CN107051851A - A kind of alliteration journey bimorph ultrasonic transducer - Google Patents
A kind of alliteration journey bimorph ultrasonic transducer Download PDFInfo
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- CN107051851A CN107051851A CN201710078691.0A CN201710078691A CN107051851A CN 107051851 A CN107051851 A CN 107051851A CN 201710078691 A CN201710078691 A CN 201710078691A CN 107051851 A CN107051851 A CN 107051851A
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- 239000010410 layer Substances 0.000 claims abstract description 13
- 239000012790 adhesive layer Substances 0.000 claims abstract description 7
- 235000013351 cheese Nutrition 0.000 claims description 2
- 238000005259 measurement Methods 0.000 abstract description 19
- 230000003068 static effect Effects 0.000 abstract description 9
- 239000007789 gas Substances 0.000 description 10
- 241001347978 Major minor Species 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000007493 shaping process Methods 0.000 description 3
- 239000013078 crystal Substances 0.000 description 2
- 230000007812 deficiency Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 238000000527 sonication Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000000567 combustion gas Substances 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000003032 molecular docking Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/66—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by measuring frequency, phase shift or propagation time of electromagnetic or other waves, e.g. using ultrasonic flowmeters
- G01F1/667—Arrangements of transducers for ultrasonic flowmeters; Circuits for operating ultrasonic flowmeters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/66—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by measuring frequency, phase shift or propagation time of electromagnetic or other waves, e.g. using ultrasonic flowmeters
- G01F1/662—Constructional details
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B2201/00—Indexing scheme associated with B06B1/0207 for details covered by B06B1/0207 but not provided for in any of its subgroups
- B06B2201/50—Application to a particular transducer type
- B06B2201/55—Piezoelectric transducer
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- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Fluid Mechanics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Measuring Volume Flow (AREA)
Abstract
A kind of alliteration journey bimorph ultrasonic transducer, including shell, annular boss is set on shell, circular trough is opened up on annular boss, annular mounting groove is opened up at annular boss outer wall, annular auxiliary piezoelectric patches is installed in annular mounting groove, the upper surface of the auxiliary piezoelectric patches of annular sets auxiliary piezoelectric sealed acoustic impedance matching layer, circular main piezoelectric patches is installed in circular trough, the upper surface of circular main piezoelectric patches sets main piezoelectric sealed acoustic impedance matching layer, the internal diameter of the auxiliary piezoelectric patches of annular is more than the diameter of circular main piezoelectric patches, circular main piezoelectric patches sets fixed range with annular auxiliary piezoelectric patches in vertical direction, the first fairlead is opened up in the middle part of annular boss, first wire is set in the first fairlead, first wire is located at housing exterior through shell, outer casing underpart fills adhesive layer.The static velocity of sound of medium is obtained because the present invention can accurately be measured using the path difference of main and auxiliary piezoelectric patches, the flow velocity of medium is obtained therefore, it is possible to accurate measurement, so as to improve the accuracy of measurement of ultrasonic wave gas meter.
Description
Technical field
It is a kind of alliteration journey bimorph ultrasonic transducer the present invention relates to transducer.
Background technology
The application of transducer is wide, and the transducer architecture used in different field has very big difference.It is special at present
The ordinary ultrasonic wave transducer of flow is measured in ultrasonic wave gas meter, because combustion gas component, pressure, temperature change at any time,
Therefore, the static velocity of sound of medium is extremely difficult obtains, and the static velocity of sound for accurately obtaining medium is the indispensability of accurate measurement gas flow
Condition.The method that the single-chip ultrasonic transducer that in the market is generally used obtains the medium velocity of sound is the transmitting by improving ultrasonic wave
Power receives the amplitude of Mintrop wave to improve, and then the docking collection of letters number is estimated from the waveform of reception and spoken using high-speed ADC sampling
In the propagation time of super ripple, then further calculate the velocity of sound.The deficiency of this structure is that emitting voltage is high, and power consumption is larger, peace
Full property is relatively low, high-speed ADC it is expensive, in addition, necessarily requiring to complete in a short time during CPU processing, to CPU performance
It is required that higher, Small flowrate measurement error is larger, and Qmin errors are general in 3%-5% or so.
The content of the invention
It is an object of the invention to provide a kind of alliteration journey bimorph ultrasonic transducer, it uses bimorph, is being situated between
Produced in matter and there is fixed path difference between alliteration journey, main and auxiliary piezoelectric patches, acoustic velocity measutement is carried out with path difference, so as to reach
The purpose of the accurate measurement static velocity of sound of medium, to solve the deficiencies in the prior art.
The present invention to achieve the above object, by the following technical programs:A kind of alliteration journey bimorph ultrasonic transducer,
Including shell, set on shell and circular trough is opened up on annular boss, annular boss, annular installation is opened up at annular boss outer wall
Annular auxiliary piezoelectric patches is installed, the upper surface of annular auxiliary piezoelectric patches sets auxiliary piezoelectric sealed acoustic impedance match in groove, annular mounting groove
Circular main piezoelectric patches is installed, the upper surface of circular main piezoelectric patches sets main piezoelectric sealed acoustic impedance matching layer, ring in layer, circular trough
The internal diameter of the auxiliary piezoelectric patches of shape is more than the diameter of circular main piezoelectric patches, and circular main piezoelectric patches is set with annular auxiliary piezoelectric patches in vertical direction
Put to open up in the middle part of fixed range, annular boss and the first wire is set in the first fairlead, the first fairlead, the first wire is outside
Shell is located at housing exterior, outer casing underpart filling adhesive layer.The upper edge of annular boss is higher than on the upper edge of shell, annular boss
Portion outer surface is circular conical surface.In the bottom of the circular conical surface and the upper edge of shell are generally aligned in the same plane.Opened in annular mounting groove
If the second fairlead, the second wire is set, second wire one end is located at housing exterior through adhesive layer in the second fairlead.It is described
Circular main piezoelectric patches and annular auxiliary piezoelectric patches are made by piezoelectric crystal material or piezoceramic material.Circular main piezoelectric patches
The center line of center line and annular auxiliary piezoelectric patches is same center line.The upper surface of main piezoelectric sealed acoustic impedance matching layer and auxiliary pressure
Electricity sealing acoustic impedance match interlayer sets fixed distance.
The advantage of the invention is that:It uses circular main piezoelectric patches, annular auxiliary two piezoelectric patches of piezoelectric patches, in ultrasonic wave combustion
Make to produce two sound paths in measured medium when using in gas meter, with the static velocity of sound of sound path difference measurements medium between two sound paths, from
And measure gas flow.Transducer knot of the present invention with two piezoelectric patches of circular main piezoelectric patches and annular auxiliary piezoelectric patches
Structure, can differ a fixed range, this distance is in the most short wave length of sound of medium on sonic propagation direction(N+x)Times, most
Good design is between N=0, x=0.6 to 0.8, that is, in a wavelength.When transducer is used in flow velocity shielded-plate tube, stream
Transducer is installed at the two ends of fast shielded-plate tube, and due to the shielding action of flow velocity shielded-plate tube, a medium can be formed before transducer
Flow velocity is that, due to the presence of main and auxiliary piezoelectric patches, can form two sound paths, the length of main sound path between 0 region, two transducers
Less than the length of auxiliary sound path, in the poor journey of sound wave between the main and auxiliary piezoelectric patches on same transducer, due to flow velocity shielded-plate tube
Effect, velocity of medium is 0 in the poor journey of sound wave, by measuring the signal phase time difference that main and auxiliary piezoelectric patches is received, so that it may
To calculate the accurate velocity of sound according to main and auxiliary path difference, because velocity of medium is 0 in this segment difference journey, therefore measure what is obtained
The velocity of sound is exactly the static velocity of sound of medium.Because the present invention can accurately be measured using the path difference of main and auxiliary piezoelectric patches, to obtain medium quiet
Only the velocity of sound, the flow velocity of medium is obtained therefore, it is possible to accurate measurement, so as to improve the accuracy of measurement of ultrasonic wave gas meter.
The transducer of the present invention is arranged on the two ends in gas or fluid line, when the circular main pressure of one of transducer
During electric piece transmitting ultrasonic wave, the circular main piezoelectric patches of another transducer first receives ultrasonic signal, then annular auxiliary piezoelectricity
Piece receives signal again, so, and a sound path is produced between the circular main piezoelectric patches and annular auxiliary piezoelectric patches of another transducer
There is a time difference between difference, the signal received.Circular main piezoelectric patches, the signal of annular auxiliary piezoelectric patches pass through " zero passage " shaping
Afterwards, the time difference can be accurately measured with phase discriminator, then further according to circular main piezoelectric patches, the path difference of annular auxiliary piezoelectric patches
The velocity of sound of medium is calculated, because the velocity of medium between the circular main piezoelectric patches and annular auxiliary piezoelectric patches of transducer is zero, is measured
The velocity of sound be exactly velocity of sound when medium is static.The precision of the digital phase discriminator of current pulse expansion can accomplish 0.1ns-
0.3ns, when the path difference of circular main piezoelectric patches, annular auxiliary piezoelectric patches is 2mm, the measurement accuracy of the velocity of sound can reach 0.01-
0.05m/s.After testing, flow measurement error when transducer of the invention is applied in ultrasonic wave gas meter is 0.1%-0.4%.
Transducer of the present invention only needs the emitting voltage within 24V, safe to use, low in energy consumption, the circuit work electricity being related to
Press scope in the range of high-voltage CMOS, it is easy to accomplish ultrasonic wave gas meter dedicated processes circuit it is integrated, it is low to CPU requirement,
The collection of letters number can be docked all using " zero passage " to compare, then carried out at the measurement that pulse expansion phase demodulation realizes the time difference, circuit
Reason is simple, and manufacturing cost is low.
Brief description of the drawings
Accompanying drawing 1 is the structural representation of the present invention;Accompanying drawing 2 is Fig. 1 overlooking the structure diagram;Accompanying drawing 3 is that the present invention is changed
Can structural representation of the device in flow velocity shielded-plate tube, the use shape for illustrating transducer of the present invention to be arranged in flow velocity shielded-plate tube
A and B represent two transducers, L respectively in state, figure1Circular main pressure in circular main piezoelectric patches and B transducer in expression A transducers
The main sound path produced between electric piece, L2In expression A transducers in circular main piezoelectric patches and B transducer between annular auxiliary piezoelectric patches
The auxiliary sound path produced.
Embodiment
Compareing accompanying drawing, the present invention will be further described.
Annular is set on a kind of alliteration journey bimorph ultrasonic transducer of the present invention, including shell 1, shell 1
Open up and opened up at circular trough 4, the outer wall of annular boss 14 in annular mounting groove 3, annular mounting groove 3 on boss 14, annular boss 14
Annular auxiliary piezoelectric patches 5 is installed, the upper surface of annular auxiliary piezoelectric patches 5 is set in auxiliary piezoelectric sealed acoustic impedance matching layer 6, circular trough 4
Circular main piezoelectric patches 7 is installed, the upper surface of circular main piezoelectric patches 7 sets main piezoelectric sealed acoustic impedance matching layer 8, annular auxiliary piezoelectricity
The internal diameter of piece 5 is more than the diameter of circular main piezoelectric patches 7, and circular main piezoelectric patches 7 sets solid with annular auxiliary piezoelectric patches 5 in vertical direction
Set a distance, the middle part of annular boss 14 opens up in the first fairlead 10, the first fairlead 10 and sets the first wire 13, the first wire 13
It is located at through shell 1 outside shell 1, the under-filled adhesive layer 9 of shell 1.
Transducer of the present invention is inserted between flow velocity shielded-plate tube two ends, two main piezoelectric patches of circle and produces main sound path, one
Auxiliary sound path is produced between individual circular main piezoelectric patches and another annular auxiliary piezoelectric patches, two sound paths have a path difference, path difference choosing
It is selected as the minimum wave length of sound of medium(N+x)Times, N round numbers, x be 0-1 between decimal, optimal selection N=0, x=0.6-
0.8, the time difference t that major-minor piezoelectric patches receives signal can be measured by phase discriminator in circuit board, then with formula c=L/t just
The velocity of sound of medium can be calculated(T is that major-minor signal time is poor, and L is the path difference of major-minor piezoelectric patches, and c is SVEL), then
By detecting gas flow after CPU computings.Transducer of the present invention inserts one or both ends in flow velocity shielded-plate tube, stream
The other end of fast shielded-plate tube can also install known single piezoelectric patches transducer, and this mounting structure also can accurately measure the velocity of sound, with making
It is identical with two array operations of the present invention.The circular main piezoelectric patches signal of transducer of the present invention can be used
" zero passage " shaping, operationally transducer signal have two effects, first be the measurement medium velocity of sound, second be measurement sound wave along
The propagation time of the positive and negative both direction in media flow direction(Sonication times difference method flowmeter), acoustic velocity measutement is changed by same
The signal of major-minor piezoelectric patches on energy device is come what is realized, and method is as follows:Due to circular main piezoelectric patches and the sound of annular auxiliary piezoelectric patches
Path difference is less than the minimum wave length of sound of quiescent atmosphere, therefore the signal of circular main piezoelectric patches and annular auxiliary piezoelectric patches is whole by zero passage
Only need to carry out after shape digital phase-detecting can be obtained by two signals precise time it is poor, then calculated accurately according to path difference
The velocity of sound;Positive and negative acoustic transit time difference measurements are flowed to along medium:Need to only signal be received to the circular main piezoelectric patches of receive transducer
Zero passage shaping is carried out, the time difference between ultrasonic propagation and reference pulse, following current are then obtained compared with reference pulse is carried out
Adverse current is compared with same reference pulse, can obtain ultrasonic wave along media flow direction and against media flow direction
Propagation time difference, then calculates media flow speed according to the static velocity of sound of medium.Because the present invention can dock collection of letters whole
Using Zero-cross comparator, the measurement that pulse expansion phase demodulation realizes the time difference is then carried out again, therefore, can simplify circuit design,
And the high requirement of precision can be reached.
The upper edge of annular boss 14 of the present invention is higher than the upper edge of shell 1, and the outer surface of upper of annular boss 14 is
Circular conical surface 12, the bottom of circular conical surface 12 is generally aligned in the same plane interior with the upper edge of shell 1.The present invention uses circular conical surface 12, is used for
Reduction is blocked to ultrasonic wave, improves the intensity that annular Secondary piezoelectric piece receives signal.
Further scheme is the present invention:Open up and set in the second fairlead 11, the second fairlead 11 in annular mounting groove 3
Second wire, second wire one end is located at outside shell 1 through adhesive layer 9.
Preferred embodiments of the present invention are:The circular main piezoelectric patches 7 and annular auxiliary piezoelectric patches 5 by piezoelectric crystal material or
Person's piezoceramic material is made.
Further preferred scheme is the present invention:Circular main piezoelectric patches 7 is patty, and annular auxiliary piezoelectric patches 5 is ring cheese,
Circular main piezoelectric patches and annular auxiliary piezoelectric patches parallel coaxial are installed, each other distance(N+x)The minimum wave length of sound of times medium, this
Planting shape and mounting means minimizes wall and corner effect, makes acoustic emission and receives symmetrically and evenly, is further ensured that measurement essence
Degree.
The center line of circular main piezoelectric patches 7 of the present invention is same center line with the center line of annular auxiliary piezoelectric patches 5.It
It can be further ensured that circular main piezoelectric patches 7, annular auxiliary 5 two piezoelectric patches of piezoelectric patches spatially in the state that is parallel to each other, generation
Sound path it is accurate, and differ a fixed range on Acoustic Wave Propagation direction, further improve measurement accuracy.
Between the upper surface of the piezoelectric sealed acoustic impedance matching layer 8 of master of the present invention and auxiliary piezoelectric sealed acoustic impedance matching layer 6
Fixed range is set.This distance is the path difference between circular main piezoelectric patches and annular auxiliary piezoelectric patches, is taken (N+x) of wavelength
Times, wherein N round numbers, x is the decimal between 0-1, and preferred plan is that N=0, x takes 0.6-0.8.For example:Assuming that ultrasonic frequency
Select 150KHZ, if the minimum wavelength of measured medium be 2.5mm, then major-minor path difference can select be:1.5 - 2mm.
Two transducers of the present invention, are separately mounted to the two ends of flow velocity shielded-plate tube by transducer of the present invention when using,
Or one end uses transducer of the prior art, makes two main piezoelectric patches of circle on transducer towards insides of pipes, wherein
Main sound path is produced between the circular main electric piece of circular main piezoelectric patches and the offside transducer of side transducer, with annular auxiliary piezoelectric patches
Between formed auxiliary sound path, there is circular main tabletting and annular on path difference, that is, transducer between main sound path and auxiliary sound path
The distance between auxiliary piezoelectric patches difference, it is poor using the signal time measured between circular main piezoelectric patches and annular auxiliary piezoelectric patches, then
The static velocity of sound of measured medium is calculated further according to the path difference between main and auxiliary piezoelectric patches, then further according to two transducers it
Between between circular main piezoelectric patches measurement obtain poor along the sonication times of the positive anti-spread in media flow direction, further according to the quiet of medium
Only the velocity of sound calculates media flow speed, so as to complete the measurement of gas flow.
Claims (7)
1. a kind of alliteration journey bimorph ultrasonic transducer, it is characterised in that:Including shell(1), shell(1)It is upper that annular is set
Boss(14), annular boss(14)On open up circular trough(4), annular boss(14)Annular mounting groove is opened up at outer wall(3), annular
Mounting groove(3)It is interior that annular auxiliary piezoelectric patches is installed(5), annular auxiliary piezoelectric patches(5)Upper surface auxiliary piezoelectric sealed acoustic impedance is set
With layer(6), circular trough(4)It is interior that circular main piezoelectric patches is installed(7), circular main piezoelectric patches(7)Upper surface set master it is piezoelectric sealed
Acoustic impedance matching layer(8), annular auxiliary piezoelectric patches(5)Internal diameter be more than circular main piezoelectric patches(7)Diameter, circular main piezoelectric patches
(7)With annular auxiliary piezoelectric patches(5)In vertical direction, fixed range, annular boss are set(14)Middle part opens up the first fairlead
(10), the first fairlead(10)The first wire of interior setting(13), the first wire(13)Through shell(1)Positioned at shell(1)Outside,
Shell(1)Under-filled adhesive layer(9).
2. a kind of alliteration journey bimorph ultrasonic transducer according to claim 1, it is characterised in that:Annular boss
(14)Upper edge be higher than shell(1)Upper edge, annular boss(14)Outer surface of upper is circular conical surface(12).
3. a kind of alliteration journey bimorph ultrasonic transducer according to claim 2, it is characterised in that:The circular conical surface
(12)Bottom and shell(1)Upper edge be generally aligned in the same plane in.
4. a kind of alliteration journey bimorph ultrasonic transducer according to claim 1, it is characterised in that:Annular mounting groove
(3)Inside open up the second fairlead(11), the second fairlead(11)The second wire of interior setting, second wire one end passes through adhesive layer
(9)Positioned at shell(1)It is outside.
5. a kind of alliteration journey bimorph ultrasonic transducer according to claim 1, it is characterised in that:Circular main piezoelectricity
Piece(7)Center line and annular auxiliary piezoelectric patches(5)Center line be same center line.
6. a kind of alliteration journey bimorph ultrasonic transducer according to claim 1, it is characterised in that:Master is piezoelectric sealed
Acoustic impedance matching layer(8)Upper surface and auxiliary piezoelectric sealed acoustic impedance matching layer(6)Between fixed range is set.
7. a kind of alliteration journey bimorph ultrasonic transducer according to claim 1, it is characterised in that:Circular main piezoelectricity
Piece(7)It is patty, annular auxiliary piezoelectric patches(5)It is ring cheese, circular main piezoelectric patches and annular auxiliary piezoelectric patches parallel coaxial are installed.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2016104328014 | 2016-06-17 | ||
CN201610432801.4A CN105973325A (en) | 2016-06-17 | 2016-06-17 | Dual-sound-distance dual-piezoelectric-patch ultrasonic transducer |
Publications (2)
Publication Number | Publication Date |
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CN107051851A true CN107051851A (en) | 2017-08-18 |
CN107051851B CN107051851B (en) | 2022-04-22 |
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CN201610432801.4A Pending CN105973325A (en) | 2016-06-17 | 2016-06-17 | Dual-sound-distance dual-piezoelectric-patch ultrasonic transducer |
CN201710078691.0A Active CN107051851B (en) | 2016-06-17 | 2017-02-14 | Double-sound-path double-piezoelectric-plate ultrasonic transducer |
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Application Number | Title | Priority Date | Filing Date |
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CN201610432801.4A Pending CN105973325A (en) | 2016-06-17 | 2016-06-17 | Dual-sound-distance dual-piezoelectric-patch ultrasonic transducer |
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CN110455359A (en) * | 2019-08-28 | 2019-11-15 | 杭州乾博科技有限公司 | A kind of ultrasonic water meter and metering method |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20040171936A1 (en) * | 2003-02-27 | 2004-09-02 | Murata Manufacturing Co., Ltd. | Ultrasonic transmitting/receiving device and method for fabricating the same |
CN103245384A (en) * | 2013-03-18 | 2013-08-14 | 武汉四方光电科技有限公司 | Ultrasonic flow gas chamber for ultrasonic gas meter |
CN105268619A (en) * | 2015-11-19 | 2016-01-27 | 浙江大学 | Gas ultrasonic transducer with metal protection film structure at front end of matching layer |
CN206854039U (en) * | 2016-06-17 | 2018-01-09 | 济南新盛电子科技有限公司 | A kind of alliteration journey bimorph ultrasonic transducer |
-
2016
- 2016-06-17 CN CN201610432801.4A patent/CN105973325A/en active Pending
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2017
- 2017-02-14 CN CN201710078691.0A patent/CN107051851B/en active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20040171936A1 (en) * | 2003-02-27 | 2004-09-02 | Murata Manufacturing Co., Ltd. | Ultrasonic transmitting/receiving device and method for fabricating the same |
CN103245384A (en) * | 2013-03-18 | 2013-08-14 | 武汉四方光电科技有限公司 | Ultrasonic flow gas chamber for ultrasonic gas meter |
CN105268619A (en) * | 2015-11-19 | 2016-01-27 | 浙江大学 | Gas ultrasonic transducer with metal protection film structure at front end of matching layer |
CN206854039U (en) * | 2016-06-17 | 2018-01-09 | 济南新盛电子科技有限公司 | A kind of alliteration journey bimorph ultrasonic transducer |
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CN107051851B (en) | 2022-04-22 |
CN105973325A (en) | 2016-09-28 |
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