CN107138380B - 多方向的压电超声发生器及其制备方法 - Google Patents
多方向的压电超声发生器及其制备方法 Download PDFInfo
- Publication number
- CN107138380B CN107138380B CN201710468911.0A CN201710468911A CN107138380B CN 107138380 B CN107138380 B CN 107138380B CN 201710468911 A CN201710468911 A CN 201710468911A CN 107138380 B CN107138380 B CN 107138380B
- Authority
- CN
- China
- Prior art keywords
- mems cantilever
- cantilever beam
- mems
- pull
- ultrasonic generator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000002360 preparation method Methods 0.000 title claims abstract description 9
- 239000000758 substrate Substances 0.000 claims abstract description 28
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 26
- 239000010703 silicon Substances 0.000 claims abstract description 26
- 239000000463 material Substances 0.000 claims abstract description 22
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 25
- 239000004642 Polyimide Substances 0.000 claims description 13
- 229920001721 polyimide Polymers 0.000 claims description 13
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 11
- 239000010931 gold Substances 0.000 claims description 11
- 229910052737 gold Inorganic materials 0.000 claims description 11
- 238000000034 method Methods 0.000 claims description 11
- 238000005452 bending Methods 0.000 claims description 5
- 238000001259 photo etching Methods 0.000 claims description 5
- 238000009713 electroplating Methods 0.000 claims description 4
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 3
- 239000011248 coating agent Substances 0.000 claims description 3
- 238000000576 coating method Methods 0.000 claims description 3
- 229920002120 photoresistant polymer Polymers 0.000 claims description 3
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 claims description 3
- 238000004544 sputter deposition Methods 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000003990 capacitor Substances 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 238000000151 deposition Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
- B81C1/0015—Cantilevers
Abstract
Description
Claims (9)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201710468911.0A CN107138380B (zh) | 2017-06-20 | 2017-06-20 | 多方向的压电超声发生器及其制备方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201710468911.0A CN107138380B (zh) | 2017-06-20 | 2017-06-20 | 多方向的压电超声发生器及其制备方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN107138380A CN107138380A (zh) | 2017-09-08 |
CN107138380B true CN107138380B (zh) | 2022-09-02 |
Family
ID=59782634
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201710468911.0A Active CN107138380B (zh) | 2017-06-20 | 2017-06-20 | 多方向的压电超声发生器及其制备方法 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN107138380B (zh) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113578723B (zh) * | 2020-12-31 | 2022-04-29 | 瑞声声学科技(深圳)有限公司 | 声换能器及电子设备 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101414701B (zh) * | 2008-11-19 | 2013-06-12 | 东南大学 | 微电子机械悬臂梁式微波功率耦合器及其制备方法 |
CN102176534A (zh) * | 2011-01-17 | 2011-09-07 | 东南大学 | 微电子机械独立下拉电极式微波天线及其制备方法 |
CN103840707B (zh) * | 2014-02-20 | 2016-04-13 | 东南大学 | 物联网射频收发组件中悬臂梁振动电磁自供电微传感器 |
CN106532265B (zh) * | 2016-11-24 | 2023-04-07 | 南京邮电大学 | 方向性可重构的微电子机械天线及其制备方法 |
CN206838453U (zh) * | 2017-06-20 | 2018-01-05 | 南京邮电大学 | 多方向的压电超声发生器 |
-
2017
- 2017-06-20 CN CN201710468911.0A patent/CN107138380B/zh active Active
Also Published As
Publication number | Publication date |
---|---|
CN107138380A (zh) | 2017-09-08 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US10189050B2 (en) | Electromechanical transducer and method of producing the same | |
Hariri et al. | A traveling wave piezoelectric beam robot | |
CN105050022B (zh) | 声音再现系统与用于操作及制造声换能器的方法 | |
Pillatsch et al. | Magnetic plucking of piezoelectric beams for frequency up-converting energy harvesters | |
KR101740115B1 (ko) | 지지 구조체 및 지지 구조체를 형성하는 방법 | |
WO2006031726A2 (en) | Method and system for operating capacitive membrane ultrasonic transducers | |
US20120206016A1 (en) | Piezoelectric micromechanical energy harvesters | |
US11012006B2 (en) | Micro electromechanical system (MEMS) energy harvester with residual stress induced instability | |
CN110050409B (zh) | 振动发电装置 | |
US20080049954A1 (en) | Push-pull capacitive micro-machined ultrasound transducer array | |
WO2014134723A1 (en) | Capacitive micromachined ultrasonic transducer with multiple deflectable membranes | |
US10804818B2 (en) | Triboelectric generator and network for mechanical energy harvesting | |
JP2015503218A (ja) | 圧電式エネルギー回収デバイス又はアクチュエータ | |
EP3220532B1 (en) | Charge pump-based artificial lightning generator and method for manufacturing same | |
WO2018105132A1 (ja) | 確率共振を通じた振動エネルギーハーベスタ及びこれを用いた振動エネルギーハーベスティングシステム | |
CN107138380B (zh) | 多方向的压电超声发生器及其制备方法 | |
WO2012164545A1 (en) | Energy scavenging from a rotating gear using an impact type piezoelectric mems scavenger | |
Cottone et al. | Non-linear MEMS electrostatic kinetic energy harvester with a tunable multistable potential for stochastic vibrations | |
US20140055908A1 (en) | Variable capacitor | |
Jagtap et al. | Geometry optimization of a MEMS-based energy harvesting device | |
KR101557238B1 (ko) | 액체방울을 이용한 발전소자 | |
CN206838453U (zh) | 多方向的压电超声发生器 | |
Lin et al. | Two-cavity MEMS variable capacitor for power harvesting | |
CN206997020U (zh) | 多频率的压电超声发生器 | |
Zhang et al. | Development of energy harvesting MEMS vibration device sensor with wideband response function in low-frequency domain |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant | ||
EE01 | Entry into force of recordation of patent licensing contract |
Application publication date: 20170908 Assignee: Nanjing Ningqixing Information Technology Co.,Ltd. Assignor: NANJING University OF POSTS AND TELECOMMUNICATIONS Contract record no.: X2023980046580 Denomination of invention: Multidirectional piezoelectric ultrasonic generator and its preparation method Granted publication date: 20220902 License type: Common License Record date: 20231113 Application publication date: 20170908 Assignee: Nanjing Kecheng Zhijia Smart Technology Co.,Ltd. Assignor: NANJING University OF POSTS AND TELECOMMUNICATIONS Contract record no.: X2023980046578 Denomination of invention: Multidirectional piezoelectric ultrasonic generator and its preparation method Granted publication date: 20220902 License type: Common License Record date: 20231113 Application publication date: 20170908 Assignee: Nanjing Bodexin Information Technology Co.,Ltd. Assignor: NANJING University OF POSTS AND TELECOMMUNICATIONS Contract record no.: X2023980046576 Denomination of invention: Multidirectional piezoelectric ultrasonic generator and its preparation method Granted publication date: 20220902 License type: Common License Record date: 20231113 |
|
EE01 | Entry into force of recordation of patent licensing contract | ||
EE01 | Entry into force of recordation of patent licensing contract |
Application publication date: 20170908 Assignee: NANJING YUANGAN MICROELECTRONIC CO.,LTD. Assignor: NANJING University OF POSTS AND TELECOMMUNICATIONS Contract record no.: X2023980048637 Denomination of invention: Multidirectional piezoelectric ultrasonic generator and its preparation method Granted publication date: 20220902 License type: Common License Record date: 20231201 |
|
EE01 | Entry into force of recordation of patent licensing contract |