CN107063329A - The method of the random Code Signal of complementary metal oxide semiconductor sensor after quick discriminating irradiation - Google Patents
The method of the random Code Signal of complementary metal oxide semiconductor sensor after quick discriminating irradiation Download PDFInfo
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Abstract
The present invention relates to the method for the random Code Signal of complementary metal oxide semiconductor sensor after quick discriminating irradiation, this method is related to device and is made up of electrostatic test platform, sample test plate, complementary metal oxide semiconductor sample sensor and computer, a large amount of darkfield images are gathered using the reading graph software installed on computer, view data is converted into the signal that gray value is changed over time；Then the picture element signal gray value obtained changed over time is resequenced, obtain its gradient information, the gradient information of picture element signal is filtered again, filtered gradient signal is combined with the signal after original rearrangement, rebuild, obtained reconstruction sequencing signal, calculate the fluctuating range and step number of signal, unfiltered signal is carried out or relational calculus by the differentiation result and filtered signal of certain criteria by the differentiation result of certain criteria, its result can correctly judge whether a pixel is random Code Signal.The present invention is easy to operate, with certain versatility.
Description
Technical field
The present invention relates to imaging sensor detection technique field, and in particular to CMOS after quick discriminating irradiation
The method of the random Code Signal of semiconductor transducer, belongs to microelectronics technology, radiation hardening technical field.
Background technology
In recent years, to be related to earth exploration, remotely sensed image, star quick for the space application of complementary metal oxide semiconductor sensor
The space exploration such as the star such as sensor image collecting function and airship visible system, navigation field.Its space application reliability is to satellite
On-orbit performance and service life have a major impact.
Random Code Signal refers to that the dark current of imaging sensor shows a series of fluctuation of transient state separation, this fluctuation
Occur at random on two and multiple steps.Random Code Signal is generally produced after imaging sensor is irradiated, and proton is with
Son irradiation can induce random Code Signal and produce, the fluctuating range of random Code Signal and the energy of radiating particle, fluence and
Environment temperature has relation.Random Code Signal occurs that the noise of imaging sensor can be significantly increased.
Complementary metal oxide semiconductor sensor is always state by the seizure of random Code Signal is produced after particle irradiation
Inside and outside problem, at present, the country not yet set up effective method for catching, external some groups emphasis in past 15 years
Have studied displacement damage causes imaging sensor (charge coupling device or complementary metal oxide semiconductor sensor) with electromechanics
Code signal noise.Hopkinson etc. uses proton spoke in the technique study of observation counting ccd image sensor
According to caused random Code Signal.J.Bogaerts and T.Nuns et al. have studied anti-respectively using the detection method based on threshold value
Charge-coupled device under random Code Signal noise and neutron irradiation in radiation hardened complementary metal oxide semiconductor sensor
The random Code Signal noise of part imaging sensor.D.R.Smith et al. uses the technique study of histogram analysis Charged Couple
The random Code Signal noise of device image sensor.Y.Yuzhelevski et al. using statistical characteristic analysis method when
Random Code Signal noise is analyzed in domain.Wherein observation method of counting major defect be can not automatically be detected and
The undue degree of accuracy for relying on operator.Detection method based on threshold value is the random Code Signal of detection most efficiently method, but this
The information and its threshold size that kind of method can not obtain random Code Signal noise be not it is general, according to specific device and
Test condition is selected.Although the detection method of histogram analysis can preferably meet the various requirement of detection, this method
Longer time is needed to cause the detection efficiency of random Code Signal low.
The present invention proposes the random Code Signal of complementary metal oxide semiconductor sensor after a kind of quick discriminating irradiation
Method, this method can quickly detect the random Code Signal in large-scale image sensor pixel array, it is not necessary to according to
Certain device carrys out setup parameter, with certain versatility, and can calculate while detection and obtain random Code Signal most
Great fluctuation process amplitude and fluctuation step number.The present invention solves what is produced after complementary metal oxide semiconductor sensor is irradiated
Random Code Signal is difficult to the difficulty detected, for analyse in depth image sensor architecture and radiation effect provide it is effective and feasible
Method.
The content of the invention
It is an object of the present invention to for solve complementary metal oxide semiconductor sensor irradiated after produce with electromechanics
The random code of complementary metal oxide semiconductor sensor after the difficult irradiation there is provided a kind of quick discriminating that code signal is difficult to detect
The method of signal, it is by electrostatic test platform, sample test plate, complementary metal oxide semiconductor sensing that this method, which is related to device,
Device sample and computer composition are big using the reading graph software collection installed on computer under the conditions of certain temperature within a certain period of time
Darkfield image is measured, view data is converted into the signal that gray value is changed over time；Then by the gray value obtained with the time
The picture element signal rearrangement of change, its gradient information is obtained for the picture element signal after rearrangement, then to picture element signal
Gradient information is filtered, and filtered gradient signal is combined with the signal after original rearrangement, and weight is carried out to it
Build, finally according to the reconstruction sequencing signal obtained after filtering, the fluctuating range and step number of signal can be calculated, will be unfiltered
Signal differentiation result that certain criteria is passed through by the differentiation result and filtered signal of certain criteria carry out "or" relation
Computing, the result now obtained can correctly judge whether a pixel is random Code Signal.The present invention is easy to operate,
Different parameters need not be set according to the difference of device, can be calculated with certain versatility, and while detection
Obtain the maximum fluctuation amplitude and fluctuation step number of random Code Signal.
The random Code Signal of complementary metal oxide semiconductor sensor after a kind of quick discriminating irradiation of the present invention
Method, it is characterised in that it is by electrostatic test platform, sample test plate, CMOS half that this method, which is related to device,
Conductor sample sensor and computer composition, place sample test plate (2), in sample test plate on electrostatic test platform (1)
(2) complementary metal oxide semiconductor sample sensor (3) is placed on, sample test plate (2) passes through USB numbers with computer (4)
Connected according to line, concrete operations follow these steps to carry out：
A, holding environment temperature are constant, and the complementary metal oxide semiconductor sample sensor (3) after being irradiated is placed in
Half an hour in the test environment of laboratory, its temperature is set to be consistent with environment temperature；
B, will be irradiated after complementary metal oxide semiconductor sample sensor (3) be fixed on sample test plate (2),
Sample test plate (2) is connected by USB data line with computer (4) again, details in a play not acted out on stage, but told through dialogues test is proceeded by, details in a play not acted out on stage, but told through dialogues needs to close when testing
All lighting sources in test cabinet are closed, and complementary metal oxide semiconductor sample sensor is covered with lighttight black box cover
(3) reading graph software, installed on computer (4) is with the 1 frame/s a large amount of darkfield images of frequency continuous acquisition；
C, the pixel depth according to darkfield image and image height and the width, are configured to reading graph software, by pixel
Grayvalue transition be the picture element signal that changes over time of gray value, to resulting picture element signal according to order from small to large
Rearrangement；
Picture element signal after d, the rearrangement for obtaining step c carries out gradient detection, obtains the gradient letter of picture element signal
Breath；
E, the gradient information to picture element signal in step d are filtered, and are filtered out white noise and are produced due to temperature jitter
Raw signal intensity；
F, with reference to filtered gradient information and sequence after picture element signal, picture element signal is rebuild；
G, according to the sequencing signal after reconstruction, step fluctuating range and step number are calculated, now by filtered letter
Number result by criterion step fluctuating range whether be more than 0 or number of steps whether be more than 1 and judge whether the pixel deposits
In the pixel of random Code Signal；
H, the pixel gradient signal in step d are directly by whether there is spike to the pixel in criterion gradient information
Carry out random Code Signal differentiation；
I, by step h acquired results and step g acquired results carry out or logical relation computing, obtained result is this
Pixel whether be random Code Signal pixel final judged result.
Environment temperature in step a is constant to refer to that complementary metal oxide semiconductor sample sensor (3) can normal work
Arbitrary temp value in the temperature range of work, is chosen after the temperature, and sample (3) is stood into half an hour at this ambient temperature, made
The device temperature of sample (3) is consistent with environment temperature all the time.
The side of the random Code Signal of complementary metal oxide semiconductor sensor after quick discriminating irradiation of the present invention
Method, during detection, finds the special random Code Signal of two classes.The special random Code Signal of one type, if
Original pixels signal is not filtered, then the gradient information of random Code Signal will be flooded by other noises, have only to original
After beginning picture element signal is filtered, the gradient information of random Code Signal can be effectively extracted, therefore, for such random code
Signal, only first picture element signal, which is filtered, could correctly detect random Code Signal.Another kind of special random code letter
If the side information of signal can be filtered out on the contrary, being filtered to its original pixels signal number with previous class.It is comprehensive
It is upper described, to correctly detect random Code Signal, unfiltered picture element signal should be differentiated, also will be to filtered
Picture element signal differentiated, using this twice identification result take the final result obtained after "or" relational calculus just can be as to this
The random Code Signal testing result of pixel.
The side of the random Code Signal of complementary metal oxide semiconductor sensor after quick discriminating irradiation of the present invention
Method, it is adaptable in any visible images, can quickly detect in complementary metal oxide semiconductor sensor pixel array
With the presence or absence of random Code Signal pixel, it is not necessary to set different parameters according to the difference of device, with certain general
Property, and the maximum fluctuation amplitude and fluctuation step number for obtaining random Code Signal can be calculated while detection.This method
Solve the random Code Signal produced after cmos image sensor is irradiated and be difficult to the difficulty detected,
Effective and feasible method is provided to analyse in depth image sensor architecture and radiation effect.
Therefore the device of the invention for being applicable to grasp complementary metal oxide semiconductor sensor performance after irradiation is ground
Unit processed, scientific research institutions and space flight load unit are used.
Brief description of the drawings
Fig. 1 is test system schematic diagram of the present invention；
Fig. 2 is that complementary metal oxide semiconductor sample sensor of the present invention uses the inventive method quick discriminating photosensitive area
Single pixel whether there is gained image result during random Code Signal, wherein (a) original pixels signal；(b) after sorting
Picture element signal；(c) gradient information of picture element signal；(d) filtered gradient signal；(e) the sorted pixels signal after rebuilding.
Fig. 3 is first kind distinguished random Code Signal of the present invention, wherein (a) unfiltered result；(b) filtering process knot
Really.
Fig. 4 is Equations of The Second Kind distinguished random Code Signal of the present invention, wherein (a) unfiltered result；(b) filtering process knot
Really.
Embodiment
The present invention is described in further detail below in conjunction with the accompanying drawings.
Embodiment
The side of the random Code Signal of complementary metal oxide semiconductor sensor after quick discriminating irradiation of the present invention
Method, this method be related to device be by electrostatic test platform, sample test plate, complementary metal oxide semiconductor sample sensor and
Computer is constituted, and sample test plate 2 is placed on electrostatic test platform 1, CMOS is placed on sample test plate 2
Semiconductor transducer sample 3, sample test plate 2 is connected with computer 4 by USB data line, concrete operations follow these steps into
OK：
The MT9M001 type complementary metal oxide semiconductor sensors that a, selection AptinaTM companies are produced are as complementation
Metal oxide semiconductor sensor sample 3, is first that 23MeV, accumulation fluence are 14.8 × 10 with energy10p/cm2Proton pair
Complementary metal oxide semiconductor sample sensor 3 is irradiated, and then passes the complementary metal oxide semiconductor after irradiation
Sensor sample 3 is placed in half an hour in the environment of 20 DEG C of temperature, starts test when device temperature and environment temperature are consistent；
B and then fixed with the zero insertion force socket on sample test plate 2 by the CMOS after proton irradiation half
Conductor sample sensor 3, then sample test plate 2 is connected by USB data line with computer 4, the purpose for the arrangement is that allowing meter
Calculation machine 4 provides power supply by sample test plate 2 and provides the image information that control signal and reception are obtained, and starts after connecting
Details in a play not acted out on stage, but told through dialogues test is carried out, details in a play not acted out on stage, but told through dialogues need to close all lighting sources in test cabinet when testing, and cover complementation with lighttight black box cover
Metal oxide semiconductor sensor sample 3, is set to 200ms by the time of integration for the reading graph software installed on computer 4, adopts
Figure set of frequency is 1 frame/s, and 1100 width darkfield images are gathered altogether；
C, according to the pixel depth of darkfield image it is 8 bits, the height and the width of image are 512 × 640, again to calculating
The reading graph software installed on machine 4 is configured, then by the gray value of the same pixel in the 1100 width darkfield images collected
Picture element signal Fig. 2 (a) that gray value is changed over time is converted to, obtained original pixels signal；To resulting picture element signal
Resequenced Fig. 2 (b), the picture element signal after obtained sequence according to order from small to large；
D, the picture element signal after the rearrangement obtained by step c is subjected to gradient detection, obtains the picture element signal
Gradient information Fig. 2 (c), the gradient information of obtained picture element signal；
E, the gradient information to picture element signal in step d are filtered, and are filtered out white noise and are produced due to temperature jitter
Raw signal intensity Fig. 2 (d), obtained filtered picture element signal；
F, with reference to filtered gradient signal and sequence after picture element signal, to picture element signal carry out reconstruction Fig. 2 (e), obtain
Sorted pixels signal after the reconstruction arrived；
G, according to the sequencing signal after reconstruction, step fluctuating range and step number are calculated, now by filtered letter
Number result by criterion step fluctuating range whether be more than 0 or number of steps whether be more than 1 come judge the pixel whether be
In the presence of the pixel of random Code Signal；
H, the pixel gradient signal in step d are directly by whether there is spike to the pixel in criterion gradient information
Carry out random Code Signal differentiation；
I, step h acquired results and step g acquired results are subjected to "or" relational calculus, obtained result is the pixel
Whether be random Code Signal pixel final judged result.
It is worth noting that, the special random Code Signal of two classes is found in detection process, as shown in figure 3, for this
The detection of the special random Code Signal of class, it is necessary to be first filtered primary signal, otherwise gradient information will drown out in noise
Among so as to can not detect；As shown in figure 4, for the detection of another kind of special random Code Signal, then can not be to original
Beginning signal filtering, the otherwise slight change of primary signal may directly be filtered out causing correctly to detect it
Come.It is possible thereby to know, if it is desired to light after more accurately detection complementary metal oxide semiconductor sample sensor 3 is irradiated
Random Code Signal in quick area's single pixel, it is necessary to which step h acquired results and step g acquired results are subjected to "or" relation fortune
Calculate, obtained result be the pixel whether be random Code Signal pixel final judged result.
Claims (1)
1. a kind of method of the random Code Signal of complementary metal oxide semiconductor sensor after quick discriminating irradiation, its feature exists
In, this method be related to device be by electrostatic test platform, sample test plate, complementary metal oxide semiconductor sample sensor and
Computer is constituted, in electrostatic test platform（1）Upper placement sample test plate（2）, in sample test plate（2）Upper placement complementary metal
Oxide-semiconductor sensor sample（3）, sample test plate（2）With computer（4）Connected by USB data line, concrete operations
Follow these steps to carry out：
A, holding environment temperature are constant, the complementary metal oxide semiconductor sample sensor after being irradiated（3）It is placed in experiment
Half an hour in the test environment of room, its temperature is set to be consistent with environment temperature；
B, will be irradiated after complementary metal oxide semiconductor sample sensor（3）It is fixed on sample test plate（2）On, then will
Sample test plate（2）Pass through USB data line and computer（4）It is connected, proceeds by details in a play not acted out on stage, but told through dialogues test, details in a play not acted out on stage, but told through dialogues need to closes survey when testing
All lighting sources in room are tried, and complementary metal oxide semiconductor sample sensor is covered with lighttight black box cover（3）, meter
Calculation machine（4）The reading graph software of upper installation is with the 1 frame/s a large amount of darkfield images of frequency continuous acquisition；
C, the pixel depth according to darkfield image and image height and the width, are configured to reading graph software, by the ash of pixel
Angle value is converted to the picture element signal that gray value is changed over time, to resulting picture element signal according to order from small to large again
Sequence；
Picture element signal after d, the rearrangement for obtaining step c carries out gradient detection, obtains the gradient information of picture element signal；
E, the gradient information to picture element signal in step d are filtered, and are filtered out white noise and are produced due to temperature jitter
Signal intensity；
F, with reference to filtered gradient information and sequence after picture element signal, picture element signal is rebuild；
G, according to the sequencing signal after reconstruction, step fluctuating range and step number are calculated, now by filtered signal
Reason result by criterion step fluctuating range whether be more than 0 or number of steps whether be more than 1 come judge the pixel whether there is with
The pixel of machine Code Signal；
H, by step d pixel gradient information directly by criterion gradient information with the presence or absence of spike to the pixel carry out with
Machine Code Signal differentiates；
I, by step h acquired results and step g acquired results carry out or logical relation computing, obtained result is the pixel
Whether be random Code Signal pixel final judged result.
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| JP2012105063A (en) * | 2010-11-10 | 2012-05-31 | Nikon Corp | Image processing apparatus, imaging apparatus, and program |
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