CN107124815A - Plasma generator - Google Patents
Plasma generator Download PDFInfo
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- CN107124815A CN107124815A CN201710545753.4A CN201710545753A CN107124815A CN 107124815 A CN107124815 A CN 107124815A CN 201710545753 A CN201710545753 A CN 201710545753A CN 107124815 A CN107124815 A CN 107124815A
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- 230000001464 adherent effect Effects 0.000 claims abstract description 40
- 238000001816 cooling Methods 0.000 claims abstract description 39
- 230000015572 biosynthetic process Effects 0.000 claims abstract description 13
- 239000011796 hollow space material Substances 0.000 claims abstract description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 14
- 239000011295 pitch Substances 0.000 claims description 11
- 238000011144 upstream manufacturing Methods 0.000 claims description 5
- 244000309464 bull Species 0.000 claims description 3
- 230000003019 stabilising effect Effects 0.000 abstract description 18
- 230000009286 beneficial effect Effects 0.000 description 9
- 230000000694 effects Effects 0.000 description 9
- 230000006835 compression Effects 0.000 description 5
- 238000007906 compression Methods 0.000 description 5
- 238000004891 communication Methods 0.000 description 3
- 238000010891 electric arc Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000000498 cooling water Substances 0.000 description 2
- 230000003467 diminishing effect Effects 0.000 description 2
- 239000013589 supplement Substances 0.000 description 2
- 101100258233 Caenorhabditis elegans sun-1 gene Proteins 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 235000019628 coolness Nutrition 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000005433 ionosphere Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
- H05H1/28—Cooling arrangements
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- Spectroscopy & Molecular Physics (AREA)
- Plasma Technology (AREA)
Abstract
The invention discloses a kind of plasma generator, including anode and negative electrode, wherein, anode is the tubular body that axis is set along the longitudinal direction, cooling air cavity is provided with the outside of the periphery of the hollow space formation plasma arc generation cavity anode of tubular body, cooling air cavity has the first air inlet for being used for being passed through compressed gas；Negative electrode is located at the front end of anode and relative with plasma arc generation cavity, and the medium air cavity connected with plasma arc generation cavity is provided with the outside of the periphery of negative electrode, and medium air cavity has the second air inlet for being used for being passed through dielectric gas；The side wall of anode offers multiple pod apertures of connection cooling air cavity and plasma arc generation cavity, and multiple pod apertures are set to：Enter the adherent eddy flow air film of the axial velocity of the compressed gas formation of plasma arc generation cavity with tangential velocity and backward by pod apertures.The plasma generator realizes anode cooling and stabilising arc function simultaneously using compressed gas.
Description
Technical field
The present invention relates to plasma apparatus field, more particularly to a kind of plasma generator.
Background technology
Anode cooling system and anode stabilising arc system are the key components of plasma generator.
In the prior art, the anode cooling system of plasma generator is usually water cooling system.Water cooling system bag
Include in the cavity of anode periphery and the water-stop sheet or water proof set that set in cavity inside, water-stop sheet or water proof set make cavity formed into
Water outlet circulates stream.Water cooling system needs in the junction of each adjacent segment of anode and the junction of anode and anode carrier
O-ring seal is set with preventing water leakage.
The stabilising arc mode of the anode stabilising arc system of plasma generator mainly has the gentle steady side of the steady mode of liquid, the steady mode of magnetic
Three kinds of formula.Wherein, the steady mode of gas is simple and easy to apply, most commonly used.
During the present invention is realized, designer has found that plasma generator uses the gentle steady side of water cooling system
The anode stabilising arc system of formula has following weak point：
1st, there is drainage once damaging in O-ring seal in water cooling system, will produce current interruption, or due to leak
Anode heat is caused to be difficult to distribute and cause hot-spot and scaling loss anode.
2nd, the plasma generator of water cooling system is complicated, and the weight of plasma generator is larger, and cost is higher,
It is difficult in maintenance.
3rd, realize that stabilising arc requires higher to the parameters of gas by the steady mode of gas, if the intensity of gas cyclone is not
Reach, or wind speed does not reach the parameter required by plasma generator electric arc, the electric arc of generation will occur in plasma
Wave and can not stablize between the negative electrode and anode of device, the fluctuating of gas ionization rate is very big, the easy current interruption of plasma generator,
The positive pole of plasma generator and the improper scaling loss of negative pole may also be caused, shorten the working life of electrode.
The content of the invention
It is an object of the invention to provide a kind of plasma generator, it is intended to realizes that anode is cooled down simultaneously using compressed gas
With stabilising arc function.
The present invention provides a kind of plasma generator, including anode and negative electrode, wherein, the anode is axis along front and back
To the tubular body of setting, it is provided with described in the hollow space formation plasma arc generation cavity of the tubular body on the outside of the periphery of anode
Air cavity is cooled down, the cooling air cavity has the first air inlet for being used for being passed through compressed gas；The negative electrode is located at the anode
Front end is simultaneously relative with the plasma arc generation cavity, is provided with and connects with the plasma arc generation cavity on the outside of the periphery of the negative electrode
Logical medium air cavity, the medium air cavity has the second air inlet for being used for being passed through dielectric gas；The side wall of the anode is opened up
There are the multiple pod apertures for connecting the cooling air cavity and the plasma arc generation cavity, the multiple pod apertures are set to：Pass through
The pod apertures enter the axially speed of the compressed gas formation of the plasma arc generation cavity with tangential velocity and backward
The adherent eddy flow air film of degree.
The plasma generator that the present invention is provided, compressed gas enters cooling air cavity by the first air inlet, then passes through
Pod apertures enter the plasma arc generation cavity of anode, and form in the presence of pod apertures adherent eddy flow air film.Adherent cyclone gas
The recirculated cooling water that film may replace water cooling system is cooled down to anode；Meanwhile, adherent eddy flow air film can be in cooling anode
While provide stabilising arc air-flow for plasma generator, plasma generator is not easy current interruption.
By referring to the drawings to the detailed description of the exemplary embodiment of the present invention, further feature of the invention and its
Advantage will be made apparent from.
Brief description of the drawings
Accompanying drawing described herein is used for providing a further understanding of the present invention, constitutes the part of the application, this hair
Bright schematic description and description is used to explain the present invention, does not constitute inappropriate limitation of the present invention.In the accompanying drawings：
Fig. 1 is the cross-sectional view of the plasma generator of one embodiment of the invention；
Fig. 2 is the cross-sectional view of the anode of the plasma generator of embodiment illustrated in fig. 1.
Label in accompanying drawing:
1st, anode；1-1, leading portion；1-2, stage casing；1-3, back segment；1-4, pod apertures；1-5, plasma arc generation cavity；2nd, it is cloudy
Pole；3rd, anode sheath；4th, plasma arc；5th, Anode arc root；6th, Cathode arc root；7th, the first air inlet；8th, dielectric gas；9th, it is adherent
Eddy flow air film；10th, the second air inlet；11st, power supply；12nd, medium air cavity；13rd, air cavity is cooled down.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Site preparation is described, it is clear that described embodiment is only a part of embodiment of the invention, rather than whole embodiments.Below
Description only actually at least one exemplary embodiment is illustrative, is never used as to the present invention and its application or makes
Any limitation.Based on the embodiment in the present invention, those of ordinary skill in the art are not making creative work premise
Lower obtained every other embodiment, belongs to the scope of protection of the invention.
Unless specifically stated otherwise, the part and positioned opposite, the digital table of step otherwise illustrated in these embodiments
Do not limited the scope of the invention up to formula and numerical value.Simultaneously, it should be appreciated that for the ease of description, each portion shown in accompanying drawing
The size divided not is to be drawn according to actual proportionate relationship.For technology, side known to person of ordinary skill in the relevant
Method and equipment may be not discussed in detail, but in the appropriate case, the technology, method and apparatus should be considered as authorizing explanation
A part for book.In shown here and discussion all examples, any occurrence should be construed as merely exemplary, and
Not by way of limitation.Therefore, the other examples of exemplary embodiment can have different values.It should be noted that：Similar label
Similar terms is represented in following accompanying drawing with letter, therefore, once it is defined in a certain Xiang Yi accompanying drawing, then subsequent attached
It need not be further discussed in figure.
In the description of the invention, it is to be understood that limit parts using the word such as " first ", " second ", only
It is for only for ease of and corresponding parts is distinguished, such as without Stated otherwise, above-mentioned word does not have particular meaning, therefore not
It is understood that as limiting the scope of the invention.
In the description of the invention, it is to be understood that the noun of locality such as " forward and backward, upper and lower, left and right ", " laterally, vertical,
Vertically, orientation or position relationship indicated by level " and " top, bottom " etc. are normally based on orientation shown in the drawings or position and closed
System, is for only for ease of the description present invention and simplifies description, in the case where not making opposite explanation, these nouns of locality are not indicated that
There must be specific orientation or with specific azimuth configuration and operation with the device or element for implying meaning, therefore can not manage
Solve as limiting the scope of the invention；The noun of locality " inside and outside " refers to relative to inside and outside each part profile in itself.
As depicted in figs. 1 and 2, the plasma generator of the embodiment of the present invention includes anode 1 and negative electrode 2.Anode 1 is axis
The tubular body set along the longitudinal direction, the hollow space formation plasma arc generation cavity 1-5 of tubular body.On the outside of the periphery of anode 1
Cooling air cavity 13 is provided with, cooling air cavity 13 has the first air inlet 7 for being used for being passed through compressed gas.Negative electrode 2 is located at anode 1
Front end is simultaneously relative with plasma arc generation cavity 1-5.It is provided with what is connected with plasma arc generation cavity 1-5 on the outside of the periphery of negative electrode 2
Medium air cavity 12, medium air cavity 12 has the second air inlet 10 for being used for being passed through dielectric gas.The side wall of anode 1 offers connection
Cool down air cavity 13 and plasma arc generation cavity 1-5 multiple pod apertures 1-4.Multiple pod apertures 1-4 are set to：Pass through pod apertures 1-
4 enter the adherent cyclone gas of the axial velocity of plasma arc generation cavity 1-5 compressed gas formation with tangential velocity and backward
Film 9.
The plasma generator is passed through compressed gas by the first air inlet 7 to cooling air cavity 13, passes through pod apertures 1-4
Compressed gas is passed through the plasma arc generation cavity 1-5 of anode 2 and adherent eddy flow air film 9 is formed.Adherent eddy flow air film 9 may replace
The recirculated cooling water of water cooling system is cooled down to anode 1；Meanwhile, adherent eddy flow air film 9 can be while anode 1 be cooled down
Stabilising arc air-flow is provided for plasma generator, plasma generator is not easy current interruption.
In some preferred embodiments, multiple pod apertures 1-4 form each at least one pod apertures group, pod apertures group
Pod apertures 1-4 is arranged centered on the axis of anode 1 along spiral trajectory.This is provided with forms adherent beneficial to tissue compression gas
Eddy flow air film 9, so as to beneficial to preferably cooling anode and produce good stabilising arc effect.
In some preferred embodiments, pod apertures 1-4 formation two or more pod apertures groups, the helix of each pod apertures group
Axis direction bull arrangement of the track along plasma sun 1.The setting can make multiple pod apertures 1-4 density degree and compression
The shooting angle of gas is preferably coordinated, so that flow, speed and the direction of compressed gas are preferably controlled, so that more preferably
Ground controls cooling effect and stabilising arc effect.
In some preferred embodiments, each pod apertures 1-4 in pod apertures group is set to：Along every the two of spiral trajectory
The flowing road of pod apertures 1-4 and the effluent stream of the pod apertures 1-4 positioned at upstream in individual adjacent pod apertures 1-4 positioned at downstream
Footpath dislocation arrangement.Dislocation arrangement can be realized by controlling pod apertures 1-4 density degree and/or angle.For example, can make
Angle positioned at the pod apertures 1-4 of upstream air-flow outflow direction and fore-and-aft direction is different from the pod apertures 1-4's positioned at downstream
Air-flow flows out direction and the angle of fore-and-aft direction realizes that foregoing dislocation is arranged.The setting can flow out the pod apertures 1-4 of upstream
Compressed gas flowing less by downstream pod apertures 1-4 flow out compressed gas influenceed, reduce vortex produce, profit
In the flowing of air-flow eddy flow, therefore beneficial to raising cooling effect and stabilising arc effect.
In some preferred embodiments, set spiral trajectory equal pitch or pitches set.Spiral trajectory
Pitch can need to set according to cooling and stabilising arc adjust the parameter of adherent eddy flow air film 9, reach the coolings of needs and steady
Arc effect.
Preferably, the pitch of spiral trajectory is gradually reduced from front to back.The setting is beneficial to improve at high temperature concentrated area
The flow and flow velocity of adherent eddy flow air film 9, improve cooling effect.
In some preferred embodiments, at least one pod apertures 1-4 air-flow outflow direction and the angle of fore-and-aft direction
The angle of direction and fore-and-aft direction is flowed out different from remaining pod apertures 1-4 air-flow.By the air-flow for controlling multiple pod apertures 1-4
The angle of direction and fore-and-aft direction is flowed out, the tangential velocity and axial velocity of adherent eddy flow air film 9 can be efficiently controlled, reached
The cooling needed and stabilising arc effect.
In some preferred embodiments, pod apertures 1-4 is located at the back segment of anode 1.The temperature highest position of anode 1 exists
At Anode arc root 5, due to impetus of the high-voltage arc by dielectric gas, Anode arc root is located at the back segment of anode 1, by water conservancy diversion
Hole 1-4 can form adherent eddy flow air film 9 located at the back segment of anode 1 in back segment, effectively higher to equitemperature at Anode arc root 5
Position cooled down targeted specifically, be better achieved cooling and stabilising arc function.
In some preferred embodiments, the side wall internal diameter of the part for being provided with pod apertures 1-4 of anode 1 is more than anode 1
Remainder side wall internal diameter.The setting can reduce adherent eddy flow air film 9 and the unfavorable of mobile generation of high-voltage arc is done
Disturb.
In some preferred embodiments, dielectric gas enters plasma arc generation cavity 1-5 with cyclone mode.Therefore, it is situated between
Matter gas and high-voltage arc are moved rearwards by plasma arc generation cavity 1-5 with cyclone mode, are located in beneficial to high-voltage arc is stable
Inside dielectric gas, the stability of plasma generator is improved.
Describe the plasma generator of the embodiment of the present invention in detail below in conjunction with Fig. 1 and Fig. 2.
As shown in figure 1, the plasma generator of the embodiment includes anode 1, negative electrode 2 and anode sheath 3.Anode 1 and the moon
Pole 2 is respectively turned on the positive pole and negative pole of power supply 11.Negative electrode 2 produces high-voltage arc with anode 1 by contacting.
Anode 1 is the tubular body axially set along the longitudinal direction, the hollow space formation plasma arc generation cavity of tubular body
1-5.As shown in Fig. 2 in the present embodiment, anode 1 is divided into leading portion 1-1, stage casing 1-2 and back segment 1-3 from front to back.Leading portion 1-1, in
Section 1-2 and back segment 1-3 can be wholely set or together with split sets and reconnected.
As depicted in figs. 1 and 2, leading portion 1-1 inner surface includes cross-sectional area diminishing tapered table from front to back
Face.Tapered surface forms tapered runner.Tapered runner can carry out mechanical compress to high-voltage arc.In addition, in order to negative electrode 2
End coordinates, the first shorter circle of one section of axial distance that the front end that leading portion 1-1 inner surface is additionally included in tapered surface is set
Cylinder.
Stage casing 1-2 inner surface includes second face of cylinder.Second face of cylinder and the rear end of leading portion 1-1 tapered surface are coaxial
Connection.The diameter on second face of cylinder is identical with the rear end diameter of tapered surface.In the present embodiment, tapered surface is to be arranged at first
Diminishing first circular conical surface of cross-sectional area between the face of cylinder and stage casing 1-2 inner surface.
Back segment 1-3 inner surface includes threeth face of cylinder coaxial with second face of cylinder.The diameter on the 3rd face of cylinder is more than
The diameter on second face of cylinder.As shown in Fig. 2 multiple pod apertures 1-4 are opened at the back segment 1-3 of anode 1 the 3rd face of cylinder.
Back segment 1-3 inner surface also includes the transitional surface on second face of cylinder of connection and the 3rd face of cylinder.Transitional surface is
Second circular conical surface.The front end of second circular conical surface is identical and coaxially connected with the second face of cylinder diameter.The rear end of second circular conical surface with
3rd face of cylinder diameter is identical and coaxially connected.Transitional surface can make medium stream from the second cylinder towards the 3rd cylinder surface current
Flowing is more steady when dynamic.
Anode 1 is made preferably by conductive capability and the preferable red copper material of the capacity of heat transmission.
As shown in figure 1, anode sheath 3 is set in the periphery of anode 1 and cooling air cavity 13 is formed in the periphery of anode 1.Cooling
Air cavity 13 has the first air inlet 7 for being used for being passed through compressed gas.
As shown in figure 1, negative electrode 2 is located at the front end of anode 1 and relative with plasma arc generation cavity 1-5.The periphery of negative electrode 2 is set
There is the medium air cavity 12 connected with plasma arc generation cavity 1-5, medium air cavity 12 has to be entered for being passed through the second of dielectric gas
Gas port 10.In the present embodiment, medium air cavity 12 is surrounded by the internal chamber wall of anode carrier and the periphery of negative electrode 2.The front end position of negative electrode 2
On the inside of the leading portion 1-1 of anode 1 first face of cylinder, the medium stream communication port of annular is formed between first face of cylinder.It is situated between
Matter air cavity 12 is connected with plasma arc generation cavity 1-5 by the medium stream communication port.Second air inlet 10 is located at medium air cavity
Front end and close to radial outside.Dielectric gas enters after medium air cavity 12, is formed in medium air cavity 12 after eddy flow by being situated between
Matter airflow mouthful.Therefore, plasma generation cavity 1-5 dielectric gas is entered from medium stream opening with cyclone mode stream
Cross plasma generation cavity 1-5.
Plasma arc generation cavity 1-5 is the groundwork region of plasma generator.As shown in Fig. 2 dielectric gas and
After leading portion 1-1 and stage casing 1-2 that high-voltage arc passes through anode 1, Anode arc root 5 is in the plasma arc generation cavity in back segment 1-3
1-5 rear portion.Blast in plasma arc generation cavity 1-5 promotes the high-voltage arc of compression to leave anode 1.
In the present embodiment, compressed gas and dielectric gas use gas of the same race, for example, can be air.
Aforesaid plurality of pod apertures 1-4 is used to connect cooling air cavity 13 and plasma arc generation cavity 1-5.Multiple pod apertures 1-4
It is set to enter the axle of plasma arc generation cavity 1-5 compressed gas formation with tangential velocity and backward by pod apertures 1-4
To the adherent eddy flow air film 9 of speed.Adherent eddy flow air film 9 can be plasma hair while plasma generator is cooled down
Raw device provides stabilising arc air-flow.
Pod apertures 1-4 aperture, quantity, arrangement mode, set location, can basis along the length of the axial direction of anode 1
Thickness, flow, flow velocity, direction, plasma generation cavity 1-5 size of adherent eddy flow air film 9 etc. needed for cooling and current stabilization because
Element is set.
In the present embodiment, at pod apertures 1-4 and fore-and-aft direction and pod apertures 1-4 between the section of the inner surface of anode 1
Certain angle is respectively provided with, so as to form adherent eddy flow air film by the pod apertures 1-4 air-flows for entering plasma arc generation cavity 1-5
9.Angle at pod apertures 1-4 aperture and pod apertures 1-4 and pod apertures 1-4 between the section of the inner surface of anode 1 is shadow
Ring the principal element of the thickness of adherent eddy flow air film 9.Pod apertures 1-4 aperture and the pressure of compressed gas are the adherent eddy flows of influence
The principal element of the tangential velocity of air film 9.Angle, pod apertures 1-4 aperture and the compressed gas of pod apertures 1-4 and fore-and-aft direction
Pressure be the axial velocity of the adherent eddy flow air film of influence backward principal element.
As shown in figure 1, in the present embodiment, multiple pod apertures 1-4 form multiple pod apertures groups.Respectively leading in each pod apertures group
Discharge orifice 1-4 is arranged centered on the axis of anode 1 along spiral trajectory.
Because the helical angle of the spiral trajectory by pod apertures group and the sidewall thickness of anode 1 are limited, for ease of adding
Work pod apertures 1-4, the pitch of spiral trajectory tends to relatively large distance, sets multiple pod apertures groups, and make multiple pod apertures groups
The arrangement of spiral trajectory bull more pod apertures 4-1 can be set so that beneficial to the adherent cyclone gas that advances at utmost speed of acquisition
Film 9, so as to be cooled down and steady flow result beneficial to improving.
In the present embodiment, along in spiral trajectory in the adjacent pod apertures 1-4 of each two positioned at downstream pod apertures 1-4 with
Misplace and arrange positioned at the flow path of the pod apertures 1-4 of upstream effluent stream.
In the present embodiment, set spiral trajectory pitches.Specifically, the pitch of spiral trajectory is from front to back gradually
Reduce.The setting be beneficial to be distributed pod apertures 1-4 before dredge after it is close so that pod apertures 1-4 is near the position at Anode arc root 5
Distribution is more intensive, the heat near the position of Anode arc root 5 is taken out of anode 1 rapidly beneficial to adherent eddy flow air film 9, so that more
Realize refrigerating function well.
In other unshowned embodiments, spiral trajectory can also equal pitch setting.
The operation principle of the plasma generator of the embodiment is described below.
After anode 1 and negative electrode 2 are passed through constant current, negative electrode 2 is first contacted with anode 1 produces high-frequency discharge, then slowly from
Kaiyang pole 1, high-voltage arc is produced between negative electrode 2 and anode 1.Produced between negative electrode 2 and anode 1 after suitable distance, negative electrode 2 and sun
The geo-stationary of pole 1.When negative electrode 2 and the separation of anode 1, dielectric gas passes through medium stream communication port, negative electrode 2 and sun with cyclone mode
High-voltage arc is formed between pole 1.High-voltage arc rotates into plasma generation cavity 1-5 under the promotion of dielectric gas.High pressure
It is mechanically compressed when electric arc is by leading portion 1-1 tapered surface, by stage casing 1-2 the second cylindrical into stable high-tension electricity
Arc.
From the first air inlet 7 compressed gas is passed through into cooling air cavity 13.The compressed gas in air cavity 13 is cooled down by leading
The plasma generation cavity 1-5 that discharge orifice 1-4 enters in back segment 1-3 the 3rd face of cylinder, forms the patch for rotating be moved rearwards by a high speed
Wall eddy flow air film 9.When high-voltage arc is by cavity inside adherent eddy flow air film 9, high-voltage arc is re-compressed, compression
High-voltage arc plasma arc 4.
The adherent eddy flow air film 9 that the side wall inner surfaces of anode 1 are rotated at a high speed is covered, and adherent eddy flow air film 9 is not
Disconnected renewal supplement, the heat entrained by high-voltage arc is difficult to transmit to anode 1 in the presence of adherent eddy flow air film 9, with etc.
Ion arc 4 leaves anode 1 together, so as to reach the cooling purpose of anode 1；Because adherent eddy flow air film 9 rotates at a high speed, high-voltage arc
It also can at a high speed be rotated inside adherent eddy flow air film 9, can effectively alleviate hot-spot phenomenon at Anode arc root 5, therefore, sun
Pole 1 is able to maintain that preferable thermodynamic equilibrium.
Adherent eddy flow air film 9 forms a stable discharge channel between the negative electrode and anode of plasma generator,
There is provided give plasma generator institute in the cavity of adherent eddy flow air film 9 for the arc stability that plasma generator is produced
The stabilising arc air-flow needed, makes plasma generator be not easy current interruption, it is ensured that the normal work of plasma generator, improves
The energy conversion efficiency of electric current.
Although above example is by taking the plasma generator of contact as an example, it is suitable for contactless etc.
Ion generator.
Understood based on above description, the embodiment of the present invention at least has one of following technique effect：
Adherent eddy flow air film 9 is supplied to the stabilising arc air-flow required for plasma generator, makes plasma generator not
Easy current interruption, it is ensured that the normal work of plasma generator, improves the energy conversion efficiency of electric current.
Adherent eddy flow air film 9 completely cuts off plasma arc 4, plays a part of cooling down anode 1；Adherent eddy flow air film 9 can drive sun
Polar arc root 5 rotates at a high speed on the inwall of anode 1, effectively alleviates the phenomenon of the scaling loss because of hot-spot of anode 1.
The adherent compression plasma arc 4 of eddy flow air film 9, improves the unit heat equivalent of plasma arc 4, improves the thermal efficiency, it is ensured that
The normal work of plasma generator.
The portion gas of adherent eddy flow air film 9 intervenes the ionization of plasma arc 4, in adherent eddy flow air film 9 and plasma arc 4
The edge formation ionosphere of contact, to dielectric gas formation useful supplement.
Finally it should be noted that：The above embodiments are merely illustrative of the technical scheme of the present invention and are not intended to be limiting thereof；To the greatest extent
The present invention is described in detail with reference to preferred embodiments for pipe, those of ordinary skills in the art should understand that：Still
The embodiment of the present invention can be modified or equivalent substitution is carried out to some technical characteristics；Without departing from this hair
The spirit of bright technical scheme, it all should cover among claimed technical scheme scope of the invention.
Claims (10)
1. a kind of plasma generator, including anode (1) and negative electrode (2), it is characterised in that
The anode (1) is the tubular body that axis is set along the longitudinal direction, the hollow space formation plasma arc of the tubular body
Cooling air cavity (13) is provided with the outside of the periphery of generation cavity (1-5) anode (1), the cooling air cavity (13), which has, to be used to lead to
Enter the first air inlet (7) of compressed gas；
The negative electrode (2) be located at the anode (1) front end and with the plasma arc generation cavity (1-5) relatively, the negative electrode
(2) the medium air cavity (12) connected with the plasma arc generation cavity (1-5), the medium air cavity are provided with the outside of periphery
(12) there is the second air inlet (10) for being used for being passed through dielectric gas；
The side wall of the anode (1) offer connection it is described cooling air cavity (13) and the plasma arc generation cavity (1-5) it is many
Individual pod apertures (1-4), the multiple pod apertures (1-4) are set to：Enter the plasma arc by the pod apertures (1-4) to send out
The adherent eddy flow air film (9) of the axial velocity of the compressed gas formation of raw chamber (1-5) with tangential velocity and backward.
2. plasma generator according to claim 1, it is characterised in that the multiple pod apertures (1-4) are formed at least
Each pod apertures (1-4) in one pod apertures group, the pod apertures group are centered on the anode (1) axis along helix
Trajectory alignment.
3. plasma generator according to claim 2, it is characterised in that the pod apertures (1-4) form two or more
The pod apertures group, the axis direction bull of the spiral trajectory of each pod apertures group along the plasma positive (1) is arranged.
4. plasma generator according to claim 2, it is characterised in that each pod apertures in the pod apertures group
(1-4) is set to：It is located at the pod apertures (1-4) in downstream along along the adjacent pod apertures of each two of the spiral trajectory (1-4)
Misplace and arrange with the flow path of the effluent stream of the pod apertures (1-4) positioned at upstream.
5. plasma generator according to claim 2, it is characterised in that set the spiral trajectory equal pitch or
Set pitches.
6. plasma generator according to claim 5, it is characterised in that the pitch of the spiral trajectory is from front to back
It is gradually reduced.
7. plasma generator according to any one of claim 1 to 6, it is characterised in that at least one described water conservancy diversion
The air-flow outflow direction in hole (1-4) and the angle of fore-and-aft direction are different from the air-flow outflow direction of remaining pod apertures (1-4)
With the angle of fore-and-aft direction.
8. plasma generator according to any one of claim 1 to 6, it is characterised in that the pod apertures (1-4) set
Back segment in the anode (1).
9. plasma generator according to any one of claim 1 to 6, it is characterised in that the setting of the anode (1)
The side wall internal diameter for having the part of the pod apertures (1-4) is more than the side wall internal diameter of the remainder of the anode (1).
10. plasma generator according to any one of claim 1 to 6, it is characterised in that the dielectric gas is to revolve
Stream mode enters in the plasma arc generation cavity (1-5).
Priority Applications (1)
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110248457A (en) * | 2019-07-02 | 2019-09-17 | 深圳杜摩韦尔工程技术有限公司 | A kind of microminiature plasma gun |
| CN110324953A (en) * | 2019-07-30 | 2019-10-11 | 无锡光程新能源科技有限公司 | Plasma torch generator |
| CN110478236A (en) * | 2019-09-10 | 2019-11-22 | 烟台海灵健康科技有限公司 | A kind of electrocautery head, Electrocautery therapeutic instrument and its application method including it |
| CN111081521A (en) * | 2019-11-27 | 2020-04-28 | 北京北方华创微电子装备有限公司 | Medium cartridge |
| CN117835514A (en) * | 2022-08-31 | 2024-04-05 | 新倍司特系统科技(苏州)有限公司 | Plasma generator and method of operating the same |
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| CN110248457A (en) * | 2019-07-02 | 2019-09-17 | 深圳杜摩韦尔工程技术有限公司 | A kind of microminiature plasma gun |
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| CN110478236A (en) * | 2019-09-10 | 2019-11-22 | 烟台海灵健康科技有限公司 | A kind of electrocautery head, Electrocautery therapeutic instrument and its application method including it |
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| CN117835514A (en) * | 2022-08-31 | 2024-04-05 | 新倍司特系统科技(苏州)有限公司 | Plasma generator and method of operating the same |
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| CN107124815B (en) | 2023-10-31 |
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