CN107037558B - Supporting system and method for optical element with large radius-thickness ratio - Google Patents

Supporting system and method for optical element with large radius-thickness ratio Download PDF

Info

Publication number
CN107037558B
CN107037558B CN201710367052.6A CN201710367052A CN107037558B CN 107037558 B CN107037558 B CN 107037558B CN 201710367052 A CN201710367052 A CN 201710367052A CN 107037558 B CN107037558 B CN 107037558B
Authority
CN
China
Prior art keywords
supporting
area
optical element
support
quadrant
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201710367052.6A
Other languages
Chinese (zh)
Other versions
CN107037558A (en
Inventor
独伟峰
叶朗
秦廷海
徐旭
严寒
全旭松
贺群
李珂
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Laser Fusion Research Center China Academy of Engineering Physics
Original Assignee
Laser Fusion Research Center China Academy of Engineering Physics
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Laser Fusion Research Center China Academy of Engineering Physics filed Critical Laser Fusion Research Center China Academy of Engineering Physics
Priority to CN201710367052.6A priority Critical patent/CN107037558B/en
Publication of CN107037558A publication Critical patent/CN107037558A/en
Application granted granted Critical
Publication of CN107037558B publication Critical patent/CN107037558B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
  • Optical Couplings Of Light Guides (AREA)

Abstract

The invention discloses a supporting system and a method for an optical element with large radius-thickness ratio, which adopt four supporting points to replace a conventional huge annular supporting surface to support the optical element, effectively utilize the gravity of the optical element to reduce the influence of the gravity on the surface type of the optical element, and theoretically realize complete self-mutual compensation. The method greatly reduces the processing precision requirement on the supporting surface of the optical element, reduces the manufacturing cost and improves the efficiency of the engineering implementation process of the supporting system of the optical element. The supporting system adopts a point contact pair between the arc-shaped surface and the plane as a transmission link of the optical element supporting module, the upper supporting surface of the top shell can be self-adaptively adjusted to be in complete contact with the lower surface of the optical element, the local stress concentration generated on the optical element in the supporting process can be effectively reduced, and the surface type precision of the optical element is improved.

Description

Supporting system and method for optical element with large radius-thickness ratio
Technical Field
The invention relates to a supporting system and a supporting method for an optical element with a large radius-thickness ratio, belonging to the technical fields of mechanical design and mechanical analysis.
Background
With the continuous development of modern optical theory and engineering implementation technology thereof, large-diameter-thickness-ratio optical elements are in a very high frequency in a plurality of large-scale optical systems at home and abroad. Because the optical element has the characteristics of large radial dimension and small normal dimension, the conventional optical element circumferential support structure can realize the basic positioning requirement, but the middle part of the optical element can sink due to the influence of gravity and large-dimension span, so that the surface type precision of the optical element is influenced. In another aspect, the central portion of the optical element is a light-passing region, and the design of the optical system requires that no additional support structures be added in this region. Therefore, the design of the supporting structure of the optical element with large diameter-thickness ratio, which meets the requirement of higher surface type precision, becomes an important engineering problem in the field.
Disclosure of Invention
In view of the above, the present invention provides a supporting system and method for an optical element with a large aspect ratio, which uses four supporting points to replace a conventional huge annular supporting surface to support the optical element, and provides a specific supporting system design scheme, so as to realize high-surface-type precision supporting for the optical element with a large aspect ratio with a simple and easy structure.
A supporting method of a large-diameter-thickness-ratio optical element comprises the following steps of: the device comprises a two-quadrant outer support area, an upper support point, a one-quadrant outer support area, a one-quadrant inner support area, a right support point, a four-quadrant inner support area, a four-quadrant outer support area, a lower support point, a three-quadrant outer support area, a three-quadrant inner support area, a left support point and a two-quadrant inner support area; the quality of the closed loop formed by connecting lines between all the supporting points is equal, once the supporting points are determined, a segmentation method always exists, so that each connecting line between every two supporting points is provided with a local inner area and a local outer area, the local inner area and the local outer area are equal in quality and are in absolute geometric symmetry relative to the connecting line between the two supporting points, the two-quadrant outer supporting area and the two-quadrant inner supporting area are equal in area and are in symmetry relative to the connecting line between the upper supporting point and the left supporting point, the one-quadrant outer supporting area and the one-quadrant inner supporting area are equal in area and are in symmetry relative to the connecting line between the upper supporting point and the right supporting point, the four-quadrant inner supporting area and the four-quadrant outer supporting area are equal in area and are in symmetry relative to the connecting line between the right supporting point and the lower supporting point, and the three-quadrant outer supporting area and the three-quadrant inner supporting area are equal in area and are in symmetry relative to the connecting line between the lower supporting point and the left supporting point.
The basic supporting principle of the optical element is divided into two main types, namely a circumferential plane supporting principle and a circumferential multipoint supporting principle; the circumference plane supporting principle is that the circumference of the bottom surface of the horizontally placed optical element is supported by adopting an integral supporting surface; the principle is applied to the conventional optical element support, has no problem, but is extremely harsh to the surface type processing precision of a support surface for the optical element with the characteristics of large caliber and large warp-thickness ratio, and the support mode has the defect that the middle part of the optical element is obvious in sinking due to the action of gravity and cannot be compensated by other modes. Therefore, the circumferential multipoint support principle is an effective way to solve the problem of supporting the large-caliber large-warp-thickness-ratio optical element. To ensure long-term stability of the optical element support system, the number of support points should be kept at three points and above. In addition, in order to better embody the superiority of the circumferential multipoint support principle relative to the circumferential plane support principle, the processing and control requirements on the support plane are reduced, and the smaller the number of the support points is, the better the smaller the number of the support points is on the premise of meeting the actual use requirements.
Based on the above, the invention considers that the number of the supporting points and the layout of the supporting points of the circumferential multi-point support of the large-caliber large-warp-thickness-ratio optical element are determined, and the following two basic principles are required to be complied with. Principle one: the quality of the inner area and the quality of the outer area of the closed loop formed by connecting lines among all supporting points are equal, namely, the square formed by connecting lines among the four supporting points of the upper supporting point, the right supporting point, the lower supporting point and the left supporting point divides the optical element into an inner area formed by a first-quadrant inner supporting area, a fourth-quadrant inner supporting area, a third-quadrant inner supporting area and a second-quadrant inner supporting area and an outer area formed by a second-quadrant outer supporting area, a first-quadrant outer supporting area, a fourth-quadrant outer supporting area and a third-quadrant outer supporting area, and the quality of the inner area and the quality of the outer area are equal, namely, the area of the inner area and the area of the outer area are equal on the basic schematic diagram; principle two: once the supporting points are determined, a segmentation method always exists, so that each connecting line between every two supporting points has a local inner area and a local outer area, the local inner area and the local outer area are equal in mass and are in absolute geometric symmetry relative to the connecting line between the two supporting points, the two-quadrant outer supporting area and the two-quadrant inner supporting area are equal in area and are in symmetry relative to the connecting line between the upper supporting point and the left supporting point, the one-quadrant outer supporting area and the one-quadrant inner supporting area are equal in area and are in symmetry relative to the connecting line between the upper supporting point and the right supporting point, the four-quadrant inner supporting area and the four-quadrant outer supporting area are equal in area and are in symmetry relative to the connecting line between the right supporting point and the lower supporting point, and the three-quadrant outer supporting area and the three-quadrant inner supporting area are equal in area and are in symmetry relative to the connecting line between the lower supporting point and the left supporting point.
The principle one of the principle is that the internal area and the external area of the supporting point are mutually compensated in view of the whole principle, so that the whole plane distortion caused by gravity is reduced. The second principle is that the consideration of local detail makes the local inner area and the local outer area of the supporting point mutually compensate, so as to further reduce the local surface distortion caused by gravity. According to the basic principle and the principle, the number of the supporting points and the layout position relation of the invention shown in the basic principle diagram are determined.
The system comprises an optical element, a supporting module adjusting threaded hole, an optical element lower surface, a bottom frame groove surface, three supporting module installing threaded holes, four supporting modules, an elastic ring, a bottom frame lower surface, a bottom frame upper surface and a bottom frame; the optical element is a rectangular thin plate type transmission element, the bottom frame is a rectangular annular frame body part, the upper surface of the bottom frame is provided with a groove surface of the bottom frame, the midpoints of four sides of the groove surface of the bottom frame are respectively provided with a threaded hole, three of which are the supporting module mounting threaded holes, and the other one of which is the supporting module adjusting threaded hole; the support module is an assembly body for supporting the optical element;
the support module comprises a top shell, a movable cavity, a top shell threaded hole, an end rod, a secondary screw compression surface, a secondary screw, a primary threaded shaft, a secondary threaded shaft, an arc-shaped top surface and a top shell contact surface; the upper surface of the top shell is used for being in contact with the optical element; the top shell is a hollow block-like part with an opening at the lower part, and the inner cavity of the top shell is the movable cavity; the movable cavity is used for limiting the rotation of the secondary threaded shaft and the arc-shaped top surface in the movable cavity; the secondary threaded shaft and the arc-shaped top surface are screwed into the top shell threaded hole through threads and are screwed until the secondary threaded shaft and the arc-shaped top surface are separated from the top shell threaded hole and enter the movable cavity. The arc top surface is in contact with the top shell contact surface to realize the rotary motion of the top shell relative to the secondary screw;
the elastic ring comprises four turning beams, an upper ring surface, a lower ring beam and a lower ring surface, wherein the upper ring beam and the lower ring beam mainly play a role in shaping, the upper ring surface and the lower ring surface mainly play a role in contact installation, the four turning beams are elastic beams with two right-angle corners and are used for establishing elastic connection between the upper ring beam and the lower ring beam, along with the increase of the pressing force between the upper ring surface and the lower ring surface, the displacement change between the upper ring beam and the lower ring surface is relatively small, and the accurate adjustment of the position of a support module at a corresponding position relative to the normal direction of the optical element can be realized.
And each support module is in threaded connection with the support module mounting threaded hole of the bottom frame through a primary threaded shaft of the support module mounting threaded hole, and the secondary screw compression surface is in contact mounting with the lower surface of the bottom frame. And a support module is in threaded connection with the support module adjusting threaded hole of the bottom frame through a primary threaded shaft of the support module adjusting threaded hole, and the secondary screw compression surface is in contact installation with the lower annular surface. The elastic ring is sleeved on the outer surface of the primary threaded shaft and is in contact installation with the lower surface of the bottom frame through the upper ring surface of the elastic ring, the top shell guides the secondary threaded shaft and the arc-shaped top surface into the movable cavity through the threaded matching relation between the top shell threaded hole and the secondary threaded shaft, the arc-shaped top surface is in point contact installation with the top shell contact surface, the self-adaptive adjustment of two rotation degrees of freedom of the top shell relative to the secondary screw is achieved, and the optical element is in contact installation with the upper surfaces of the four top shells through the lower surface of the optical element.
The beneficial effects are that:
1. according to the supporting method of the optical element with the large diameter-thickness ratio, the four supporting points are adopted to replace the conventional huge annular supporting surface to support the optical element, so that the influence of gravity on the surface type of the optical element is effectively reduced by utilizing the gravity of the optical element, and complete self-compensation is theoretically realized. The method greatly reduces the processing precision requirement on the supporting surface of the optical element, reduces the manufacturing cost and improves the efficiency of the engineering implementation process of the supporting system of the optical element.
2. The supporting system of the optical element with large radius-thickness ratio adopts the point contact pair between the arc surface and the plane as a transmission link of the optical element supporting module, can adaptively adjust the upper supporting surface of the top shell to be in full contact with the lower surface of the optical element, can effectively reduce local stress concentration generated on the optical element in the supporting process, and improves the surface type precision of the optical element. The supporting system is based on the basic principle that a surface is determined by three points, an elastic ring structure is adopted for a fourth supporting module as a middle flexible connecting piece, and the fine adjustment function of the position of the fourth supporting module is realized, so that the state of four-point supporting required in the supporting method is technically ensured.
Drawings
FIG. 1 is a basic schematic of the present invention;
FIG. 2 is a schematic diagram of an embodiment of the present invention;
FIG. 3 is a schematic diagram of a large aspect ratio optical element support system according to the present invention;
FIG. 4 is a schematic view of a support module according to the present invention;
FIG. 5 is a schematic view of the elastic ring structure of the present invention.
Wherein, 1, optical element, 2, two-quadrant outer support zone, 3, upper support point, 4, one-quadrant outer support zone, 5, one-quadrant inner support zone, 6, right support point, 7, four-quadrant inner support zone, 8, four-quadrant outer support zone, 9, lower support point, 10, three-quadrant outer support zone, 11, three-quadrant inner support zone, 12, left support point, 13, two-quadrant inner support zone, 14, upper support surface, 15, right support surface, 16, upper deflection support surface, 17, lower support surface, 18, lower deflection support surface, 19, lower deflection support point, 20, upper deflection support point, 21, left support surface, 22, support module adjustment screw hole, 23, optical element lower surface, 24, bottom frame groove surface, 25, support module mounting screw hole, 26, support module, 27, elastic ring, 28, bottom frame lower surface, 29, bottom frame upper surface, 30, bottom frame, 31, top shell, 32, movable cavity, 33, top shell screw hole, 34, end rod, 35, second stage screw, 36, second stage screw, 37, second stage screw, lower shaft, upper ring surface, 37, lower ring screw, 40, lower ring surface, 45, arc-shaped upper ring surface, 43, arc-shaped upper ring surface, 44, lower ring surface, arc-shaped screw surface, upper ring surface, 43.
Detailed Description
The invention will now be described in detail by way of example with reference to the accompanying drawings.
The invention provides a supporting method of a large-diameter-thickness-ratio optical element, as shown in a figure 1, wherein the method divides a supporting area and supporting points on the optical element as follows: an optical element 1, a two-quadrant outer support area 2, an upper support point 3, a one-quadrant outer support area 4, a one-quadrant inner support area 5, a right support point 6, a four-quadrant inner support area 7, a four-quadrant outer support area 8, a lower support point 9, a three-quadrant outer support area 10, a three-quadrant inner support area 11, a left support point 12, a two-quadrant inner support area 13.
The basic supporting principle of the optical element can be divided into two main categories, namely a circumferential plane supporting principle and a circumferential multipoint supporting principle. The circumferential plane supporting principle is that an integral supporting surface is adopted to support the periphery of the bottom surface of the horizontally placed optical element. The principle is applied to the conventional optical element support, has no problem, but is extremely harsh to the surface type processing precision of a support surface for the optical element with the characteristics of large caliber and large warp-thickness ratio, and the support mode has the defect that the middle part of the optical element is obvious in sinking due to the action of gravity and cannot be compensated by other modes. Therefore, the multi-point support principle is an effective way for solving the problem of supporting the large-caliber large-warp-thickness-ratio optical element. To ensure long-term stability of the optical element support system, the number of support points should be kept at three points and above. In addition, in order to better embody the superiority of the circumferential multipoint support principle relative to the circumferential plane support principle, the processing and control requirements on the support plane are reduced, and the smaller the number of the support points is, the better the smaller the number of the support points is on the premise of meeting the actual use requirements. Based on the above, the invention considers that the number of the supporting points and the layout of the supporting points of the circumferential multi-point support of the large-caliber large-warp-thickness-ratio optical element are determined, and the following two basic principles are required to be complied with. Principle one: the mass of the inner area and the outer area of the closed loop formed by the connecting lines of all the supporting points should be equal, namely, in the invention, the square formed by the connecting lines of the four supporting points of the upper supporting point 3, the right supporting point 6, the lower supporting point 9 and the left supporting point 12 divides the optical element 1 into an inner area formed by the inner supporting area 5 in one quadrant, the inner supporting area 7 in four quadrants, the inner supporting area 11 in three quadrants and the inner supporting area 13 in two quadrants and an outer area formed by the outer supporting area 2 in one quadrant, the outer supporting area 4 in four quadrants and the outer supporting area 10 in three quadrants, and the mass of the inner area and the outer area are equal, which is shown as the area of the inner area and the outer area is equal on the basic principle diagram. Principle two: once the support points are determined, there is always a dividing method that each of the connecting lines between every two support points has a local inner area and a local outer area, and the local inner area and the local outer area have equal mass and are in an absolute geometric symmetry relation with respect to the connecting line between the two support points, namely, in the invention, the two-quadrant outer support area 2 and the two-quadrant inner support area 13 have equal areas and are in a symmetrical relation with respect to the connecting line between the upper support point 3 and the left support point 12, the one-quadrant outer support area 4 and the one-quadrant inner support area 5 have equal areas and are in a symmetrical relation with respect to the connecting line between the upper support point 3 and the right support point 6, the four-quadrant inner support area 7 and the four-quadrant outer support area 8 have equal areas and are in a symmetrical relation with respect to the connecting line between the right support point 6 and the lower support point 9, and the three-quadrant outer support area 10 and the three-quadrant inner support area 11 have equal areas and are in a symmetrical relation with respect to the connecting line between the lower support point 9 and the left support point 12. The principle one of the principle is that the internal area and the external area of the supporting point are mutually compensated in view of the whole principle, so that the whole plane distortion caused by gravity is reduced. The second principle is that the consideration of local detail makes the local inner area and the local outer area of the supporting point mutually compensate, so as to further reduce the local surface distortion caused by gravity. According to the basic principle and the principle, the number of the supporting points and the layout position relation of the invention shown in the basic principle diagram are determined. The upper supporting point 3, the right supporting point 6, the lower supporting point 9 and the left supporting point 12 are respectively positioned at the midpoints of the four sides of the optical element 1. The boundary lines of the optical element and the optical element between the upper supporting point 3, the right supporting point 6, the lower supporting point 9 and the left supporting point 12 divide the optical element into eight uniformly distributed areas, such as a two-quadrant outer supporting area 2, a one-quadrant outer supporting area 4, a one-quadrant inner supporting area 5, a four-quadrant inner supporting area 7, a four-quadrant outer supporting area 8, a three-quadrant outer supporting area 10, a three-quadrant inner supporting area 11 and a two-quadrant inner supporting area 13.
The implementation method shown in fig. 2 comprises an optical element 1, an upper supporting point 3, a right supporting point 6, a lower supporting point 9, a left supporting point 12, an upper supporting surface 14, a right supporting surface 15, an upper supporting surface 16, a lower supporting surface 17, a lower supporting surface 18, a lower supporting point 19, an upper supporting point 20 and a left supporting surface 21.
The basic principle of the invention is as follows: the layout positional relationship of the four support points upper support point 3, right support point 6, lower support point 9, left support point 12 with respect to the surface of the optical element has been determined. However, in practical implementations, the support point may not be a theoretical point, but a tiny plane. Therefore, in the implementation process, the upper supporting surface 14 is a micro-plane corresponding to the upper supporting point 3, the right supporting surface 15 is a micro-plane corresponding to the right supporting point 6, the upper supporting surface 16 is a micro-plane corresponding to the upper supporting point 20, the lower supporting surface 17 is a micro-plane corresponding to the lower supporting point 9, the lower supporting surface 18 is a micro-plane corresponding to the lower supporting point 19, and the left supporting surface 21 is a micro-plane corresponding to the left supporting point 12. The basic principle of determining a plane by three points is that once the positions of the supporting points 3, 6 and 12 are determined, the contact surface of the optical element 1 with them is determined. Due to the deviation of the heights of the supporting points 3, 6, 12 in the Z-axis direction and the surface shape error of the optical element 1 itself, it is possible that the lower supporting point 9 needs to be moved to the position corresponding to the lower supporting point 19 to be in contact with the surface of the optical element 1, and it is also possible that the lower supporting point 9 needs to be moved to the position corresponding to the upper supporting point 20 to be in contact with the surface of the optical element 1. Therefore, in order to ensure that the lower support point 9 and the optical element 1 can be sufficiently contacted and perform the same supporting function as the support point 3, the right support point 6, and the left support point 12, the lower support point 9 has a function of continuously fine-tuning in the Z-axis direction. In addition, on the premise that each supporting point is in contact with the surface of the optical element 1 in theory, it is impossible for each supporting surface to be in contact with the surface of the optical element in a perfectly coincident manner due to actual machining errors and the like. Thus, each of the upper support surface 14, the right support surface 15, the lower support surface 17, and the left support surface 21 has a function of adjusting about the X axis and a function of adjusting about the Y axis.
A schematic view of a large aspect ratio optical element support system is shown in fig. 3, which includes an optical element 1, a support module adjustment screw hole 22, an optical element lower surface 23, a bottom frame groove surface 24, three support module mounting screw holes 25, four support modules 26, an elastic ring 27, a bottom frame lower surface 28, a bottom frame upper surface 29, and a bottom frame 30. The optical element 1 is a rectangular sheet-like transmissive element. The bottom frame 30 is a rectangular annular frame-like member having a bottom frame recess surface 24 formed in the top surface 29 thereof. A threaded hole is provided at the midpoint of four sides of the bottom frame groove surface 24, three of which are the support module mounting threaded holes 25 and the other of which is the support module adjusting threaded hole 22. The elastic ring 27 is a three-dimensional complex structure. The support module 26 is an assembly for supporting the optical element 1.
A support module schematic as shown in fig. 4 includes a top shell 31, a movable cavity 32, a top shell threaded bore 33, an end stem 34, a secondary screw compression face 35, a secondary screw 36, a primary threaded shaft 37, a secondary threaded shaft 38, an arcuate top surface 39, and a top shell contact face 40. The upper surface of the top case 31 is for contact mounting with the optical element 1. The top shell 31 is a hollow block-like part with an opening at the lower part, and the inner cavity of the top shell is the movable cavity 32. The movable cavity 32 is adapted to limit rotation of the secondary threaded shaft 38 and the arcuate top surface 39 therein. The secondary threaded shaft 38 and arcuate top surface 39 are threaded into the top housing threaded bore 33 and tightened until it is disengaged from the top housing threaded bore 33 and into the movable cavity 32. The arcuate top surface 39 effects rotational movement of the top shell 31 relative to the secondary screw 36 by contact mounting with the top shell contact surface 40.
The elastic ring structure shown in fig. 5 includes four turning beams 41, an upper ring surface 42, an upper ring beam 43, a lower ring beam 44 and a lower ring surface 45. The upper ring beam 43 and the lower ring beam 44 mainly play a role in shaping. The upper and lower annular surfaces 42, 45 serve primarily for contact mounting. The four turning beams 41 are elastic beams having two right-angled corners for establishing elastic connection between the upper ring beam 43 and the lower ring beam 44. As the pressing force between the upper and lower annular surfaces 42, 45 increases, the displacement variation therebetween is relatively small, and precise adjustment of the position of the support module 26 with respect to the normal direction of the optical element 1 at the corresponding position can be achieved.
The whole connection relation is as follows:
at the positions corresponding to the three support module mounting threaded holes 25, each support module 26 is in threaded connection with the support module mounting threaded hole 25 of the bottom frame 30 through its own primary threaded shaft 37, and the secondary screw compression surface 35 is in contact mounting with the bottom frame lower surface 28. At the position corresponding to the support module adjusting threaded hole 22, a support module 26 is in threaded connection with the support module adjusting threaded hole 22 of the bottom frame 30 through its own primary threaded shaft 37, and the secondary screw compression surface 35 is in contact installation with the lower annular surface 45. The elastic ring 27 is sleeved on the outer surface of the primary threaded shaft 37 and is in contact installation with the lower surface 28 of the bottom frame through the upper ring surface 42. The top shell 31 guides the secondary threaded shaft 38 and the arcuate top surface 39 into the movable cavity 32 through a threaded mating relationship between the top shell threaded bore and the secondary threaded shaft 38. The arcuate top surface 39 is mounted in point contact with the top housing contact surface 40 to provide for adaptive adjustment of the two rotational degrees of freedom of the top housing 31 relative to the secondary screw 36. The optical element 1 is mounted in contact with the upper surfaces of the four top cases 31 through its own optical element lower surface 23.
In summary, the above embodiments are only preferred embodiments of the present invention, and are not intended to limit the scope of the present invention. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (1)

1. A supporting method of an optical element with large radius-thickness ratio is characterized in that the method divides a supporting area and supporting points on the optical element as follows: the device comprises a two-quadrant outer support area, an upper support point, a one-quadrant outer support area, a one-quadrant inner support area, a right support point, a four-quadrant inner support area, a four-quadrant outer support area, a lower support point, a three-quadrant outer support area, a three-quadrant inner support area, a left support point and a two-quadrant inner support area; the quality of the closed loop formed by connecting lines between all the supporting points is equal, once the supporting points are determined, a segmentation method always exists, so that each connecting line between every two supporting points is provided with a local inner area and a local outer area, the local inner area and the local outer area are equal in quality and are in absolute geometric symmetry relative to the connecting line between the two supporting points, the two-quadrant outer supporting area and the two-quadrant inner supporting area are equal in area and are in symmetry relative to the connecting line between the upper supporting point and the left supporting point, the one-quadrant outer supporting area and the one-quadrant inner supporting area are equal in area and are in symmetry relative to the connecting line between the upper supporting point and the right supporting point, the four-quadrant inner supporting area and the four-quadrant outer supporting area are equal in area and are in symmetry relative to the connecting line between the right supporting point and the lower supporting point, and the three-quadrant outer supporting area and the three-quadrant inner supporting area are equal in area and are in symmetry relative to the connecting line between the lower supporting point and the left supporting point.
CN201710367052.6A 2017-05-23 2017-05-23 Supporting system and method for optical element with large radius-thickness ratio Active CN107037558B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201710367052.6A CN107037558B (en) 2017-05-23 2017-05-23 Supporting system and method for optical element with large radius-thickness ratio

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201710367052.6A CN107037558B (en) 2017-05-23 2017-05-23 Supporting system and method for optical element with large radius-thickness ratio

Publications (2)

Publication Number Publication Date
CN107037558A CN107037558A (en) 2017-08-11
CN107037558B true CN107037558B (en) 2023-05-26

Family

ID=59539755

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201710367052.6A Active CN107037558B (en) 2017-05-23 2017-05-23 Supporting system and method for optical element with large radius-thickness ratio

Country Status (1)

Country Link
CN (1) CN107037558B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114777721A (en) * 2022-05-05 2022-07-22 中国科学院光电技术研究所 High-precision optical element surface shape detection supporting structure

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105022136A (en) * 2015-07-15 2015-11-04 中国科学院长春光学精密机械与物理研究所 Back supporting mechanism of reflector in aerial remote sensing camera
CN106405775A (en) * 2016-12-08 2017-02-15 中国科学院长春光学精密机械与物理研究所 Support adjustment mechanism applied to large-aperture dichroic mirror
CN207181781U (en) * 2017-05-23 2018-04-03 中国工程物理研究院激光聚变研究中心 A kind of support system of big radius-thickness ratio optical element

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105022136A (en) * 2015-07-15 2015-11-04 中国科学院长春光学精密机械与物理研究所 Back supporting mechanism of reflector in aerial remote sensing camera
CN106405775A (en) * 2016-12-08 2017-02-15 中国科学院长春光学精密机械与物理研究所 Support adjustment mechanism applied to large-aperture dichroic mirror
CN207181781U (en) * 2017-05-23 2018-04-03 中国工程物理研究院激光聚变研究中心 A kind of support system of big radius-thickness ratio optical element

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
《大口径超薄晶体的面形畸变分析和低应力新型夹持方法探索》;向勇 等;《中国激光》;20170228;第44卷(第2期);0208001-1至0208001-8 *

Also Published As

Publication number Publication date
CN107037558A (en) 2017-08-11

Similar Documents

Publication Publication Date Title
JP5719478B2 (en) 3D angle adjustment mechanism
EP3798725A1 (en) Two-degree-of-freedom and three-degree-of-freedom convertible spherical joint structure
CN103576283A (en) Rapid reflective mirror system based on flexible supports
CN203551874U (en) Fast reflecting mirror system based on flexible support
CN107037558B (en) Supporting system and method for optical element with large radius-thickness ratio
CN105179589A (en) Vibration isolator with adjustable three-dimensional rigidity
CN103293634B (en) Adjustable support device used for vertically placed big-caliber reflecting mirror
CN208268678U (en) A kind of camera adjustments mechanism and optical imaging system
CN102508352B (en) Two-dimensional angular fine-tuning regulating frame
CN102565983A (en) Axial fine-adjustment device for movable mirror
CN203337904U (en) Adjustable support apparatus for vertically-placed large-calibre reflecting mirror
US10605649B2 (en) Adjustable load transmitter
CN102073117B (en) Integral bidimensional optical adjusting frame
US11067124B2 (en) Planar rotary air bearing stage
CN114660899A (en) Flexible supporting platform system
TWI446045B (en) Optical adjusted mechanism
CN207181781U (en) A kind of support system of big radius-thickness ratio optical element
CN104533956A (en) Active compensation type low-swirl shaft-driven air bearing
CN201344990Y (en) Interferometer primary mirror adjusting mechanism
CN214279461U (en) Splicing structure of LED display screen box body
CN110440783A (en) The split type umbrella mechanical shaking device of laser gyro
CN113917646B (en) Three-degree-of-freedom fine tuning device for movable mirror
CN217765042U (en) Wafer detection calibration mechanism
CN108693616B (en) Installation adjusting device and installation adjusting method for columnar beam expander
CN108591259B (en) Magnetic suspension bearing

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant