CN107121900A - A kind of MicroLED screens stripper - Google Patents
A kind of MicroLED screens stripper Download PDFInfo
- Publication number
- CN107121900A CN107121900A CN201710354653.3A CN201710354653A CN107121900A CN 107121900 A CN107121900 A CN 107121900A CN 201710354653 A CN201710354653 A CN 201710354653A CN 107121900 A CN107121900 A CN 107121900A
- Authority
- CN
- China
- Prior art keywords
- micro led
- stripper
- ether
- hydroxide
- led screens
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/42—Stripping or agents therefor
- G03F7/422—Stripping or agents therefor using liquids only
- G03F7/425—Stripping or agents therefor using liquids only containing mineral alkaline compounds; containing organic basic compounds, e.g. quaternary ammonium compounds; containing heterocyclic basic compounds containing nitrogen
Abstract
The invention discloses a kind of Micro LED screens stripper, it is made up of the raw material of following mass fraction：Quaternary ammonium hydroxide 15 32%, alkoxy base metal salt 10 22%, organic amine 8 25%, surfactant 5 14%, epoxies organic solvent 20 40%, metal-chelator 5 9%, preservative 4 7% and water.Compared with prior art, stripper of the present invention is to peeling off of occurring that rotten photoresist can be effective in etching work procedure, and the inorganic material material of metal film, oxide-film for Micro LED screen glass substrates has extremely low corrosivity；The colour resist and protective layer of this strippings liquid energy at a lower temperature, in the short period on removal glass substrate optical filter, are not damaged, the glass substrate after being handled with stripper can be recycled to glass substrate simultaneously；The stripper peeling effect of the present invention is preferable, while having the security of height to environment and human body.
Description
Technical field
The present invention relates to stripper technical field, and in particular to a kind of Micro LED screens stripper.
Background technology
Generally include to carry out successively on the glass substrate in the photoetching technique of the production of Micro LED screen substrates：Set
The metal wiring formation process of metal or metal oxide layer；The process that photoresist layer is set；Turn on the photoresist
Write the exposure process of mask graph；The etching work procedure being etched according to figure to mould；And remove the stripping of photoresist
Process.Photo-mask process can be up to more than ten time in common manufacturing process.
Layer protective layer is formed with substrate on resist layer, stripping can not be also removed easily.Due to glass substrate cost
It is very high, if directly discarded can cause very big waste, therefore the film layer on bad colored filter substrate can all be peeled off
Fall, reuse, can be with cost-effective.But if film layer peel off it is unclean, or thoroughly to peel off the time needed very long,
Cost-effective effect can not just be played.
General stripper can include inorganic acid, organic acid, inorganic base or organic solvent, but, it is used as stripping
The active ingredient of agent, when using inorganic acid or inorganic base, or makes lower metal erosion, or with being harmful to lacking for human body
The operational difficulty such as point.Therefore usually using organic solvent.In current PDP panels manufacture using stripper be mainly containing
The stripper of the system of organic polar solvent, amine and water.But there is problems with these existing strippers：1st, work is produced
Skill is complicated.During lift-off processing is carried out, need to be rinsed respectively with organic solvent and water after photoresist is peeled off, increase
Plus the matting time, produce a large amount of waste liquid waste water；2nd, stripping performance is weak, influences big to wire corrosion；3rd, residue gold after cleaning
Belong to the quantity of ion beyond standard requirement, easily cause surface metal ion pollution.
The content of the invention
The present invention is intended to provide a kind of Micro LED screens stripper.
The present invention provides following technical scheme：
A kind of Micro LED screens stripper, it is made up of the raw material of following mass fraction：Quaternary ammonium hydroxide 15-
32%th, alkoxy base metal salt 10-22%, organic amine 8-25%, surfactant 5-14%, epoxies organic solvent 20-
40%th, metal-chelator 5-9%, preservative 4-7% and water.
The quaternary ammonium hydroxide structural formula is：
Described R1, R2 and R3 are selected from any one in C1-C5 alkyl and C1-C5 hydroxyalkyl.
The quaternary ammonium hydroxide is selected from TMAH, tetraethyl ammonium hydroxide, TPAOH, hydrogen
Aoxidize monomethyl dipropyl allyl-ammonium, the allyl ammonium of dimethyl one, hydroxide (1,2- dihydroxy ethyl) one
Allyl ammonium, the allyl ammonium of one ethyl of hydroxide monomethyl one, cetyltrimethylammonium hydroxide and benzyl three
One or more in ammonium hydroxide.
The alkoxy base metal salt includes the one or more in sodium alcoholate, alkoxy lithium, alkoxy potassium.
The surfactant is the one or more in APEO, polyethenoxy ether.
The epoxies organic solvent be oxirane, expoxy propane, 1,2- epoxy butanes, n-butyl glycidyl ether,
Isopropyl glycidyl ether, phenyl glycidyl ether, naphthyl glycidyl ether, allyl glycidyl ether, furfuryl shrink
Glycerin ether, ethylene glycol diglycidylether, 1,4- butanediol diglycidyl ethers, 1,6 hexanediol diglycidylether, isophthalic
Diphenol diglycidyl ether, bisphenol A diglycidyl ether, one kind or many of the propyl ether of glycerine three and pentaerythrite glycidol ether
Kind.
The metal-chelator is selected from ethylenediamine tetra-acetic acid, disodium EDTA, diethylenetriamines five
At least one of acetic acid, triethylenetetraaminehexaacetic acid and nitrilotriacetic acid.
The preservative is selected from fructose, glucose, xylitol, D-sorbite, 2 mercapto ethanol, catechol, nutgall
At least one of acid, malic acid and BTA.
The water is deionized water, is specially electron level deionized water, is at least 22 megaohms in 25 DEG C of resistivity.
Compared with prior art, the beneficial effects of the invention are as follows：Stripper of the present invention is to occurring what is gone bad in etching work procedure
Photoresist can be peeled off effectively, the inorganic material of metal film, oxide-film for Micro LED screen glass substrates
Material has extremely low corrosivity；Simultaneously this strippings liquid energy at a lower temperature, removal glass substrate optical filter in the short period
On colour resist and protective layer, glass substrate is not damaged, the glass substrate after being handled with stripper can be recycled；
The stripper peeling effect of the present invention is preferable, while having the security of height to environment and human body.
Embodiment
Below in conjunction with the embodiment of the present invention, the technical scheme in the embodiment of the present invention is clearly and completely described,
Obviously, described embodiment is only a part of embodiment of the invention, rather than whole embodiments.Based in the present invention
Embodiment, the every other embodiment that those of ordinary skill in the art are obtained under the premise of creative work is not made, all
Belong to the scope of protection of the invention.
A kind of Micro LED screens stripper of embodiment 1, it is made up of the raw material of following mass fraction：Quaternary amine hydroxide
Thing 15%, alkoxy base metal salt 10%, organic amine 8%, surfactant 5%, epoxies organic solvent 20%, metal-chelating
Agent 5%, preservative 4% and water.
The quaternary ammonium hydroxide structural formula is：
Described R1, R2 and R3 are selected from any one in C1-C5 alkyl and C1-C5 hydroxyalkyl.
The quaternary ammonium hydroxide is selected from TMAH, tetraethyl ammonium hydroxide, TPAOH, hydrogen
Aoxidize monomethyl dipropyl allyl-ammonium, the allyl ammonium of dimethyl one, hydroxide (1,2- dihydroxy ethyl) one
Allyl ammonium, the allyl ammonium of one ethyl of hydroxide monomethyl one, cetyltrimethylammonium hydroxide and benzyl three
One or more in ammonium hydroxide.
The alkoxy base metal salt includes the one or more in sodium alcoholate, alkoxy lithium, alkoxy potassium.
The surfactant is the one or more in APEO, polyethenoxy ether.
The epoxies organic solvent be oxirane, expoxy propane, 1,2- epoxy butanes, n-butyl glycidyl ether,
Isopropyl glycidyl ether, phenyl glycidyl ether, naphthyl glycidyl ether, allyl glycidyl ether, furfuryl shrink
Glycerin ether, ethylene glycol diglycidylether, 1,4- butanediol diglycidyl ethers, 1,6 hexanediol diglycidylether, isophthalic
Diphenol diglycidyl ether, bisphenol A diglycidyl ether, one kind or many of the propyl ether of glycerine three and pentaerythrite glycidol ether
Kind.
The metal-chelator is selected from ethylenediamine tetra-acetic acid, disodium EDTA, diethylenetriamines five
At least one of acetic acid, triethylenetetraaminehexaacetic acid and nitrilotriacetic acid.
The preservative is selected from fructose, glucose, xylitol, D-sorbite, 2 mercapto ethanol, catechol, nutgall
At least one of acid, malic acid and BTA.
The water is deionized water, is specially electron level deionized water, is at least 22 megaohms in 25 DEG C of resistivity.
A kind of Micro LED screens stripper of embodiment 2, it is made up of the raw material of following mass fraction：Quaternary amine hydroxide
Thing 32%, alkoxy base metal salt 22%, organic amine 25%, surfactant 14%, epoxies organic solvent 40%, metal chelating
Mixture 9%, preservative 7% and water.
The quaternary ammonium hydroxide structural formula is：
Described R1, R2 and R3 are selected from any one in C1-C5 alkyl and C1-C5 hydroxyalkyl.
The quaternary ammonium hydroxide is selected from TMAH, tetraethyl ammonium hydroxide, TPAOH, hydrogen
Aoxidize monomethyl dipropyl allyl-ammonium, the allyl ammonium of dimethyl one, hydroxide (1,2- dihydroxy ethyl) one
Allyl ammonium, the allyl ammonium of one ethyl of hydroxide monomethyl one, cetyltrimethylammonium hydroxide and benzyl three
One or more in ammonium hydroxide.
The alkoxy base metal salt includes the one or more in sodium alcoholate, alkoxy lithium, alkoxy potassium.
The surfactant is the one or more in APEO, polyethenoxy ether.
The epoxies organic solvent be oxirane, expoxy propane, 1,2- epoxy butanes, n-butyl glycidyl ether,
Isopropyl glycidyl ether, phenyl glycidyl ether, naphthyl glycidyl ether, allyl glycidyl ether, furfuryl shrink
Glycerin ether, ethylene glycol diglycidylether, 1,4- butanediol diglycidyl ethers, 1,6 hexanediol diglycidylether, isophthalic
Diphenol diglycidyl ether, bisphenol A diglycidyl ether, one kind or many of the propyl ether of glycerine three and pentaerythrite glycidol ether
Kind.
The metal-chelator is selected from ethylenediamine tetra-acetic acid, disodium EDTA, diethylenetriamines five
At least one of acetic acid, triethylenetetraaminehexaacetic acid and nitrilotriacetic acid.
The preservative is selected from fructose, glucose, xylitol, D-sorbite, 2 mercapto ethanol, catechol, nutgall
At least one of acid, malic acid and BTA.
The water is deionized water, is specially electron level deionized water, is at least 22 megaohms in 25 DEG C of resistivity.
A kind of Micro LED screens stripper of embodiment 3, it is made up of the raw material of following mass fraction：Quaternary amine hydroxide
Thing 24%, alkoxy base metal salt 16%, organic amine 15%, surfactant 9%, epoxies organic solvent 30%, metal chelating
Mixture 7%, preservative 6% and water.
The quaternary ammonium hydroxide structural formula is：
Described R1, R2 and R3 are selected from any one in C1-C5 alkyl and C1-C5 hydroxyalkyl.
The quaternary ammonium hydroxide is selected from TMAH, tetraethyl ammonium hydroxide, TPAOH, hydrogen
Aoxidize monomethyl dipropyl allyl-ammonium, the allyl ammonium of dimethyl one, hydroxide (1,2- dihydroxy ethyl) one
Allyl ammonium, the allyl ammonium of one ethyl of hydroxide monomethyl one, cetyltrimethylammonium hydroxide and benzyl three
One or more in ammonium hydroxide.
The alkoxy base metal salt includes the one or more in sodium alcoholate, alkoxy lithium, alkoxy potassium.
The surfactant is the one or more in APEO, polyethenoxy ether.
The epoxies organic solvent be oxirane, expoxy propane, 1,2- epoxy butanes, n-butyl glycidyl ether,
Isopropyl glycidyl ether, phenyl glycidyl ether, naphthyl glycidyl ether, allyl glycidyl ether, furfuryl shrink
Glycerin ether, ethylene glycol diglycidylether, 1,4- butanediol diglycidyl ethers, 1,6 hexanediol diglycidylether, isophthalic
Diphenol diglycidyl ether, bisphenol A diglycidyl ether, one kind or many of the propyl ether of glycerine three and pentaerythrite glycidol ether
Kind.
The metal-chelator is selected from ethylenediamine tetra-acetic acid, disodium EDTA, diethylenetriamines five
At least one of acetic acid, triethylenetetraaminehexaacetic acid and nitrilotriacetic acid.
The preservative is selected from fructose, glucose, xylitol, D-sorbite, 2 mercapto ethanol, catechol, nutgall
At least one of acid, malic acid and BTA.
The water is deionized water, is specially electron level deionized water, is at least 22 megaohms in 25 DEG C of resistivity.
It is obvious to a person skilled in the art that the invention is not restricted to the details of the one exemplary embodiment, Er Qie
In the case of without departing substantially from spirit or essential attributes of the invention, the present invention can be realized in other specific forms.Therefore, no matter
From the point of view of which point, embodiment all should be regarded as exemplary, and be nonrestrictive, the scope of the present invention is by appended power
Profit is required rather than the explanation is limited, it is intended that all in the implication and scope of the equivalency of claim by falling
Change is included in the present invention.Although not each moreover, it will be appreciated that the present specification is described in terms of embodiments
Embodiment is only comprising an independent technical scheme, and this narrating mode of specification is only this area for clarity
Technical staff should be using specification as an entirety, and the technical solutions in the various embodiments may also be suitably combined, forms this
Art personnel may be appreciated other embodiment.
Claims (9)
1. a kind of Micro LED screens stripper, it is characterised in that：It is made up of the raw material of following mass fraction：Quaternary amine hydrogen-oxygen
Compound 15-32%, alkoxy base metal salt 10-22%, organic amine 8-25%, surfactant 5-14%, epoxies are organic molten
Agent 20-40%, metal-chelator 5-9%, preservative 4-7% and water.
2. a kind of Micro LED screens stripper according to claim 1, it is characterised in that：The quaternary ammonium hydroxide knot
Structure formula is：
Described R1, R2 and R3 are selected from any one in C1-C5 alkyl and C1-C5 hydroxyalkyl.
3. a kind of Micro LED screens stripper according to claim 1, it is characterised in that：The quaternary ammonium hydroxide is
Selected from TMAH, tetraethyl ammonium hydroxide, TPAOH, hydroxide monomethyl dipropyl allyl-ammonium,
The allyl ammonium of dimethyl one, the allyl ammonium of hydroxide (1,2- dihydroxy ethyl) one, hydroxide monomethyl
The allyl ammonium of one ethyl one, cetyltrimethylammonium hydroxide and one kind or many in benzyltrimethylammonium hydroxide
Kind.
4. a kind of Micro LED screens stripper according to claim 1, it is characterised in that：The alkoxy base metal salt
Including the one or more in sodium alcoholate, alkoxy lithium, alkoxy potassium.
5. a kind of Micro LED screens stripper according to claim 1, it is characterised in that：The surfactant is poly-
One or more in oxygen vinethene, polyethenoxy ether.
6. a kind of Micro LED screens stripper according to claim 1, it is characterised in that：The epoxies organic solvent
It is sweet for oxirane, expoxy propane, 1,2- epoxy butanes, n-butyl glycidyl ether, isopropyl glycidyl ether, phenyl glycidyl
Oily ether, naphthyl glycidyl ether, allyl glycidyl ether, furfuryl glycidol ether, ethylene glycol diglycidylether, 1,
4- butanediol diglycidyl ethers, 1,6 hexanediol diglycidylether, resorcinolformaldehyde resin, bisphenol-A two shrink
The one or more of glycerin ether, the propyl ether of glycerine three and pentaerythrite glycidol ether.
7. a kind of Micro LED screens stripper according to claim 1, it is characterised in that：The metal-chelator
Selected from ethylenediamine tetra-acetic acid, disodium EDTA, diethylene-triamine pentaacetic acid, triethylenetetraaminehexaacetic acid and nitrogen
At least one of base triacetic acid.
8. a kind of Micro LED screens stripper according to claim 1, it is characterised in that：The preservative be selected from fructose,
In glucose, xylitol, D-sorbite, 2 mercapto ethanol, catechol, gallic acid, malic acid and BTA at least
It is a kind of.
9. a kind of Micro LED screens stripper according to claim 1, it is characterised in that：The water is deionized water, tool
Body is electron level deionized water, is at least 22 megaohms in 25 DEG C of resistivity.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710354653.3A CN107121900A (en) | 2017-05-19 | 2017-05-19 | A kind of MicroLED screens stripper |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710354653.3A CN107121900A (en) | 2017-05-19 | 2017-05-19 | A kind of MicroLED screens stripper |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107121900A true CN107121900A (en) | 2017-09-01 |
Family
ID=59728085
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710354653.3A Pending CN107121900A (en) | 2017-05-19 | 2017-05-19 | A kind of MicroLED screens stripper |
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| Country | Link |
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| CN (1) | CN107121900A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107561878A (en) * | 2017-09-14 | 2018-01-09 | 合肥惠科金扬科技有限公司 | A kind of display screen photoresist lift off liquid |
| CN113296374A (en) * | 2021-05-25 | 2021-08-24 | 深圳深骏微电子材料有限公司 | Reworking liquid for color filter |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102200700A (en) * | 2011-06-08 | 2011-09-28 | 绵阳艾萨斯电子材料有限公司 | Stripping liquid as well as preparation method and application |
| CN103019051A (en) * | 2012-12-07 | 2013-04-03 | 京东方科技集团股份有限公司 | Resist stripping solution |
| CN104635438A (en) * | 2013-11-12 | 2015-05-20 | 安集微电子科技(上海)有限公司 | Photoresist stripping liquid |
-
2017
- 2017-05-19 CN CN201710354653.3A patent/CN107121900A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102200700A (en) * | 2011-06-08 | 2011-09-28 | 绵阳艾萨斯电子材料有限公司 | Stripping liquid as well as preparation method and application |
| CN103019051A (en) * | 2012-12-07 | 2013-04-03 | 京东方科技集团股份有限公司 | Resist stripping solution |
| CN104635438A (en) * | 2013-11-12 | 2015-05-20 | 安集微电子科技(上海)有限公司 | Photoresist stripping liquid |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107561878A (en) * | 2017-09-14 | 2018-01-09 | 合肥惠科金扬科技有限公司 | A kind of display screen photoresist lift off liquid |
| CN113296374A (en) * | 2021-05-25 | 2021-08-24 | 深圳深骏微电子材料有限公司 | Reworking liquid for color filter |
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Application publication date: 20170901 |
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