CN107121748B - Micro-flexible structure macro-micro combined fine tuning device for large-caliber optical element - Google Patents
Micro-flexible structure macro-micro combined fine tuning device for large-caliber optical element Download PDFInfo
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- CN107121748B CN107121748B CN201710367072.3A CN201710367072A CN107121748B CN 107121748 B CN107121748 B CN 107121748B CN 201710367072 A CN201710367072 A CN 201710367072A CN 107121748 B CN107121748 B CN 107121748B
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- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
Abstract
The invention discloses a micro-flexible structure macro-micro combined fine tuning device of a large-caliber optical element, which comprises a base plate, an optical element, a cover plate screw and a micro-flexible fine tuning module, wherein the base plate is arranged on the base plate; the optical element is installed through the contact of the front of the optical element and three supporting surfaces in the base plate, the cover plate fixes the optical element in the bottom frame through cover plate screws, the micro-flexibility fine adjustment module is installed on the cover plate, the micro-flexibility fine adjustment module adjusts the surface type of the optical element in a macro-movement adjustment and micro-movement adjustment combined mode, a spring is used as a main part of macro-movement adjustment to achieve primary adjustment of the surface type of the optical element, and a micro-flexibility structural member is used as a main part of micro-movement adjustment to achieve accurate adjustment of the surface type of the optical element. The micro-flexible structural member can amplify the adjustment precision of motion input, so that the output adjustment precision of the micro-flexible structural member is greatly improved, the macro-movement adjustment process and the micro-movement adjustment process are not mutually influenced, and the micro-movement adjustment method has great engineering practical significance.
Description
Technical Field
The invention relates to a micro-flexible structure macro-micro combined fine tuning device of a large-caliber optical element, belonging to the technical field of mechanical design and mechanical analysis.
Background
The high-power laser source is one of the most important tools used in the energy research process, and the large-caliber optical element is an essential basic element in the high-power laser source. The area quality of the optical element is directly related to the beam quality so as to be high or low in energy output efficiency of the laser light source. Generally, the surface quality of the optical element itself can be ensured by the advanced high-precision processing technology. However, in the practical use process, the surface shape of the optical element is often difficult to predict due to the mutual influence of the gravity of the optical element and the acting force of the mounting and clamping system, so that the energy output efficiency of the laser light source is seriously influenced. However, the optical element has a high elastic property and can be precisely adjusted by a fine adjustment method of the surface type. Therefore, it is needed to design a micro-flexible macro-micro combination fine tuning device for large-caliber optical elements.
Disclosure of Invention
In view of this, the invention provides a micro-flexible structure macro-micro combined fine tuning device for large-caliber optical elements, which can realize the high-resolution micro-force tuning of the large-caliber optical elements by combining macro-dynamic tuning and micro-dynamic tuning by adopting a simple and easy structure.
A micro-flexible structure macro-micro combined fine tuning device of a large-caliber optical element comprises a base plate, an optical element, a cover plate screw and a micro-flexible fine tuning module;
the optical element is installed through the contact of the front of the optical element and three supporting surfaces in the base plate, the cover plate fixes the optical element inside the bottom frame through cover plate screws, the micro-flexibility fine adjustment module is installed on the cover plate, the micro-flexibility fine adjustment module adjusts the surface type of the optical element in a macro-movement adjustment and micro-movement adjustment combined mode, a spring is used as a main part of macro-movement adjustment to achieve preliminary adjustment of the surface type of the optical element, and a micro-flexibility structural member is used as a main part of micro-movement adjustment to achieve accurate adjustment of the surface type of the optical element.
Further, the substrate is a rectangular frame part, the cross section of each side of the substrate is L-letter-shaped, one side of the outer boundary of the frame is a substrate connecting surface, two cover plate mounting holes are uniformly arranged on each of four sides of the frame on the substrate connecting surface, a substrate stress surface is arranged on a groove formed by the L-shaped cross section, three bearing surfaces are arranged on the substrate stress surface in an equilateral triangle manner, one bearing surface is positioned at the middle point of one side of the substrate, and the other two bearing surfaces are uniformly arranged on the opposite sides of the substrate; the optical element is a square sheet part, wherein one large plane is the front surface, and the other large plane is the back surface; the cover plate is a four-grid-shaped part, two cover plate connecting holes are respectively distributed at the positions, corresponding to the cover plate mounting holes on the substrate, on the four sides of the cover plate, nine through holes are uniformly distributed in a 3X 3 position relation on the cover plate, and four fine adjustment module mounting holes are distributed around each through hole.
Further, the micro-flexible fine tuning module comprises a fine tuning module box body, a cross elastic piece, a micro force sensor, a flexible fine tuning piece, a micro adjusting screw, a micro adjusting spring, a micro adjusting nut, a macro adjusting adapter block, a macro adjusting screw, a macro adjusting spring and a macro adjusting nut;
one end face of the fine adjustment module box body is provided with a through hole, the inner surface of the fine adjustment module box body is provided with a flexible fine adjustment piece guide boss and a macro-movement adjustment conversion block guide boss, one side face of the fine adjustment module box body is provided with a micro-movement adjustment screw through hole, and the other end face of the fine adjustment module box body is provided with a macro-movement adjustment screw through hole;
the cross elastic piece is a cylindrical part, one end face of the cross elastic piece is an optical element contact face, two ports are cut off on the outer cylindrical surface along the orthogonal direction to form a flexible cross shaft, and the other end face of the cross elastic piece is provided with a micro force sensor connecting hole;
the micro force sensor is a rotary part with a raised middle part, one side is a connecting stud, and the other side is a mounting stud;
the flexible fine tuning piece is of an M-shaped block structure, a circular micro-force sensor mounting hole is formed in the top end of the flexible fine tuning piece, a square flexible fine tuning piece guide hole is formed in the middle of the block structure, two side parts of the block structure are bilaterally symmetrical with each other through the middle part, a gap which is gradually widened from the top end is formed between the two side parts and the opposite surface of the middle part, one bottom of the two side parts is provided with a micro-motion adjusting screw through hole, the other bottom is provided with a micro-motion adjusting screw mounting hole, and two sides of the bottom are respectively provided with a macro-motion adjusting switching block guide lug;
the macro-movement adjusting and switching block is an n-shaped block-mounted part, two sides of the inner surface of the macro-movement adjusting and switching block are respectively provided with a macro-movement adjusting and switching block guide groove, and the end surface of the macro-movement adjusting and switching block is provided with a micro-movement adjusting nut mounting hole;
the contact surface of the optical element on the cross elastic piece is contacted with the reverse surface of the optical element; the micro force sensor connecting hole on the cross elastic piece is fixedly connected with the connecting stud on the micro force sensor, the mounting stud on the micro force sensor is fixedly connected with the micro force sensor mounting hole on the flexible fine adjustment piece, and the flexible fine adjustment piece guiding hole on the flexible fine adjustment piece is in sliding fit with the flexible fine adjustment piece guiding boss on the fine adjustment module box body; the macro-movement adjusting switching block guide lug on the flexible fine adjusting piece is in sliding fit with the macro-movement adjusting switching block guide groove on the macro-movement adjusting switching block; the macro movement adjusting transfer block is in sliding fit with a guide boss of the macro movement adjusting transfer block on the fine adjustment module box body; the micro-motion adjusting nut is fixedly connected with a micro-motion adjusting screw mounting hole on the flexible fine adjusting piece, and the micro-motion adjusting screw penetrates through a micro-motion adjusting screw passing hole on the flexible fine adjusting piece and the micro-motion adjusting spring to be in threaded fit with the micro-motion adjusting nut; the macro-movement adjusting nut is fixedly connected with the micro-movement adjusting nut mounting hole on the macro-movement adjusting adapter block, and the macro-movement adjusting screw penetrates through the macro-movement adjusting spring to be in threaded connection with the macro-movement adjusting nut.
The beneficial effects are that:
1. the invention adopts a mode of combining macro-motion adjustment and micro-motion adjustment to adjust the surface type of the optical element, adopts a spring as a main part of macro-motion adjustment to realize the preliminary adjustment of the surface type of the optical element, and adopts a micro-flexible structural member as a main part of micro-motion adjustment to realize the accurate adjustment of the surface type of the optical element. The macro-micro combination mode can reduce the stroke of precise adjustment, and further improve the precision of the precise adjustment process.
2. The micro-flexible structural member adopted in the precise adjustment process can amplify the adjustment precision of the fine adjustment screw of the motion input member through reasonable structural design, so that the output adjustment precision of the micro-flexible structural member is greatly improved. The macro-adjustment process and the micro-adjustment process are not affected by each other through reasonable connector design. The surface type adjusting process is in a real-time monitoring state through the introduction of the force sensor.
3. The cross elastic piece is cut off to form a cross rotating shaft structure, and the flexible cross shaft can adaptively rotate according to the surface condition of the optical element in the compression process, so that the flexible contact piece and the optical element are completely and normally compressed, the contact surface is in surface contact, and the stress concentration on the surface of the optical element caused by the compression device can be effectively avoided. Because of the point contact transmission link in the motion execution part, the torque in the compaction process is not transmitted to the optical element, and only forward pressure is applied to the optical element.
Drawings
FIG. 1 is a schematic diagram of the overall structure of the present invention;
FIG. 2 is an exploded view of the overall structure of the present invention;
FIG. 3 is an exploded view of a micro-flexible fine tuning module structure according to the present invention;
FIG. 4 is a three-dimensional view of a micro-flexible fine tuning module structure according to the present invention;
FIG. 5 is a cross-sectional view of a micro-flexible fine tuning module structure according to the present invention;
FIG. 6 is a schematic structural view of the flexible fine tuning element of the present invention.
Wherein 1, a substrate, 2, an optical element, 3, a cover plate, 4, a cover plate screw, 5, a micro-flexible fine adjustment module, 6, a cover plate mounting hole, 7, a substrate connecting surface, 8, a bearing surface, 9, a cover plate connecting hole, 10, a fine adjustment module mounting hole, 11, a via hole, 12, a back surface, 13, a substrate stress surface, 14, a front surface, 15, a right angle block connecting hole, 16, a fine adjustment module mounting screw, 17, a via hole, 18, a right angle block mounting hole, 19, a fine adjustment module cover plate mounting hole, 20, a fine adjustment module box, 21, a flexible fine adjustment guide boss, 22, a micro adjustment screw passing hole, 23, a macro adjustment transfer block guide boss, 24, a macro adjustment screw passing hole, 25, a micro adjustment screw, 26, a micro adjustment spring, 27, a micro adjustment screw passing hole, 28, a macro adjustment transfer block guide groove, 29, a micro-adjusting screw mounting hole, 30, a micro-adjusting nut mounting hole, 31, a macro-adjusting nut, 32, a macro-adjusting spring, 33, a macro-adjusting screw, 34, a macro-adjusting adapter block, 35, a fine-adjusting module cover plate connecting hole, 36, a fine-adjusting module cover plate mounting screw, 37, a fine-adjusting module cover plate, 38, a right-angle block mounting screw, 39, a right-angle block mounting surface, 40, a macro-adjusting adapter block guide lug, 41, a micro-adjusting nut, 42, a flexible fine-adjusting piece guide hole, 43, a flexible fine-adjusting piece, 44, a micro-sensor mounting hole, 45, a mounting stud, 46, a micro-sensor, 47, a connecting stud, 48, a micro-sensor connecting hole, 49, a cross elastic piece, 50, a flexible cross axle, 51, an optical element contact surface, 52, a fine-adjusting module connecting hole, 53 and a right-angle block.
Detailed Description
The invention will now be described in detail by way of example with reference to the accompanying drawings.
As shown in fig. 1, the invention provides a micro-flexible structure macro-micro combination fine adjustment device of a large-caliber optical element, which comprises a base plate 1, an optical element 2, a cover plate 3, eight cover plate screws 4 and nine micro-flexible fine adjustment modules 5.
As shown in fig. 2, the base plate 1 is a rectangular frame-like part, the cross section of each side of the rectangular frame-like part is L letter-shaped, one side of the outer boundary of the frame is a base plate connecting surface 7, two cover plate mounting holes 6 are uniformly arranged on each of four sides of the frame on the base plate connecting surface 7, a base plate stress surface 13 is arranged on a groove formed by the L-shaped cross section, three bearing surfaces 8 are arranged on the base plate stress surface 13 in an equilateral triangle, one bearing surface 8 is positioned at the midpoint of one side of the base plate 1, and the other two bearing surfaces 8 are uniformly arranged on the opposite side of the base plate 1. The optical element 2 is a square sheet-like part, one large plane of which is the front face 14 and the other large plane is the back face 12. The cover plate 3 is a four-grid-shaped part, two cover plate connecting holes 9 are respectively distributed at the positions corresponding to the cover plate mounting holes 6 on the base plate 1 on the four sides of the four sides, nine through holes 11 are uniformly distributed on the cover plate 3 in a 3 x 3 position relation, and four fine adjustment module mounting holes 10 are distributed around each through hole 11.
As shown in fig. 3, a micro-flexible fine adjustment module 5 includes two right angle blocks 53, four fine adjustment module mounting screws 16, four right angle block mounting screws 38, a fine adjustment module housing 20, a cross elastic member 49, a micro-sensor 46, a flexible fine adjustment member 43, a micro-adjustment screw 25, a micro-adjustment spring 26, a micro-adjustment nut 41, a macro-adjustment adapter block 34, a macro-adjustment screw 33, a macro-adjustment spring 32, a macro-adjustment nut 31, a fine adjustment module cover 37 and four fine adjustment module cover mounting screws 36.
The right-angle block 53 is a block-like part with an L-shaped section, one surface of the block-like part is provided with two right-angle block connecting holes 15, the other surface of the block-like part is provided with a right-angle block mounting surface 39, and the block-like part is provided with two fine-tuning module connecting holes 52. Two right-angle block mounting holes 18 are respectively arranged at corresponding positions on the surfaces of the fine adjustment module box body 20 and the fine adjustment module cover plate 37.
One end face of the fine adjustment module box body 20 is provided with a through hole 17, four corner positions on the opening face of the through hole are provided with four fine adjustment module cover plate mounting holes 19, the inner surface of the fine adjustment module box body is provided with a flexible fine adjustment piece guide boss 21 and a macro adjustment conversion block guide boss 23, one side face of the fine adjustment module box body is provided with a micro adjustment screw passing hole 22, and the other end face of the fine adjustment module box body is provided with a macro adjustment screw passing hole 24.
The cross elastic member 49 is a cylindrical part, one end face of the cross elastic member is an optical element contact surface 51, two openings are cut out of the outer cylindrical surface along the orthogonal direction, the left material forms a flexible cross shaft 50, and the other end face of the cross elastic member 49 is provided with a micro force sensor connecting hole 48.
The micro force sensor 46 is a rotary part with a raised middle part, one side is a connecting stud 47, and the other side is a mounting stud 45.
The flexible fine adjustment piece 43 is a block-type part which is in an M shape and is centrosymmetric in two directions, a round micro-force sensor mounting hole 44 is formed in the top end of the block-type part, a square flexible fine adjustment piece guide hole 42 is formed in the middle part of the block-type structure, two side parts of the block-type structure are bilaterally symmetrical with each other through the middle part, a gap which is gradually widened from the top end is formed between the two side parts and the opposite surface of the middle part, one bottom of the two side parts is provided with a micro-motion adjusting screw passing hole 27, the other bottom of the two side parts is provided with a micro-motion adjusting screw mounting hole 29, and two sides of the bottom are respectively provided with a macro-motion adjusting conversion block guide lug 40;
the macro motion adjusting and switching block 34 is a block type part with an approximate n-shaped appearance, two sides of the inner surface of the block type part are respectively provided with a macro motion adjusting and switching block guide groove 28, and the end surface of the block type part is provided with a micro motion adjusting nut mounting hole 30. The fine adjustment module cover plate is a rectangular plate-shaped part, and four corners of the surface of the fine adjustment module cover plate are respectively provided with a fine adjustment module cover plate connecting hole 35.
The optical element 2 is mounted with its front face 14 in contact with the three support faces 8 of the base plate 1. The cover plate 3 is connected and installed by adopting eight cover plate screws 4 through eight cover plate connecting holes 9 on the cover plate 3 and eight cover plate installing holes 6 on the base plate 1. The 9 micro-flexible fine adjustment modules 5 are respectively connected and installed with the four fine adjustment module installation holes 10 on the cover plate 3 through the right angle block connection holes 15 on the two right angle blocks 53 by adopting four fine adjustment module installation screws 16. The two right-angle blocks 53 are respectively connected with the two right-angle block mounting holes 18 on the fine adjustment module box 20 and the fine adjustment module cover plate 37 by two right-angle block mounting screws 38. The optical element contact surface 51 of the cross elastic member 49 is mounted in contact with the opposite surface 12 of the optical element 2. As shown in fig. 4 and 5, the micro force sensor connecting hole 48 of the cross elastic member 49 is connected with the connecting stud 47 of the micro force sensor 46. The mounting stud 45 on the micro force sensor 46 is connected with the micro force sensor mounting hole 44 on the flexible fine tuning piece 43. The flexible fine adjustment member guide hole 42 on the flexible fine adjustment member 43 is in contact with the flexible fine adjustment member guide boss 21 on the fine adjustment module case 20. The macro movement adjusting adapter block guide convex blocks 40 on the flexible fine adjusting piece 43 are in contact installation with the macro movement adjusting adapter block guide grooves 28 on the macro movement adjusting adapter blocks 34; the macro motion adjusting and switching block 34 is in contact with the macro motion adjusting and switching block guide boss 23 on the fine tuning module box 20. The micro-adjusting nut 41 is connected with the micro-adjusting screw mounting hole 29 on the flexible fine adjusting piece 43. The micro-adjusting screw 25 passes through the micro-adjusting screw through hole 27 and the micro-adjusting spring 26 to be connected with the micro-adjusting nut 41. The macro adjusting nut 31 is connected with the micro adjusting nut mounting hole 30 on the macro adjusting adapter block 34. The macro adjustment screw 33 is connected to the macro adjustment nut 31 through the macro adjustment spring 32. The fine adjustment module cover plate 37 is connected and installed with the fine adjustment module cover plate installation hole 19 on the fine adjustment module box 20 through four fine adjustment module cover plate connection holes 35 by adopting four fine adjustment module cover plate installation screws 36.
Working principle: when macro adjustment is performed, the macro adjustment nut 31 is rotated, and the macro adjustment nut 31 pushes the macro adjustment conversion block 34 and the flexible fine adjustment piece 43 to horizontally apply positive pressure to the optical element 2 under the guidance of the flexible fine adjustment piece guide boss 21; when micro adjustment is required, the micro adjustment screw 25 is turned, and the two side parts on the flexible fine adjustment member 43 move in opposite directions or in opposite directions along the macro adjustment adapter guide groove 28 on the macro adjustment adapter 34 under the action of the micro adjustment screw 25, and as a gap with a gradually wider width is formed between the two side parts and the middle part on the flexible fine adjustment member 43, the two side parts are horizontally displaced while being vertically displaced, and the horizontal pressure is transmitted to the optical element 2 through the cross elastic member 49. The flexible fine adjustment member 43 can amplify the adjustment accuracy of the motion input member micro-motion adjusting screw 25 through reasonable structural design, so that the output adjustment accuracy of the flexible fine adjustment member 43 is greatly improved. The macro-adjustment process and the micro-adjustment process are not affected by the reasonable macro-adjustment adapter block 34 design. The introduction of the micro force sensor 46 enables the surface type adjustment process to be in a real-time monitoring state.
In summary, the above embodiments are only preferred embodiments of the present invention, and are not intended to limit the scope of the present invention. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (2)
1. The micro-flexible structure macro-micro combined fine tuning device of the large-caliber optical element is characterized by comprising a base plate, an optical element, a cover plate screw and a micro-flexible fine tuning module;
the micro-flexible fine adjustment module is arranged on the cover plate, and is used for adjusting the surface shape of the optical element in a mode of combining macro-movement adjustment and micro-movement adjustment, the spring is used as a main part of macro-movement adjustment to realize the preliminary adjustment of the surface shape of the optical element, and the micro-flexible structural member is used as a main part of micro-movement adjustment to realize the accurate adjustment of the surface shape of the optical element;
the micro-flexible fine tuning module comprises a fine tuning module box body, a cross elastic piece, a micro force sensor, a flexible fine tuning piece and a micro adjusting screw, wherein the micro adjusting spring, the micro adjusting nut, the macro adjusting switching block, the macro adjusting screw, the macro adjusting spring and the macro adjusting nut;
one end face of the fine adjustment module box body is provided with a through hole, the inner surface of the fine adjustment module box body is provided with a flexible fine adjustment piece guide boss and a macro-movement adjustment conversion block guide boss, one side face of the fine adjustment module box body is provided with a micro-movement adjustment screw through hole, and the other end face of the fine adjustment module box body is provided with a macro-movement adjustment screw through hole;
the cross elastic piece is a cylindrical part, one end face of the cross elastic piece is an optical element contact face, two ports are cut off on the outer cylindrical surface along the orthogonal direction to form a flexible cross shaft, and the other end face of the cross elastic piece is provided with a micro force sensor connecting hole;
the micro force sensor is a rotary part with a raised middle part, one side is a connecting stud, and the other side is a mounting stud;
the flexible fine tuning piece is of an M-shaped block structure, a circular micro-force sensor mounting hole is formed in the top end of the flexible fine tuning piece, a square flexible fine tuning piece guide hole is formed in the middle of the block structure, two side parts of the block structure are bilaterally symmetrical with each other through the middle part, a gap which is gradually widened from the top end is formed between the two side parts and the opposite surface of the middle part, one bottom of the two side parts is provided with a micro-motion adjusting screw through hole, the other bottom is provided with a micro-motion adjusting screw mounting hole, and two sides of the bottom are respectively provided with a macro-motion adjusting switching block guide lug;
the macro-movement adjusting and switching block is an n-shaped block-mounted part, two sides of the inner surface of the macro-movement adjusting and switching block are respectively provided with a macro-movement adjusting and switching block guide groove, and the end surface of the macro-movement adjusting and switching block is provided with a micro-movement adjusting nut mounting hole;
the contact surface of the optical element on the cross elastic piece is contacted with the reverse surface of the optical element; the micro force sensor connecting hole on the cross elastic piece is fixedly connected with the connecting stud on the micro force sensor, the mounting stud on the micro force sensor is fixedly connected with the micro force sensor mounting hole on the flexible fine adjustment piece, and the flexible fine adjustment piece guiding hole on the flexible fine adjustment piece is in sliding fit with the flexible fine adjustment piece guiding boss on the fine adjustment module box body; the macro-movement adjusting switching block guide lug on the flexible fine adjusting piece is in sliding fit with the macro-movement adjusting switching block guide groove on the macro-movement adjusting switching block; the macro movement adjusting transfer block is in sliding fit with a guide boss of the macro movement adjusting transfer block on the fine adjustment module box body; the micro-motion adjusting nut is fixedly connected with a micro-motion adjusting screw mounting hole on the flexible fine adjusting piece, and the micro-motion adjusting screw penetrates through a micro-motion adjusting screw passing hole on the flexible fine adjusting piece and the micro-motion adjusting spring to be in threaded fit with the micro-motion adjusting nut; the macro-movement adjusting nut is fixedly connected with a micro-movement adjusting nut mounting hole on the macro-movement adjusting adapter block, and the macro-movement adjusting screw penetrates through the macro-movement adjusting spring to be in threaded connection with the macro-movement adjusting nut;
the micro-flexibility fine adjustment module further comprises two right-angle blocks, wherein each right-angle block is a block part with an L-shaped section, and connecting holes are formed in two surfaces of each right-angle block; the micro-flexibility fine adjustment module is connected and installed with the installation holes on the cover plate through the connection holes on the two right-angle blocks by adopting screws.
2. The micro-flexible structure macro-micro combination fine tuning device of the large-caliber optical element as claimed in claim 1, wherein the substrate is a rectangular frame-like part, the cross section of each side of the rectangular frame-like part is L-letter-shaped, one side of the outer boundary of the frame is a substrate connecting surface, two cover plate mounting holes are uniformly arranged on each of four sides of the frame on the substrate connecting surface, a substrate stress surface is arranged on a groove formed by the L-letter-shaped cross section, three bearing surfaces are arranged on the substrate stress surface in an equilateral triangle, one bearing surface is positioned at the midpoint of one side of the substrate, and the other two bearing surfaces are uniformly arranged on the opposite sides of one side of the substrate; the optical element is a square sheet part, wherein one large plane is the front surface, and the other large plane is the back surface; the cover plate is a four-grid-shaped part, two cover plate connecting holes are respectively distributed at the positions, corresponding to the cover plate mounting holes on the substrate, on the four sides of the cover plate, nine through holes are uniformly distributed in a 3X 3 position relation on the cover plate, and four fine adjustment module mounting holes are distributed around each through hole.
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| CN201710367072.3A CN107121748B (en) | 2017-05-23 | 2017-05-23 | Micro-flexible structure macro-micro combined fine tuning device for large-caliber optical element |
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| CN201710367072.3A CN107121748B (en) | 2017-05-23 | 2017-05-23 | Micro-flexible structure macro-micro combined fine tuning device for large-caliber optical element |
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| CN103472559B (en) * | 2013-09-25 | 2015-06-10 | 中国科学院长春光学精密机械与物理研究所 | Axial macro-micro adjusting device for optical element in photoetching projection objective lens system |
| CN205539657U (en) * | 2016-01-21 | 2016-08-31 | 清华大学 | Precision assembly structure of heavy -calibre speculum for inertial confinement fusion |
| CN207181780U (en) * | 2017-05-23 | 2018-04-03 | 中国工程物理研究院激光聚变研究中心 | A kind of micro- flexible structure grand micro- combination adjuster of optical elements of large caliber |
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