CN107052947B - Deformation polishing disk based on piezoelectric ceramic driver - Google Patents
Deformation polishing disk based on piezoelectric ceramic driver Download PDFInfo
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- CN107052947B CN107052947B CN201710149292.9A CN201710149292A CN107052947B CN 107052947 B CN107052947 B CN 107052947B CN 201710149292 A CN201710149292 A CN 201710149292A CN 107052947 B CN107052947 B CN 107052947B
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- piezoelectric ceramic
- base
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- disc
- ceramic driver
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- 239000000919 ceramic Substances 0.000 title claims abstract description 115
- 238000005498 polishing Methods 0.000 title claims abstract description 48
- 230000008602 contraction Effects 0.000 claims abstract description 26
- 238000001125 extrusion Methods 0.000 claims abstract description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 4
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- 229910000831 Steel Chemical group 0.000 claims description 3
- 239000010959 steel Chemical group 0.000 claims description 3
- AZDRQVAHHNSJOQ-UHFFFAOYSA-N alumane Chemical group [AlH3] AZDRQVAHHNSJOQ-UHFFFAOYSA-N 0.000 claims description 2
- 238000006073 displacement reaction Methods 0.000 description 5
- 238000005452 bending Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 2
- 239000004411 aluminium Substances 0.000 description 1
- 230000003872 anastomosis Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
- B24B13/01—Specific tools, e.g. bowl-like; Production, dressing or fastening of these tools
- B24B13/012—Specific tools, e.g. bowl-like; Production, dressing or fastening of these tools conformable in shape to the optical surface, e.g. by fluid pressure acting on an elastic membrane
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
- B24B13/02—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor by means of tools with abrading surfaces corresponding in shape with the lenses to be made
Abstract
The invention relates to a deformation polishing disk based on a piezoelectric ceramic driver, which belongs to the technical field of aspheric mirror polishing equipment and comprises a base, a plurality of piezoelectric ceramic drivers positioned on the base, a base disk positioned above the piezoelectric ceramic drivers, and a plurality of elastic sheets, wherein the elastic sheets are radially arranged on the upper surface of the base and are arranged one by one with the piezoelectric ceramic drivers, the piezoelectric ceramic drivers are axially arranged on the upper surface of the base, one ends of the elastic sheets are pointed to the center of the base, the elastic sheets are propped against one ends of the piezoelectric ceramic drivers, which are pointed to the center of the base, and after the piezoelectric ceramic drivers apply extrusion force to the elastic sheets, the elastic sheets can generate expansion and contraction quantities along the axial direction of the elastic sheets so as to change the shape of the base disk.
Description
Technical Field
The invention belongs to the technical field of aspheric mirror polishing equipment, and particularly relates to a deformation polishing disk based on a piezoelectric ceramic driver.
Background
In recent years, a computer-controlled deformable polishing disk technology has been developed for aspheric mirror polishing. In the polishing motion process, people can automatically change the shape of the polishing disk at any time so as to adapt to the mirror surface shape of the arrived point. Currently, active polishing disk technologies are mainly divided into two categories:
a movable grinding disc technology based on bending moment drivers uniformly distributes a plurality of groups of bending moment drivers on the back surface of a polishing disc, and applies different bending moments on the polishing disc, so that the curvature of the polishing disc is changed, and the polishing disc is deformed to ensure that any moment and any position are matched with a workpiece. Because the bending moment driver is large in size and needs enough space, the movable polishing disk is only suitable for polishing a large mirror surface.
The other is an active polishing disk technology based on a piezoelectric ceramic driver, the piezoelectric ceramic driver is controlled to deform, and the surface shape of the active polishing disk is changed, so that the polishing disk can generate a local surface shape with an ideal aspherical mirror at any time and any position, a workpiece is processed into an aspherical surface, and the active polishing disk can process the aspherical mirror with a small caliber. However, the conventional deformation polishing disk based on the piezoelectric ceramic actuator is to mount the piezoelectric ceramic actuator on the base disk in the radial direction. Because the extension and contraction amount of the piezoelectric ceramic driver is in direct proportion to the length of the piezoelectric ceramic driver, about one thousandth of the length, in order to ensure the deformation amount of the polishing disk, the length of the piezoelectric ceramic driver selected cannot be too short, which causes the diameter-thickness ratio of the polishing disk to be very small, and the stability of the polishing disk is poor.
Disclosure of Invention
The inventors found in long-term practice that: in the polishing process, the motion mode of the polishing disk is planetary motion, so that the diameter-thickness ratio of the polishing disk is increased, and the stability of the polishing disk in rotation and the coincidence with a workpiece can be obviously improved. In order to solve the problems, the deformation polishing disk based on the piezoelectric ceramic driver has large diameter-thickness ratio and is suitable for polishing the aspheric mirror with medium and small caliber.
In order to achieve the above purpose, the present invention provides the following technical solutions:
a deformation polishing disk based on a piezoelectric ceramic driver comprises a base, a plurality of piezoelectric ceramic drivers positioned on the base and a base disk positioned above the piezoelectric ceramic drivers;
the piezoelectric ceramic driving device further comprises a plurality of elastic sheets, wherein the elastic sheets are radially arranged on the upper surface of the base and are arranged one by one with the piezoelectric ceramic driver, and the tops of the elastic sheets are propped against the lower surface of the base;
the piezoelectric ceramic driver is axially arranged on the upper surface of the base, one end of the piezoelectric ceramic driver points to the center of the base, the other end of the piezoelectric ceramic driver is provided with a propping piece, the elastic piece is propped against one end of the piezoelectric ceramic driver, which points to the center of the base, and after the piezoelectric ceramic driver applies extrusion force to the elastic piece, the elastic piece can generate expansion and contraction quantity along the axial direction of the elastic piece so as to change the surface shape of the base plate;
the piezoelectric ceramic driver is connected with a voltage source through the conductive slip ring.
Further, the base plate is an aluminum spherical thin plate.
Further, when the voltage loaded on the piezoelectric ceramic driver is Umax/2, the surface shape generated by the base disc is defined as an initial surface shape; when the voltage loaded on the piezoelectric ceramic driver is 0-Umax/2, the base plate generates negative deformation; when the voltage applied to the piezoelectric ceramic driver is Umax/2-Umax, the base plate is deformed forward.
Further, the minimum amount of expansion and contraction of the piezoelectric ceramic actuator is in the nanometer scale.
Further, after the piezoelectric ceramic actuator is applied with a voltage, the amount of expansion and contraction generated in the axial direction of the piezoelectric ceramic actuator is Δs, the amount of expansion and contraction generated in the radial direction of the elastic sheet is Δx, the amount of expansion and contraction generated in the axial direction of the elastic sheet is Δy, and Δs=Δx, Δy=n×Δx, where n represents the amount of expansion transferred from the radial direction to the axial direction.
Further, on the premise of specific area of the base plate, the number of the piezoelectric ceramic drivers is increased, and the surface shape accuracy of the base plate is improved.
Further, be equipped with the fixed disk between base and the base, set up rectangular groove in the fixed disk, piezoceramics driver, elastic sheet all are located rectangular inslot, the tight piece in top is located the edge of fixed disk to offset with piezoceramics driver's tip.
Further, the piezoelectric ceramic driver top is equipped with the supporting disk, set up the recess in the supporting disk, the base plate is located the recess, and the base plate upper surface is higher than the supporting disk upper surface, correspond elastic sheet department in the recess and be equipped with the arch, and the protruding number equals with the elastic sheet, bellied top offsets with the lower surface of base plate, the top of elastic sheet offsets with the lower surface of supporting disk.
Furthermore, the piezoelectric ceramic drivers are symmetrically arranged on the upper surface of the base.
Further, the supporting plate is of an aluminum structure or a steel structure.
The beneficial effects of the invention are as follows:
1. the piezoelectric ceramic driver and the elastic sheet are combined to change the surface shape of the base plate under the combined action. The piezoelectric ceramic driver is placed along the axial direction of the piezoelectric ceramic driver, the voltage loaded on the piezoelectric ceramic driver is changed to enable the piezoelectric ceramic driver to generate expansion and contraction quantity, the elastic sheet is extruded by the piezoelectric ceramic driver, the elastic sheet generates expansion and contraction quantity along the axial direction of the piezoelectric ceramic driver, and all corresponding points on the base plate are enabled to generate vertical displacement, so that the surface shape of the whole base plate is changed. Because the piezoelectric ceramic driver is arranged along the axial direction of the polishing disc, the diameter-thickness ratio of the polishing disc is increased by selecting the piezoelectric ceramic driver with smaller cross section, the structure is compact, the stability of the polishing disc during rotation and the anastomosis with a workpiece are obviously improved, and the cost is low.
2. The voltage source can provide positive voltage and negative voltage, the positive voltage causes the piezoelectric ceramic driver to extend and generate a certain expansion amount, the expansion amount is defined as positive displacement, the negative voltage causes the piezoelectric ceramic driver to contract and generate a certain expansion amount, the expansion amount is defined as negative displacement, and the piezoelectric ceramic driver is only positively displaced, so that the service life of the piezoelectric ceramic driver is prolonged.
Drawings
FIG. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is a schematic diagram of another embodiment of the present invention;
FIG. 3 is a schematic illustration of the disassembled structure of FIG. 2;
fig. 4 is a schematic view of a partial structure at a in fig. 3.
In the accompanying drawings: 1-base, 2-piezoceramics driver, 3-elastic piece, 4-base plate, 5-conductive slip ring, 6-fixed disk, 7-supporting disk, 8-long strip groove, 9-groove, 10-bulge.
Detailed Description
In order to make the technical solution of the present invention better understood by those skilled in the art, the technical solution of the present invention will be clearly and completely described below with reference to the accompanying drawings, and based on the embodiments in the present application, other similar embodiments obtained by those skilled in the art without making creative efforts should fall within the scope of protection of the present application. In addition, directional words such as "upper", "lower", "left", "right", and the like, as used in the following embodiments are merely directions with reference to the drawings, and thus, the directional words used are intended to illustrate, not to limit, the invention.
Embodiment one:
as shown in fig. 1, a deformation polishing disk based on a piezoceramic driver comprises a base 1, 1 piezoceramic driver 2, 1 elastic sheet 3 and a base 4, that is, the elastic sheet 3 and the piezoceramic driver 2 are arranged one by one, the piezoceramic driver 2 is located on the upper surface of the base 1, the base 4 is located above the piezoceramic driver 2, an electric slip ring 5 is arranged on the lower surface of the base 1, the piezoceramic driver 2 is connected with a voltage source through the electric slip ring 5, and the base 4 is an aluminum spherical sheet.
The elastic piece 3 is radially arranged on the upper surface of the base 1, in order to increase the diameter-thickness ratio of the polishing disc, the piezoelectric ceramic driver 2 is axially arranged on the upper surface of the base 1, one end of the piezoelectric ceramic driver points to the center of the base 1, and a tightening piece is arranged at the other end of the piezoelectric ceramic driver, so that stability is enhanced. The elastic sheet 3 is propped against one end of the piezoelectric ceramic driver 2, which points to the center of the base 1, and the piezoelectric ceramic driver 2 generates expansion and contraction after voltage is applied, so that extrusion force is applied to the elastic sheet 3, the elastic sheet 3 is caused to generate expansion and contraction along the axial direction of the elastic sheet, and the top of the elastic sheet 3 is propped against the lower surface of the base 4, so that the surface shape of the base 4 is changed.
The voltage source adjustment range corresponding to the piezoelectric ceramic driver 2 is from Umin to Umax, when the voltage loaded on the piezoelectric ceramic driver 2 is Umax/2, the surface shape generated by the base plate 4 is defined as an initial surface shape, therefore, when the voltage loaded on the piezoelectric ceramic driver 2 is from 0 to Umax/2, the base plate 4 generates negative deformation, and when the voltage loaded on the piezoelectric ceramic driver 2 is from Umax/2 to Umax, the base plate 4 generates positive deformation. In order to make the base plate 4 generate an aspherical surface shape with high precision, the minimum expansion and contraction amount of the piezoelectric ceramic actuator 2 is in the nanometer scale. After the piezoelectric ceramic actuator 2 is applied with a voltage, the amount of expansion and contraction generated in the axial direction is Δs, the amounts of expansion and contraction generated in the radial direction and the axial direction of the elastic sheet 3 are Δx and Δy, respectively, and Δs=Δx, Δy=n×Δx, where n represents the amount of expansion from radial to axial displacement, and is determined by the shape and the material of the elastic sheet 3.
On the premise of specific area of the base plate 4, the surface shape precision of the base plate 4 is improved by increasing the number of the piezoelectric ceramic drivers 2. Preferably, the piezoelectric ceramic actuator 2 is symmetrically mounted on the upper surface of the base 1.
In the embodiment, the caliber of the base plate 4 is 100mm, the caliber of the base plate 1 is 100mm, the overall thickness of the polishing disc is 20mm, the number of the piezoelectric ceramic drivers 2 and the number of the elastic sheets 3 are 1, the caliber of the piezoelectric ceramic drivers 2 is 7mm multiplied by 7mm, the length of the piezoelectric ceramic drivers is 38mm, the expansion and contraction range is-6 mu m to 36 mu m, the minimum expansion and contraction range is 10nm, and the voltage source adjusting range is-20V to 120V. The relation between the voltage U loaded on the piezoelectric ceramic driver 2 and the expansion and contraction amount is as follows:in addition, Δs=Δx, Δy=1.5×Δx.
Firstly, 60V voltage is loaded on each piezoelectric ceramic driver 2, the surface shape generated by the base plate 4 is defined as an initial surface shape, then, when the voltage is loaded at 60V-120V, the base plate 4 generates positive deformation, and when 0-60V is loaded, the base plate 4 generates negative deformation. The piezoelectric ceramic driver 2 is caused to elongate and generate a certain amount of expansion and contraction by only the positive voltage supplied by the voltage source, that is, the present invention contributes to the extension of the service life of the piezoelectric ceramic driver 2 by only the forward displacement of the piezoelectric ceramic driver 2.
Embodiment two:
as shown in fig. 2-4, the same parts as those of the first embodiment are not repeated, except that:
a fixed disc 6 is arranged between the base 1 and the base 4 and used for installing the piezoelectric ceramic driver 2 and the elastic sheet 3, a long groove 8 is formed in the fixed disc 6, the piezoelectric ceramic driver 2 and the elastic sheet 3 are both positioned in the long groove 8, and the propping piece is positioned at the edge of the fixed disc 6 and propped against the end part of the piezoelectric ceramic driver 2.
The piezoelectric ceramic actuator 2 top is equipped with the supporting disk 7 of aluminium system structure or steel structure, set up recess 9 in the supporting disk 7, base plate 4 is located recess 9, and base plate 4 upper surface is higher than supporting disk 7 upper surface, and the base plate 4 is convenient for polish the aspherical mirror, correspond elastic sheet 3 department in the recess 9 and be equipped with protruding 10, and protruding 10 equals with elastic sheet 3 number, protruding 10's top offsets with the lower surface of base plate 4, elastic sheet 3's top offsets with the lower surface of supporting disk 7, that is to say, the flexible volume of elastic sheet 3 production along its axial is passed to base plate 4 lower surface through protruding 10, and then changes the shape of base plate 4, base 1, fixed disk 6, supporting disk 7 pass through the bolt fastening.
In this embodiment, the caliber of the base plate 4 is 100mm, the caliber of the base 1 is 175mm, the overall thickness of the polishing disc is 20mm, the upper surface of the base plate 4 is 1mm higher than the upper surface of the supporting disc 7, the number of the piezoelectric ceramic drivers 2 and the number of the elastic pieces 3 are 16 respectively, the piezoelectric ceramic drivers 2 are divided into two circles of staggered arrangement, 8 piezoelectric ceramic drivers are respectively arranged in each circle, each piezoelectric ceramic driver 2 is provided with a voltage source loaded on the same way, and each piezoelectric ceramic driver 2 is connected with each voltage source through the conductive slip ring 5. The caliber of the piezoelectric ceramic driver 2 is 7mm multiplied by 7mm, the length is 38mm, the expansion and contraction amount is-6 mu m-36 mu m, the minimum expansion and contraction amount is 10nm, and the voltage source adjusting range is-20V-120V. The relation between the voltage U loaded on the piezoelectric ceramic driver 2 and the expansion and contraction amount is as follows:in addition, Δs=Δx, Δy=0.7×Δx.
The foregoing detailed description of the invention has been presented for purposes of illustration and description, but is not intended to limit the scope of the invention, i.e., the invention is not limited to the details shown and described.
Claims (10)
1. The utility model provides a deformation polishing dish based on piezoceramics driver, includes base, a plurality of piezoceramics driver that are located on the base and the base that is located piezoceramics driver top, its characterized in that:
the piezoelectric ceramic driving device further comprises a plurality of elastic sheets, wherein the elastic sheets are radially arranged on the upper surface of the base and are arranged one by one with the piezoelectric ceramic driver, and the tops of the elastic sheets are propped against the lower surface of the base;
the piezoelectric ceramic driver is axially arranged on the upper surface of the base, one end of the piezoelectric ceramic driver points to the center of the base, the other end of the piezoelectric ceramic driver is provided with a propping piece, the elastic piece is propped against one end of the piezoelectric ceramic driver, which points to the center of the base, and after the piezoelectric ceramic driver applies extrusion force to the elastic piece, the elastic piece can generate expansion and contraction quantity along the axial direction of the elastic piece so as to change the surface shape of the base plate;
the lower surface of the base is provided with a plurality of conductive slip rings, the piezoelectric ceramic drivers are divided into two circles of staggered arrangement, each piezoelectric ceramic driver is provided with a voltage source loaded on the same path, and each piezoelectric ceramic driver is connected with each voltage source through the conductive slip ring.
2. A deformable polishing disc based on a piezoelectric ceramic actuator as defined in claim 1, wherein: the base plate is an aluminum spherical sheet.
3. A deformable polishing disc based on a piezoelectric ceramic actuator as defined in claim 1, wherein: when the voltage loaded on the piezoelectric ceramic driver is Umax/2, the surface shape generated by the base disc is defined as an initial surface shape; when the voltage loaded on the piezoelectric ceramic driver is 0-Umax/2, the base plate generates negative deformation; when the voltage applied to the piezoelectric ceramic driver is Umax/2-Umax, the base plate is deformed forward.
4. A deformable polishing disc based on a piezoelectric ceramic actuator as defined in claim 3, wherein: the minimum expansion and contraction amount of the piezoelectric ceramic driver is in the nanometer level.
5. A deformable polishing disc based on a piezoelectric ceramic actuator as defined in claim 3, wherein: after the piezoelectric ceramic driver is subjected to voltage, the expansion and contraction amount of the piezoelectric ceramic driver along the axial direction is deltas, the expansion and contraction amount of the elastic sheet along the radial direction is deltax, the expansion and contraction amount of the elastic sheet along the axial direction is deltay, deltas=deltax, deltay=n×deltax, wherein n represents the expansion amount transferred from the radial direction to the axial direction.
6. A deformable polishing disc based on a piezoelectric ceramic actuator as defined in claim 1, wherein: on the premise of specific area of the base plate, the number of the piezoelectric ceramic drivers is increased, and the surface shape accuracy of the base plate is improved.
7. A deformable polishing disc based on a piezoelectric ceramic actuator as defined in claim 6, wherein: a fixed disc is arranged between the base and the base, a long strip groove is formed in the fixed disc, the piezoelectric ceramic driver and the elastic piece are both located in the long strip groove, and the propping piece is located at the edge of the fixed disc and propped against the end part of the piezoelectric ceramic driver.
8. A deformable polishing disc based on a piezoelectric ceramic actuator as claimed in any one of claims 1-7, wherein:
the piezoelectric ceramic drive comprises a piezoelectric ceramic drive, and is characterized in that a supporting disc is arranged above the piezoelectric ceramic drive, a groove is formed in the supporting disc, the base disc is located in the groove, the upper surface of the base disc is higher than the upper surface of the supporting disc, protrusions are arranged in the groove corresponding to the elastic sheets, the number of the protrusions is equal to that of the elastic sheets, the tops of the protrusions are propped against the lower surface of the base disc, and the tops of the elastic sheets are propped against the lower surface of the supporting disc.
9. A deformable polishing disc based on a piezoelectric ceramic actuator as defined in claim 8, wherein: the piezoelectric ceramic drivers are symmetrically arranged on the upper surface of the base.
10. A deformable polishing disc based on a piezoelectric ceramic actuator as defined in claim 8, wherein: the supporting disc is of an aluminum structure or a steel structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710149292.9A CN107052947B (en) | 2017-03-14 | 2017-03-14 | Deformation polishing disk based on piezoelectric ceramic driver |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710149292.9A CN107052947B (en) | 2017-03-14 | 2017-03-14 | Deformation polishing disk based on piezoelectric ceramic driver |
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| Publication Number | Publication Date |
|---|---|
| CN107052947A CN107052947A (en) | 2017-08-18 |
| CN107052947B true CN107052947B (en) | 2024-03-22 |
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| CN201710149292.9A Active CN107052947B (en) | 2017-03-14 | 2017-03-14 | Deformation polishing disk based on piezoelectric ceramic driver |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN112775767B (en) * | 2021-01-29 | 2022-09-23 | 上海理工大学 | Ultrasonic vibration assisted magnetic composite fluid polishing device |
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| CN103286682A (en) * | 2013-05-08 | 2013-09-11 | 吉林大学 | Test specimen fixture for ultrasonic vibration assisted grinding/polishing |
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2017
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| CN101223614A (en) * | 2005-07-15 | 2008-07-16 | 株式会社村田制作所 | Capacitor and method for producing the same |
| WO2008146678A1 (en) * | 2007-05-23 | 2008-12-04 | Nec Corporation | Piezoelectric actuator and electronic device |
| CN101239446A (en) * | 2008-01-22 | 2008-08-13 | 中国科学院光电技术研究所 | Deformation polishing grinding pan based on piezoelectric ceramic driver |
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| CN107052947A (en) | 2017-08-18 |
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