CN107123585A - A kind of straight drive radio-frequency power supply - Google Patents
A kind of straight drive radio-frequency power supply Download PDFInfo
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- CN107123585A CN107123585A CN201710318377.5A CN201710318377A CN107123585A CN 107123585 A CN107123585 A CN 107123585A CN 201710318377 A CN201710318377 A CN 201710318377A CN 107123585 A CN107123585 A CN 107123585A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/022—Circuit arrangements, e.g. for generating deviation currents or voltages ; Components associated with high voltage supply
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
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Abstract
A kind of straight to drive radio-frequency power supply, including signal source, voltage modulate circuit and the three parallel high voltage amplifier circuits being sequentially connected, signal source provides that two-way is separate and low pressure sine wave signal RF and AC within the adjustable 5V of amplitude, frequency and phase；Voltage modulate circuit receives RF and AC and is handled to obtain RF ' signals, RF+AC+ coupled signals and the road signal of RF+AC coupled signals three and export respectively to three high voltage amplifier circuits to be handled, adjustable three road high-voltage signal within adjustable within bilateral differential output voltage 1000V and frequency 900kHz is obtained, load is can be supplied to and uses.Wherein high voltage amplifier circuit is set up by discrete component, including difference correction circuit, driving booster circuit, power amplification circuit and the feedback circuit being connected between the input of difference correction circuit and the output end of power amplification circuit being sequentially connected.The present invention has the advantages that cost is low, output voltage is high, frequency-adjustable and bandwidth.
Description
Technical field
The present invention relates to radio-frequency power supply, specifically a kind of high-frequency and high-voltage directly drives radio-frequency power supply.
Background technology
Radio-frequency power supply as mass spectrometric important composition part, be carried in rectilinear ion trap, level Four bar, multistage bar or from
On sub- funnel, for controlling motion of the ion in rectilinear ion trap, level Four bar, multistage bar or ion funnel.Radio-frequency power supply
Output voltage and operating frequency influences mass spectrograph can detect the scope of material, its stability and linear property influence mass spectrometric standard
True property and stability.Existing mass spectrograph mainly realizes that upper kilovolt high pressure is defeated with radio-frequency power supply by the way of coil resonance
Go out, circuit is only operable on resonant frequency point, cause frequency parameter not change, significantly limit the flexible of application mode
Property；It is right and coil resonance formula radio-frequency power supply causes load to export sine wave due to the part that load is resonant tank
The coupling of RF and AC under resonant excitation mode cause very big obstruction.
To overcome the drawbacks described above of coil resonance formula radio-frequency power supply, the conceptual design that someone passes through integrated device frequency exists
Continuously adjustable in the range of 0Hz~1MHz, the bilateral adjustable straight drive radio-frequency power supplies of differential output voltage 0V~600V, but it is made
Integrated device cost is very expensive, it is necessary to close to 5000 yuans of chip cost, and output voltage is still relatively low.
The content of the invention
It is a primary object of the present invention to set up the high non-coil resonance of a kind of low cost, output voltage by discrete component
Formula directly drives radio-frequency power supply, with solve it is above-mentioned it is existing it is straight drive present in radio-frequency power supply it is with high costs, output voltage is relatively low asks
Topic.
The present invention is as follows for the technical scheme proposed up to above-mentioned purpose：
A kind of straight drive radio-frequency power supply, including：
Signal source there is provided two-way is separate and the adjustable 5V of amplitude, frequency and phase within low pressure sine wave signal,
Respectively as RF signals and AC signals；
Voltage modulate circuit, is connected to the signal source, and RF signals and AC signals are received respectively by two input ports,
And difference output is carried out respectively to obtain the road signal of RF+, RF-, AC+ and AC- tetra-, following locate then is carried out to four road signal
Reason：RF+ signals are obtained into RF+ ' signals through inverting amplifier output, enter RF- signals and AC+ signals by anti-phase adder
Row addition obtains RF-AC+ coupled signals and is added RF- signals by anti-phase adder with AC- signals to obtain RF-AC- couplings
Signal is closed, respectively RF+ ' signals, RF-AC+ coupled signals and RF-AC- coupled signals is exported by three output ports；Or
Person carries out following handle to four road signal：RF- signals are obtained into RF- ' signals through inverting amplifier output, RF+ is believed
Number by anti-phase adder be added with AC+ signals obtaining RF+AC+ coupled signals and passing through RF+ and AC- signals anti-phase
Adder be added obtain RF+AC- coupled signals, by three output ports respectively by RF- ' signals, RF+AC+ coupled signals with
And the output of RF+AC- coupled signals；
Three identical high voltage amplifier circuits, each high voltage amplifier circuit includes difference correction circuit, the driving being sequentially connected
Booster circuit, power amplification circuit and it is connected between the input of difference correction circuit and the output end of power amplification circuit
Feedback circuit；Three high voltage amplifier circuits are connected respectively to three output ports of the voltage modulate circuit, with right
The output of voltage modulate circuit carries out following handle：
First pass through difference correction circuit and the feedback signal of the output of voltage modulate circuit and feedback circuit is subjected to differential ratio
Compared with the output after comparing is again through driving booster circuit to boost to form adjustable and frequency within bilateral differential output voltage 1000V
Adjustable high-voltage signal within 900kHz, the high-voltage signal is exported after carrying out Current amplifier through power amplification circuit again.
Above-mentioned technical proposal proposed by the present invention compared with prior art, has the advantages that：
1) circuit structure of whole radio-frequency power supply is compact, realizes that high voltage amplifier circuit is greatly reduced into using discrete component
This, it is only necessary to 200 yuan of chip cost；
2) due to not using coil coupled modes to realize, the conversion of form of energy is reduced, circuit anti-interference ability is strong；
3) high voltage amplifier circuit is realized by using discrete element so that the linear property of the radio-frequency power supply is high, can be right
The coupling waveform of unlike signal carries out Linear Amplifer in frequency band, and the office of sinusoidal signal can only be exported by having broken coil type radio-frequency power supply
It is sex-limited, couple the condition of providing in high-pressure side with RF signals for AC；
4) radio-frequency power supply possesses linear adjustable within very wide passband, 900kHz, when it is applied to mass spectrograph, opens up
The working method of RF signals in wide mass spectrograph ion trap, can use fixed frequency scan amplitude, jump frequency scan amplitude,
A variety of mass scanning methods such as fixed amplitude scan frequency；
5) also just because of realizing high voltage amplifier circuit using discrete element so that the power supply controllability is good, voltage
Output accuracy is high, and output signal total harmonic distortion is within 1%, and linearity is high, and the output modulation waveform linearity is
99.99%, full power bandwidth 900kHz, unilateral output can reach 900kHz frequencies full power bandwidth output 500Vpp, bilateral difference
Output is divided to can reach 1000V and adjustable.
Further, the signal source includes serial communication circuit, single chip machine controlling circuit, the DDS electricity being sequentially connected
Road and bandwidth-limited circuit；The control instruction of host computer is write to the monolithic of single chip machine controlling circuit by serial communication circuit
In machine, and by single-chip microcomputer into the DDS chips of DDS circuit write frequency control word so that DDS circuit output two-way amplitude,
Low pressure sine wave signal within frequency and the adjustable 5V of phase, and output RF letters after being filtered processing through bandwidth-limited circuit
Number and AC signals.In this preferred scheme, high-precision DDS chips so that amplitude, frequency, phase pass through upper computer software
It can directly adjust, and ensure in each external trigger cycle, initial phase is stable between different passages.
Further, the voltage modulate circuit includes two multipliers, respectively adjusts RF signals and AC signals and one
Signal multiplication processed, RF signals and AC signals after being modulated；Also, the output end of each multiplier is connected with one instead simultaneously
Phase amplifier and an in-phase amplifier, inverting amplifier and in-phase amplifier are used for the RF signals after modulation and AC signals point
Difference output is not carried out, so as to obtain four road signal.
Further, the driving booster circuit is realized by the common source amplifying circuit of NMOS FETs and boosted.
Further, the power amplification circuit is hindered by the source follower of NMOS FETs while realizing
Resistance is changed and power amplification.
Further, the difference correction circuit is integrated low-voltage operational amplifier.Integrated operational amplifier has good
Good driving force, switching rate is fast, and gain bandwidth product is big, beneficial to improvement wave distortion.
Further, the feedback circuit passing ratio resistance obtains the feedback signal of open loop amplification output, and by institute
Feedback signal is stated as one of input signal of the difference correction circuit, so that the high voltage amplifier circuit has stabilization
Closed-loop gain.
Brief description of the drawings
Fig. 1 is a kind of straight theory diagram for driving radio-frequency power supply of the specific embodiment of the invention；
Fig. 2 is the theory diagram of the signal source of the straight drive radio-frequency power supply of the specific embodiment of the invention；
Fig. 3 is the structure chart of the voltage modulate circuit of the straight drive radio-frequency power supply of the specific embodiment of the invention；
Fig. 4 is the structure chart of the high voltage amplifier circuit of the straight drive radio-frequency power supply of the specific embodiment of the invention；
Fig. 5 is that the straight drive radio-frequency power supply of the specific embodiment of the invention is applied to the connection diagram of ion trap.
Embodiment
The invention will be further described with specific embodiment below in conjunction with the accompanying drawings.
The embodiment of the present invention provides a kind of straight drive radio-frequency power supply, as shown in figure 1, the radio-frequency power supply is included successively
Signal source, voltage modulate circuit and the three parallel high voltage amplifier circuits of connection, it is negative that the output of radio-frequency power supply is connected to one
Carry, with the straight drive radio-frequency power supply needed for being provided to load.Wherein, signal source provides that two-way is separate and amplitude, frequency and phase
Low pressure sine wave signal within the adjustable 5V in position, respectively as RF signals and AC signals, with reference to Fig. 2, in a kind of specific reality
Apply in example, signal source includes serial communication circuit, single chip machine controlling circuit, DDS circuit and the bandpass filtering electricity being sequentially connected
Road；In the single-chip microcomputer that the control instruction of host computer is write to single chip machine controlling circuit by serial communication circuit, and pass through monolithic
Machine write frequency control word into the DDS chips of DDS circuit, so that DDS circuit output two-way amplitude, frequency and phase are adjustable
5V within low pressure sine wave signal RF and AC, and through bandwidth-limited circuit be filtered processing after output RF signals and AC believe
Number.
As shown in figure 1, voltage modulate circuit is connected to signal source, pass through two input ports (line with arrow in Fig. 1,2
Bar has signal transmission relation between only representing circuit, and not comprising the limitation of the bar number to data circuit) RF letters are received respectively
Number and AC signals, and respectively carry out difference output to obtain the road signal of RF+, RF-, AC+ and AC- tetra-, then to four road believe
Number carry out following handle：RF+ signals are obtained into RF+ ' signals through inverting amplifier output, pass through RF- signals and AC+ signals
Anti-phase adder be added obtaining RF-AC+ coupled signals and being added RF- signals by anti-phase adder with AC- signals
RF-AC- coupled signals are obtained, by three output ports respectively by RF+ ' signals, RF-AC+ coupled signals and RF-AC- couplings
Close signal output；Or following handle is carried out to four road signal：RF- signals are obtained into RF- ' through inverting amplifier output
Signal, RF+ signals and AC+ signals by anti-phase adder be added obtain RF+AC+ coupled signals and by RF+ and AC-
Signal is added by anti-phase adder and obtains RF+AC- coupled signals, by three output ports respectively by RF- ' signals, RF+AC
+ coupled signal and the output of RF+AC- coupled signals.
In a kind of preferred embodiment, voltage modulate circuit is realized using circuit as shown in Figure 3, as shown in figure 3,
Voltage modulate circuit includes two multipliers 11 and 12, and RF signals and AC signals are multiplied with modulated signal 21,22 respectively, obtains
RF signals and AC signals after modulation；Also, the output end of each multiplier is connected with an inverting amplifier and one simultaneously
(output end of multiplier 11 is connected with inverting amplifier 31 and in-phase amplifier 32 to in-phase amplifier；The output end of multiplier 21
It is connected with inverting amplifier 41 and in-phase amplifier 42), inverting amplifier and in-phase amplifier are used for the RF signals after modulation
Difference output is carried out respectively with AC signals, so as to obtain four road signal RF+, RF-, AC+ and AC-.
It is to be appreciated that the "+" and "-" after RF and AC do not represent the positive and negative of power supply, it is only intended to distinguish different
Signal, because RF and AC are originally AC signal (sinusoidal signals), in the absence of positive and negative point.
In a kind of specific embodiment, as shown in figure 3, the RF signals after modulation are mutually put by inverting amplifier 31 with same
RF- and RF+ are respectively obtained after big device 32, the AC signals after modulation are obtained respectively after inverting amplifier 41 and in-phase amplifier 42
To AC- and AC+, RF- is directly obtained into RF+ ' via the output of inverting amplifier 50, RF+ signals and AC- signals are added by anti-phase
Musical instruments used in a Buddhist or Taoist mass 51 be added obtaining RF-AC+ coupled signals, and RF+ signals are added with AC+ signals by anti-phase adder 52 and obtained
RF-AC- coupled signals, so that RF the and AC signals that signal source is produced obtain RF+ ' signals, RF-AC+ after voltage modulate circuit
Coupled signal and RF-AC- coupled signals, are exported to high voltage amplifier circuit by three output ports.Or, can also be by RF
+ RF- ' directly is obtained via the output of inverting amplifier 50, RF- signals are added with AC- signals by anti-phase adder 51
RF+AC+ coupled signals are obtained, RF- signals are added with AC+ signals by anti-phase adder 52 and obtain RF+AC- coupled signals,
So as to which RF the and AC signals that signal source is produced obtain RF- ' signals, RF+AC+ coupled signals and RF+ after voltage modulate circuit
AC- coupled signals.
Three high voltage amplifier circuits, the signal of three output ports of receiving voltage modulate circuit and are handled respectively.Such as
Shown in Fig. 4, each high voltage amplifier circuit includes the difference correction circuit 1, driving booster circuit 3, power amplification circuit 4 being sequentially connected
And it is connected to the feedback circuit 2 between the output end of the input of difference correction circuit 1 and power amplification circuit 4；It is three high
Pressure amplifying circuit is connected respectively to three output ports of the voltage modulate circuit, with the output to voltage modulate circuit
Carry out following handle：
First pass through difference correction circuit 1 and the feedback signal of the output of voltage modulate circuit and feedback circuit 2 is subjected to difference
Compare, the output after comparing is again through driving the boosting of booster circuit 3 to form adjustable and frequency within bilateral differential output voltage 1000V
Adjustable high-voltage signal within 900kHz, the high-voltage signal is exported to one after carrying out Current amplifier through power amplification circuit 4 again
Load.Load herein is, for example, mass spectrometric ion trap.
In a kind of specific embodiment, as shown in figure 4, difference correction circuit 1 can use integrated low-voltage operational amplifier
To realize；Drive booster circuit 3 to realize by the common source amplifying circuit of NMOS FETs to boost；Power amplification circuit 4 leads to
The source follower of NMOS FETs is crossed, while realizing impedance conversion and power amplification；The passing ratio resistance of feedback circuit 2
Obtain open loop amplification output feedback signal, and using the feedback signal as the difference correction circuit one of input
Signal, so that the high voltage amplifier circuit has stable closed-loop gain.The structure of high voltage amplifier circuit as shown in figure 4,
The output end of operational amplifier 100 is connected to NMOS FETs Q1 grid by a capacitor C1, and by resistance R1~
R5 connects to form driving booster circuit 3 according to the connected mode in such as Fig. 4；Another NMOS FETs Q2 grid is connected to Q1
Drain electrode, drain electrode the source electrode that Q1 drain electrode, source electrode are connected to Q1 by resistance R6, R5, high voltage amplifier circuit are connected to by R4
Final output exported from Q2 source electrode via a capacitor C2 to load.Meanwhile, feedback circuit is by using a proportion resistor
The small-signal within 5V is taken out from the output end decay of high voltage amplifier circuit, as an input signal of difference correction circuit,
Make whole high voltage amplifier circuit formation closed loop feedback system, with stable voltage amplification factor, improve control accuracy.
The foregoing straight drive radio-frequency power supply that the present invention is provided, using the teaching of the invention it is possible to provide it is adjustable within bilateral differential output voltage 1000V and
Adjustable high-voltage signal is used for load within frequency 900kHz.When this directly drive radio-frequency power supply be used for a mass spectrograph when, its with from
The connected mode of sub- trap is as shown in figure 5, wherein signal s1 represents that signal RF- ' or signal RF+ ' passes through high voltage amplifier processing of circuit
Output afterwards, signal s2 represents that RF+AC- coupled signals or RF-AC+ coupled signals are defeated after high voltage amplifier processing of circuit
Go out, signal s3 represents the output of RF+AC+ coupled signals or RF-AC- coupled signals after high voltage amplifier processing of circuit.
Above content is to combine specific preferred embodiment further description made for the present invention, it is impossible to assert
The specific implementation of the present invention is confined to these explanations.For those skilled in the art, do not taking off
On the premise of from present inventive concept, some equivalent substitutes or obvious modification can also be made, and performance or purposes are identical, all should
When being considered as belonging to protection scope of the present invention.
Claims (7)
1. a kind of straight drive radio-frequency power supply, including：
Signal source there is provided two-way is separate and the adjustable 5V of amplitude, frequency and phase within low pressure sine wave signal, respectively
It is used as RF signals and AC signals；
Voltage modulate circuit, is connected to the signal source, receives RF signals and AC signals respectively by two input ports, and divide
Not carry out difference output to obtain the road signal of RF+, RF-, AC+ and AC- tetra-, following handle then is carried out to four road signal：
RF- signals are obtained into RF+ ' signals through inverting amplifier output, carry out RF+ signals and AC- signals by anti-phase adder
Addition obtains RF-AC+ coupled signals and is added RF+ signals and AC+ signals by anti-phase adder obtaining RF-AC- and coupling
Signal, is respectively exported RF+ ' signals, RF-AC+ coupled signals and RF-AC- coupled signals by three output ports；Or
Following handle is carried out to four road signal：RF+ signals are obtained into RF- ' signals, by RF- signals through inverting amplifier output
By anti-phase adder be added with AC+ signals and obtain RF+AC- coupled signals and add RF- and AC- signals by anti-phase
Musical instruments used in a Buddhist or Taoist mass be added obtain RF+AC+ coupled signals, by three output ports respectively by RF- ' signals, RF+AC+ coupled signals and
RF+AC- coupled signals are exported；
Three high voltage amplifier circuits, each high voltage amplifier circuit includes the difference correction circuit, driving booster circuit, work(being sequentially connected
Rate amplifying circuit and the feedback circuit being connected between the input of difference correction circuit and the output end of power amplification circuit；
Three high voltage amplifier circuits are connected respectively to three output ports of the voltage modulate circuit, with to voltage modulate circuit
Output carry out following handle：
First pass through difference correction circuit and the feedback signal of the output of voltage modulate circuit and feedback circuit is subjected to differential comparison, than
Output after relatively again through drive booster circuit to boost to be formed adjustable within bilateral differential output voltage 1000V and frequency 900kHz with
Interior adjustable high-voltage signal, the high-voltage signal is exported after carrying out Current amplifier through power amplification circuit again.
2. straight drive radio-frequency power supply as claimed in claim 1, it is characterised in that：The serial ports that the signal source includes being sequentially connected leads to
Believe circuit, single chip machine controlling circuit, DDS circuit and bandwidth-limited circuit；By serial communication circuit by the control of host computer
In the single-chip microcomputer of instruction write-in single chip machine controlling circuit, and into the DDS chips of DDS circuit, write frequency is controlled by single-chip microcomputer
Word, so that low pressure sine wave signal within DDS circuit output two-way amplitude, frequency and the adjustable 5V of phase, and filtered through band logical
Wave circuit is filtered output RF signals and AC signals after processing.
3. straight drive radio-frequency power supply as claimed in claim 1, it is characterised in that：The voltage modulate circuit includes two multiplication
RF signals and AC signals, are multiplied by device with a modulated signal respectively, RF signals and AC signals after being modulated；Also, it is each
The output end of multiplier is connected with an inverting amplifier and an in-phase amplifier, inverting amplifier and in-phase amplifier simultaneously
For carrying out difference output respectively to the RF signals and AC signals after modulation, so as to obtain four road signal.
4. straight drive radio-frequency power supply as claimed in claim 1, it is characterised in that：The driving booster circuit passes through NMOS field-effects
The common source amplifying circuit of pipe realizes boosting.
5. straight drive radio-frequency power supply as claimed in claim 1, it is characterised in that：The power amplification circuit passes through NMOS field-effects
The source follower of pipe, while realizing impedance conversion and power amplification.
6. straight drive radio-frequency power supply as claimed in claim 1, it is characterised in that：The difference correction circuit is integrated low-voltage computing
Amplifier.
7. straight drive radio-frequency power supply as claimed in claim 1, it is characterised in that：The feedback circuit passing ratio resistance is obtained and opened
Ring amplification output feedback signal, and using the feedback signal as the difference correction circuit one of input signal,
So that the high voltage amplifier circuit has stable closed-loop gain.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710318377.5A CN107123585B (en) | 2017-05-08 | 2017-05-08 | A kind of straight drive radio-frequency power supply |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710318377.5A CN107123585B (en) | 2017-05-08 | 2017-05-08 | A kind of straight drive radio-frequency power supply |
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| Publication Number | Publication Date |
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| CN107123585A true CN107123585A (en) | 2017-09-01 |
| CN107123585B CN107123585B (en) | 2018-11-30 |
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| CN201710318377.5A Active CN107123585B (en) | 2017-05-08 | 2017-05-08 | A kind of straight drive radio-frequency power supply |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108390238A (en) * | 2018-01-29 | 2018-08-10 | 雄安华讯方舟科技有限公司 | Terahertz driving device |
| CN112509904A (en) * | 2020-11-30 | 2021-03-16 | 上海裕达实业有限公司 | Switchable digital ion trap mass spectrum radio frequency power supply system and control method thereof |
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| US20090058304A1 (en) * | 2005-11-21 | 2009-03-05 | Mattaboni Paul J | Inductively-Coupled RF Power Source |
| US20120286585A1 (en) * | 2010-01-13 | 2012-11-15 | Inprocess Instruments Gmbh | High-frequency (hf) voltage supply system and method for supplying a multipole mass spectrometer with the hf ac voltage used to generate a multipole field |
| CN104597955A (en) * | 2015-01-08 | 2015-05-06 | 聚光科技(杭州)股份有限公司 | Adjusting device and adjusting method for two-way radio-frequency power supply |
| CN105895491A (en) * | 2016-06-12 | 2016-08-24 | 清华大学深圳研究生院 | Radio-frequency power supply for mass spectrometer and mass spectrometer |
| CN105932859A (en) * | 2016-05-19 | 2016-09-07 | 清华大学深圳研究生院 | Radio-frequency power supply for mass spectrometer |
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| US20090058304A1 (en) * | 2005-11-21 | 2009-03-05 | Mattaboni Paul J | Inductively-Coupled RF Power Source |
| US20120286585A1 (en) * | 2010-01-13 | 2012-11-15 | Inprocess Instruments Gmbh | High-frequency (hf) voltage supply system and method for supplying a multipole mass spectrometer with the hf ac voltage used to generate a multipole field |
| CN104597955A (en) * | 2015-01-08 | 2015-05-06 | 聚光科技(杭州)股份有限公司 | Adjusting device and adjusting method for two-way radio-frequency power supply |
| CN105932859A (en) * | 2016-05-19 | 2016-09-07 | 清华大学深圳研究生院 | Radio-frequency power supply for mass spectrometer |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108390238A (en) * | 2018-01-29 | 2018-08-10 | 雄安华讯方舟科技有限公司 | Terahertz driving device |
| CN108390238B (en) * | 2018-01-29 | 2019-09-17 | 雄安华讯方舟科技有限公司 | Terahertz driving device |
| CN112509904A (en) * | 2020-11-30 | 2021-03-16 | 上海裕达实业有限公司 | Switchable digital ion trap mass spectrum radio frequency power supply system and control method thereof |
| CN112509904B (en) * | 2020-11-30 | 2024-05-03 | 上海裕达实业有限公司 | Switchable digital ion trap mass spectrum radio frequency power supply system and control method thereof |
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| Publication number | Publication date |
|---|---|
| CN107123585B (en) | 2018-11-30 |
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