CN107123585B - A kind of straight drive radio-frequency power supply - Google Patents
A kind of straight drive radio-frequency power supply Download PDFInfo
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- CN107123585B CN107123585B CN201710318377.5A CN201710318377A CN107123585B CN 107123585 B CN107123585 B CN 107123585B CN 201710318377 A CN201710318377 A CN 201710318377A CN 107123585 B CN107123585 B CN 107123585B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/022—Circuit arrangements, e.g. for generating deviation currents or voltages ; Components associated with high voltage supply
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
Abstract
A kind of straight drive radio-frequency power supply, including sequentially connected signal source, voltage conditioning circuit and three parallel high voltage amplifier circuits, signal source provides two-way independently of each other and low pressure sine wave signal RF and AC within the adjustable 5V of amplitude, frequency and phase；Voltage conditioning circuit receives RF and AC and is handled to obtain RF- ' signal, RF+AC+ coupled signal and three road signal of RF+AC- coupled signal and export to three high voltage amplifier circuits respectively to be handled, adjustable three road high-voltage signal within adjustable within bilateral differential output voltage 1000V and frequency 900kHz is obtained, load is can be supplied to and uses.Wherein high voltage amplifier circuit is established by discrete component, including sequentially connected difference correction circuit, driving booster circuit, power amplification circuit and the feed circuit being connected between the input terminal of difference correction circuit and the output end of power amplification circuit.The present invention has the advantages that at low cost, output voltage is high, frequency is adjustable and bandwidth.
Description
Technical field
The present invention relates to radio-frequency power supply, specifically a kind of high-frequency and high-voltage directly drives radio-frequency power supply.
Background technique
Radio-frequency power supply as mass spectrometric important composition component, load rectilinear ion trap, level four bars, multistage bar or from
On sub- funnel, for controlling movement of the ion in rectilinear ion trap, level four bars, multistage bar or ion funnel.Radio-frequency power supply
Output voltage and operating frequency influences mass spectrograph can detect the range of substance, stability and linear property influence mass spectrometric standard
True property and stability.Existing mass spectrograph mainly realizes that upper kilovolt high pressure is defeated by the way of coil resonance with radio-frequency power supply
Out, circuit is only operable on resonant frequency point, causes frequency parameter that can not change, and significantly limits the flexible of application mode
Property；And coil resonance formula radio-frequency power supply causes load that can only export sine wave due to a part that load is resonant tank, and it is right
The coupling of RF and AC under resonant excitation mode cause very big obstruction.
For the drawbacks described above for overcoming coil resonance formula radio-frequency power supply, someone passes through the conceptual design of integrated device frequency and exists
Continuously adjustable within the scope of 0Hz~1MHz, the bilateral adjustable straight drive radio-frequency power supply of differential output voltage 0V~600V, but it is made
Integrated device cost is very expensive, needs access to 5000 yuans of chip cost, and output voltage is still relatively low.
Summary of the invention
It is a primary object of the present invention to establish a kind of non-coil resonance inexpensive, output voltage is high by discrete component
Formula directly drives radio-frequency power supply, with solve present in above-mentioned existing straight drive radio-frequency power supply it is with high costs, output voltage is relatively low asks
Topic.
The technical solution that the present invention proposes for the above-mentioned purpose is as follows：
A kind of straight drive radio-frequency power supply, including：
Signal source provides two-way independently of each other and low pressure sine wave signal within the adjustable 5V of amplitude, frequency and phase,
Respectively as RF signal and AC signal；
Voltage conditioning circuit is connected to the signal source, receives RF signal and AC signal respectively by two input ports,
And carry out difference output respectively to obtain tetra- road signal of RF+, RF-, AC+ and AC-, following place then is carried out to four road signal
Reason：By RF+ signal through an inverting amplifier export to obtain RF+ ' signal, by RF- signal and AC+ signal by reverse phase adder into
Row is added and obtains RF-AC+ coupled signal and be added RF- signal by reverse phase adder with AC- signal to obtain RF-AC- coupling
Signal is closed, is respectively exported RF+ ' signal, RF-AC+ coupled signal and RF-AC- coupled signal by three output ports；Or
Person carries out the following processing four road signal：RF- signal is exported to obtain RF- ' signal through an inverting amplifier, believes RF+
It number is added to obtain RF+AC+ coupled signal by reverse phase adder with AC+ signal and RF+ and AC- signal is passed through into reverse phase
Adder is added to obtain RF+AC- coupled signal, by three output ports respectively by RF- ' signal, RF+AC+ coupled signal with
And RF+AC- coupled signal output；
Three identical high voltage amplifier circuits, each high voltage amplifier circuit include sequentially connected difference correction circuit, driving
It booster circuit, power amplification circuit and is connected between the input terminal of difference correction circuit and the output end of power amplification circuit
Feed circuit；Three high voltage amplifier circuits are connected respectively to three output ports of the voltage conditioning circuit, with right
The output of voltage conditioning circuit carries out the following processing：
It first passes through difference correction circuit and the feedback signal of the output of voltage conditioning circuit and feed circuit is subjected to differential ratio
Compared with the output after comparing is again through driving booster circuit to boost to form adjustable and frequency within bilateral differential output voltage 1000V
Adjustable high-voltage signal within 900kHz, the high-voltage signal export after power amplification circuit carries out Current amplifier again.
Above-mentioned technical proposal proposed by the present invention compared with prior art, has the advantages that：
1) circuit structure of entire radio-frequency power supply is compact, realizes that high voltage amplifier circuit is greatly reduced into using discrete component
This, it is only necessary to 200 yuan of chip cost；
2) due to not using coil coupled modes to realize, reduce the conversion of form of energy, circuit anti-interference ability is strong；
3) high voltage amplifier circuit is realized by using discrete element, so that the linear property of the radio-frequency power supply is high, it can be right
The coupling waveform of unlike signal carries out Linear Amplifer in frequency band, and the office of sinusoidal signal can only be exported by having broken coil type radio-frequency power supply
It is sex-limited, the condition of providing is coupled in high-voltage end with RF signal for AC；
4) radio-frequency power supply possesses very wide passband, linear adjustable within 900kHz, when it is suitable for mass spectrograph, opens up
The working method of RF signal in wide mass spectrograph ion trap, can be used fixed frequency scan amplitude, jump frequency scan amplitude,
A variety of mass scanning methods such as fixed amplitude scan frequency；
5) also just because of realizing high voltage amplifier circuit using discrete element, so that the power supply controllability is good, voltage
Output accuracy is high, and for output signal total harmonic distortion within 1%, linearity is high, and the output modulation waveform linearity is
99.99%, full power bandwidth 900kHz, unilateral output can reach 900kHz frequency full power bandwidth output 500Vpp, bilateral difference
Point output can reach 1000V and adjustable.
Further, the signal source includes sequentially connected serial communication circuit, single chip machine controlling circuit, DDS electricity
Road and bandwidth-limited circuit；The control instruction of host computer is written to the monolithic of single chip machine controlling circuit by serial communication circuit
In machine, and pass through single-chip microcontroller write frequency control word into the DDS chip of DDS circuit, so that DDS circuit output two-way amplitude,
Frequency and low pressure sine wave signal within the adjustable 5V of phase, and RF letter is exported after bandwidth-limited circuit is filtered
Number and AC signal.In this preferred scheme, high-precision DDS chip, so that amplitude, frequency, phase pass through upper computer software
It can directly adjust, and guarantee in each external trigger period, initial phase is stablized between different channels.
Further, the voltage conditioning circuit includes two multipliers, respectively adjusts RF signal and AC signal and one
Signal multiplication processed obtains modulated RF signal and AC signal；Also, the output end of each multiplier is connected with one instead simultaneously
Phase amplifier and an in-phase amplifier, inverting amplifier and in-phase amplifier are used for modulated RF signal and AC signal point
Not carry out difference output, to obtain four road signal.
Further, the driving booster circuit realizes boosting by the common source amplifying circuit of NMOS field-effect tube.
Further, the power amplification circuit passes through the source follower of NMOS field-effect tube, while realizing resistance
Resistance changes and power amplification.
Further, the difference correction circuit is integrated low-voltage operational amplifier.Integrated operational amplifier has good
Good driving capability, conversion rate is fast, and gain bandwidth product is big, is conducive to improve wave distortion.
Further, the feed circuit obtains the feedback signal of open loop amplification output by proportion resistor, and by institute
One of input signal of the feedback signal as the difference correction circuit is stated, is stablized so that the high voltage amplifier circuit has
Closed-loop gain.
Detailed description of the invention
Fig. 1 is the straight functional block diagram for driving radio-frequency power supply of one kind of the specific embodiment of the invention；
Fig. 2 is the functional block diagram of the signal source of the straight drive radio-frequency power supply of the specific embodiment of the invention；
Fig. 3 is the structure chart of the voltage conditioning circuit of the straight drive radio-frequency power supply of the specific embodiment of the invention；
Fig. 4 is the structure chart of the high voltage amplifier circuit of the straight drive radio-frequency power supply of the specific embodiment of the invention；
Fig. 5 is that the straight drive radio-frequency power supply of the specific embodiment of the invention is applied to the connection schematic diagram of ion trap.
Specific embodiment
The invention will be further described with specific embodiment with reference to the accompanying drawing.
A specific embodiment of the invention provides a kind of straight drive radio-frequency power supply, as shown in Figure 1, the radio-frequency power supply includes successively
Signal source, voltage conditioning circuit and the three parallel high voltage amplifier circuits of connection, it is negative that the output of radio-frequency power supply is connected to one
It carries, to provide required straight drive radio-frequency power supply to load.Wherein, signal source provides two-way independently of each other and amplitude, frequency and phase
Low pressure sine wave signal within the adjustable 5V in position, respectively as RF signal and AC signal, with reference to Fig. 2, in a kind of specific reality
It applies in example, signal source includes sequentially connected serial communication circuit, single chip machine controlling circuit, DDS circuit and bandpass filtering electricity
Road；The control instruction of host computer is written by serial communication circuit in the single-chip microcontroller of single chip machine controlling circuit, and passes through monolithic
Machine write frequency control word into the DDS chip of DDS circuit, so that DDS circuit output two-way amplitude, frequency and phase are adjustable
5V within low pressure sine wave signal RF and AC, and after bandwidth-limited circuit is filtered export RF signal and AC letter
Number.
As shown in Figure 1, voltage conditioning circuit is connected to signal source, pass through two input ports (Fig. 1, line with the arrow in 2
Item only represents between circuit, and there is signal to transmit relationship, and not include the limitation to the item number of data route) RF letter is received respectively
Number and AC signal, and respectively carry out difference output to obtain tetra- road signal of RF+, RF-, AC+ and AC-, then to four road believe
It number carries out the following processing：RF+ signal is exported to obtain RF+ ' signal through an inverting amplifier, passes through RF- signal and AC+ signal
Reverse phase adder is added to obtain RF-AC+ coupled signal and is added RF- signal by reverse phase adder with AC- signal
RF-AC- coupled signal is obtained, by three output ports respectively by RF+ ' signal, RF-AC+ coupled signal and RF-AC- coupling
Close signal output；Or four road signal is carried out the following processing：RF- signal is exported to obtain RF- ' through an inverting amplifier
RF+ signal and AC+ signal by reverse phase adder are added to obtain RF+AC+ coupled signal and by RF+ and AC- by signal
Signal is added to obtain RF+AC- coupled signal by reverse phase adder, by three output ports respectively by RF- ' signal, RF+AC
+ coupled signal and the output of RF+AC- coupled signal.
In a kind of preferred embodiment, voltage conditioning circuit is realized using circuit as shown in Figure 3, as shown in figure 3,
Voltage conditioning circuit includes two multipliers 11 and 12, and RF signal and AC signal are multiplied with modulated signal 21,22 respectively, is obtained
Modulated RF signal and AC signal；Also, the output end of each multiplier is connected with an inverting amplifier and one simultaneously
(output end of multiplier 11 is connected with inverting amplifier 31 and in-phase amplifier 32 to in-phase amplifier；The output end of multiplier 21
It is connected with inverting amplifier 41 and in-phase amplifier 42), inverting amplifier and in-phase amplifier are used for modulated RF signal
Difference output is carried out respectively with AC signal, to obtain four road signal RF+, RF-, AC+ and AC-.
It is to be appreciated that the "+" and "-" after RF and AC do not represent the positive and negative of power supply, it is only intended to distinguish different
Signal, because RF and AC are originally AC signal (sinusoidal signals), there is no positive and negative points.
In a kind of specific embodiment, as shown in figure 3, modulated RF signal is mutually put by inverting amplifier 31 with same
RF- and RF+ are respectively obtained after big device 32, modulated AC signal obtains respectively after inverting amplifier 41 and in-phase amplifier 42
To AC- and AC+, RF- is directly obtained into RF+ ' via the output of inverting amplifier 50, RF+ signal is added with AC- signal by reverse phase
Musical instruments used in a Buddhist or Taoist mass 51 is added to obtain RF-AC+ coupled signal, and RF+ signal is added to obtain with AC+ signal by reverse phase adder 52
RF-AC- coupled signal, so that RF the and AC signal that signal source generates obtains RF+ ' signal, RF-AC+ after voltage conditioning circuit
Coupled signal and RF-AC- coupled signal are exported by three output ports to high voltage amplifier circuit.Alternatively, can also be by RF
+ RF- ' directly is obtained via the output of inverting amplifier 50, RF- signal is added with AC- signal by reverse phase adder 51
RF+AC+ coupled signal is obtained, RF- signal is added to obtain RF+AC- coupled signal with AC+ signal by reverse phase adder 52,
To which RF the and AC signal that signal source generates obtains RF- ' signal, RF+AC+ coupled signal and RF+ after voltage conditioning circuit
AC- coupled signal.
Three high voltage amplifier circuits receive the signal of three output ports of voltage conditioning circuit respectively and are handled.Such as
Shown in Fig. 4, each high voltage amplifier circuit includes sequentially connected difference correction circuit 1, driving booster circuit 3, power amplification circuit 4
And it is connected to the feed circuit 2 between the input terminal of difference correction circuit 1 and the output end of power amplification circuit 4；Three height
Pressure amplifying circuit is connected respectively to three output ports of the voltage conditioning circuit, with the output to voltage conditioning circuit
It carries out the following processing：
It first passes through difference correction circuit 1 and the feedback signal of the output of voltage conditioning circuit and feed circuit 2 is subjected to difference
Compare, the output after comparing forms adjustable and frequency within bilateral differential output voltage 1000V through the driving boosting of booster circuit 3 again
Adjustable high-voltage signal within 900kHz, the high-voltage signal export after power amplification circuit 4 carries out Current amplifier to one again
Load.Load herein is, for example, mass spectrometric ion trap.
In a kind of specific embodiment, as shown in figure 4, integrated low-voltage operational amplifier can be used in difference correction circuit 1
To realize；Booster circuit 3 is driven to realize boosting by the common source amplifying circuit of NMOS field-effect tube；Power amplification circuit 4 is logical
The source follower of NMOS field-effect tube is crossed, while realizing impedance transformation and power amplification；Feed circuit 2 passes through proportion resistor
The feedback signal of open loop amplification output is obtained, and using the feedback signal as one of input of the difference correction circuit
Signal, so that the high voltage amplifier circuit has stable closed-loop gain.The structure of high voltage amplifier circuit as shown in figure 4,
The output end of operational amplifier 100 is connected to the grid of NMOS field-effect tube Q1 by a capacitor C1, and by resistance R1~
R5 connects to form driving booster circuit 3 according to the connection type in such as Fig. 4；The grid of another NMOS field-effect tube Q2 is connected to Q1
Drain electrode, drain electrode the source electrode that the drain electrode of Q1, source electrode are connected to by resistance R6, R5 Q1, high voltage amplifier circuit be connected to by R4
Final output exported from the source electrode of Q2 via a capacitor C2 to load.Meanwhile feed circuit is by using a proportion resistor
Decay the small signal taken out within 5V from the output end of high voltage amplifier circuit, as an input signal of difference correction circuit,
So that entire high voltage amplifier circuit is formed closed loop feedback system, there is stable voltage amplification factor, improve control precision.
Aforementioned straight drive radio-frequency power supply provided by the invention, be capable of providing it is adjustable within bilateral differential output voltage 1000V and
Adjustable high-voltage signal is used for load within frequency 900kHz.When this directly drives radio-frequency power supply for a mass spectrograph, with from
The connection type of sub- trap is as shown in figure 5, wherein signal s1 indicates that signal RF- ' or signal RF+ ' passes through high voltage amplifier processing of circuit
Output afterwards, signal s2 indicate that RF+AC- coupled signal or RF-AC+ coupled signal are defeated after high voltage amplifier processing of circuit
Out, signal s3 indicates the output of RF+AC+ coupled signal or RF-AC- coupled signal after high voltage amplifier processing of circuit.
The above content is a further detailed description of the present invention in conjunction with specific preferred embodiments, and it cannot be said that
Specific implementation of the invention is only limited to these instructions.For those skilled in the art to which the present invention belongs, it is not taking off
Under the premise of from present inventive concept, several equivalent substitute or obvious modifications can also be made, and performance or use is identical, all answered
When being considered as belonging to protection scope of the present invention.
Claims (4)
1. a kind of straight drive radio-frequency power supply, including：
Signal source provides two-way independently of each other and low pressure sine wave signal within the adjustable 5V of amplitude, frequency and phase, respectively
As RF signal and AC signal；
Voltage conditioning circuit is connected to the signal source, receives RF signal and AC signal respectively by two input ports, and divide
Not carry out difference output to obtain tetra- road signal of RF+, RF-, AC+ and AC-, then four road signal is carried out the following processing：
RF- signal is exported to obtain RF+ ' signal through an inverting amplifier, carries out RF+ signal and AC- signal by reverse phase adder
Addition obtains RF-AC+ coupled signal and is added to obtain RF-AC- by reverse phase adder by RF+ signal and AC+ signal to couple
Signal is respectively exported RF+ ' signal, RF-AC+ coupled signal and RF-AC- coupled signal by three output ports；Or
Four road signal is carried out the following processing：RF+ signal is exported to obtain RF- ' signal through an inverting amplifier, by RF- signal
It is added to obtain RF+AC- coupled signal by reverse phase adder with AC+ signal and is added RF- and AC- signal by reverse phase
Musical instruments used in a Buddhist or Taoist mass is added to obtain RF+AC+ coupled signal, by three output ports respectively by RF- ' signal, RF+AC+ coupled signal and
The output of RF+AC- coupled signal；
Three high voltage amplifier circuits, each high voltage amplifier circuit include sequentially connected difference correction circuit, driving booster circuit, function
Rate amplifying circuit and the feed circuit being connected between the input terminal of difference correction circuit and the output end of power amplification circuit；
Three high voltage amplifier circuits are connected respectively to three output ports of the voltage conditioning circuit, to voltage conditioning circuit
Output carry out the following processing：
It first passes through difference correction circuit and the feedback signal of the output of voltage conditioning circuit and feed circuit is subjected to differential comparison, than
Output after relatively driven again booster circuit boost to be formed adjustable within bilateral differential output voltage 1000V and frequency 900kHz with
Interior adjustable high-voltage signal, the high-voltage signal export after power amplification circuit carries out Current amplifier again.
2. straight drive radio-frequency power supply as described in claim 1, it is characterised in that：The signal source includes that sequentially connected serial ports is logical
Believe circuit, single chip machine controlling circuit, DDS circuit and bandwidth-limited circuit；By serial communication circuit by the control of host computer
In the single-chip microcontroller of instruction write-in single chip machine controlling circuit, and into the DDS chip of DDS circuit, write frequency is controlled by single-chip microcontroller
Word, so that low pressure sine wave signal within DDS circuit output two-way amplitude, frequency and the adjustable 5V of phase, and filtered through band logical
Wave circuit exports RF signal and AC signal after being filtered.
3. straight drive radio-frequency power supply as described in claim 1, it is characterised in that：The voltage conditioning circuit includes two multiplication
RF signal and AC signal are multiplied with a modulated signal respectively, obtain modulated RF signal and AC signal by device；Also, it is each
The output end of multiplier is connected with an inverting amplifier and an in-phase amplifier, inverting amplifier and in-phase amplifier simultaneously
For carrying out difference output respectively to modulated RF signal and AC signal, to obtain four road signal.
4. straight drive radio-frequency power supply as described in claim 1, it is characterised in that：The driving booster circuit passes through NMOS field-effect
The common source amplifying circuit of pipe realizes boosting；The power amplification circuit passes through the source follower of NMOS field-effect tube, together
Shi Shixian impedance transformation and power amplification；The difference correction circuit is integrated low-voltage operational amplifier；The feed circuit is logical
Cross proportion resistor obtain open loop amplification output feedback signal, and using the feedback signal as the difference correction circuit its
In an input signal so that the high voltage amplifier circuit have stable closed-loop gain.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201710318377.5A CN107123585B (en) | 2017-05-08 | 2017-05-08 | A kind of straight drive radio-frequency power supply |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710318377.5A CN107123585B (en) | 2017-05-08 | 2017-05-08 | A kind of straight drive radio-frequency power supply |
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| CN107123585A CN107123585A (en) | 2017-09-01 |
| CN107123585B true CN107123585B (en) | 2018-11-30 |
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Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108390238B (en) * | 2018-01-29 | 2019-09-17 | 雄安华讯方舟科技有限公司 | Terahertz driving device |
| CN112509904A (en) * | 2020-11-30 | 2021-03-16 | 上海裕达实业有限公司 | Switchable digital ion trap mass spectrum radio frequency power supply system and control method thereof |
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| CN104597955A (en) * | 2015-01-08 | 2015-05-06 | 聚光科技(杭州)股份有限公司 | Adjusting device and adjusting method for two-way radio-frequency power supply |
| CN105895491A (en) * | 2016-06-12 | 2016-08-24 | 清华大学深圳研究生院 | Radio-frequency power supply for mass spectrometer and mass spectrometer |
| CN105932859A (en) * | 2016-05-19 | 2016-09-07 | 清华大学深圳研究生院 | Radio-frequency power supply for mass spectrometer |
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|---|---|---|---|---|
| US7459899B2 (en) * | 2005-11-21 | 2008-12-02 | Thermo Fisher Scientific Inc. | Inductively-coupled RF power source |
| DE102010004649B4 (en) * | 2010-01-13 | 2013-11-07 | Inprocess Instruments Gmbh | A radio frequency (RF) power supply system and method for supplying a multipole mass spectrometer with the RF AC voltage used to generate a multipole field |
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2017
- 2017-05-08 CN CN201710318377.5A patent/CN107123585B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104597955A (en) * | 2015-01-08 | 2015-05-06 | 聚光科技(杭州)股份有限公司 | Adjusting device and adjusting method for two-way radio-frequency power supply |
| CN105932859A (en) * | 2016-05-19 | 2016-09-07 | 清华大学深圳研究生院 | Radio-frequency power supply for mass spectrometer |
| CN105895491A (en) * | 2016-06-12 | 2016-08-24 | 清华大学深圳研究生院 | Radio-frequency power supply for mass spectrometer and mass spectrometer |
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