CN107045139A - The real-time diagnosis method and system of a kind of plasma electron density and energy - Google Patents
The real-time diagnosis method and system of a kind of plasma electron density and energy Download PDFInfo
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- CN107045139A CN107045139A CN201611008141.3A CN201611008141A CN107045139A CN 107045139 A CN107045139 A CN 107045139A CN 201611008141 A CN201611008141 A CN 201611008141A CN 107045139 A CN107045139 A CN 107045139A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/36—Measuring spectral distribution of X-rays or of nuclear radiation spectrometry
- G01T1/366—Measuring spectral distribution of X-rays or of nuclear radiation spectrometry with semi-conductor detectors
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/29—Measurement performed on radiation beams, e.g. position or section of the beam; Measurement of spatial distribution of radiation
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Abstract
The present invention combines multi fiber beam, spectrometer and the EMICCD cameras of different length to realize many framings diagnosis plasma electron densities and energy Temporal Evolution in real time.Fixed when the shutter moment of high speed camera, transmission light represents the light of earliest time in the most long sub-optical fibre of the multi fiber beam of different length, and transmission light represents the light of latest time in most short sub-optical fibre.The optical fiber length difference of multi fiber beam is equal, and equal to shutter exposure time, to avoid light in time overlapping.Between fibre bundle enough space lengths with separated light, avoid space optical coupling.Different delay light enters spectrum after spectrometer by single tandem Coupler slot and is unfolded, enter back into high speed camera and divide picture into, the picture of high speed camera different subregions is microwave plasma spectrum not in the same time, according to the Stark broadening of plasma optical emission spectroscopy line, luminescence of plasma spectrum line ratio, the density and energy of plasma can be obtained with nanosecond evolutionary process, many framing time delays are smaller than 1ns.
Description
Technical field
The invention belongs to high power microwave plasma diagnostic techniques field, more particularly to a kind of single nanosecond microwave arteries and veins
Many framings diagnose the system and method for plasma electron densities and energy Temporal Evolution in real time in punching.
Background technology
In High-Power Microwave generation device, medium window ensures that microwave produces required vacuum environment, radiation microwave, and being must
Indispensable important component.It is particularly high-power, small with the raising of the peak power and pulse width of high-power pulsed ion beams
The development of type microwave device, medium window microwave surface, which punctures, has become the transmission of limitation High-Power Microwave and emission system power
The main bottleneck of raising.Puncture the inlet side for occurring mainly in medium window, it is triggered by Secondary-emission multipbcation, be in dielectric surface
Discharge the plasma avalanche of ionization electric discharge in gas blanket.
High-Power Microwave medium window breakdown test finds that plasma spectral line is changed in each microwave pulse, main former
Because being that dielectric surface absorbs gas and composition, surface pressure and can be continually changing during Nanosecond discharge, and triggering time delay and
The shake of power output.Accordingly, it would be desirable in single microwave pulse, diagnose plasma spectral line.
Because HPM produces microwave time jitter scope greatly, the side accumulated by single width high speed camera in multiple microwave pulse
The temporal information that is overlapping, can not obtaining plasma of fluorescent lifetime occurs in method.
Existing EMICCD cameras have the advantages that high-gain, nanosecond shutter, but due to system delay time length, in single
It is only capable of realizing that single width is imaged in microwave pulse.Many framing high speed cameras can diagnose several plasmas in single microwave pulse
Time delay most short is 5ns between spectral line, in the world existing most much faster framing high speed camera, adjacent framing, and 10GHz microwaves
Cycle is 0.1ns, and 5ns has been 50 cycles, is developed if necessary to shoot shorter time interlude, then without any equipment
It can realize.
The content of the invention
The technical problems to be solved by the invention, which are to provide one kind, to implement many points in single nanosecond microwave pulse
Width diagnoses the method and system of plasma electron density and energy, it is possible to achieve the temporal evolution of 1ns magnitude time intervals is examined
It is disconnected.
The technical solution of the present invention is to provide the real-time diagnosis method of a kind of plasma electron density and energy, bag
Include following steps：
1) light that plasma is sent enters simultaneously exports different delay light after the sub-optical fibre beam of multiple different lengths, described
The sub-optical fibre beam of multiple different lengths is made up of the optical fiber of multiple equal lengths respectively；Fiber lengths between adjacent sub-optical fibre beam
Difference is equal, and its length difference is equal to shutter exposure time；
Spacing between the output end longitudinal arrangement of the sub-optical fibre beam of the multiple different length and adjacent sub-optical fibre beam is extremely
It is 2 times of fibre diameter less；
2) different delay light enters spectrum after spectrometer and is unfolded；Enter back into high speed camera and divide picture into, high speed camera is not
Picture with subregion is microwave plasma spectrum not in the same time；
3) plasma spectrometry progress Stark broadening to a certain moment, the analysis of hot dopplerbroadening obtain plasma
Luminescence spectrum, the halfwidth for obtaining Stark broadening according to Lorentz lorentz and gauss of distribution function deconvolution is close to obtain plasma
Degree obtains hot dopplerbroadening to obtain the temperature of emitter according still further to Lorentz lorentz and gauss of distribution function deconvolution, passes through difference
The multi fiber beam of length obtains the density and energy parameter of plasma not in the same time, obtains it with nanosecond evolutionary process.
Present invention also offers the real-time diagnosis system of a kind of plasma electron density and energy, its special feature exists
In：Including plasma emission body, fibre bundle, spectrometer and camera, the output end and fibre bundle of above-mentioned plasma emission body
Input connection, the input of above-mentioned fibre bundle is single hemispherical, for detecting the luminous of the same space position；Above-mentioned light
The output end of fine beam is single longitudinal arrangement, and the output end of the fibre bundle is connected with spectrometer input port；Above-mentioned spectrometer
Delivery outlet is connected with camera；
Above-mentioned fibre bundle includes the different sub-optical fibre beam of multiple length；Above-mentioned sub-optical fibre beam includes the light of multiple equal lengths
It is fine；
Overlapped in time after reaching spectrometer in order to avoid the light of each beamlet, the adjacent sub-optical fibre beam of output end
Between length difference it is equal be Δ dm, corresponding delay time is 5 Δ d ns/m, the exposure of above-mentioned length difference and above-mentioned spectrometer
Time is identical；
In order to avoid the light in adjacent beamlet is in Space Coupling, the spacing between the adjacent beamlet of output end is at least 2
The diameter of times optical fiber.Concrete methods of realizing：Extended spread can be closely lined up by fibre bundle, two optical fiber heads at middle interval are concentrated
Muffle, not to input light.
Above-mentioned plasma emission body includes microwave introduction window, vacuum chamber, microwave output medium window and observation window, described micro-
Ripple input window be located at vacuum chamber top, the microwave output medium window be located at vacuum chamber bottom, the observation window be located at
The side of the contour vacuum chamber of medium window, the input of the fibre bundle is from outside window towards microwave output medium window.
Above-mentioned plasma emission body includes microwave introduction window, vacuum chamber, microwave output medium window and observation window, above-mentioned micro-
Ripple output medium window is located at the bottom of vacuum chamber, and above-mentioned microwave introduction window is located at vacuum chamber side and microwave introduction window is just to described
Medium window, above-mentioned observation window is located at the top of vacuum chamber, and the input of above-mentioned fibre bundle is just exported to microwave outside window to be situated between
Matter window.
Above-mentioned camera is EMICCD cameras.
Above-mentioned fibre bundle also includes many positioning optical fiber, the output end of above-mentioned positioning optical fiber be located at adjacent sub-optical fibre beam it
Between, the input shading treatment of above-mentioned positioning optical fiber.
The present invention also provides the real-time diagnosis system of another plasma electron density and energy, and its special feature exists
In：Including plasma emission body, fibre bundle, multiple spectrometers and camera, the output end and light of above-mentioned plasma emission body
The input connection of fine beam, the input of above-mentioned fibre bundle is single hemispherical, for detecting the luminous of the same space position；On
The output end for stating fibre bundle is single longitudinal arrangement, and the output end of above-mentioned fibre bundle is connected with spectrometer input port；Above-mentioned spectrum
The delivery outlet of instrument is connected with camera；
Above-mentioned fibre bundle includes the different sub-optical fibre beam of multiple length；Above-mentioned sub-optical fibre beam includes the light of multiple equal lengths
It is fine；
Length difference Δ dm between the adjacent sub-optical fibre beam of output end corresponds to the time for exposure of above-mentioned spectrometer；
Spacing between all adjacent beamlets corresponding with same spectrometer is at least the diameter of 2 times of optical fiber.
The time for exposure of multiple spectrometers is identical or different.Pass through multiple spectrometers, it is possible to achieve more framings.It is identical to expose
Multiple spectrometers between light time, can see the image of continuous many framings, and multiple spectrometers of different exposure time, observable is different
The pattern evolution of period.The different exposure time of multiple spectrometers can be by passing through a time delay by an optical signal
Device is realized.
Plasma emission body bag in the real-time diagnosis system of above-mentioned alternative plasma electron density and energy
Microwave introduction window, vacuum chamber, microwave output medium window and observation window are included, the microwave introduction window is located at the top of vacuum chamber, institute
The bottom that microwave output medium window is located at vacuum chamber is stated, the observation window is located at the side of the vacuum chamber contour with medium window, institute
The input of fibre bundle is stated from outside window towards microwave output medium window.
For the ease of connecting multiple spectrometers, the real-time diagnosis system of above-mentioned alternative plasma electron density and energy
Plasma emission body in system can also be：Including microwave introduction window, vacuum chamber, medium window and observation window, the medium window
Positioned at the bottom of vacuum chamber, the microwave introduction window is located at the window of vacuum chamber side and microwave introduction window just to the medium
Window, the observation window is located at the top of vacuum chamber, and the input of above-mentioned fibre bundle is from outside window just to microwave output medium window.
Above-mentioned camera can be EMICCD cameras.
The beneficial effects of the invention are as follows：
1st, multi fiber beam, spectrometer and the EMICCD cameras of invention joint different length are to realize many points in real time
Width diagnoses plasma electron density and energy Temporal Evolution；
2nd, fixed when the shutter moment of high speed camera, transmission light is represented in the most long sub-optical fibre of the multi fiber beam of different length
The light of earliest time, and transmission light represents the light of latest time in most short sub-optical fibre；
3rd, the optical fiber length difference of multi fiber beam is equal, and equal to shutter exposure time, to avoid the weight of light in time
It is folded；
4th, space length enough between fibre bundle with separated light, avoid space optical coupling；
5th, different delay light is placed in the different upper-lower positions of single tandem, is entered by single tandem Coupler slot after spectrometer
Spectrum is unfolded, and is entered back into high speed camera and is divided picture into, the picture of high speed camera different subregions is microwave plasma not in the same time
Body spectrum, according to the Stark broadening of plasma optical emission spectroscopy line, luminescence of plasma spectrum line ratio, can obtain plasma
Density and energy with nanosecond evolutionary process, many framing time delays are smaller than 1ns.
Brief description of the drawings
Fig. 1 is the system schematic of embodiment one；
Fig. 2 is the system schematic of embodiment two；
Fig. 3 is the space hot spot of different length multi fiber beam；
Fig. 4 is the evolutionary process of plasma discharge spectral line；
Fig. 5 is electron density neWith ion energy TiWith the evolution of time.
Reference is in figure：1- medium windows；2- vacuum chambers；3- observation windows；4- fibre bundles；5- spectrometers；6- cameras；7-
Microwave introduction window.
Embodiment
Below in conjunction with drawings and Examples, the present invention will be further described.
Multi fiber beam 4, spectrometer 5 and the EMICCD cameras 6 of present invention joint different length, realize many framing diagnosis in real time
Plasma electron density and energy Temporal Evolution.Within the light launch time of Nanosecond discharge, multi fiber beam transmission light
Time sequencing is met：The light that is transmitted in most eldest son's fibre bundle reach the shutter of camera the latest, the light of earliest time is represented, most short
The light that is transmitted in sub-optical fibre beam reach the shutter of camera earliest, represent the light of latest time.
Multi fiber beam is divided into N number of sub-optical fibre beam, represents and N frame imagings can be achieved.Each sub-optical fibre beam of multi fiber beam
It is made up of the optical fiber of m equal length, the optical fiber length difference between adjacent sub-optical fibre beam (fibre bundle exit end is adjacent) is equal, and
And equal to shutter exposure time, overlapped in time after reaching spectrometer with the light for avoiding each beamlet.Adjacent sub-light
Optical fiber length difference between fine beam is defined as Δ d, length difference 1m correspondences 5ns time delay, therefore the corresponding time delays of length difference Δ d
5Δd(ns/m)。
The light of single optical fiber can cover and enough skies are reserved between adjacent optical fiber, fibre bundle according to Gaussian spatial distribution
Between distance, diameter (the usual n at a distance of n optical fiber>=3), for avoiding light in adjacent beamlet from spatially coupling.It is specific logical
Cross the input realization for covering the n optical fiber.
The multi fiber beam is that single smooth input head, output bundle are single extended spread.Single smooth input head is used to detect same
Locus it is luminous, it is same position that single extended spread, which is used to be connected to spectrometer, ensure,.Single tandem length is N times of (m+n)
Fibre diameter, it is necessary to less than the length of spectrometer input slit.More sub-optical fibres mean more framings spectrum in real time into
Picture.
By S spectrometer, more framings, the temporal evolution of SxN width can be achieved.The time for exposure of S spectrometer can be with
It is identical can also be different, the S spectrometer of identical time for exposure can see the image of continuous SxN framings, different exposure time
S spectrometer, the pattern evolution of observable different time sections.The different exposure time of S spectrometer can be by passing through a light
Signal is realized by a S roads time delay device.
The broadening of plasma optical emission spectroscopy line can be analyzed according to Stark broadening, hot dopplerbroadening, according to Lorentz lorentz
The halfwidth of Stark broadening is obtained with gauss of distribution function deconvolution to obtain plasma density, hot dopplerbroadening to obtain
To the temperature of emitter, the density and energy parameter of plasma not in the same time are obtained by the multi fiber beam of different length,
It is obtained with nanosecond evolutionary process.
Embodiment
The experimental provision of the present embodiment is as shown in figure 1, the microwave introduction window of microwave pulse is located at vacuum in the present embodiment
The top of room, dielectric chamber is located at the bottom of vacuum chamber, and observation window is arranged at the side of vacuum chamber, its particular location and dielectric chamber
Bottom is concordant, and the sub-optical fibre beam of different length is connected through observation window with spectrometer, delivery outlet and the EMICCD cameras of spectrometer
Connection.The optical fiber of different radii represents the optical fiber of different length in Fig. 1.The present invention can also provide experiment dress as shown in Figure 2
Put, medium window is located at the bottom of vacuum chamber, microwave introduction window is located at the window of vacuum chamber side and microwave introduction window just to described
Medium window, observation window is located at the top of vacuum chamber, and fibre bundle is connected through observation window with spectrometer.
In order to which medium/vacuum interface punctures luminous from positive side, three beam fiber-optics of different length, phase are devised
The length difference of adjacent optical fiber is 0.5m, equal to identical time delay 2.5ns, is also equal to the time for exposure 2.5ns of shutter, therefore
Avoid three-beam in time overlapping.The diameter of 3 optical fiber of space isolation distance between beamlet, it is to avoid adjacent sub-light
Shu Zhongguang is spatially coupled.Three beam fiber-optics of different length are connected to the input port of spectrometer, and the delivery outlet of spectrometer connects
Connect high speed camera, spatial resolution 13um/px, temporal resolution 0.25ns.The hot spot that three spaces of longitudinal arrangement separate is such as
Shown in Fig. 3, in figure, X-direction represents hot spot lateral dimension, and Y-direction represents the longitudinal size of hot spot, and right side amplitude represents brightness.
Different length multi fiber beam is combined with spectrometer, many framings can detect the evolutionary process of whole spectrum in real time.Typical experimental spectrum
Line is as shown in figure 4, the first width is named as ROI-1 than the early 5ns of the 3rd width ROI-3, every width time of integration 2.5ns.For picture letter
Clean, the second width ROI-2 is not shown.
Plasma light spectral line due to plasma electron collision and broadening, and the Stark exhibition being distributed according to Lorentz lorentz
Width, its halfwidth is corresponding with plasma density.For non-hydrogen atom, Lorentz lorentz's halfwidth Δ λLWith electron density neRelation expires
Foot：
ΔλL=2 × 10-16ωne(1+1.75×10-4ne 1/4α[1-0.068ne 1/6Te -1/2]) (1)
ω and α are electronics and ion parameters herein.
Emission spectra is also according to the halfwidth Δ λ of Gauss broadeningGCome convolution, including instrumental broadening Δ λIWith hot dopplerbroadening
ΔλD, meet relational expression Δ λG=(Δ λD 2+ΔλI 2)0.5.Dopplerbroadening Δ λDIt is relevant with the temperature of emitter, it is calculated as：
ΔλD=2 λG(ln2kTi/mic2)0.5 (2)
Ion energy T hereiniWith quality mi。
Lorentz lorentz and Gaussian Profile convolution cause Voigt to be distributed.By using Voigt fittings of distribution experiment spectral line and Fourier
Leaf is changed, and spectral line uncoupling obtains Δ λLWith Δ λGParameter, with quantitative calculating plasma density and ion temperature.
In background gas pressure 0.01Pa and quantitative feed-in Ar gas, HPM emission spectras are obtained by three light beams of different length
Evolution.10Pa Ar air pressure and field strength 40kV/cm, is become by the spectral line of 548.2nm in fitted figure 4, and using Fourier
Change, can obtain electron number densitiy and ion energy Temporal Evolution such as Fig. 5.
Claims (10)
1. the real-time diagnosis method of a kind of plasma electron density and energy, it is characterised in that：Comprise the following steps：
1) light that plasma is sent exports different delay light after entering the sub-optical fibre beam of multiple different lengths simultaneously；It is the multiple
The sub-optical fibre beam of different length is made up of the optical fiber of multiple equal lengths respectively, the optical fiber length difference phase between adjacent sub-optical fibre beam
Deng, and its length difference correspond to shutter exposure time, the output end longitudinal arrangement of the sub-optical fibre beam of the multiple different length and
Spacing between adjacent sub-optical fibre beam is at least 2 times of fibre diameter；
2) divide picture into high speed camera after the spectrum of different delay light is deployed by spectrometer, then high speed camera different subregions into
As being plasma spectrometry not in the same time；
3) Stark broadening and hot dopplerbroadening are carried out to the plasma spectrometry at a certain moment, analysis obtains plasma hair
Spectrum line, the halfwidth for obtaining Stark broadening according to Lorentz lorentz and gauss of distribution function deconvolution is close to obtain plasma
Degree, obtains hot dopplerbroadening to obtain the temperature of plasma according still further to Lorentz lorentz and gauss of distribution function deconvolution；
4) density and energy parameter of plasma not in the same time are obtained by the multi fiber beam of different length, it is obtained with receiving
Second evolutionary process.
2. the real-time diagnosis system of a kind of plasma electron density and energy, it is characterised in that：Including plasma emission body,
Fibre bundle, spectrometer and camera, the output end of the plasma emission body and the input of fibre bundle are connected, the fibre bundle
Input be single hemispherical, for detecting the luminous of the same space position；The output end of the fibre bundle is single longitudinal direction
Arrangement, the output end of the fibre bundle is connected with spectrometer input port；The delivery outlet of the spectrometer is connected with camera；
The fibre bundle includes the different sub-optical fibre beam of multiple length；The sub-optical fibre beam includes the optical fiber of multiple equal lengths；
Length difference Δ dm correspondences and the time for exposure of the spectrometer between the adjacent sub-optical fibre beam of output end；
Spacing between the adjacent beamlet of output end is at least the diameter of 2 times of optical fiber.
3. the real-time diagnosis system of plasma electron density according to claim 2 and energy, it is characterised in that：It is described
Plasma emission body includes microwave introduction window, vacuum chamber, microwave output medium window and observation window, and the microwave introduction window is located at
The top of vacuum chamber, the microwave output medium window is located at the bottom of vacuum chamber, and the observation window is located at and microwave output medium
The side of the contour vacuum chamber of window, the input of the fibre bundle is from outside window towards microwave output medium window.
4. the real-time diagnosis system of plasma electron density according to claim 2 and energy, it is characterised in that：It is described
Plasma emission body includes microwave introduction window, vacuum chamber, microwave output medium window and observation window, the microwave output medium window
Positioned at the bottom of vacuum chamber, the microwave introduction window is located at vacuum chamber side and microwave introduction window is just to the medium window, described
Observation window is located at the top of vacuum chamber, and the input of the fibre bundle is from outside window just to microwave output medium window.
5. according to the real-time diagnosis system of any described plasma electron density of claim 2 to 4 and energy, its feature exists
In：The camera is EMICCD cameras.
6. according to the real-time diagnosis system of any described plasma electron density of claim 2 to 4 and energy, its feature exists
In：The fibre bundle also includes many positioning optical fiber, and the output end of the positioning optical fiber is located between adjacent sub-optical fibre beam, described
Position the input shading treatment of optical fiber.
7. the real-time diagnosis system of a kind of plasma electron density and energy, it is characterised in that：Including plasma emission body,
Fibre bundle, multiple spectrometers and camera, the output end of the plasma emission body and the input of fibre bundle are connected, the light
The input of fine beam is single hemispherical, for detecting the luminous of the same space position；The output end of the fibre bundle is single
Longitudinal arrangement, the output end of the fibre bundle is connected with spectrometer input port；The delivery outlet of the spectrometer is connected with camera；
The fibre bundle includes the different sub-optical fibre beam of multiple length；The sub-optical fibre beam includes the optical fiber of multiple equal lengths；
Length difference Δ dm between the adjacent sub-optical fibre beam of output end corresponds to the time for exposure of the spectrometer；
Spacing between all adjacent beamlets corresponding with same spectrometer is at least the diameter of 2 times of optical fiber.
8. the real-time diagnosis system of plasma electron density according to claim 7 and energy, it is characterised in that：It is described
Plasma emission body includes microwave introduction window, vacuum chamber, microwave output medium window and observation window, and the microwave introduction window is located at
The top of vacuum chamber, the microwave output medium window is located at the bottom of vacuum chamber, and the observation window is located at and microwave output medium
The side of the contour vacuum chamber of window, the input of the fibre bundle is from outside window towards microwave output medium window.
9. the real-time diagnosis system of plasma electron density according to claim 7 and energy, it is characterised in that：It is described
Plasma emission body includes microwave introduction window, vacuum chamber, microwave output medium window and observation window, the microwave output medium window
Positioned at the bottom of vacuum chamber, the microwave introduction window is located at vacuum chamber side and microwave introduction window is just to the medium window, described
Observation window is located at the top of vacuum chamber, and the input of the fibre bundle is from outside window just to microwave output medium window.
10. according to the real-time diagnosis system of any described plasma electron density of claim 2 to 4 and energy, its feature
It is：The fibre bundle also includes many positioning optical fiber, and the output end of the positioning optical fiber is located between adjacent sub-optical fibre beam, institute
State the input shading treatment of positioning optical fiber.
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| CN109444142B (en) * | 2018-12-26 | 2021-05-28 | 哈工大机器人（岳阳）军民融合研究院 | Ion source circumferential spoke oscillation remote measurement system and measurement method |
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| CN107045139B (en) | 2017-12-08 |
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