CN107146751A - Sample fixing jig and operation method thereof - Google Patents
Sample fixing jig and operation method thereof Download PDFInfo
- Publication number
- CN107146751A CN107146751A CN201610186263.5A CN201610186263A CN107146751A CN 107146751 A CN107146751 A CN 107146751A CN 201610186263 A CN201610186263 A CN 201610186263A CN 107146751 A CN107146751 A CN 107146751A
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- sample
- cavity
- ring
- fixed jig
- presetter device
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- 238000000034 method Methods 0.000 title abstract description 5
- 230000005540 biological transmission Effects 0.000 claims abstract description 86
- 238000003780 insertion Methods 0.000 claims abstract description 25
- 230000037431 insertion Effects 0.000 claims abstract description 25
- 238000011017 operating method Methods 0.000 claims description 17
- 230000007723 transport mechanism Effects 0.000 claims description 14
- 230000035515 penetration Effects 0.000 claims description 13
- 230000007246 mechanism Effects 0.000 claims 1
- 230000001737 promoting effect Effects 0.000 claims 1
- 239000000523 sample Substances 0.000 description 262
- 238000010586 diagram Methods 0.000 description 11
- 230000008859 change Effects 0.000 description 5
- 230000008878 coupling Effects 0.000 description 4
- 238000010168 coupling process Methods 0.000 description 4
- 238000005859 coupling reaction Methods 0.000 description 4
- 238000010894 electron beam technology Methods 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 230000005611 electricity Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000004804 winding Methods 0.000 description 2
- 241000237858 Gastropoda Species 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- ZZUFCTLCJUWOSV-UHFFFAOYSA-N furosemide Chemical compound C1=C(Cl)C(S(=O)(=O)N)=CC(C(O)=O)=C1NCC1=CC=CO1 ZZUFCTLCJUWOSV-UHFFFAOYSA-N 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000001727 in vivo Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000009738 saturating Methods 0.000 description 1
- 238000012163 sequencing technique Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
Abstract
The invention provides a sample fixing jig and an operation method thereof. The sample fixing tool is suitable for loading a first sample into a cavity of the transmission electron microscope. The sample fixing jig comprises a body, a sample presetting device and a sample conveying device. The body is suitable for combining with the cavity to form a closed space in the cavity. The body is provided with an insertion part suitable for being inserted into the cavity and an external connection part kept outside the cavity. The sample presetting device is arranged in the body and used for bearing a first sample. The sample conveying device is arranged in the body and coupled with the sample presetting device, and is used for conveying the first samples on the sample presetting device to the observation area of the closed space in sequence and conveying the observed first samples back to the sample presetting device from the observation area in sequence. In addition, an operation method of the sample fixing jig is also provided. In the sample replacing process, the sample can be replaced and reloaded without destroying the vacuum environment, so that the operating time and the cost of the microscope are saved.
Description
Technical field
The present invention relates to a kind of sample fixed jig and its operating method, more particularly to one kind can be in vacuum ring
Multiple samples are loaded under border and enter the sample fixed jig observed in the cavity of transmission electron microscope
And its operating method.
Background technology
With the development of microexamination technology, various types of microscopes, such as light microscope (Optical
Microscope), AFM (Atomic Force Microscope, AFM), electron microscope be such as
Sweep electron microscope (Scanning Electron Microscope, SEM), transmission electron microscope
(Transmission Electron Microscope, TEM) etc., in response to and give birth to.When utilization e.g. penetration
Electron microscope is carried out during sample observation, and the cavity domestic demand of transmission electron microscope forms hollow environment,
And it will sequentially be observed one by one in sample loading chambers, and in taking out sample after observation.
However, in current transmission electron microscope, after each sample terminates observation, penetrating
The step of formula electron microscope must all carry out vacuum breaker, sample is taken out in cavity.In addition, when weight
When the new sample of load is observed into cavity is interior, the step of cavity must be vacuumized again, with
Again vacuum environment is formed in cavity.Therefore, transmission electron microscope replace each sample when,
Above-mentioned cavity all must be constantly repeated to vacuumize and the step of vacuum breaker.Due to forming vacuum environment in cavity
The required time is tediously long, therefore, when user is seen using transmission electron microscope to substantial amounts of sample
When examining, often need to take a substantial amount of time the step of loading and changing sample, and cause manpower, time
And the consuming of equipment cost.
The content of the invention
The present invention provides a kind of sample fixed jig, and multiple observation samples can be first preset in wherein by it, be made
Transmission electron microscope is obtained in operation, when replacing observation sample, without carrying out vacuum breaker
Step is taken out sample is observed.
The present invention provides a kind of operating method of sample fixed jig, and it can need not will be formed in penetration
In the case of vacuum environment in the cavity of electron microscope carries out the step of vacuum breaker, multiple observations are carried out
Observation, replacement and the loading of sample, to save the operating time of transmission electron microscope.
The sample fixed jig of the present invention is suitable to be loaded into the first sample to the cavity of transmission electron microscope
It is interior.Sample fixed jig includes body, sample presetter device and device for transferring samples.Body be suitable to
Cavity combines and forms confined space in cavity.Body has insertion section and the guarantor for being adapted for insertion into cavity
It is held in the external connection portion outside cavity.Sample presetter device is configured in body, to carry the first sample.Sample
Product conveyer is configured in body, and device for transferring samples is coupled to sample presetter device, to incite somebody to action
The first sample on sample presetter device is sequentially sent to the observation area in confined space, and by after observation
First sample is sequentially sent back sample presetter device by observation area
It is aobvious into penetration type electron that the operating method of the sample fixed jig of the present invention is suitable to the first sample of loading
In the cavity of micro mirror.The operating method of sample fixed jig includes the first sample presetter device being configured at sample
In the body of product fixed jig.Body has the insertion section for being suitably inserted into cavity and is held in outside cavity
External connection portion.First sample is preset in the sample presetter device.By bulk junction together in cavity, and in chamber
Confined space is formed in vivo.The first sample on sample presetter device is sequentially passed by device for transferring samples
It is sent to the observation area in confined space.Device for transferring samples is transmitted the first sample after observation by observation area
Counter sample product presetter device.
In one embodiment of this invention, above-mentioned device for transferring samples includes transport mechanism and actuating group
Part.Actuating assembly is coupled to transport mechanism and sample presetter device.To drive transport mechanism in observation area
The first sample is transmitted between sample presetter device.
In one embodiment of this invention, above-mentioned sample presetter device is located at the insertion section of body.
In one embodiment of this invention, above-mentioned sample presetter device is located at the external connection portion of body.
In one embodiment of this invention, above-mentioned sample fixed jig also includes sample loading device.Sample
Product loading device stores multiple second samples.Sample loading device is removably assembled in external connection portion and coupling
Sample presetter device is connect, by the second sample load sample presetter device.
In one embodiment of this invention, above-mentioned sample presetter device is removably assembled in external connection portion.
In one embodiment of this invention, above-mentioned sample presetter device includes ring-type carrier.Ring-type carrier
With the axis of centres, and ring-type carrier on the circumference relative to the axis of centres suitable for carrying the first sample.Cause
Dynamic component is coupled to ring-type carrier, to drive ring-type carrier to be rotated along the axis of centres.
In one embodiment of this invention, above-mentioned actuating assembly includes power source and driving member.Transmission
Part is coupled between power source and ring-type carrier, to drive ring-type carrier to be rotated along the axis of centres.
In one embodiment of this invention, above-mentioned driving member includes power wheel, and ring-type carrier includes ring
Shape wheel.Ring-type wheel is coupled to power wheel.
In one embodiment of this invention, above-mentioned ring-type wheel and power wheel are helical gear group, worm screw snail
Wheel group or bevel gear set.
In one embodiment of this invention, above-mentioned ring-type carrier also includes bracket.Bracket is arranged at ring-type
On the circumference of carrier, to carry the first sample respectively.
In one embodiment of this invention, the normal direction of bracket movably circumferentially is inserted in ring-type load
On tool.Transport mechanism includes upper push piece and transmission parts.Upper push piece is arranged in circumference.Upper push piece is suitable to
Corresponding bracket is promoted away from ring-type carrier along normal direction.Transmission parts are suitable in bracket away from ring-type carrier
Afterwards, bracket is sent to observation area.
In one embodiment of this invention, above-mentioned sample presetter device is configured at the insertion section of body.
In one embodiment of this invention, above-mentioned sample presetter device is configured at the external connection portion of body.
In one embodiment of this invention, above-mentioned operating method also includes sample loading device is detachable
Ground is assembled in external connection portion and couples sample presetter device, multiple in sample loading device by being preset in
In second sample load sample presetter device.
Sample fixed jig in the above embodiment of the present invention can have body, sample presetter device and
Device for transferring samples.Sample presetter device and device for transferring samples are configured in body, and penetration
The observation sample of electron microscope can be preloaded in sample presetter device.It is micro- with penetration type electron in body
Mirror is in the confined space formed in cavity, and device for transferring samples will can be preloaded in sample presetter device
The observation area that is sent in the cavity of transmission electron microscope of sample observed.Therefore, sample is worked as
When the confined space being placed in the cavity of transmission electron microscope is observed, replaced in observation sample
During, user can be in the case of need not destroy the vacuum environment in confined space, directly will observation
Complete sample takes out in observation area, and replaces and heavily loaded next observation sample, to save penetration electricity
Operating time and cost needed for sub- microscope.
For the features described above and advantage of the present invention can be become apparent, special embodiment below, and coordinate
Accompanying drawing is described in detail below.
Brief description of the drawings
Fig. 1 is the schematic diagram of the sample fixed jig according to one embodiment of the invention；
Fig. 2 is that Fig. 1 sample fixed jig is configured at the signal in the cavity in transmission electron microscope
Figure；
Fig. 3 A are the schematic diagrames of the sample presetter device of the sample fixed jig of one embodiment of the invention；
Fig. 3 B are the side schematic views of Fig. 3 A sample presetter device；
Fig. 4 A to Fig. 4 D are the device for transferring samples of the sample fixed jig according to one embodiment of the invention
Make the schematic diagram of flowing mode；
Fig. 5 A and Fig. 5 B are the signals for making flowing mode of the device for transferring samples according to one embodiment of the invention
Figure；
Fig. 6 A and Fig. 6 B are the schematic diagrames of the sample fixed jig according to another embodiment of the present invention；
Fig. 7 A and Fig. 7 B are the schematic diagrames for making flowing mode of Fig. 6 A and Fig. 6 B sample fixed jig；
Fig. 8 is the schematic flow sheet of the operating method of the sample fixed jig according to one embodiment of the invention；
Fig. 9 is the flow signal of the operating method of the sample fixed jig according to another embodiment of the present invention
Figure.
Reference：
10：First sample
20：Copper mesh
30：Second sample
50：Transmission electron microscope
51：Vavuum pump
52：Cavity
53：Confined space
54：Insert port
55：Observation area
56：Power line
57：Electron source
58：Magnetic lenses
59：Project magnetic lenses
100、200：Sample fixed jig
110、210：Body
112、212：Insertion section
114、214：External connection portion
120、220：Sample presetter device
122：Housing
123：Opening
124：Ring-type carrier
124a：Ring-type wheel
125：Bracket
125a：U-shaped recess
130：Device for transferring samples
132：Transport mechanism
132a：Transmission parts
132a1：Projection
132b：Upper push piece
134：Actuating assembly
134a：Power source
134b：Driving member
134b1：Power wheel
136：Control circuit
150、250：Sample loading device
152、252：Load cavity
214a：It is loaded into mouth
A1：The axis of centres
L：Electron beam
S301~S304, S401~405：Step
Embodiment
Multiple embodiments hereafter have the component or dress of same or similar function with identical symbology
Put, the shape of component, size, ratio etc. are only to illustrate wherein shown in schema, the non-reality to the present invention
Scope is applied to be any limitation as.In addition, though any embodiment described in following description discloses multiple skills simultaneously
Art feature, also it is not intended that all technical characteristics in any embodiment must be implemented simultaneously.
Fig. 1 is the schematic diagram of the sample fixed jig according to one embodiment of the invention.Fig. 2 is Fig. 1
Sample fixed jig is configured at the schematic diagram in the cavity of transmission electron microscope.It refer to Fig. 1 and figure
2, in the present embodiment, transmission electron microscope 50 may include vavuum pump 51, cavity 52, insert port
54th, observation area 55, power line 56, electron source 57, magnetic lenses 58 and projection magnetic lenses 59.At this
In embodiment, vavuum pump 51 is configured at outside cavity 52, and vavuum pump 51 can vacuumize cavity 52,
With in formation vacuum environment in the confined space 53 in cavity 52.In addition, insert port 54 is located at cavity
On 52 wall, sample fixed jig 100 can be inserted in cavity 52 via insert port 54.Furthermore,
Power line 56, electron source 57, magnetic lenses 58, observation area 55 and the projection magnetic lenses 59 of sample are all
In cavity 52, and in from top to bottom sequentially being configured in the vertical direction in cavity 52.Electron source
57 can couple power supply (not shown) via power line 56, and to form electron beam L, and electron beam L can pass through
Magnetic lenses 58 focuses on the observation area 55 of sample.Cross and be positioned in observation area 55 when electron beam L break-through
Sample after, can focus on and amplify via projection magnetic lenses 59 again, and finally be projected on position in cavity 52
In the imaging screen (not shown) of bottom, to form image or diffration figure (Diffraction pattern).
In the present embodiment, first sample 10 can be loaded into penetration type electron micro- for sample fixed jig 100
In the cavity 52 of mirror 50.Sample fixed jig 100 include body 110, sample presetter device 120 with
And device for transferring samples 130.In addition, body 110 can be combined with cavity 52, and in shape in cavity 52
Vavuum pump 51 into confined space 53, and transmission electron microscope 50 can enter to confined space 53
Row is vacuumized, to form vacuum environment.In the present embodiment, body 110, which has, can be inserted into cavity 52
Insertion section 112, and the external connection portion 114 being held in outside cavity 52.Specifically, as shown in Fig. 2
The insertion section 112 of body 110 can be inserted and match somebody with somebody via the insert port 54 of transmission electron microscope 50
It is placed in cavity 52.In addition, when in the insertion of insertion section 112 cavity 52, being connected to insertion section 112
External connection portion 114 be still held in outside the cavity 52 of transmission electron microscope 50.
In the present embodiment, sample presetter device 120 and device for transferring samples 130 are all configured at body 110
It is interior, and the coupling device for transferring samples 130 of sample presetter device 120.Sample presetter device 120 can use
To carry the first sample 10, and the first sample 10 sequentially can be sent to by device for transferring samples 130
Observation area 55 in cavity 52.In addition, when transmission electron microscope 50 often completes first sample
After 10 observation.Device for transferring samples 130 can be by the first sample 10 by the observation area in confined space 53
55 send back in sample presetter device 120.Meanwhile, device for transferring samples 130 can be in confined space 53
It is interior to change and transmit next the first sample 10 observed.
The device for transferring samples 130 of the present embodiment includes transport mechanism 132 and actuating assembly 134.Cause
The dynamic coupling transport mechanism 132 of component 134 and sample presetter device 120.In addition, the cause of the present embodiment
Dynamic component 134 can be used to the observation for driving transport mechanism 132 to be sent to the first sample 10 in cavity 52
Area 55.Or, after transmission electron microscope 50 completes the observation of the first sample 10, actuating group
Part 134 can drive transport mechanism 132 that first sample 10 is sent back into the preset dress of sample by observation area 55 again
Put in 120.Therefore, actuating assembly 134 can drive transport mechanism 132 sample presetter device 120 with
The first sample 10 is transmitted between observation area 55 in cavity 52 back and forth.Furthermore, the actuating group of the present embodiment
Part 134 can be electrically connected with via control circuit 136 and be configured at long-range manipulation main frame or system, with to causing
Dynamic component 134 is manipulated.
Fig. 1 and Fig. 2 is refer again to, in the present embodiment, sample presetter device 120 and actuating assembly 134
All it is in the insertion section 112 of body 110.In the insertion section 112 of body 110 via insert port 54
Insert before cavity 52, multiple first samples 10 can be first preset in sample presetter device 120 by user
In.As shown in figure 1, the sample fixed jig 100 of the present embodiment can comprise additionally in sample loading device 150.
Before the first sample 10 is loaded sample presetter device 120, the first sample 10 can be stored in sample in advance
In product loading device 150.In the present embodiment, sample loading device 150, which has, loads cavity 152.
First sample 10 can be preset in loading cavity 152, and the first sample 10 can be attached and held respectively
It is loaded on e.g. discoid copper mesh 20.
In the present embodiment, multiple first samples 10 can be preloaded on sample in batch according to the sequencing of observation
In the loading cavity 152 of product loading device 150, to avoid user from being intended to simultaneously to the first of multiple batches
When sample 10 is observed, the observation sequence between the first sample 10 of different batches, which can be produced, to be obscured
Situation, while also cause the first sample 10 being loaded before transmission electron microscope 50 observed,
It can pre-save in sample loading device 150, to avoid the pollution of the first sample 10.
Fig. 3 A are the schematic diagrames of the sample presetter device of the sample fixed jig of one embodiment of the invention.Figure
3B is the side schematic view of Fig. 3 A sample presetter device.Fig. 3 A and Fig. 3 B are refer to, in this implementation
In example, sample presetter device 120 is, for example, the sample presetter device of annular.In addition, sample presetter device
120 may include housing 122, ring-type carrier 124.In the present embodiment, ring-type carrier 124 has center
Axle A1, and ring-type carrier 124 can carry multiple first samples on its circumference relative to axis of centres A1
Product 10.Furthermore, the actuating assembly 134 of above-mentioned device for transferring samples 130 can be coupled to ring-type carrier 124,
And actuating assembly 134 can drive ring-type carrier 124 to be rotated along axis of centres A1.
Specifically, Fig. 1, Fig. 3 A and Fig. 3 B are refer to, the actuating assembly 134 of the present embodiment includes
Power source 134a and driving member 134b, wherein power source 134a can be motor or magnetic valve.Driving member
134b is coupled between power source 134a and ring-type carrier 124, to drive ring-type carrier 124 along the axis of centres
A1 rotates.In addition, driving member 134b may include power wheel 134b1, and power wheel 134b1 is configured
The position being mutually coupled in driving member 134b and ring-type carrier 124.Meanwhile, ring-type carrier 124 may include
Ring-type wheel 124a, it is configured at the inwall of ring-type carrier 124, and ring-type wheel 124a is coupled to driving member
134b power wheel 134b1.Specifically, driving member 134b power wheel 134b1 can be via power source
134a driving and rotate, and power wheel 134b1 is further driven to the ring-type wheel that is coupled against each other with it
Axial-rotations of the 124a along axis of centres A1.The ring-type wheel 124a and power wheel 134b1 of the present embodiment can be
The Component composition of the achievable identical functions such as helical gear group, worm and wormwheel group or bevel gear set.
In the present embodiment, ring-type carrier 124 also includes multiple brackets 125 configured along its circumference.Support
Frame 125 can be used to the first sample 10 for carrying copper mesh 20 respectively and being loaded thereon.In the present embodiment
In, bracket 125 is, for example, U-shaped bracket, and bracket 125 has U-shaped recess 125a.The present embodiment
Bracket 125 can respectively along ring-type carrier 124 circumference normal direction, that is, towards central shaft A1's
Direction is movably inserted on ring-type carrier 124.
Above-mentioned transport mechanism 132 also includes transmission parts 132a and upper push piece 132b.In the present embodiment,
Transmission parts 132a is, for example, transmission bar component, and it is used for transmission bracket 125, and the first sample 10 is transmitted
Observed into the observation area 55 in cavity 52.In addition, upper push piece 132b is arranged at ring-type carrier
In 124 circumference, and it is suitable to the normal direction along the circumference of ring-type carrier 124 (in namely Fig. 3 A
The upward direction of arrow) promote bracket 125 away from ring-type carrier 124.Specifically, sample presetter device
120 housing 122 has opening 123, and the upper push piece 132b's of its correspondence raises direction configuration.Ring-type wheel
124a is sequentially rotated the bracket 125 for carrying the first sample 10 to right via power wheel 134b1 driving
Should be open 123 position, and using normal directions of the upper push piece 132b along ring-type carrier 124 towards opening
123 raise the bracket 125 being inserted on ring-type wheel 124a, and then bracket 125 is released into ring-type carrier 124
Outside.
Fig. 4 A to Fig. 4 D are the device for transferring samples of the sample fixed jig according to one embodiment of the invention
Make the schematic diagram of flowing mode.As shown in fig. 4 a and fig. 4b, carried when upper push piece 132b will be inserted in ring-type
First sample 10 of one of bracket 125 and its carrying in tool 124 is raised towards the direction of opening 123
When, transmission parts 132a can be moved towards the position of bracket 125 in the horizontal direction via the driving of actuating assembly 134
It is dynamic.As shown in Figure 4 B, after upper push piece 132b raises bracket 125 in the direction of the arrow, transmission parts 132a
It can be passed through, and stayed in by the gap between the U-shaped opening 125a and ring-type carrier 124 of bracket 125
In U-shaped opening 125a.
Then, Fig. 4 C and Fig. 4 D are refer to, after transmission parts 132a enters U-shaped opening 125a,
Transmission parts 132a can prop up bracket 125 via U-shaped opening 125a, and along the arrow side in Fig. 4 C
To raising so that bracket 125 leaves the ring-type carrier 124 of its script plant.Meanwhile, as shown in Figure 4 D,
After bracket 125 is raised by transmission parts 132a, upper push piece 132b can drop to script position in the direction of the arrow
Initial position in the circumference of ring-type carrier 124.Then, transmission parts 132a can be towards in cavity 52
The transmission bracket 125 of observation area 55 and its first sample 10 loaded, the first sample 10 is loaded
Observed in observation area 55.In the present embodiment, transmission parts 132a contacts and load carriage 125
Projection 132a1 can be respectively configured before and after position, bracket 125 is fixed on transmission parts 132a, and prevents
Only the sample 10 of bracket 125 and first produces the phenomenon slid back and forth during transmission parts 132a is transmitted.
In the present embodiment, transmission parts 132a is that son is explained exemplified by transmitting bar component.Of the invention another
In one unshown embodiment, transmission parts 132a be alternatively slide rail, belt and cam either gear with
The combining structure of the components such as rack composition, to transmit the first sample 10.The present invention is for transmission parts 132a
Building form and be not limited.Sample fixed jig 100 can select appropriate structure according to actual demand
Part composition transmission parts 132a carrys out the sample 10 of transmission bracket 125 and first and entered in observation area 55.In addition,
The source of transmission parts 132a driving force can also exert a force manually in addition to above-mentioned actuating assembly 134
Or other mode electrically or mechanically drives, for example by mechanical force, frictional force, electrostatic force,
Active force produced by the principles such as piezoelectric vibration drives transmission parts 132a.
Fig. 5 A and Fig. 5 B are the signals for making flowing mode of the device for transferring samples according to one embodiment of the invention
Figure.Fig. 4 D, Fig. 5 A and Fig. 5 B are refer to, above-mentioned content, the biography of device for transferring samples 130 is held
Send part 132a direction of arrow courts that can be by bracket 125 and its first sample 10 carried shown in Fig. 5 A
Transmit observation area 55.In addition, after transmission electron microscope 50 completes the observation of the first sample 10,
Actuating assembly 134 can drive transmission parts 132a to drive the horizontal displacement of bracket 125 and retreat to ring-type carrier 124
Top.After bracket 125 to be retreated to transmission parts 132a the top of ring-type carrier 124, transmission parts 132a
The height of bracket 125 can be reduced, while upper push piece 132b rises to the position of the bottom of bracket 125, with
Load support 125.After the bottom of bracket 125 is carried on upper push piece 132b, transmission parts 132a
Bracket 125 can be left by the gap between the U-shaped opening 125a and ring-type carrier 124 of bracket 125.Together
When, upper push piece 132b can decline and drive bracket 125 to plant in winding shape carrier 124.
After bracket 125 plants winding shape carrier 124, power wheel 134b1 can drive ring-type wheel 124a again
And ring-type carrier 124 rotates, by next the first sample 10 to be observed and first sample is carried
10 bracket 125 is sent to the upper push piece 132b of the correspondence position for above pushing away direction and opening 123, with
The step of carrying out the transmission and observation of next first sample 10.
In the present embodiment, because multiple first samples 10 for being preset in sample presetter device 120 can be through
By the transmission and replacement of device for transferring samples 130, it is sequentially transmitted to the chamber of transmission electron microscope 50
Observation area 55 in body 52 is observed, without after each first sample 10 completes observation, being
The first sample 10 observe and heavily loaded next the first sample 10 to be observed are taken out, i.e., to cavity
The step of confined space 53 in 52 carries out vacuum breaker.Therefore, transmission electron microscope 50 is by sample
Product fixed jig 100 is loaded into the first sample 10, can make cavity 52 need not will be formed in it is true in it
In the case of Altitude carries out vacuum breaker, sequentially replace and load and be preloaded in sample presetter device 120
The first sample 10 enter observation area 55 in observed.Also therefore, in the present embodiment, penetration
The sample loading of electron microscope 50, the time exited and replaced can efficiently reduce, and further
Reduce the operating time needed for transmission electron microscope 50.
Fig. 6 A and Fig. 6 B are the schematic diagrames of the sample fixed jig according to another embodiment of the present invention.This reality
The structure for granting Fig. 1 and Fig. 2 sample fixed jig is similar.Therefore, same or analogous component is with phase
Same or similar symbol is represented, and explanation is not repeated.It refer to Fig. 6 A and Fig. 6 B, the present embodiment
It is with Fig. 1 and Fig. 2 embodiment difference, the sample of the sample fixed jig 200 of the present embodiment is preset
Device 220 and actuating assembly 134 are arranged in the external connection portion 214 of body 210.In addition, sample is solid
Tool 200 is determined with sample loading device 250, and the second sample 30 can be preloaded on it and load cavity 252 by it
In.The external connection portion 214 of the present embodiment has load ports 214a, when insertion section 212 is loaded onto penetration electricity
When in the cavity 52 of sub- microscope 50, sample loading device 250 can be via load ports 214a and along Fig. 6 B
In the direction of arrow be removably assembled in external connection portion 214, and be coupled to sample presetter device 220.Sample
Loading device 250 can be loaded the second sample 30 in cavity 252 in load sample presetter device 220 by it.
In the present embodiment, when transmission electron microscope 50 completes what sample loading device 250 was loaded
All after the observation of the second samples 30, when need to change the second sample 30 of next group to be observed, make
User can be without whole sample fixed jig 200 be moved back in the cavity 52 of transmission electron microscope 50
Go out.User can will directly load another sample of the second sample of next group 30 via load ports 214a
Loading device 250 is coupled to sample presetter device 220, second will loaded in loading cavity 252
Sample 30 is loaded into body 210.Therefore, the transmission electron microscope 50 of the present embodiment can be in its chamber
In the case of confined space 53 in body 52 need not carry out vacuum breaker, directly via sample loading device 250
Dismounting and replacing, to replace the second sample 30 for being intended to be observed.
In another unshown embodiment, sample presetter device 220 itself can also be filled as sample is loaded
250 are put removably to be assembled in external connection portion 214 via load ports 214a.In other words, in the present embodiment
In, sample presetter device 220 can be had concurrently by external load sample and in preset sample in body 210
Function.Therefore, sample to be seen can be preloaded in sample presetter device 220, and in the preset dress of sample
During putting 220 external connection portions 214 for being assembled into body 210, directly it is loaded in body 210, with
The step of carrying out subsequent sample transmission.
Fig. 7 A and Fig. 7 B are the schematic diagrames for making flowing mode of Fig. 6 A and Fig. 6 B sample fixed jig.
It refer to Fig. 6 A, Fig. 6 B, Fig. 7 A and Fig. 7 B, in the present embodiment, sample loading device 250
Removably it is inserted in the load ports 214a of external connection portion 214, and second in sample loading device 250
Sample 30 is sequentially in load sample presetter device 220.When the load sample presetter device 220 of the second sample 30
Afterwards, device for transferring samples 130 can transmit the observation that the second sample 30 enters transmission electron microscope 50
Observed in area 55.Then, as shown in Figure 7 B, when transmission electron microscope 50 is completed for
After the observation of two samples 30, transmission parts 132 can via actuating assembly 134 drive, and by the second sample
30 are retracted into the initial position in sample presetter device 220.
Fig. 8 is the schematic flow sheet of the operating method of the sample fixed jig according to one embodiment of the invention.
It refer to Fig. 8 and Fig. 2.In the present embodiment, the operating method step of sample fixed jig 100 can be wrapped
Include：By in the load sample presetter device 120 of the first sample 10 (step S301).In the present embodiment, sample
Product presetter device 120 and actuating assembly 134 are all configured in the insertion section 114 of body 110.Then,
The insertion section 112 of body 110 is inserted in cavity 52, so that body 110 is combined and shape with cavity 52
Into confined space 53 (step S302), and transmission electron microscope 50 can be taken out very to confined space 53
Sky, with forming vacuum environment in confined space.Then, device for transferring samples 130 will be sequentially preset in
The first sample 10 in sample presetter device 120 is sent in the observation area 55 in confined space 53 and carried out
Observe (step S303).When transmission electron microscope 50 completes the observation of the first sample 10 every time,
The first sample 10 after observation is sent back the preset dress of sample by device for transferring samples 130 in observation area 55
120 (step S304) are put, and device for transferring samples 130 is again by next the first sample 10 to be observed
It is sent in observation area 55.
In the present embodiment, the user of transmission electron microscope 50 can be intended to the same batch observed
The first sample 10, in body 110 insertion section 112 insertion cavity 52 before, pre-loaded sample
In presetter device 120.Therefore, it is intended to when user completes the observation of one of them the first sample 10 every time
When changing and carrying out the observation of next first sample 10 of same batch, without to being formed at confined space
The step of vacuum environment in 53 carries out vacuum breaker, and need not be by the body 110 of sample fixed jig 100
Taken out in cavity 52.The transmission electron microscope 50 of the present embodiment can directly be fixed via sample and controlled
The device for transferring samples 130 of tool 100 transmits the first sample between sample presetter device 120 and observation area 55
Product 10.Transmission electron microscope 50 due to the present embodiment is changing the first sample observed every time
During product 10, the step of cavity 52 is without repeatedly carrying out vacuum breaker and vacuumizing, therefore, penetration
The operating time of electron microscope 50 can significantly be reduced relatively.
Fig. 9 is the flow signal of the operating method of the sample fixed jig according to another embodiment of the present invention
Figure.It refer to Fig. 9 and Fig. 7 A and Fig. 7 B, in the present embodiment, the operation of sample fixed jig 200
Method includes：Second sample 30 is first preloaded in sample loading device 250 (step S401).Then,
The insertion section 212 of body 210 is bound to cavity 52 to form confined space 53 in cavity 52, and
Sample loading device 250 is removably assembled in the external connection portion 214 being held in outside cavity 52, and sample
The coupling sample presetter device 220 of loading device 250 (step S402).After above-mentioned step is completed, wear
The step of vavuum pump 51 of saturating formula electron microscope 50 can be vacuumized to confined space 53, with close
Close and vacuum environment is formed in space 53.In the present embodiment, sample presetter device 220 and actuating assembly
134 are all configured in the external connection portion 214 of body 210.Then, the second sample 30 sequentially can be added by sample
Carry put 250 the load sample presetter device 220 (step S403) of loading cavity 252.Then, sample
The second sample 30 on sample presetter device is orderly sent to chamber by the transmission parts 132a of conveyer 130
Observed (step S404) observation area 55 in confined space 53 in body 52.When penetration type electron is aobvious
When micro mirror 50 completes the observation of the second sample 30 every time, device for transferring samples is by the first sample after observation
10 are sent back in sample presetter device 220 (step S405) by observation area 55, and device for transferring samples
Next the second sample 30 to be observed is sent to observation area 55 by 130 again.
In the present embodiment, the user of transmission electron microscope 50 can be by with a batch of multiple second samples
The observation area 55 that product 30 are loaded into the confined space 53 that body 210 is formed with cavity 52 simultaneously is carried out
Observation.After transmission electron microscope often completes the observation of second sample 30, and it is intended to load next
When individual second sample 30 is observed, transmission electron microscope 100 is without to being formed at confined space
The step of vacuum environment in 53 carries out vacuum breaker, and can be directly by the sample of sample fixed jig 200
Next the second sample 30 observed is sent in observation area 55 by conveyer 130.
Compared to the embodiment described in Fig. 8 flow chart, in the present embodiment, when penetration type electron is micro-
Mirror 50 is completed after the observation of same batch of second sample 30 contained in sample loading device 250, is penetrated
Formula electron microscope 200 can change another sample by the loading mouth 214a of external connection portion 214 switch
Loading device 250.Therefore, in the present embodiment, when contained same batch of of sample loading device 250
Second sample 30 complete observation after, and be intended to change be preloaded on it is next in another sample loading device 250
When second sample 30 of batch is to be observed, transmission electron microscope 50 can be without to confined air
Between 53 in the case of carry out vacuum breaker step, directly add by changing the sample that is assembled in external connection portion 214
Carry and put 250 to reach above-mentioned purpose.
In summary, the sample fixed jig in above-mentioned multiple embodiments of the invention, it is pre- that it includes sample
Put device and device for transferring samples is configured in its body.In addition, body can be with transmission electron microscope
Cavity combine, and form confined space.The observation sample of transmission electron microscope is transmitted via sample
Device is loaded into the observation area in confined space.When transmission electron microscope is come in advance using sample fixed jig
When putting and transmit observation sample, transmission electron microscope can be not required to that above-mentioned confined space is carried out to break true
In the case of the step of sky, the step of being carried out continuously the observation of multiple samples, replace and load.Therefore,
When transmission electron microscope carries out the observation of multiple samples, without repeatedly carry out cavity vacuumize and
The step of vacuum breaker.Also therefore, the operating time of transmission electron microscope can significantly shorten, to enter
One step lifts the service efficiency of transmission electron microscope.
Although the present invention is disclosed as above with embodiment, so it is not limited to the present invention, any affiliated
Those of ordinary skill in technical field, it is without departing from the spirit and scope of the present invention, a little when that can make
Change with retouching, therefore protection scope of the present invention ought be defined depending on appended claims confining spectrum.
Claims (16)
1. a kind of sample fixed jig, it is characterised in that suitable for being loaded into multiple first samples a to penetration
In one cavity of electron microscope, the sample fixed jig includes：
One body, forms a confined space suitable for being combined with the cavity in the cavity, and described
Body has the external connection portion for being adapted for insertion into an insertion section of the cavity and being held in outside the cavity；
One sample presetter device, is configured in the body, to carry the multiple first sample；With
And
One device for transferring samples, is configured in the body, and is coupled to the sample presetter device,
The multiple first sample on the sample presetter device is sequentially sent in the confined space
An observation area, and suitable for the multiple first sample after observation is sequentially transmitted by the observation area
Return the sample presetter device.
2. sample fixed jig according to claim 1, it is characterised in that the sample transmission dress
Put including：
One transport mechanism；And
One actuating assembly, couples the transport mechanism and the sample presetter device, to drive the biography
Mechanism is sent to transmit each first sample between the observation area and the sample presetter device.
3. sample fixed jig according to claim 2, it is characterised in that the preset dress of the sample
Setting in the insertion section of the body.
4. sample fixed jig according to claim 2, it is characterised in that the preset dress of the sample
Setting in the external connection portion of the body.
5. sample fixed jig according to claim 4, it is characterised in that also include：
One sample loading device, suitable for storing multiple second samples, the sample loading device is removably
It is assembled in the external connection portion and couples the sample presetter device, the multiple second sample is loaded
In the sample presetter device.
6. sample fixed jig according to claim 4, it is characterised in that the preset dress of the sample
Put and be removably assembled in the external connection portion.
7. sample fixed jig according to claim 2, it is characterised in that the preset dress of the sample
Put including：
One ring-type carrier, with an axis of centres, and suitable on the circumference relative to the axis of centres
The multiple first sample is carried, the actuating assembly is coupled to the ring-type carrier, to drive the ring
Shape carrier rotates along the axis of centres.
8. sample fixed jig according to claim 7, it is characterised in that the actuating assembly bag
Include：
One power source；And
One driving member, is coupled between the power source and the ring-type carrier, to drive the ring-type
Carrier rotates along the axis of centres.
9. sample fixed jig according to claim 8, it is characterised in that the driving member includes
One power wheel, and the ring-type carrier includes a ring-type wheel, is coupled to the power wheel.
10. sample fixed jig according to claim 8, it is characterised in that the ring-type wheel and institute
Power wheel is stated for helical gear group, worm and wormwheel group or bevel gear set.
11. sample fixed jig according to claim 7, it is characterised in that the ring-type carrier is also
Including：
Multiple brackets, are arranged on the circumference of ring-type carrier, to carry the multiple first respectively
Sample.
12. sample fixed jig according to claim 11, it is characterised in that each bracket can
Movably it is inserted in along a normal direction of the circumference on the ring-type carrier, and the transport mechanism bag
Include：
Push piece on one, is arranged in the circumference, and suitable for promoting corresponding described along the normal direction
Bracket is away from the ring-type carrier；And
One transmission parts, after in the bracket away from the ring-type carrier, the bracket is sent to
The observation area.
13. a kind of operating method of sample fixed jig, it is characterised in that be applicable multiple first samples of loading
Product enter in the cavity in a transmission electron microscope, and the operating method includes：
In the body that one sample presetter device is configured to the sample fixed jig, and the body
With the external connection portion for being suitably inserted into an insertion section of the cavity and being held in outside the cavity；
The multiple first sample is preset in the sample presetter device；
By the bulk junction together in the cavity in forming a confined space in the cavity；And
By being configured at an intrinsic device for transferring samples by described on the sample presetter device
Multiple first samples are orderly sent to the observation area in the confined space, and sample transmission dress
Put the multiple first sample after observation and the sample presetter device is sent back by the observation area.
14. operating method according to claim 13, it is characterised in that the sample presetter device
It is configured at the insertion section of the body.
15. operating method according to claim 13, it is characterised in that the sample presetter device
It is configured at the external connection portion of the body.
16. operating method according to claim 15, it is characterised in that also including a sample is added
Carry to put and be removably assembled in the external connection portion, and couple the sample presetter device, will be preset
Multiple second samples in the sample loading device load the sample presetter device.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW105106089 | 2016-03-01 | ||
| TW105106089A TWI600890B (en) | 2016-03-01 | 2016-03-01 | Sample holding fixture of transmission electron microscopy and operation method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107146751A true CN107146751A (en) | 2017-09-08 |
| CN107146751B CN107146751B (en) | 2018-12-21 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610186263.5A Active CN107146751B (en) | 2016-03-01 | 2016-03-29 | Sample fixing jig and operation method thereof |
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| Country | Link |
|---|---|
| JP (1) | JP6264583B2 (en) |
| CN (1) | CN107146751B (en) |
| TW (1) | TWI600890B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110018279A (en) * | 2019-04-26 | 2019-07-16 | 西安奕斯伟硅片技术有限公司 | A kind of detection method and device of Defect |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI733470B (en) * | 2020-05-26 | 2021-07-11 | 台灣電鏡儀器股份有限公司 | Sealing transfer device |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0510618A1 (en) * | 1991-04-26 | 1992-10-28 | Hitachi, Ltd. | Electron microscope |
| EP1770751A2 (en) * | 2005-09-28 | 2007-04-04 | FEI Company | Cluster tool for microscopic processing of samples |
| WO2007123592A2 (en) * | 2006-02-08 | 2007-11-01 | Hysitron, Inc. | Actuatable capacitive transducer for quantitative nanoindentation combined with transmission electron microscopy |
| CN103827655A (en) * | 2011-07-22 | 2014-05-28 | 罗氏血液诊断股份有限公司 | Sample transport systems and methods |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3340603B2 (en) * | 1995-10-05 | 2002-11-05 | 日本電子株式会社 | Sample holder for electron microscope |
-
2016
- 2016-03-01 TW TW105106089A patent/TWI600890B/en active
- 2016-03-29 CN CN201610186263.5A patent/CN107146751B/en active Active
- 2016-06-15 JP JP2016119091A patent/JP6264583B2/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0510618A1 (en) * | 1991-04-26 | 1992-10-28 | Hitachi, Ltd. | Electron microscope |
| EP1770751A2 (en) * | 2005-09-28 | 2007-04-04 | FEI Company | Cluster tool for microscopic processing of samples |
| WO2007123592A2 (en) * | 2006-02-08 | 2007-11-01 | Hysitron, Inc. | Actuatable capacitive transducer for quantitative nanoindentation combined with transmission electron microscopy |
| CN103827655A (en) * | 2011-07-22 | 2014-05-28 | 罗氏血液诊断股份有限公司 | Sample transport systems and methods |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110018279A (en) * | 2019-04-26 | 2019-07-16 | 西安奕斯伟硅片技术有限公司 | A kind of detection method and device of Defect |
Also Published As
| Publication number | Publication date |
|---|---|
| CN107146751B (en) | 2018-12-21 |
| JP2017157544A (en) | 2017-09-07 |
| TWI600890B (en) | 2017-10-01 |
| JP6264583B2 (en) | 2018-01-24 |
| TW201732257A (en) | 2017-09-16 |
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