CN107105568A - A kind of cydariform rotation electrode - Google Patents
A kind of cydariform rotation electrode Download PDFInfo
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- CN107105568A CN107105568A CN201710492089.1A CN201710492089A CN107105568A CN 107105568 A CN107105568 A CN 107105568A CN 201710492089 A CN201710492089 A CN 201710492089A CN 107105568 A CN107105568 A CN 107105568A
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 6
- 238000003780 insertion Methods 0.000 claims abstract description 5
- 230000037431 insertion Effects 0.000 claims abstract description 5
- 239000000498 cooling water Substances 0.000 claims description 20
- 239000002184 metal Substances 0.000 claims description 6
- 229910052751 metal Inorganic materials 0.000 claims description 6
- 230000005611 electricity Effects 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 10
- 238000002679 ablation Methods 0.000 abstract description 7
- 210000002381 plasma Anatomy 0.000 description 31
- 239000007789 gas Substances 0.000 description 14
- 239000000126 substance Substances 0.000 description 14
- 230000000505 pernicious effect Effects 0.000 description 9
- 108091006146 Channels Proteins 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000010891 electric arc Methods 0.000 description 4
- 239000007921 spray Substances 0.000 description 3
- 239000012141 concentrate Substances 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 102000010637 Aquaporins Human genes 0.000 description 1
- 108010063290 Aquaporins Proteins 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000010494 dissociation reaction Methods 0.000 description 1
- 230000005593 dissociations Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 238000002309 gasification Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000005433 ionosphere Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000002086 nanomaterial Substances 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 238000007750 plasma spraying Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
- H05H1/28—Cooling arrangements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/32—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by electrical effects other than those provided for in group B01D61/00
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
- H05H1/32—Plasma torches using an arc
- H05H1/34—Details, e.g. electrodes, nozzles
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
- H05H1/32—Plasma torches using an arc
- H05H1/34—Details, e.g. electrodes, nozzles
- H05H1/3436—Hollow cathodes with internal coolant flow
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2259/00—Type of treatment
- B01D2259/80—Employing electric, magnetic, electromagnetic or wave energy, or particle radiation
- B01D2259/818—Employing electrical discharges or the generation of a plasma
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Plasma Technology (AREA)
Abstract
A kind of cydariform rotation electrode, it is related to plasma apparatus, it is made up of cydariform electrode and hollow linking rotating shaft, cydariform electrode is made up of upper convergence part, drum body portion and lower convergence part, there is bearing mouthful in the interior space insertion of upper convergence part, drum body portion and lower convergence part, upper convergence part, water-cooling-sprayer is extend into the cavity in bulging body portion, spray-hole on water-cooling-sprayer is towards the inner side wall body in drum body portion, and water return outlet is arranged at the cavity bottom roused in body portion；Hollow linking rotating shaft is made up of adapter, driven swing pinion and rotating shaft head, and adapter is arranged on hollow linking rotating shaft in the way of being embedded into lower convergence part the bottom of cydariform electrode, and the interior space of hollow linking rotating shaft constitutes backwater channel.The present invention makes to constitute discharge face in turn on 360 degree of ring surfaces of cydariform electrode, is cooled down in turn on 360 degree of ring surfaces of cydariform electrode while realizing, is avoided or slowing down cathode ablation, the service life for extending negative electrode so as to realize, improves production efficiency and reduction production cost.
Description
Technical field
The present invention relates to plasma apparatus, a kind of arc plasma device is especially related to.
Background technology
Currently, plasma technology has been widely used, industrially applied to plasma ignition, plasma spraying, gold
Category is smelted, heating plasma manufactures nano material, cutting, domestic garbage gasification processing, chemical industry tail gas harmless treatment etc..Deng from
The processing mode of daughter and general mode are made a world of difference, and plasma is the one kind formed under ionosphere or electric discharge phenomena
State, will generate excited atom along with electric discharge phenomena, excite molecule, dissociation atom, free atomic group, atom or molecule
The activity chemistry thing of cluster ion and they with being reacted caused by other chemicals collisions.In plasma generator,
Discharge process causes work gas molecule to lose outer-shell electron and form ionic condition, produces high temperature through mutually collision, temperature can
Up to more than tens of thousands of degree, processed chemical industry pernicious gas by HTHP plasma attack when, its molecule, atom will
Reconfigure and generate new material, so that harmful substance is changed into innocuous substance.
In plasma apparatus, negative electrode is pole body structure, because the effect of negative electrode is launching electronics, is produced on negative electrode
Plasma arc arc root extreme temperatures, therefore, negative electrode be easy to it is ablated and cause damage, not only influence production, and
Increase production cost.It is always the problem that this area research staff does not solve to avoid cathode burning corrosion, extension negative electrode service life.
Research and develop it is a kind of it is rational in infrastructure, avoid cathode burning corrosion, realize extension negative electrode service life be this area research staff
Task, it is the target that this area research staff is pursued to improve the efficiency of plasma device, reduce power consumption.
The content of the invention
, should as negative electrode in arc plasma device it is an object of the invention to provide a kind of electrode rational in infrastructure
With, realize avoid or slowing down cathode ablation, extend negative electrode service life target, and be adapted to processing chemical industry pernicious gas or
Applied in the device for being pyrolyzed purposes, improve production efficiency and reduction production cost.
A kind of cydariform rotation electrode of the present invention, including water-cooling-sprayer and swing pinion, it is characterized in that cydariform electric rotating
Pole is made up of cydariform electrode 1 and hollow linking rotating shaft 2, wherein, cydariform electrode 1 is by upper convergence part 1-5, drum body portion 1-1 and downlink
Socket part 1-4 constitutes hollow structure, and drum body portion 1-1 is between upper convergence part 1-5 and lower convergence part 1-4, upper convergence part 1-5, drum
Body portion 1-1 and lower convergence part 1-4 interior space insertion, when it is implemented, upper convergence part 1-5, drum body portion 1-1 and lower convergence part 1-
4 are integrated；There is bearing mouthful 1-6 in upper convergence part 1-5, water-cooling-sprayer 3 is extend into bulging body portion 1-1 cavity, cold
But the spray-hole 3-1 on sprinkler head 3 is towards drum body portion 1-1 inner side wall body, and water return outlet 1- is arranged at the cavity bottom roused in body portion 1-1
3, during work, cooling water carries out washing away for spray mode to drum body portion 1-1 inner side wall body, makes cold water stream that electrode be produced immediately
Heat remove, in the case of electrode rotary, electrode is effectively cooled down；It is hollow linking rotating shaft 2 by adapter 2-1, from
Dynamic swing pinion 2-4 and rotating shaft head 2-2 is constituted, and driven swing pinion 2-4 is between adapter 2-1 and rotating shaft head 2-2,
When it is implemented, adapter 2-1, driven swing pinion 2-4 and rotating shaft head 2-2 are integrated；Adapter 2-1 is with insertion
Hollow linking rotating shaft 2 is arranged on to the mode in lower convergence part 1-4 the bottom of cydariform electrode 1, the interior sky of hollow linking rotating shaft 2
Between constitute backwater channel 2-3.The present invention have in the device of cydariform rotation electrode supporter 8, lower bearing 7, support member 10 and on
Bearing 5, the rotating shaft head 2-2 of cydariform rotation electrode is arranged on supporter 8 by lower bearing 7, there is backwater cavity 8- in supporter 8
Cavity in 1, drum body portion 1-1 is communicated to the backwater cavity 8- in supporter 8 by the backwater channel 2-3 in hollow linking rotating shaft 2
1, backwater cavity 8-1 have backwater interface 8-3 to pick out；Support member 10 is made up of supported rod erecting 10-2 and support arm 10-5, in support
There are support shaft 10-3, support shaft 10-3 to be connected by the upper convergence part 1-5 of upper bearing (metal) 5 and cydariform rotation electrode on armed lever 10-5
Connect；Water-cooling-sprayer 3 is arranged on support shaft 10-3, the cooling-water duct in support arm 10-5 and support shaft 10-3, cooling
Aquaporin is communicated to water-cooling-sprayer 3, and cooling-water duct has cooling water connector 10-4 accesses；In the device of cydariform rotation electrode
There is active rotation gear 11, active rotation gear 11 is engaged with the hollow driven swing pinion 2-4 for being connected rotating shaft 2, actively
Swing pinion 11 is driven by motor to be rotated.When it is implemented, negative electrode application of the cydariform rotation electrode as plasma device, work
When making, motor drives active rotation gear 11 to rotate, and active rotation gear 11 engages driven swing pinion 2-4 and rotated, from
And drive cydariform electrode 1 to rotate, make to constitute discharge face in turn on 360 degree of ring surfaces of cydariform electrode 1, meanwhile, cooling water is to drum
Body portion 1-1 inner side wall body is sprayed, and is realized and is cooled down in turn on 360 degree of ring surfaces of cydariform electrode 1, thus realize avoid or
Slowing down cathode ablation, the target for extending negative electrode service life.
Of the present invention " " cydariform " of cydariform electrode 1 " is the shape at spherosome stage casing position, or for stringcourse circumferentially
The circle drum shape outwards smoothly protruded.
In the present invention, water-cooling-sprayer 3 is circle pipe structure, and the lower end closed of pipe body, spray-hole divides in multi-layer annular
Cloth is on the wall body of pipe body.During work, the spray-hole that multi-layer annular is distributed on the pipe body wall body of water-cooling-sprayer 3 is cooling water
Uniform spray is on the wall body of the inner side of cydariform electrode 1.
When the present invention is handling chemical industry pernicious gas or is being pyrolyzed the applications of purposes, in the device of cydariform rotation electrode
In have an anode, cydariform rotation electrode is negative electrode, and anode is relative with the side of cydariform electrode 1, during work, in cydariform electrode 1 and positive
Plasma arc is produced in the air line distance of pole, the arc root of plasma arc is raw on the discharge face of cydariform electrode 1 respectively
Generated into on the discharge face of anode, therefore, generate the arc root of negative electrode, cydariform electricity in cydariform electrode 1 on the wall body of loin
When pole 1 rotates, the arc root of negative electrode is generated in turn in cydariform electrode 1 on 360 degree of ring surfaces of loin, makes the arc root of negative electrode permanent
Surely anode is pointed to；There are annular convex surface 1-8, annular convex surface 1-8 to be the straight structure of vertical line in the middle loin of cydariform electrode 1；When
When the middle loin of cydariform electrode 1 has annular convex surface 1-8, the arc root of negative electrode is generated on annular convex surface 1-8.
Cathodic discharge face is invariable in general plasma device, and the Cathode arc root of plasma arc is concentrated on
One position is continuously generated, therefore, and this position is easily ablated, is quickly damaged negative electrode.The present invention uses cydariform electric rotating
Pole makes the arc root for producing negative electrode on 360 degree of ring surfaces of cydariform electrode 1 in turn, then cooled down in turn as negative electrode application,
The Cathode arc root of plasma arc will not be made to concentrate on a position to continuously generate, so that avoid or slowing down cathode is ablated,
Overcome the shortcoming that negative electrode is present in general plasma device.
The beneficial effects of the invention are as follows：Applied using cydariform rotation electrode as negative electrode in arc plasma device,
Make to constitute discharge face in turn on 360 degree of ring surfaces of cydariform electrode 1, meanwhile, cooling water is carried out to drum body portion 1-1 inner side wall body
Spray, realizes and is cooled down in turn on 360 degree of ring surfaces of cydariform electrode 1, is avoided or slowing down cathode ablation, extension negative electrode so as to realize
Service life, also, the present invention be adapted to processing chemical industry pernicious gas or be pyrolyzed purposes device in apply, improve production effect
Rate and reduction production cost.
Brief description of the drawings
Fig. 1 is a kind of structure chart of cydariform rotation electrode of the present invention.
Fig. 2 is Fig. 1 A-A profiles.
Fig. 3 be the present invention cydariform rotation electrode processing chemical industry pernicious gas or be pyrolyzed purposes device in apply show
It is intended to.
Fig. 4 is Fig. 3 B-B profiles.
In figure：1. convergence part under the cavity in cydariform electrode, 1-1. drum bodies portion, 1-2. drum bodies, 1-3. water return outlets, 1-4.,
The upper convergence parts of 1-5., 1-6. bearings mouthful, 1-7. Cathode arc roots, 1-8. annular convex surfaces, 2. hollow linking rotating shafts, 2-1. adapters,
2-2. rotating shaft heads, 2-3. backwater channels, the driven swing pinions of 2-4., 3. water-cooling-sprayers, 3-1. spray-holes, 4. plasmas
Torch, 5. upper bearing (metal)s, 6. anodes, 6-1. Anode arc roots, 7. lower bearings, 8. supporters, 8-1. backwater cavities, 8-2. supporters are installed
Flange, 8-3. backwater interfaces, 9. backwater, 10. support members, 10-1. support member mounting flanges, 10-2. supported rod erectings, 10-3. branch
Support axle, 10-4. cooling water connectors, 10-5. support arms, 11. active rotation gears, 12. cooling waters, 13. chemical industry pernicious gases
Or unstripped gas to be pyrolyzed.
Embodiment
In the Fig. 1 of embodiment 1, the embodiment shown in 2, cydariform rotation electrode is by cydariform electrode 1, hollow linking rotating shaft 2 and
Water-cooling-sprayer 3 is constituted, wherein, cydariform electrode 1 constitutes hollow knot by upper convergence part 1-5, drum body portion 1-1 and lower convergence part 1-4
Structure, drum body portion 1-1 is between upper convergence part 1-5 and lower convergence part 1-4, upper convergence part 1-5, drum body portion 1-1 and lower convergence part
1-4 interior space insertion, upper convergence part 1-5, drum body portion 1-1 and lower convergence part 1-4 are integrated, in cydariform electrode 1
Middle loin has annular convex surface 1-8, annular convex surface 1-8 to be the straight structure of vertical line, there is bearing mouthful 1-6 in upper convergence part 1-5；
Water-cooling-sprayer 3 is circle pipe structure, and the lower end closed of pipe body, spray-hole is distributed in the wall body of pipe body in multi-layer annular
On, water-cooling-sprayer 3 is extend into bulging body portion 1-1 cavity, and the spray-hole 3-1 on water-cooling-sprayer 3 is towards drum body portion 1-1's
Water return outlet 1-3 is arranged at the cavity bottom in inner side wall body, drum body portion 1-1, and hollow linking rotating shaft 2 is by adapter 2-1, driven rotary teeth
Take turns 2-4 and rotating shaft head 2-2 to constitute, driven swing pinion 2-4 is between adapter 2-1 and rotating shaft head 2-2, adapter 2-
1st, driven swing pinion 2-4 and rotating shaft head 2-2 are integrated, and adapter 2-1 is to be embedded into the side in lower convergence part 1-4
Formula is arranged on hollow linking rotating shaft 2 bottom of cydariform electrode 1, and the interior space of hollow linking rotating shaft 2 constitutes backwater channel 2-3.
The cydariform rotation electrode of the present embodiment is as negative electrode application in arc plasma device, and during work, cydariform electrode 1 is driven
Rotation, makes to constitute discharge face in turn on 360 degree of ring surfaces of cydariform electrode 1, meanwhile, it is many on the pipe body wall body of water-cooling-sprayer 3
The spray-hole of layer annular spread is uniformly sprayed cooling water on the wall body of the inner side of cydariform electrode 1, makes 360 degree of cydariform electrode 1
Cool down, avoided or slowing down cathode ablation, the target for extending negative electrode service life so as to realize in turn on ring surface.
The Fig. 3 of embodiment 2, the embodiment shown in 4 be the cydariform rotation electrode of the present invention in processing chemical industry pernicious gas or
Applied in the device for being pyrolyzed purposes, wherein, the structure of cydariform rotation electrode is basically the same as those in the first embodiment, and repeats no more.This reality
Apply in example, there is supporter 8, lower bearing 7, support member 10 and upper bearing (metal) 5, cydariform rotation electrode in the device of cydariform rotation electrode
Rotating shaft head 2-2 be arranged on by lower bearing 7 on supporter 8, have backwater cavity 8-1 in supporter 8, the sky in drum body portion 1-1
Chamber is communicated to the backwater cavity 8-1 in supporter 8 by the backwater channel 2-3 in hollow linking rotating shaft 2, and backwater cavity 8-1 has backwater
Interface 8-3 is picked out；Support member 10 is made up of supported rod erecting 10-2 and support arm 10-5, has support shaft on support arm 10-5
10-3, support shaft 10-3 are attached by the upper convergence part 1-5 of upper bearing (metal) 5 and cydariform rotation electrode；Water-cooling-sprayer 3 is installed
On support shaft 10-3, the cooling-water duct in support arm 10-5 and support shaft 10-3, cooling-water duct is communicated to cooling water
Shower nozzle 3, cooling-water duct has cooling water connector 10-4 accesses；There is active rotation gear 11 in the device of cydariform rotation electrode,
Active rotation gear 11 is engaged with the hollow driven swing pinion 2-4 for being connected rotating shaft 2, and active rotation gear 11 is driven by motor
Dynamic rotation.
In the present embodiment, there is anode 6 in the device of cydariform rotation electrode, cydariform rotation electrode is negative electrode, anode 6 and drum
The side of shape electrode 1 is relative, and anode 6 and cydariform electrode 1 are electrically connected with plasma operation power supply, anode 6 and cydariform
Striking is carried out using high-frequency arc strike power supply between electrode 1 and produces high-temperature plasma electric arc, or use is carried out close to arcing mode
Striking, when using striking is carried out close to arcing mode, wait after the electric arc that ignites, then pull open between anode 6 and cydariform electrode 1 away from
From, increase the torch of high-temperature plasma electric arc, increase energy.During work, motor drives active rotation gear 11 to rotate, main
Dynamic swing pinion 11 engages driven swing pinion 2-4 and rotated, so as to drive cydariform electrode 1 to rotate；Work as plasma operation
When power supply is applied to anode 6 with cydariform electrode 1, high-temperature plasma is produced in the air line distance of cydariform electrode 1 and anode
Electric arc, arc root generation and the generation on the discharge face of anode on the discharge face of cydariform electrode 1 respectively of plasma arc, its
In, the arc root of negative electrode is generated in turn on the annular convex surface 1-8 of 360 degree of the middle loin of cydariform electrode 1, meanwhile, cooling water pair
Drum body portion 1-1 inner side wall body is sprayed, and is realized and is cooled down in turn on 360 degree of ring surfaces of cydariform electrode 1, is avoided so as to realize
Or slowing down cathode ablation, the service life for extending negative electrode.Chemical industry pernicious gas or unstripped gas to be pyrolyzed are sent in device,
In the presence of high-temperature plasma torch and in strong electric field environment, molecule, the atom of chemical industry pernicious gas are reconfigured
And new neutral innocuous substance is generated, or unstripped gas to be pyrolyzed is decomposed into target product.
The present embodiment makes the arc root for producing negative electrode on 360 degree of ring surfaces of cydariform electrode 1 in turn, then carries out in turn cold
But, the Cathode arc root of plasma arc will not be made to concentrate on a position to continuously generate, general plasma device is overcome
The shortcoming of the middle easy ablation of negative electrode.The present embodiment is avoided or slowing down cathode is ablated, extends the service life of negative electrode, improves production effect
Rate and reduction production cost.
Claims (6)
1. a kind of cydariform rotation electrode, including water-cooling-sprayer and swing pinion, it is characterized in that cydariform rotation electrode is by cydariform electricity
Pole（1）With hollow linking rotating shaft（2）Composition, wherein, cydariform electrode（1）By upper convergence part（1-5）, drum body portion（1-1）And downlink
Socket part（1-4）Constitute hollow structure, drum body portion（1-1）In upper convergence part（1-5）With lower convergence part（1-4）Between, upper linking
Portion（1-5）, drum body portion（1-1）With lower convergence part（1-4）Interior space insertion, upper convergence part（1-5）In have bearing mouthful（1-6）,
Water-cooling-sprayer（3）It extend into bulging body portion（1-1）Cavity in, water-cooling-sprayer（3）On spray-hole（3-1）Towards drum body portion
（1-1）Inner side wall body, drum body portion（1-1）In cavity bottom have water return outlet（1-3）；Hollow linking rotating shaft（2）By adapter
（2-1）, driven swing pinion（2-4）And rotating shaft head（2-2）Constitute, driven swing pinion（2-4）In adapter（2-1）With
Rotating shaft head（2-2）Between, adapter（2-1）To be embedded into lower convergence part（1-4）In mode hollow linking rotating shaft（2）Peace
Mounted in cydariform electrode（1）Bottom, hollow linking rotating shaft（2）Interior space constitute backwater channel（2-3）.
2. a kind of cydariform rotation electrode according to claim 1, it is characterized in that water-cooling-sprayer（3）To justify pipe structure,
The lower end closed of pipe body, spray-hole is distributed on the wall body of pipe body in multi-layer annular.
3. a kind of cydariform rotation electrode according to claim 1, it is characterized in that having sun in the device of cydariform rotation electrode
Pole, anode and cydariform electrode（1）Side it is relative, during work, cydariform electrode（1）The arc of negative electrode is generated on the wall body of middle loin
Root, cydariform electrode（1）During rotation, the arc root of negative electrode is in cydariform electrode（1）Generated in turn on 360 degree of ring surfaces of middle loin,
Make the constant sensing anode of arc root of negative electrode.
4. a kind of cydariform rotation electrode according to claim 1, it is characterized in that in cydariform electrode（1）Middle loin have ring
Shape convex surface（1-8）, annular convex surface（1-8）For the structure that vertical line is straight；When in cydariform electrode（1）Middle loin have annular convex surface
（1-8）When, the arc root of negative electrode is in annular convex surface（1-8）Upper generation.
5. a kind of cydariform rotation electrode according to claim 1, it is characterized in that having branch in the device of cydariform rotation electrode
Gripping member（8）, lower bearing（7）, support member（10）And upper bearing (metal)（5）, the rotating shaft head of cydariform rotation electrode（2-2）Pass through lower bearing
（7）Installed in supporter（8）On, supporter（8）In have backwater cavity（8-1）, drum body portion（1-1）In cavity pass through hollow linking
Rotating shaft（2）In backwater channel（2-3）It is communicated to supporter（8）In backwater cavity（8-1）, backwater cavity（8-1）There is backwater interface
（8-3）Pick out；Support member（10）By supported rod erecting（10-2）And support arm（10-5）Composition, in support arm（10-5）On have
Support shaft（10-3）, support shaft（10-3）Pass through upper bearing (metal)（5）With the upper convergence part of cydariform rotation electrode（1-5）It is attached；
Water-cooling-sprayer（3）Installed in support shaft（10-3）On, in support arm（10-5）And support shaft（10-3）Middle cooling-water duct,
Cooling-water duct is communicated to water-cooling-sprayer（3）, cooling-water duct has cooling water connector（10-4）Access.
6. a kind of cydariform rotation electrode according to claim 1, it is characterized in that having master in the device of cydariform rotation electrode
Dynamic swing pinion（11）, active rotation gear（11）It is connected rotating shaft with hollow（2）Driven swing pinion（2-4）It is engaged,
Active rotation gear（11）Driven and rotated by motor.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201710492089.1A CN107105568A (en) | 2017-06-26 | 2017-06-26 | A kind of cydariform rotation electrode |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201710492089.1A CN107105568A (en) | 2017-06-26 | 2017-06-26 | A kind of cydariform rotation electrode |
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| CN107105568A true CN107105568A (en) | 2017-08-29 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111585152A (en) * | 2020-04-08 | 2020-08-25 | 中国科学院微电子研究所 | Electrode for laser cavity, laser system and exposure equipment |
| CN112616234A (en) * | 2020-12-30 | 2021-04-06 | 西安交通大学 | Device and method for generating underwater discharge plasma by using direct current source |
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| CN111585152A (en) * | 2020-04-08 | 2020-08-25 | 中国科学院微电子研究所 | Electrode for laser cavity, laser system and exposure equipment |
| CN111585152B (en) * | 2020-04-08 | 2022-02-08 | 中国科学院微电子研究所 | Electrode for laser cavity, laser system and exposure equipment |
| CN112616234A (en) * | 2020-12-30 | 2021-04-06 | 西安交通大学 | Device and method for generating underwater discharge plasma by using direct current source |
| CN112616234B (en) * | 2020-12-30 | 2021-09-17 | 西安交通大学 | Device and method for generating underwater discharge plasma by using direct current source |
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