CN107121073B - A kind of high-precision Three Degree Of Freedom method for real-time measurement and device based on laser interferometer - Google Patents
A kind of high-precision Three Degree Of Freedom method for real-time measurement and device based on laser interferometer Download PDFInfo
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- CN107121073B CN107121073B CN201710432061.9A CN201710432061A CN107121073B CN 107121073 B CN107121073 B CN 107121073B CN 201710432061 A CN201710432061 A CN 201710432061A CN 107121073 B CN107121073 B CN 107121073B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
Abstract
The present invention provides a kind of high-precision Three Degree Of Freedom method for real-time measurement and device based on laser interferometer solves the problems, such as the real-time measurement of the pitch angle of moving object, roll angle and axial displacement three degree of freedom.The device includes high-precision laser interfeerometry ranging instrument, external reflectance prism of corner cube, plane mirror, shutter and control and data processing system.Utilize three points of laser interference range finder, external reflectance prism of corner cube and shutter measurement moving object difference coordinate, it recycles the location information of measurement three obtained range information and three coordinates to calculate the changes in coordinates of three points in moving object, pitching, roll angle and the axial displacement of target is finally calculated using the method for construction ideal plane provided by the invention.The method of the present invention has the characteristics that precision is high, structure is simple, data processing amount is small and real-time is good.
Description
Technical field
The invention belongs to field of precision measurement, and in particular to a kind of high-precision Three Degree Of Freedom based on laser interferometer is real-time
The method and device of measurement.
Background technique
Measurement is all scientific researches and industrial basis, in fields of measurement, distance, displacement, angle and angle position
Shifting is fundamental measurement physical quantity.With the development of technology, there are various measurement methods, in terms of high-acruracy survey,
For optical means with that can trace to the source and non-contacting advantage, time-of-flight method and laser interference ranging are common linear measure longimetry hands
Section, autocollimation method, laser interferance method, loop laser method and internal reflection method are common angle-measuring methods, these methods generally use
In the measurement of single one physical amount.With the development of technology, single one physical measurement is no longer satisfied scientific research and industry is raw
The demand of production, this requires the abilities that there is measuring instrument multiple degrees of freedom to measure simultaneously.
In multivariant measurement method, various dimensions measurement is generally implemented in combination with using multiple sensors and measurement method,
Such measuring system is very complicated and has an adverse effect due to increasing measuring device to measurement target, and measurement result is caused to be missed
Poor source increases.With the development of computer, laser speckle interference measuring, digital hologram measurement and computer vision are in multiple degrees of freedom
Fields of measurement starts to occur, but this method based on image procossing need to handle a large amount of image information and cannot high speed it is real
When measure, and its measurement accuracy is limited to the Pixel size of imaging sensor.
In view of the deficiencies of the prior art, high-precision range information can be obtained using the method for laser interferometry, to obtain
More accurate coordinate points information is obtained, realizes that an interferometer is used for the purpose of multimetering using multiple reflection face prism；In conjunction with
The motion information of target is converted to the rotation between plane normal vector and the translation of plane, to obtain by ideal plane structured approach
Obtain high-precision three-degree-of-freedom motion information.This method has the advantage that structure is simple and data operation quantity is small, but in other texts
The method was not yet used in offering.
Summary of the invention
The present invention devises a kind of dry based on laser for structure is complicated in the prior art and the not high deficiency of measurement accuracy
The high-precision Three Degree Of Freedom measurement method and device of interferometer, with precision is high, structure is simple, data processing amount is small and real-time is good
The characteristics of.
A kind of the technical solution adopted by the present invention are as follows: dress of the high-precision Three Degree Of Freedom real-time measurement based on laser interferometer
It sets, comprising: high precision laser range finder, external reflectance prism of corner cube, right angle roof prism, shutter, control and data processing system,
The transmission direction control of light, shutter control signal interface, signal transmission system and mechanism shell；High-precision laser in measuring device
Rangefinder and external reflectance prism of corner cube are to be co-axially mounted, wherein the mirror surface of external reflectance prism of corner cube successively with right angle roof prism
Crestal line is parallel and keeps the incident light of right angle roof prism and reflected light orthogonal；Three right angle ridges in same plane
It is fixed on mechanism shell between prism with the position two-by-two at a distance of 120 °；Control and processing system reception are surveyed by high-precision laser
The range information d that distance meter is surveyed1、d2And d3, operation is carried out to it obtains three-degree-of-freedom motion information, while control and processing system
System issues control instruction and controls fast door state completion measurement.
Wherein, external reflectance prism of corner cube will be divided into the three-beam propagated along different directions along the collimated light beam of axis, this three
120 ° and perpendicular to axis each other of the direction of propagation of Shu Guang；External reflectance prism of corner cube combines three positions, 120 ° of right angle room each other
Ridge prism realizes three different location point distance d1、d2And d3Measurement.
In addition pitching, the angular displacement of rolling and axial piston displacement are realized using the method for construction ideal plane while surveyed
Amount, specific measurement method the following steps are included:
1, the normal of reference planes is determined according to the position of three plane mirrors；
2, the normal of object under test reflecting surface is calculated according to the range information of measurement；
3, moving object is solved in the amount of exercise of pitch angle, roll angle and axial displacement using coordinate transformation relation.
The present invention compared with the prior art the advantages of be:
1. the invention proposes the control for realizing beam direction using multi-panel reflection-type prism (such as external reflectance prism of corner cube),
It solves the problems, such as that multiple interferometers is needed to carry out multimetering in the prior art, so that measuring device is simple and compact for structure.
2. the method proposed by the present invention using construction ideal plane realizes pitching, the angular displacement of rolling and axial piston position
It moves while measuring.
3. the method for the present invention has the characteristics that precision is high, structure is simple, data processing amount is small and real-time is good.
Detailed description of the invention
Fig. 1 is apparatus of the present invention structure chart；
Fig. 2 is measuring method flow chart of the present invention；
Fig. 3 is angle displacement measurement error curve diagram；
Fig. 4 is displacement measurement error curve diagram；
Appended drawing reference meaning in figure are as follows: 1 is high-precision laser interfeerometry ranging instrument, and 2 be external reflectance prism of corner cube, and 3 be right angle
Roof prism, 4 be shutter, and 5 be control and data processing system, and 6 control for the transmission direction of light, and 7 connect for shutter control signal
Mouthful, 8 be signal transmission system, and 9 be mechanism shell.
Specific embodiment
It is clear to be more clear the object, technical solutions and advantages of the present invention, specific implementation example is once combined, in conjunction with
The present invention is further described for attached drawing.
High-precision Three Degree Of Freedom measuring device of Fig. 1 introduction based on laser interferometer is combined first.Measuring device it is main
Component has at high-precision laser interfeerometry ranging instrument 1, external reflectance prism of corner cube 2, right angle roof prism 3, shutter 4, control and data
Reason system 5, the transmission direction of light control 6, shutter control signal interface 7, signal transmission system 8 and mechanism shell 9；Measuring device
Middle high precision laser range finder 1 and external reflectance prism of corner cube 2 are to be co-axially mounted, wherein the mirror surface of external reflectance prism of corner cube successively with
The crestal line of right angle roof prism 3 is parallel and keeps the incident light of right angle roof prism and reflected light orthogonal；In same plane
It is fixed on mechanism shell between three interior right angle roof prisms 3 with the position two-by-two at a distance of 120 °；External reflectance prism of corner cube
The distance between axis and reflecting mirror are set as 81.65mm；Control and data processing system 5 are received by high precision laser range finder 1
The range information d surveyed1、d2And d3, operation is carried out to it obtains three-degree-of-freedom motion information, while control and data processing system
System 5 issues control instruction and controls fast door state completion measurement.
In conjunction with Fig. 2, the present invention is based on the Three Degree Of Freedom measurement method of laser interferometer, steps are as follows:
Step 1), the specific size according to measuring device calculate the center position coordinates A of three plane mirrors0(x1,
y1,z1)、B0(x2,y2,z2)、C0(x3,y3,z3), and saved as reference data.According to device design parameter and assume to survey
Device is measured in the first quartile positive direction of three Cartesian coordinates, the special coordinates for obtaining plane mirror center is A0
(100,0,0)、B0(0,100,0)、C0(0,0,100), not Dui Zhun three secondary mirrors to measure range information d1、d2And d3。
Step 2) substitutes into d1、d2And d3Calculate the coordinate A (x of three points in target face1,y1,z1)、B(x2,y2,z2)、C
(x3,y3,z3), two not conllinear vectors in target face are determined according to 3 coordinates of A, B, CWithBy followingTable
Current goal plane normal is obtained up to formula
Step 3) repeats step 1 and step 2, obtains post exercise objective plane normal
Step 4), according to coordinate conversion relationThe rotation angle of both direction distinguishes P and R, then both direction is all
It deposits when rotated, transformation matrix T are as follows:
It is calculated:
Wherein,
The angular displacement P and R that step 5), basis are found out are updated in former coordinate data and obtain only by rotation without work
Fill in mobile dbjective state coordinate A1 (x1,y1,z1)、B1(x2,y2,z2)、C1(x3,y3,z3), and calculate corresponding front and rear coordinate point
Distance | A1-A |, | B1-B | and | C1-C | and their mean value, the mobile d of piston is replaced with the range difference approximation of three points.
Step 6), by A (x1,y1,z1)、B(x2,y2,z2)、C(x3,y3,z3) store away primary plane as next wheel measurement
Data, according to proceeding measurement d in step 1)1、d2And d3, and repeat the row measurement of step 2) step 6).
Certainly in this example, the installation requirement for externally reflecting prism of corner cube, interferometer and plane mirror is stringent, if
In installation there are angular error in the case where measurement result can be impacted, therefore to control installation error in certain range
It is interior to guarantee measurement accuracy.The Computer Simulation of Fig. 3 and Fig. 4 can be seen that in the case where operating distance is the configuration of 800mm
0.01 ° of angle displacement measurement error and piston displacement error is respectively 10-6° and 10-14mm。
Although the illustrative specific embodiment of the present invention is described above, in order to the technology people of this technology neck
Member understands the present invention, it should be apparent that scope of protection of the present invention is not limited thereto, especially external reflectance type pyramid, algorithm
Process and optical path on-off system shutter, any people for being familiar with the technology is in disclosed technical scope, it will be appreciated that thinks
To transform or replace and be encompassed by within the scope of the present invention includes.
Claims (4)
1. a kind of high-precision Three Degree Of Freedom real-time measurement apparatus based on laser interferometer, it is characterised in that: swash including high-precision
Optar (1), external reflectance prism of corner cube (2), right angle roof prism (3), shutter (4), control and data processing system (5),
Transmission direction control (6), shutter control signal interface (7), signal transmission system (8) and the mechanism shell (9) of light；Measuring device
Middle high precision laser range finder (1) and external reflectance prism of corner cube (2) are to be co-axially mounted, wherein the mirror surface of external reflectance prism of corner cube according to
It is secondary parallel with the crestal line of right angle roof prism (3) and keep the incident light of right angle roof prism and reflected light orthogonal；In same
It is fixed on mechanism shell between three right angle roof prisms (3) in one plane with the position two-by-two at a distance of 120 °；Control and
Data processing system (5) receives the range information d surveyed by high precision laser range finder (1)1、d2And d3, operation is carried out to it and is obtained
To three-degree-of-freedom motion information, while control and data processing system (5) issue control instruction control shutter on off operating mode and complete
Measurement.
2. the high-precision Three Degree Of Freedom real-time measurement apparatus based on laser interferometer according to claim 1, it is characterised in that:
External reflectance prism of corner cube (2) will be divided into the three-beam propagated along different directions, the propagation of this three-beam along the collimated light beam of axis
120 ° and perpendicular to axis each other of direction；External reflectance prism of corner cube (2) combines three positions, 120 ° of right angle roof prism each other
Realize three different location point distance d1、d2And d3Measurement.
3. a kind of high-precision Three Degree Of Freedom method for real-time measurement based on laser interferometer, sharp using being based on described in claim 1
The high-precision Three Degree Of Freedom real-time measurement apparatus of optical interferometer, it is characterised in that: the measurement method the following steps are included:
Step 1), the specific size according to measuring device calculate the center position coordinates A of three secondary mirrors0(x1,y1,z1)、
B0(x2,y2,z2)、C0(x3,y3,z3), control and data processing system (5) issue control instruction and successively control the logical of three shutters
It is disconnected, so that three-beam passes sequentially through shutter and measures measurement range information d1、d2And d3；
Step 2) substitutes into d1、d2And d3Calculate the coordinate A (x of three points in target face1,y1,z1)、B(x2,y2,z2)、C(x3,
y3,z3), two not conllinear vectors in target face are determined according to 3 coordinates of A, B, CWithBy followingExpression formula
Obtain current goal plane normal
Step 3) repeats step 1) and step 2), obtains post exercise objective plane normal
Step 4), according to coordinate conversion relationThe rotation angle of both direction distinguishes P and R, then both direction all exists
When rotation, transformation matrix T are as follows:
It is calculated:
Wherein,
The angular displacement P and R that step 5), basis are found out are updated in former coordinate data to obtain and only move by rotation without piston
Dynamic dbjective state coordinate A1 (x1,y1,z1)、B1(x2,y2,z2)、C1(x3,y3,z3), and calculate corresponding front and rear coordinate point distance |
A1-A |, | B1-B | and | C1-C | and their mean value, the mobile d of piston is replaced with the range difference approximation of three points；
Step 6), by A (x1,y1,z1)、B(x2,y2,z2)、C(x3,y3,z3) store away primary plane number as next wheel measurement
According to according to proceeding measurement d in step 1)1、d2And d3, and repeat step 2)-step 6) and measure.
4. the high-precision Three Degree Of Freedom method for real-time measurement based on laser interferometer according to claim 3, it is characterised in that:
An ideal plane is determined by three points, resolves the positional relationship between the ideal face in front and back to obtain target in pitching, rolling
Angular displacement and axial piston displacement movement.
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| CN109059777B (en) * | 2018-08-08 | 2019-10-29 | 中国十七冶集团有限公司 | A kind of method of fully-automatic laser interference observation |
| CN109373906B (en) * | 2018-09-05 | 2020-07-28 | 三英精控（天津）仪器设备有限公司 | Method for simultaneously measuring distance, pitch and yaw |
| CN110455277B (en) * | 2019-08-19 | 2023-04-07 | 哈尔滨工业大学 | High-precision attitude measurement device and method based on data fusion of Internet of things |
| CN113028987A (en) * | 2021-03-03 | 2021-06-25 | 中国科学院光电技术研究所 | High-precision six-degree-of-freedom measuring method and device based on laser range finder |
| CN113390337A (en) * | 2021-06-03 | 2021-09-14 | 合肥工业大学 | X-Y-theta three-degree-of-freedom measuring method based on field separation |
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| CN102252634B (en) * | 2011-06-16 | 2012-11-14 | 中国科学技术大学 | Laser multiple degrees of freedom precision measurement system based on telescope system |
| CN104142123B (en) * | 2013-05-08 | 2017-04-05 | 上海微电子装备有限公司 | It is applied to the Three Degree Of Freedom laser measurement system of plant equipment geometric error measurement |
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