CN107063329B - Quickly identify the method for the random Code Signal of complementary metal oxide semiconductor sensor after irradiating - Google Patents
Quickly identify the method for the random Code Signal of complementary metal oxide semiconductor sensor after irradiating Download PDFInfo
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- CN107063329B CN107063329B CN201710200747.5A CN201710200747A CN107063329B CN 107063329 B CN107063329 B CN 107063329B CN 201710200747 A CN201710200747 A CN 201710200747A CN 107063329 B CN107063329 B CN 107063329B
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Abstract
The present invention relates to the methods of the random Code Signal of complementary metal oxide semiconductor sensor after quick identification irradiation, this method is related to device and is made of electrostatic test platform, sample test plate, complementary metal oxide semiconductor sample sensor and computer, a large amount of darkfield images are acquired using the reading graph software installed on computer, image data is converted into the signal that gray value changes over time；Then picture element signal gray value obtained changed over time is resequenced, find out its gradient information, the gradient information of picture element signal is filtered again, signal of the filtered gradient signal after original rearrangement is combined, it is rebuild, obtained reconstruction sequencing signal, calculate the fluctuating range and step number of signal, by unfiltered signal is by the differentiation result of certain criteria and filtered signal is carried out by the differentiation result of certain criteria or relational calculus, result can correctly judge whether a pixel is random Code Signal.Operation of the present invention is convenient and efficient, has certain versatility.
Description
Technical field
The present invention relates to imaging sensor detection technique fields, and in particular to quickly identifies complementary metal oxide after irradiation
The method of the random Code Signal of semiconductor transducer belongs to microelectronics technology, radiation hardening technical field.
Background technique
In recent years, it is quick to be related to earth exploration, remotely sensed image, star for the space application of complementary metal oxide semiconductor sensor
The space explorations such as the stars such as sensor image collecting function and airship visible system, navigation field.Its space application reliability is to satellite
On-orbit performance and service life have a major impact.
Random Code Signal refers to that the dark current of imaging sensor shows a series of fluctuation of transient state separation, this fluctuation
Occur at random on two and multiple steps.Random Code Signal usually generates after imaging sensor is irradiated, and proton is in
Son irradiation can induce random Code Signal and generate, the energy of the fluctuating range of random Code Signal and radiating particle, fluence and
Environment temperature has relationship.Random Code Signal occurs that the noise of imaging sensor can be significantly increased.
Complementary metal oxide semiconductor sensor generates random Code Signal capture after by particle irradiation is always state
Inside and outside problem, currently, domestic not yet set up effective method for catching, external some groups emphasis in past 15 years
Having studied displacement damage causes imaging sensor (charge-coupled device or complementary metal oxide semiconductor sensor) with electromechanics
Code signal noise.Hopkinson etc. uses proton spoke in the technique study for observing counting ccd image sensor
According to caused random Code Signal.J.Bogaerts and T.Nuns et al. are had studied anti-respectively using the detection method based on threshold value
Charge-coupled device under random Code Signal noise and neutron irradiation in radiation hardened complementary metal oxide semiconductor sensor
The random Code Signal noise of part imaging sensor.D.R.Smith et al. uses the technique study of histogram analysis Charged Couple
The random Code Signal noise of device image sensor.Y.Yuzhelevski et al. using statistical characteristic analysis method when
Random Code Signal noise is analyzed in domain.Wherein observe method of counting major defect be cannot automatically carry out detection and
Excessively rely on the accuracy of operator.Detection method based on threshold value is the random Code Signal of detection most efficiently method, but this
Kind of method cannot obtain the information of random Code Signal noise and also its threshold size be not it is general, according to specific device and
Test condition selects.Although the detection method of histogram analysis can preferably meet the various requirement of detection, this method
Takeing a long time causes the detection efficiency of random Code Signal low.
The present invention proposes a kind of quickly to identify the random Code Signal of complementary metal oxide semiconductor sensor after irradiation
Method, this method can quickly detect the random Code Signal in large-scale image sensor pixel array, not need basis
Certain device carrys out setup parameter, has certain versatility, and random Code Signal can be calculated most while detection
Great fluctuation process amplitude and fluctuation step number.The present invention, which solves, to be generated after complementary metal oxide semiconductor sensor is irradiated
Random Code Signal is difficult to the difficulty detected, for analyse in depth image sensor structure and radiation effect provide it is effective and feasible
Method.
Summary of the invention
It is an object of the present invention to be to be generated after solution complementary metal oxide semiconductor sensor is irradiated with electromechanics
Code signal is difficult to the difficulty detected, provides a kind of random code of complementary metal oxide semiconductor sensor after quickly identifying irradiation
The method of signal, it is by electrostatic test platform, sample test plate, complementary metal oxide semiconductor sensing that this method, which is related to device,
Device sample and computer composition are acquired under the conditions of certain temperature using the reading graph software installed on computer big within a certain period of time
Darkfield image is measured, image data is converted into the signal that gray value changes over time；Then at any time by gray value obtained
The picture element signal of variation is resequenced, and finds out its gradient information for the picture element signal after rearrangement, then to picture element signal
Gradient information is filtered, and signal of the filtered gradient signal after original rearrangement is combined, and weight is carried out to it
It builds, finally according to the reconstruction sequencing signal obtained after filtering, the fluctuating range and step number of signal can be calculated, it will be unfiltered
Signal differentiation result progress "or" relationship that certain criteria is passed through by the differentiations result of certain criteria and filtered signal
Operation, the result obtained at this time can correctly judge whether a pixel is random Code Signal.Operation of the present invention is convenient and efficient,
It does not need the difference according to device and different parameters is set, there is certain versatility, and can calculate while detection
Obtain the maximum fluctuation amplitude and fluctuation step number of random Code Signal.
A kind of random Code Signal of complementary metal oxide semiconductor sensor after quickly identifying irradiation of the present invention
Method, which is characterized in that it is by electrostatic test platform, sample test plate, complementary metal oxide half that this method, which is related to device,
Conductor sample sensor and computer composition, place sample test plate (2) on electrostatic test platform (1), in sample test plate
(2) complementary metal oxide semiconductor sample sensor (3) are placed on, sample test plate (2) and computer (4) pass through USB number
It is connected according to line, concrete operations follow these steps to carry out:
A, keep environment temperature constant, the complementary metal oxide semiconductor sample sensor (3) after being irradiated is placed in
Half an hour in laboratory test environment is consistent its temperature with environment temperature；
B, the complementary metal oxide semiconductor sample sensor (3) after being irradiated is fixed on sample test plate (2),
Sample test plate (2) are connected by USB data line with computer (4) again, start to carry out dark field test, dark field needs to close when testing
All lighting sources in test cabinet are closed, and live complementary metal oxide semiconductor sample sensor with lighttight black box the cover
(3), the reading graph software installed on computer (4) is with a large amount of darkfield images of 1 frame/s frequency continuous acquisition；
C, according to the height and the width of the pixel depth of darkfield image and image, reading graph software is configured, by pixel
Grayvalue transition be the picture element signal that changes over time of gray value, to obtained picture element signal according to sequence from small to large
Rearrangement；
D, the picture element signal after the rearrangement for obtaining step c carries out gradient detection, obtains the gradient letter of picture element signal
Breath；
E, the gradient information of picture element signal in step d is filtered, filters out white noise and is produced due to temperature jitter
Raw signal intensity；
F, in conjunction with the picture element signal after filtered gradient information and sequence, picture element signal is rebuild；
G, according to the sequencing signal after reconstruction, step fluctuating range and step number are calculated, at this time by filtered letter
Number processing result by criterion step fluctuating range whether be greater than 0 or number of steps whether be greater than 1 and judge whether the pixel deposits
In the pixel of random Code Signal；
H, directly passed through in criterion gradient information according to the gradient information of the picture element signal in step d with the presence or absence of spike pair
The pixel carries out random Code Signal differentiation；
I, by step h acquired results and step g acquired results carry out or logical relation operation, obtained result is should
Pixel whether be random Code Signal pixel final judging result.
Environment temperature in step a is constant to refer to that complementary metal oxide semiconductor sample sensor (3) can normal work
Sample (3) after choosing the temperature, is stood half an hour at this ambient temperature, made by the arbitrary temp value in the temperature range of work
The device temperature of sample (3) is consistent with environment temperature always.
The side of the random Code Signal of complementary metal oxide semiconductor sensor after quick identification irradiation of the present invention
Method, during detection, the special random Code Signal of two classes of discovery.The special random Code Signal of one type, if
Original pixels signal is not filtered, then the gradient information of random Code Signal will be flooded by other noises, is had only to original
After beginning picture element signal is filtered, the gradient information of random Code Signal can be effectively extracted, therefore, for such random code
Signal, random Code Signal could correctly be detected by being only first filtered to picture element signal.Another kind of special random code letter
Number with it is preceding one kind on the contrary, the side information of signal can be filtered out if be filtered to its original pixels signal.It is comprehensive
It is upper described, to correctly detect random Code Signal, unfiltered picture element signal should be identified, it also will be to filtered
Picture element signal is identified, and by this, identification result takes the final result obtained after "or" relational calculus just and can be used as to this twice
The random Code Signal testing result of pixel.
The side of the random Code Signal of complementary metal oxide semiconductor sensor after quick identification irradiation of the present invention
Method can quickly detect in complementary metal oxide semiconductor sensor pixel array suitable for any visible images
It with the presence or absence of random Code Signal pixel, does not need the difference according to device and different parameters is set, there is centainly general
Property, and detection while can be calculated random Code Signal maximum fluctuation amplitude and fluctuation step number.This method
It solves the random Code Signal generated after cmos image sensor is irradiated and is difficult to the difficulty detected,
Effective and feasible method is provided to analyse in depth image sensor structure and radiation effect.
Therefore the device that the present invention is applicable to complementary metal oxide semiconductor sensor performance after grasp irradiates is ground
Unit, scientific research institutions and space flight load unit processed use.
Detailed description of the invention
Fig. 1 is test macro schematic diagram of the present invention；
Fig. 2 is that complementary metal oxide semiconductor sample sensor of the present invention uses the method for the present invention quickly to identify photosensitive area
Single pixel is with the presence or absence of gained image result during random Code Signal, wherein (a) original pixels signal；(b) after sorting
Picture element signal；(c) gradient information of picture element signal；(d) filtered gradient signal；(e) the sorted pixels signal after rebuilding.
Fig. 3 is first kind distinguished random Code Signal of the present invention, wherein (a) unfiltered processing result；(b) filtering processing knot
Fruit.
Fig. 4 is the second class distinguished random Code Signal of the invention, wherein (a) unfiltered processing result；(b) filtering processing knot
Fruit.
Specific embodiment
Present invention is further described in detail with reference to the accompanying drawing.
Embodiment
The side of the random Code Signal of complementary metal oxide semiconductor sensor after quick identification irradiation of the present invention
Method, this method be related to device be by electrostatic test platform, sample test plate, complementary metal oxide semiconductor sample sensor and
Computer composition, sample test plate 2 is placed on electrostatic test platform 1, places complementary metal oxide on sample test plate 2
Semiconductor transducer sample 3, sample test plate 2 are connect with computer 4 by USB data line, concrete operations follow these steps into
Row:
A, AptinaTM company MT9M001 type complementary metal oxide semiconductor sensor produced is chosen as complementary
Metal oxide semiconductor sensor sample 3, first be 23MeV with energy, accumulation fluence is 14.8 × 1010p/cm2Proton pair
Complementary metal oxide semiconductor sample sensor 3 is irradiated, and then passes the complementary metal oxide semiconductor after irradiation
Sensor sample 3 is placed in half an hour in 20 DEG C of temperature of environment, starts to test when device temperature is consistent with environment temperature；
B, the complementary metal oxide after by proton irradiation half then is fixed with the zero insertion force socket on sample test plate 2
Conductor sample sensor 3, then sample test plate 2 is connected by USB data line with computer 4, the purpose for the arrangement is that allowing meter
Calculation machine 4 is that sample test plate 2 provides power supply and provides control signal and receive image information obtained, is started after connecting
Dark field test is carried out, dark field need to close all lighting sources in test cabinet when testing, and live complementation with lighttight black box the cover
Metal oxide semiconductor sensor sample 3 sets 200ms for the time of integration for the reading graph software installed on computer 4, adopts
Figure set of frequency is 1 frame/s, acquires 1100 width darkfield images altogether；
It c, is 8 bits according to the pixel depth of darkfield image, the height and the width of image are 512 × 640, again to calculating
The reading graph software installed on machine 4 is configured, then by the gray value of the same pixel in collected 1100 width darkfield image
Picture element signal Fig. 2 (a) that gray value changes over time is converted to, obtained original pixels signal；To obtained picture element signal
It resequences Fig. 2 (b) according to sequence from small to large, the picture element signal after obtained sequence；
D, the picture element signal after rearrangement obtained in step c is subjected to gradient detection, obtains the picture element signal
Gradient information Fig. 2 (c), the gradient information of obtained picture element signal；
E, the gradient information of picture element signal in step d is filtered, filters out white noise and is produced due to temperature jitter
Raw signal intensity Fig. 2 (d), obtained filtered picture element signal；
F, in conjunction with the picture element signal after filtered gradient signal and sequence, reconstruction Fig. 2 (e) is carried out to picture element signal, is obtained
Sorted pixels signal after the reconstruction arrived；
G, according to the sequencing signal after reconstruction, step fluctuating range and step number are calculated, at this time by filtered letter
Number processing result by criterion step fluctuating range whether be greater than 0 or number of steps whether be greater than 1 come judge the pixel whether be
There are the pixels of random Code Signal；
H, directly passed through in criterion gradient information according to the gradient information of the picture element signal in step d with the presence or absence of spike pair
The pixel carries out random Code Signal differentiation；
I, step h acquired results and step g acquired results are subjected to "or" relational calculus, obtained result is the pixel
Whether be random Code Signal pixel final judging result.
It is worth noting that, the special random Code Signal of two classes is found in the detection process, as shown in figure 3, for this
The detection of the special random Code Signal of class, it is necessary to first be filtered original signal, otherwise gradient information will drown out in noise
Among to can not detected；As shown in figure 4, be directed to the detection of another kind of special random Code Signal, then it cannot be to original
The filtering of beginning signal, otherwise the slight change of original signal may directly be filtered out so as to cause cannot correctly detect it
Come.It is possible thereby to know, if it is desired to light after more accurately detection complementary metal oxide semiconductor sample sensor 3 is irradiated
Random Code Signal in quick area's single pixel, it is necessary to which step h acquired results and step g acquired results are subjected to "or" relationship fortune
Calculate, obtained result be the pixel whether be random Code Signal pixel final judging result.
Claims (1)
1. the method for the random Code Signal of complementary metal oxide semiconductor sensor, feature exist after a kind of quickly identification irradiation
In, this method be related to device be by electrostatic test platform, sample test plate, complementary metal oxide semiconductor sample sensor and
Computer composition, places sample test plate (2) on electrostatic test platform (1), places complementary metal on sample test plate (2)
Oxide-semiconductor sensor sample (3), sample test plate (2) are connect with computer (4) by USB data line, concrete operations
It follows these steps to carry out:
A, keep environment temperature constant, the complementary metal oxide semiconductor sample sensor (3) after being irradiated is placed in experiment
Half an hour in environment is tested in room, is consistent its temperature with environment temperature；
B, the complementary metal oxide semiconductor sample sensor (3) after being irradiated is fixed on sample test plate (2), then will
Sample test plate (2) is connected by USB data line with computer (4), starts to carry out dark field test, dark field need to close survey when testing
All lighting sources in room are tried, and are lived complementary metal oxide semiconductor sample sensor (3) with lighttight black box the cover, are counted
The reading graph software installed on calculation machine (4) is with a large amount of darkfield images of 1 frame/s frequency continuous acquisition；
C, according to the height and the width of the pixel depth of darkfield image and image, reading graph software is configured, by the ash of pixel
Angle value is converted to the picture element signal that gray value changes over time, to obtained picture element signal according to sequence from small to large again
Sequence；
D, the picture element signal after the rearrangement for obtaining step c carries out gradient detection, obtains the gradient information of picture element signal；
E, the gradient information of picture element signal in step d is filtered, filters out white noise and is generated due to temperature jitter
Signal intensity；
F, in conjunction with the picture element signal after filtered gradient information and sequence, picture element signal is rebuild；
G, according to the sequencing signal after reconstruction, step fluctuating range and step number are calculated, it at this time will be at filtered signal
Reason result by criterion step fluctuating range whether be greater than 0 or number of steps whether be greater than 1 come judge the pixel whether there is with
The pixel of electromechanical code signal；
H, the gradient information of the picture element signal in step d is directly passed through in criterion gradient information with the presence or absence of spike to the pixel
Carry out random Code Signal differentiation；
I, by step h acquired results and step g acquired results carry out or logical relation operation, obtained result is the pixel
Whether be random Code Signal pixel final judging result.
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| JP2012105063A (en) * | 2010-11-10 | 2012-05-31 | Nikon Corp | Image processing apparatus, imaging apparatus, and program |
| CN103618860A (en) * | 2013-11-04 | 2014-03-05 | 中国航天科技集团公司第九研究院第七七一研究所 | Image sensor-used analog-to-digital converter |
| CN104394334A (en) * | 2014-11-18 | 2015-03-04 | 中国科学院西安光学精密机械研究所 | Image sensor on-track noise intelligent inhibition method |
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