CN107036868A - Device and method for preparing fused quartz optical component surface damage - Google Patents
Device and method for preparing fused quartz optical component surface damage Download PDFInfo
- Publication number
- CN107036868A CN107036868A CN201710464476.4A CN201710464476A CN107036868A CN 107036868 A CN107036868 A CN 107036868A CN 201710464476 A CN201710464476 A CN 201710464476A CN 107036868 A CN107036868 A CN 107036868A
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- Prior art keywords
- fused quartz
- optical component
- support arm
- control terminal
- quartz optical
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
- G01N1/286—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q involving mechanical work, e.g. chopping, disintegrating, compacting, homogenising
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
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- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Sampling And Sample Adjustment (AREA)
Abstract
The present invention relates to laser repairing field.The invention provides a kind of device and method for being used to prepare fused quartz optical component surface damage, the surface damage for artificially preparing fused quartz optical component, its repair process for deliberation, its technical scheme can be summarized as：Device for preparing fused quartz optical component surface damage, it is characterized in that, including optical table, two-dimension translational platform, diamond pressing, counter weight device, microscope, support meanss and control terminal, the two-dimension translational platform and support meanss are connected with control terminal respectively, controlled terminal control, microscope is connected with control terminal.The beneficial effects of the invention are as follows：It is simple and convenient, it is adaptable to the artificial surface damage for preparing fused quartz optical component.
Description
Technical field
The present invention relates to laser repairing technology, the more particularly to technology for preparing fused quartz optical component surface damage.
Background technology
The construction of high power solid-state laser device needs enormous amount, miscellaneous optical element, by taking NIF as an example, entirely
Device makes it not only turn into laser the biggest in the world, is also so far altogether comprising 7460 pieces of optical elements of large caliber (0.5~1.0m)
Maximum optical system untill the present.Due to fused quartz element surface manufacture, dress school and follow-up use during it is all inevitable
Contain various types of defects, such as cut, sub-surface crackle and pollutant, therefore in high flux action of ultraviolet laser
Under, the surface potential of fused quartz element must produce damage, and lesion size can with Laser emission number of times increase rapid growth,
Badly influence the stability and service life of optical element.By the bore of fused quartz element is big, consumption is big, expensive, such as
What suppresses rapid growth of the damage under post laser emitting times, is this kind of high power solid-state laser device reduction cost and reality
One of the problem of now operation steady in a long-term first has to solve.
Laser repairing technology is then that the damage field of fused quartz element is handled using laser, realizes and effectively suppresses to damage
Hinder the purpose of rapid growth.And the fused quartz element in high power solid-state laser device can not easily undercarriage (from fixing device
Take out), so how artificially preparing consistent therewith damage and studying its repair process then turns into the task of top priority, at present,
There are a kind of method that use laser irradiation prepares damage, but the bulk damage of the damage mostly optical element prepared by it, not
For surface damage, and the damage mostly surface damage of high power solid-state laser device undercarriage optical element, it is seen then that it is not right
Should.
The content of the invention
It is an object of the invention to provide a kind of device and method for being used to prepare fused quartz optical component surface damage, use
In the surface damage for artificially preparing fused quartz optical component, its repair process for deliberation.
The present invention solves its technical problem, and the technical scheme of use is, for preparing fused quartz optical component surface damage
Device, it is characterised in that including optical table, two-dimension translational platform, diamond pressing, counter weight device, microscope, support meanss
And control terminal, the two-dimension translational platform and support meanss are connected with control terminal respectively, controlled terminal control, microscope with
Control terminal is connected；
The two-dimension translational platform is placed on optical table, can be translated in the top surface plane direction of optical table,
For placing fused quartz optical component sample；
The support meanss include having fixing hole, support arm and fixing end on support arm and fixing end, the support arm
It is slidably connected；The diamond pressing includes syringe needle and backshank, has a protuberance between syringe needle and backshank, and the syringe needle is worn
Cross after the fixing hole on support arm and correspond to the upper surface of optical table, the projection of fixing hole in the horizontal direction is less than protuberance
Projection in the plane perpendicular to diamond pressing, so that the syringe needle of diamond pressing passes through protuberance after passing through fixing hole
It is placed on support arm, is supported by support arm, the diamond pressing is fixedly connected with counter weight device；
The microscope is fixed on support arm, and its camera lens corresponds to the upper surface of optical table, and microscope receives control
The control of terminal shoots photo and is uploaded to control terminal；
When the support arm is slided in fixing end, can make the syringe needle and microscope that are placed on support arm closer or far from
The upper surface of optical table；
Direction and distance when the control terminal is used to control the support arm to slide in fixing end, and control two dimension are put down
The translation that moving stage is carried out in the top surface plane direction of optical table, is additionally operable to control microscope photographing photo, receives and show
The photo that microscope is uploaded, and captured photo is measured and/or analyzed.
Specifically, the counter weight device is scale pan and counterweight, the scale pan is fixed on backshank, and counterweight is placed on counterweight
On disk.
Further, the counter weight device is scale pan and counterweight, and the scale pan is fixed between backshank and protuberance,
Counterweight is placed on scale pan.
Specifically, the protuberance is frustum type, the less one side of its area of section is close to syringe needle, the shape of the fixing hole
Shape is adapted with protuberance.
Further, the fixing end is fixed on optical table, and support arm, can parallel to optical table upper surface
In fixing end lifting carriage is carried out along the vertical direction in optical table upper surface.
Specifically, the microscope is light microscope.
Further, the control terminal is computer.
Method for preparing fused quartz optical component surface damage, using above-mentioned fused quartz optical component surface damage
Device, it is characterised in that comprise the following steps：
Step 1, the balance weight for selecting counter weight device according to the actual requirements, and fused quartz optical component sample is placed in two
Tie up on translation stage；
Step 2, by control terminal adjust two-dimension translational platform, fused quartz optical component sample is moved to and diamond pressure
The corresponding position of syringe needle of pin；
Step 3, by control terminal control support arm decline, make diamond pressing syringe needle drop to fused quartz optics member
Part sample upper surface, and kept for certain time, prepare the surface damage of fused quartz optical component sample；
Step 4, by control terminal control support arm rise, make the syringe needle of diamond pressing hanging；
Step 5, by control terminal adjust two-dimensional stage, fused quartz optical component sample is moved to and microscopical mirror
Corresponding position；
Step 6, by control terminal control support arm rise or fall so that microscope is in fused quartz optical component sample
Surface is focused；
Step 7, by microscope the surface damage of prepared fused quartz optical component sample is observed, or it is logical
The photo of surface damage described in control terminal control microscope photographing is crossed, and is uploaded to control terminal and is shown, is carried out simultaneously
Measurement and/or analysis.
Specifically, in step 3, the certain time is 15 seconds.
The beneficial effects of the invention are as follows pass through above-mentioned device and the side for being used to prepare fused quartz optical component surface damage
Method, the surface damage of the fused quartz optical component required for being gone out according to manual manufacture the need for researcher is simple and convenient,
The efficiency for preparing fused quartz optical component surface damage can be increased substantially.
Brief description of the drawings
Fig. 1 be the embodiment of the present invention in be used for prepare fused quartz optical component surface damage device diagrammatic cross-section；
Wherein, 1 is optical table, and 2 be two-dimension translational platform, and 3 be diamond pressing, and 4 be counterweight, and 5 be scale pan, and 6 be aobvious
Micro mirror, 7 be support meanss, and 8 be control terminal, and 9 be fused quartz optical component sample.
Embodiment
With reference to embodiment and accompanying drawing, technical scheme is described in detail.
The device of the present invention for being used to prepare fused quartz optical component surface damage, it includes optical table 1, two dimension
Translation stage 2, diamond pressing 3, counter weight device, microscope 6, support meanss 7 and control terminal 8, two-dimension translational platform 2 and support dress
Put 7 to be connected with control terminal 8 respectively, controlled terminal 8 is controlled, and microscope 6 is connected with control terminal；Two-dimension translational platform 2 is placed in
On optical table 1, it can be translated in the top surface plane direction of optical table 1, for placing fused quartz optical component sample
Product 9；Support meanss 7 include having fixing hole on support arm and fixing end, support arm, and support arm is slidably connected with fixing end；Gold
Hard rock pressing 3 includes syringe needle and backshank, has a protuberance between syringe needle and backshank, and syringe needle passes through the fixing hole on support arm
Correspond to the upper surface of optical table 1 afterwards, the projection of fixing hole in the horizontal direction is less than protuberance perpendicular to diamond pressure
Projection in the plane of pin 3, so that the syringe needle of diamond pressing 3 is placed on support arm after passing through fixing hole by protuberance
On, supported by support arm, diamond pressing 3 is fixedly connected with counter weight device；Microscope 6 is fixed on support arm, its camera lens
Corresponding to the upper surface of optical table 1, the control that microscope 6 receives control terminal 8 shoots photo and is uploaded to control terminal 8；
When support arm is slided in fixing end, the syringe needle and microscope that are placed on support arm can be made closer or far from optical table 1
Upper surface；Direction and distance when control terminal 8 is used to control the support arm to slide in fixing end, and control two-dimension translational platform
2 translations carried out in the top surface plane direction of optical table 1, are additionally operable to control microscope 6 and shoot photo, receive and show aobvious
The photo that micro mirror 6 is uploaded, and captured photo is measured and/or analyzed.
Embodiment
Being used in the embodiment of the present invention prepares the device of fused quartz optical component surface damage, its diagrammatic cross-section referring to
Fig. 1, it includes optical table 1, two-dimension translational platform 2, diamond pressing 3, counter weight device, microscope 6, support meanss 7 and control
Terminal 8.
Two-dimension translational platform 2 and support meanss 7 are connected with control terminal 8 respectively, and controlled terminal 8 is controlled, microscope 6 and control
Terminal connection processed.
Two-dimension translational platform 2 is placed on optical table 1, can be translated in the top surface plane direction of optical table 1, is used
In placement fused quartz optical component sample 9.
Support meanss 7 include having fixing hole on support arm and fixing end, support arm, and support arm is slided with fixing end to be connected
Connect.
Diamond pressing 3 includes syringe needle and backshank, has a protuberance between syringe needle and backshank, and syringe needle passes through support arm
On fixing hole after correspond to optical table 1 upper surface, the projection of fixing hole in the horizontal direction be less than protuberance vertical
Projection in the plane of diamond pressing 3, so that the syringe needle of diamond pressing 3 is placed after passing through fixing hole by protuberance
On support arm, supported by support arm, diamond pressing 3 is fixedly connected with counter weight device.Here, the syringe needle of diamond pressing
Shape can have any shape, syringe needle of different shapes can be equipped with according to the actual requirements, to prepare the surface of different-shape
Damage.
Microscope 6 is fixed on support arm, and its camera lens corresponds to the upper surface of optical table 1, and microscope 6 receives control eventually
The control at end 8 shoots photo and is uploaded to control terminal 8.
When support arm is slided in fixing end, the syringe needle and microscope 6 that are placed on support arm can be made closer or far from light
The upper surface of platform 1 is learned, the control that microscope 6 receives control terminal 8 shoots photo and is uploaded to control terminal 8.
Direction and distance when control terminal 8 is used to control the support arm to slide in fixing end, and control two-dimension translational
The translation that platform 2 is carried out in the top surface plane direction of optical table 1, is additionally operable to control microscope 6 and shoots photo, receive and show
The photo that microscope 6 is uploaded, and captured photo is measured and/or analyzed.
In this example, counter weight device can be fixed on backshank, can also fix for scale pan 5 and counterweight 4, scale pan 5
Between backshank and protuberance, counterweight 4 is placed on scale pan 5.
Here, it can be seen from Fig. 1, protuberance can be frustum type, and the less one side of its area of section is close to syringe needle, then solid
The shape and protuberance for determining hole are adapted, and this shape can make it that precision when diamond pressing 3 declines is higher.
In this example, fixing end can also be fixed on optical table 1, and support arm is preferably parallel to the upper table of optical table 1
Face, can be in fixing end along the direction progress lifting carriage that the upper surface of optical table 1 is vertical.
Because light microscope enlargement ratio is more particularly suitable relative to surface damage, therefore microscope is preferably optical microphotograph
Mirror.And control terminal 8 can be computer etc..
In use, including step in detail below：
Step 1, the balance weight for selecting counter weight device according to the actual requirements, and fused quartz optical component sample is placed in two
Tie up on translation stage.
Step 2, by control terminal adjust two-dimension translational platform, fused quartz optical component sample is moved to and diamond pressure
The corresponding position of syringe needle of pin.
Step 3, by control terminal control support arm decline, make diamond pressing syringe needle drop to fused quartz optics member
Part sample upper surface, and kept for certain time, prepare the surface damage of fused quartz optical component sample.
Here, through experiment gained, the certain time of holding is longer, and obtained surface damage size is bigger, but it is not
It is unlimited increase, reaches after a time point, its lesion size is not increasing, therefore preferably 15 seconds.
Step 4, by control terminal control support arm rise, make the syringe needle of diamond pressing hanging.
Step 5, by control terminal adjust two-dimensional stage, fused quartz optical component sample is moved to and microscopical mirror
Corresponding position.
Step 6, by control terminal control support arm rise or fall so that microscope is in fused quartz optical component sample
Surface is focused.
Step 7, by microscope the surface damage of prepared fused quartz optical component sample is observed, or it is logical
The photo of surface damage described in control terminal control microscope photographing is crossed, and is uploaded to control terminal and is shown, is carried out simultaneously
Measurement and/or analysis.
Although present disclosure is discussed in detail by above-mentioned preferred embodiment, but it should be appreciated that on
Give an account of to continue and be not considered as limitation of the present invention.When the personnel with professional knowledge and technical ability are reading the above
Afterwards, to the present invention a variety of modifications, instead of and evade and all will be apparent.Therefore, protection scope of the present invention should be by institute
Attached claim is limited.
Claims (9)
1. the device for preparing fused quartz optical component surface damage, it is characterised in that including optical table, two-dimension translational
Platform, diamond pressing, counter weight device, microscope, support meanss and control terminal, the two-dimension translational platform and support meanss difference
It is connected with control terminal, controlled terminal control, microscope is connected with control terminal；
The two-dimension translational platform is placed on optical table, can be translated, is used in the top surface plane direction of optical table
Place fused quartz optical component sample；
The support meanss include having fixing hole on support arm and fixing end, the support arm, and support arm is slided with fixing end
Connection；The diamond pressing includes syringe needle and backshank, has a protuberance between syringe needle and backshank, and the syringe needle passes through branch
Correspond to the upper surface of optical table after fixing hole in brace, the projection of fixing hole in the horizontal direction is less than protuberance and hung down
Directly in the projection in the plane of diamond pressing, so that the syringe needle of diamond pressing is placed after passing through fixing hole by protuberance
On support arm, supported by support arm, the diamond pressing is fixedly connected with counter weight device；
The microscope is fixed on support arm, and its camera lens corresponds to the upper surface of optical table, and microscope receives control terminal
Control shoot photo and be uploaded to control terminal；
When the support arm is slided in fixing end, the syringe needle and microscope that are placed on support arm can be made closer or far from optics
The upper surface of platform；
Direction and distance when the control terminal is used to control the support arm to slide in fixing end, and control two-dimension translational platform
The translation carried out in the top surface plane direction of optical table, is additionally operable to control microscope photographing photo, receives and show micro-
The photo that mirror is uploaded, and captured photo is measured and/or analyzed.
2. the device as claimed in claim 1 for being used to prepare fused quartz optical component surface damage, it is characterised in that described to match somebody with somebody
Refitting is set to scale pan and counterweight, and the scale pan is fixed on backshank, and counterweight is placed on scale pan.
3. the device as claimed in claim 1 for being used to prepare fused quartz optical component surface damage, it is characterised in that described to match somebody with somebody
Refitting is set to scale pan and counterweight, and the scale pan is fixed between backshank and protuberance, and counterweight is placed on scale pan.
4. the device as claimed in claim 1 for being used to prepare fused quartz optical component surface damage, it is characterised in that described prominent
Go out portion for frustum type, the less one side of its area of section is adapted close to syringe needle, shape and the protuberance of the fixing hole.
5. the device as claimed in claim 1 for being used to prepare fused quartz optical component surface damage, it is characterised in that described solid
Fixed end is fixed on optical table, and support arm, can be in fixing end along optical table upper table parallel to optical table upper surface
The vertical direction in face carries out lifting carriage.
6. the device as claimed in claim 1 for being used to prepare fused quartz optical component surface damage, it is characterised in that described aobvious
Micro mirror is light microscope.
7. being used for as described in claim any one of 1-6 prepares the device of fused quartz optical component surface damage, its feature exists
In the control terminal is computer.
8. the method for preparing fused quartz optical component surface damage, using the molten stone as described in claim any one of 1-7
The device of English optical element surface damage, it is characterised in that comprise the following steps：
Step 1, the balance weight for selecting counter weight device according to the actual requirements, and fused quartz optical component sample is placed in two-dimentional put down
In moving stage；
Step 2, by control terminal adjust two-dimension translational platform, fused quartz optical component sample is moved to and diamond pressing
The corresponding position of syringe needle；
Step 3, by control terminal control support arm decline, make the syringe needle of diamond pressing drop to fused quartz optical component sample
Product upper surface, and kept for certain time, prepare the surface damage of fused quartz optical component sample；
Step 4, by control terminal control support arm rise, make the syringe needle of diamond pressing hanging；
Step 5, by control terminal adjust two-dimensional stage, fused quartz optical component sample is moved to and microscopical camera lens pair
The position answered；
Step 6, by control terminal control support arm rise or fall so that microscope is in fused quartz optical component sample surfaces
It is focused；
Step 7, by microscope the surface damage of prepared fused quartz optical component sample is observed, or pass through control
The photo of surface damage described in terminal control microscope photographing processed, and be uploaded to control terminal and shown, measure simultaneously
And/or analysis.
9. the method as claimed in claim 8 for being used to prepare fused quartz optical component surface damage, it is characterised in that step 3
In, the certain time is 15 seconds.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710464476.4A CN107036868A (en) | 2017-06-19 | 2017-06-19 | Device and method for preparing fused quartz optical component surface damage |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710464476.4A CN107036868A (en) | 2017-06-19 | 2017-06-19 | Device and method for preparing fused quartz optical component surface damage |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107036868A true CN107036868A (en) | 2017-08-11 |
Family
ID=59542137
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710464476.4A Pending CN107036868A (en) | 2017-06-19 | 2017-06-19 | Device and method for preparing fused quartz optical component surface damage |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2078878U (en) * | 1990-08-13 | 1991-06-12 | 中国科学院固体物理研究所 | Instrument for measuring film adhesive force by scratch method |
| CN1077027A (en) * | 1993-04-16 | 1993-10-06 | 冶金工业部钢铁研究总院 | The measuring method of material surface film and basal body binding force and device |
| CN101413859A (en) * | 2008-12-12 | 2009-04-22 | 哈尔滨工业大学 | Method and system for testing material hardness |
| CN103257085A (en) * | 2012-02-21 | 2013-08-21 | 株式会社三丰 | Image processing device and method for image processing |
| CN103940736A (en) * | 2014-04-01 | 2014-07-23 | 上海交通大学 | Multifunctional scratch test device for thin film coating |
| CN203929512U (en) * | 2014-06-12 | 2014-11-05 | 湘潭大学 | A kind of fracture toughness of brittle materials and unrelieved stress in-situ synchronization proving installation |
-
2017
- 2017-06-19 CN CN201710464476.4A patent/CN107036868A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2078878U (en) * | 1990-08-13 | 1991-06-12 | 中国科学院固体物理研究所 | Instrument for measuring film adhesive force by scratch method |
| CN1077027A (en) * | 1993-04-16 | 1993-10-06 | 冶金工业部钢铁研究总院 | The measuring method of material surface film and basal body binding force and device |
| CN101413859A (en) * | 2008-12-12 | 2009-04-22 | 哈尔滨工业大学 | Method and system for testing material hardness |
| CN103257085A (en) * | 2012-02-21 | 2013-08-21 | 株式会社三丰 | Image processing device and method for image processing |
| CN103940736A (en) * | 2014-04-01 | 2014-07-23 | 上海交通大学 | Multifunctional scratch test device for thin film coating |
| CN203929512U (en) * | 2014-06-12 | 2014-11-05 | 湘潭大学 | A kind of fracture toughness of brittle materials and unrelieved stress in-situ synchronization proving installation |
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Application publication date: 20170811 |
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