CN107144947B - 非球面变焦系统及照明光学系统 - Google Patents
非球面变焦系统及照明光学系统 Download PDFInfo
- Publication number
- CN107144947B CN107144947B CN201710498808.0A CN201710498808A CN107144947B CN 107144947 B CN107144947 B CN 107144947B CN 201710498808 A CN201710498808 A CN 201710498808A CN 107144947 B CN107144947 B CN 107144947B
- Authority
- CN
- China
- Prior art keywords
- lens
- positive lens
- aspherical
- pancreatic
- positive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B15/00—Optical objectives with means for varying the magnification
- G02B15/14—Optical objectives with means for varying the magnification by axial movement of one or more lenses or groups of lenses relative to the image plane for continuously varying the equivalent focal length of the objective
- G02B15/16—Optical objectives with means for varying the magnification by axial movement of one or more lenses or groups of lenses relative to the image plane for continuously varying the equivalent focal length of the objective with interdependent non-linearly related movements between one lens or lens group, and another lens or lens group
- G02B15/163—Optical objectives with means for varying the magnification by axial movement of one or more lenses or groups of lenses relative to the image plane for continuously varying the equivalent focal length of the objective with interdependent non-linearly related movements between one lens or lens group, and another lens or lens group having a first movable lens or lens group and a second movable lens or lens group, both in front of a fixed lens or lens group
- G02B15/167—Optical objectives with means for varying the magnification by axial movement of one or more lenses or groups of lenses relative to the image plane for continuously varying the equivalent focal length of the objective with interdependent non-linearly related movements between one lens or lens group, and another lens or lens group having a first movable lens or lens group and a second movable lens or lens group, both in front of a fixed lens or lens group having an additional fixed front lens or group of lenses
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
- G03F7/7015—Details of optical elements
- G03F7/70183—Zoom systems for adjusting beam diameter
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Optics & Photonics (AREA)
- Lenses (AREA)
Abstract
Description
Claims (9)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201710498808.0A CN107144947B (zh) | 2017-06-26 | 2017-06-26 | 非球面变焦系统及照明光学系统 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201710498808.0A CN107144947B (zh) | 2017-06-26 | 2017-06-26 | 非球面变焦系统及照明光学系统 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN107144947A CN107144947A (zh) | 2017-09-08 |
CN107144947B true CN107144947B (zh) | 2019-11-26 |
Family
ID=59785659
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201710498808.0A Active CN107144947B (zh) | 2017-06-26 | 2017-06-26 | 非球面变焦系统及照明光学系统 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN107144947B (zh) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108037632B (zh) * | 2017-12-27 | 2020-09-25 | 海信视像科技股份有限公司 | 一种用于投影的激光照明装置、投影系统及其调节方法 |
CN113625508B (zh) * | 2021-08-18 | 2022-10-25 | 长春电子科技学院 | 高变倍比照明光学系统 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19809395A1 (de) * | 1998-03-05 | 1999-09-09 | Zeiss Carl Fa | Beleuchtungssystem und REMA-Objektiv mit Linsenverschiebung und Betriebsverfahren dafür |
US6456442B1 (en) * | 1999-05-25 | 2002-09-24 | Asahi, Kogaku Kogyo Kabushiki Kaisha | Zoom lens system and a focusing method thereof |
CN103777316B (zh) * | 2012-10-18 | 2015-08-19 | 常州光电技术研究所 | 一种紫外物镜 |
CN103926683B (zh) * | 2014-04-18 | 2016-05-18 | 中国科学院光电技术研究所 | 一种变焦光学系统 |
-
2017
- 2017-06-26 CN CN201710498808.0A patent/CN107144947B/zh active Active
Also Published As
Publication number | Publication date |
---|---|
CN107144947A (zh) | 2017-09-08 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN105988207B (zh) | 放大光学系统、光学单元和投影仪设备 | |
EP3108302A1 (en) | Illumination optical unit for projection lithography | |
WO2013080953A1 (ja) | 投写光学系および投写型画像表示装置 | |
JP3608580B2 (ja) | 照明光学装置、露光装置、露光方法、及びフライアイレンズ | |
CN103926683B (zh) | 一种变焦光学系统 | |
CN107144947B (zh) | 非球面变焦系统及照明光学系统 | |
CN104460242B (zh) | 一种基于自由曲面式光阑复眼的极紫外光刻照明系统 | |
CN107885041B (zh) | 一种大视场曝光系统 | |
CN207181796U (zh) | 一种超短焦投影镜头 | |
CN104880898A (zh) | 一种基于激光光源的dlp投影装置 | |
CN102998779A (zh) | 一种变焦距光刻物镜系统 | |
JP2010515089A (ja) | マイクロリソグラフィのための光学要素及び照明光学系 | |
CN102645730B (zh) | 一种实验型浸没式投影光刻物镜 | |
CN207457592U (zh) | 一种超短焦投影镜头 | |
CN204405927U (zh) | 超短焦投影镜头 | |
KR910008066B1 (ko) | 피조사면의 주변부의 조도를 증가시키는 광학계 | |
CN108957704A (zh) | 高清短焦投影镜头 | |
CN104483816A (zh) | 一种用于极紫外光刻的类临界照明系统 | |
JPH06508446A (ja) | オーバーヘッドプロジェクター用集光レンズシステム | |
CN103278913B (zh) | 一种非球面光刻耦合物镜 | |
CN103092000A (zh) | 极紫外光刻复眼匀光离轴照明系统及实现离轴照明的方法 | |
CN205080354U (zh) | 一种桌面超短焦光学模组 | |
CN200986618Y (zh) | 一种无衍射光大景深成像光学系统 | |
CN208013527U (zh) | 一种可实现内部调焦功能的光学镜头 | |
CN109633882B (zh) | 一种相衬显微镜及其调试方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
TA01 | Transfer of patent application right | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20180403 Address after: 130000, triumph Road, Kuancheng District, Jilin, Changchun 3050 Applicant after: JILIN TEACHERS' INSTITUTE OF ENGINEERING & TECHNOLOGY Address before: 130000 Jilin province Changchun high tech Zone versatilist Road No. 399 Applicant before: COLLEGE OF OPTICAL AND ELECTRONICAL INFORMATION CHANGCHUN University OF SCIENCE AND TECHNOLOGY |
|
GR01 | Patent grant | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20230614 Address after: Room 831, Silicon Valley Building, No. 1198, Silicon Valley Street, High tech Zone, Jilin City, Jilin Province, 132013 Patentee after: Zhongke Jingyi Jilin Science and Technology Co.,Ltd. Address before: No. 3050 Kuan Xuan Road, Changchun City, Jilin Province Patentee before: JILIN TEACHERS' INSTITUTE OF ENGINEERING & TECHNOLOGY |