CN107057580A - A kind of Ludox polishing fluid and preparation method thereof - Google Patents
A kind of Ludox polishing fluid and preparation method thereof Download PDFInfo
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- CN107057580A CN107057580A CN201710506535.XA CN201710506535A CN107057580A CN 107057580 A CN107057580 A CN 107057580A CN 201710506535 A CN201710506535 A CN 201710506535A CN 107057580 A CN107057580 A CN 107057580A
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09G—POLISHING COMPOSITIONS; SKI WAXES
- C09G1/00—Polishing compositions
- C09G1/02—Polishing compositions containing abrasives or grinding agents
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Abstract
The invention discloses a kind of Ludox polishing fluid and preparation method thereof, wherein, the preparation method includes：Ludox, surfactant, passivator, corrosion inhibiter, phosphoric acid, citric acid, oxalic acid and ammoniacal liquor are mixed, and heating stirring forms the Ludox polishing fluid, it is usually nano aluminium oxide liquid to solve traditional aluminium alloy and polish the suspension polishing agent used, its hardness is big, serious damage easily is formed to aluminum or aluminum alloy surface, with its surface of polished not easy cleaning, it is difficult to the problem of ensuring flatness.
Description
Technical field
The present invention relates to polishing fluid, more particularly to a kind of Ludox polishing fluid and preparation method thereof.
Background technology
The effect of polishing agent is will to be polished the removal of workpiece surface high spot, improves the flatness of workpiece surface.For example, right
When semiconductor wafer is polished, by means of external force, the blunt matter that abrasive material generates wafer surface after chemical reaction is removed, plus
Work goes out required planarization.Conventional polishing agent has the suspension such as silicon dioxide colloid, aluminum oxide, cerium oxide and Nano diamond at present
Polishing agent.It is usually nano aluminium oxide liquid to polish the suspension polishing agent used to aluminium alloy in the world at present, and its hardness is big, machine
Tool effect is big, can guarantee that higher polishing speed, but nano aluminium oxide hardness is big, it is easy to which aluminum or aluminum alloy surface is formed
Serious damage, with its surface of polished not easy cleaning, it is difficult to ensure flatness.
The content of the invention
The technical problems to be solved by the invention are to provide a kind of Ludox polishing fluid and preparation method thereof, solve tradition
The suspension polishing agent that uses of aluminium alloy polishing be usually nano aluminium oxide liquid, its hardness is big, easily to aluminum or aluminum alloy table
Face forms serious damage, with its surface of polished not easy cleaning, it is difficult to the problem of ensuring flatness.
To achieve the above object, the present invention provides following technical scheme：A kind of preparation method of Ludox polishing fluid, its
In, the preparation method includes：By Ludox, surfactant, passivator, corrosion inhibiter, phosphoric acid, citric acid, oxalic acid and ammoniacal liquor
Mixing, and heating stirring forms the Ludox polishing fluid, wherein,
Relative to the Ludox of 100 parts by weight, the consumption of the surfactant is 10-15 parts by weight, the use of the passivator
Measure as 1-4 parts by weight, the consumption of the corrosion inhibiter is 2-8 parts by weight, and the consumption of the phosphoric acid is 10-20 parts by weight, the lemon
The consumption of lemon acid is 2-10 parts by weight, and the consumption of the oxalic acid is 1-5 parts by weight, and the consumption of the ammoniacal liquor is 5-8 parts by weight.
It is preferred that, the surfactant is OPEO, NPE and aliphatic acid polyoxy
One or more in vinyl acetate.
It is preferred that, the corrosion inhibiter is the one or more in sodium chromate, natrium nitrosum and sodium metasilicate.
It is preferred that, the heating-up temperature is 30-45 DEG C, and the heat time is 10-20min.
It is preferred that, the mixing speed is 800-1000r/min, and mixing time is 5-10min.
It is preferred that, the raw material of the passivator includes ammonium phosphomolybdate, zinc stearate and hydrogen peroxide.
Present invention also offers a kind of Ludox polishing fluid, the Ludox polishing fluid is made by above-mentioned preparation method.
Beneficial effect：The invention provides a kind of Ludox polishing fluid and preparation method thereof, wherein, the preparation method bag
Include：Ludox, surfactant, passivator, corrosion inhibiter, phosphoric acid, citric acid, oxalic acid and ammoniacal liquor are mixed, and heating stirring shape
Into the Ludox polishing fluid, pass through the synergy between each raw material so that obtained Ludox polishing fluid will not to aluminium or
Aluminum alloy surface formation serious damage, and easily cleaning, while the method for the Ludox polishing fluid is simple, raw material is easy for preparing
.
Embodiment
The following detailed description of the preferred embodiment of the present invention.
Embodiment 1
A kind of preparation method of Ludox polishing fluid, the preparation method includes：By 100g Ludox, 10g surfactants, 1g
Passivator, 2g corrosion inhibiter, 10g phosphoric acid, 2g citric acids, 1g oxalic acid and the mixing of 5g ammoniacal liquor, and heat（Heating-up temperature is 30 DEG C, plus
The hot time is 10min）Stirring（Mixing speed is 800r/min, and mixing time is 5min）Form the Ludox polishing fluid A1.
Embodiment 2
A kind of preparation method of Ludox polishing fluid, the preparation method includes：By 100g Ludox, 15g surfactants, 4g
Passivator, 8g corrosion inhibiter, 20g phosphoric acid, 10g citric acids, 5g oxalic acid and the mixing of 8g ammoniacal liquor, and heat（Heating-up temperature is 45 DEG C, plus
The hot time is 20min）Stirring（Mixing speed is 1000r/min, and mixing time is 10min）Form the Ludox polishing fluid
A2。
Embodiment 3
A kind of preparation method of Ludox polishing fluid, the preparation method includes：By 100g Ludox, 12g surfactants, 2g
Passivator, 5g corrosion inhibiter, 15g phosphoric acid, 5g citric acids, 2g oxalic acid and the mixing of 6g ammoniacal liquor, and heat（Heating-up temperature is 35 DEG C, plus
The hot time is 15min）Stirring（Mixing speed is 900r/min, and mixing time is 8min）Form the Ludox polishing fluid A3.
Comparative example 1
A kind of preparation method of Ludox polishing fluid, the preparation method includes：By 100g Ludox, 5g surfactants,
0.5g passivator, 1g corrosion inhibiter, 5g phosphoric acid, 1g citric acids, 0.5g oxalic acid and the mixing of 2g ammoniacal liquor, and heat（Heating-up temperature is 30
DEG C, the heat time is 10min）Stirring（Mixing speed is 800r/min, and mixing time is 5min）Form the Ludox polishing
Liquid D1.
Comparative example 2
A kind of preparation method of Ludox polishing fluid, the preparation method includes：By 100g Ludox, 20g surfactants, 6g
Passivator, 10g corrosion inhibiter, 25g phosphoric acid, 15g citric acids, 10g oxalic acid and the mixing of 10g ammoniacal liquor, and heat（Heating-up temperature is 45
DEG C, the heat time is 20min）Stirring（Mixing speed is 1000r/min, and mixing time is 10min）The Ludox is formed to throw
Light liquid D2.
Table 1
| Embodiment is numbered | Test Metal Surface Roughness（μm） |
| A1 | 0.159 |
| A2 | 0.185 |
| A3 | 0.175 |
| D1 | 0.325 |
| D2 | 0.384 |
It can be seen from Table 1 that, polishing fluid A1-A3 obtained within the scope of the present invention to test metal surface polishing effect compared with
Good, obtained polishing fluid D1 and D2 is poor to the polishing effect for testing metal surface outside the scope of the invention.
Above-described is only the preferred embodiment of the present invention, it is noted that for one of ordinary skill in the art
For, without departing from the concept of the premise of the invention, various modifications and improvements can be made, these belong to the present invention
Protection domain.
Claims (7)
1. a kind of preparation method of Ludox polishing fluid, it is characterised in that the preparation method includes：Ludox, surface are lived
Property agent, passivator, corrosion inhibiter, phosphoric acid, citric acid, oxalic acid and ammoniacal liquor mixing, and heating stirring forms the Ludox polishing fluid,
Wherein,
Relative to the Ludox of 100 parts by weight, the consumption of the surfactant is 10-15 parts by weight, the use of the passivator
Measure as 1-4 parts by weight, the consumption of the corrosion inhibiter is 2-8 parts by weight, and the consumption of the phosphoric acid is 10-20 parts by weight, the lemon
The consumption of lemon acid is 2-10 parts by weight, and the consumption of the oxalic acid is 1-5 parts by weight, and the consumption of the ammoniacal liquor is 5-8 parts by weight.
2. preparation method according to claim 1, wherein, the surfactant is OPEO, nonyl
One or more in phenol polyethenoxy ether and polyoxyethylene carboxylate.
3. preparation method according to claim 1, wherein, the corrosion inhibiter is in sodium chromate, natrium nitrosum and sodium metasilicate
One or more.
4. preparation method according to claim 1, wherein, the heating-up temperature is 30-45 DEG C, and the heat time is 10-
20min。
5. preparation method according to claim 1, wherein, the mixing speed is 800-1000r/min, and mixing time is
5-10min。
6. preparation method according to claim 1, wherein, the raw material of the passivator includes ammonium phosphomolybdate, stearic acid
Zinc and hydrogen peroxide.
7. a kind of Ludox polishing fluid, it is characterised in that the Ludox polishing fluid is as described in any one in claim 1-6
Preparation method be made.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710506535.XA CN107057580A (en) | 2017-06-28 | 2017-06-28 | A kind of Ludox polishing fluid and preparation method thereof |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710506535.XA CN107057580A (en) | 2017-06-28 | 2017-06-28 | A kind of Ludox polishing fluid and preparation method thereof |
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| CN201710506535.XA Pending CN107057580A (en) | 2017-06-28 | 2017-06-28 | A kind of Ludox polishing fluid and preparation method thereof |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107541145A (en) * | 2017-09-20 | 2018-01-05 | 无锡市恒利弘实业有限公司 | A kind of green polishing Ludox and preparation method thereof |
| CN110885638A (en) * | 2019-11-26 | 2020-03-17 | 东莞市八溢自动化设备有限公司 | Plasma polishing agent and polishing method |
| CN111850626A (en) * | 2020-07-06 | 2020-10-30 | 苏州剑派实业有限公司 | Corrosion-resistant bolt and corrosion-resistant treatment method thereof |
| CN112496484A (en) * | 2020-10-19 | 2021-03-16 | 陕西斯瑞新材料股份有限公司 | Metal auxiliary machining process for plasma deburring of copper alloy contact |
| CN114657493A (en) * | 2022-05-05 | 2022-06-24 | 河北华熙管业有限公司 | Corrosion-resistant galvanized steel pipe and production method thereof |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107541145A (en) * | 2017-09-20 | 2018-01-05 | 无锡市恒利弘实业有限公司 | A kind of green polishing Ludox and preparation method thereof |
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| CN110885638A (en) * | 2019-11-26 | 2020-03-17 | 东莞市八溢自动化设备有限公司 | Plasma polishing agent and polishing method |
| CN111850626A (en) * | 2020-07-06 | 2020-10-30 | 苏州剑派实业有限公司 | Corrosion-resistant bolt and corrosion-resistant treatment method thereof |
| CN112496484A (en) * | 2020-10-19 | 2021-03-16 | 陕西斯瑞新材料股份有限公司 | Metal auxiliary machining process for plasma deburring of copper alloy contact |
| CN114657493A (en) * | 2022-05-05 | 2022-06-24 | 河北华熙管业有限公司 | Corrosion-resistant galvanized steel pipe and production method thereof |
| CN114657493B (en) * | 2022-05-05 | 2024-02-13 | 河北华熙管业有限公司 | Corrosion-resistant galvanized steel pipe and production method thereof |
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Application publication date: 20170818 |
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