CN107030061B - Probe cleaning device and probe cleaning method - Google Patents
Probe cleaning device and probe cleaning method Download PDFInfo
- Publication number
- CN107030061B CN107030061B CN201710227576.5A CN201710227576A CN107030061B CN 107030061 B CN107030061 B CN 107030061B CN 201710227576 A CN201710227576 A CN 201710227576A CN 107030061 B CN107030061 B CN 107030061B
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- China
- Prior art keywords
- probe
- rinse bath
- cleaning
- mould group
- cleaning agent
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B21/00—Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
- F26B21/004—Nozzle assemblies; Air knives; Air distributors; Blow boxes
Abstract
The invention discloses a kind of probe cleaning devices, probe cleaning device includes rinse bath, supersonic generator and control mould group, it controls mould group and is electrically connected supersonic generator, rinse bath holds cleaning agent and is installed on the workbench side of surface section difference measuring device, supersonic generator is placed in rinse bath, control mould group control supersonic generator drives cleaning agent to vibrate under ultrasonic frequency to clean probe, while controlling the depth that mould group control probe protrudes into cleaning agent liquid level.A kind of probe cleaning method is also disclosed in the present invention.By workbench be arranged probe cleaning device can in non-stop-machine situation periodic cleaning probe; avoid the accuracy that detecting probe surface speckles with spot or residue influences measurement; ultrasonic cleaning works well and stablizes; it is not in the anomalous effects probe measurement accuracy such as probe inclination; it protects probe not damaged, extends probe service life.
Description
Technical field
The present invention relates to thicknesses of layers testing fields, more particularly, to a kind of probe cleaning device and probe cleaning method.
Background technique
In the industries such as liquid crystal display, in order to accurately control the thickness of each film layer and the flatness of film surface, need more
The thickness of secondary measurement film layer and the difference in height of film layer each position.Probe-type surface section difference measurements mode is common test film thickness
The method of degree, probe-type surface section aberration measuring apparatus use probe contact measured surface, and probe is true according to the fluctuating on surface to be measured
Determine the thickness and difference in height of film surface, be used for a long time probe or equipment stagnate using too long can detecting probe surface generate spot or
Residue influences the accuracy of measurement, therefore needs often to carry out probe the operation holding detecting probe surface cleaning such as to clean.
In the prior art, staff wipes manually after the cleaning of probe needs to shut down, and manual wiping effect is decided by work
Make the gimmick of personnel, wiping effect is unstable, and be easy wiping it is improper cause probe inclination etc. anomalous effects probe measurement accuracy,
Even damage probe.
Summary of the invention
The technical problem to be solved in the present invention is to provide a kind of probe cleaning device and probe cleaning methods, existing to solve
Have manual wiping effect in technology unstable, and be easy wiping it is improper cause probe inclination etc. anomalous effects probe measurement accuracy,
The problem of even damaging probe.
In order to solve the above technical problems, the present invention provides a kind of probe cleaning device, for clean the surface segment difference measurement dress
The probe set, the probe cleaning device include rinse bath, supersonic generator and control mould group, the control mould group electrical connection
The supersonic generator, the rinse bath hold cleaning agent, and the supersonic generator is placed in the rinse bath, the control
Molding group controls the supersonic generator and the cleaning agent is driven to vibrate to clean the probe, simultaneously under ultrasonic frequency
The control mould group controls the depth that the probe protrudes into the cleaning agent liquid level.
Further, the control mould group further includes first control unit, and the first control unit records the probe and exists
The operating time of the surface segment difference test device, and the work of the supersonic generator is adjusted frequently according to the operating time
Rate and working time.
Further, the control mould group further includes the second control unit, and second control unit records the surface section
The maximum extension elongation of difference measuring device probe when working, and the probe is adjusted according to the maximum extension elongation and is protruded into
The depth of the cleaning agent liquid level.
Further, the surface section difference measuring device includes workbench, and the rinse bath is mounted on by elevating screw
The side of the workbench, the control mould group include the first driving unit, and first driving unit controls driving motor
The rinse bath is driven to go up and down by the elevating screw, to control the depth that the probe protrudes into the cleaning agent liquid level.
Further, the surface section difference measuring device further includes blowning installation and movable arm, and the activity arm includes
The outer wall of the rinse bath is fixed in first arm and the second arm, first arm one end, and hinged second arm of the other end is described
The hinged blowning installation of the second arm other end, when the activity arm blows to the probe for adjusting the blowning installation
Angle.
Further, the control mould group further includes the second driving unit, and second driving unit controls the movable hand
The posture of arm is to adjust the angle when blowning installation blows to the probe.
Further, the quantity of the blowning installation is multiple, and the quantity of the activity arm is multiple, each activity
Arm adjusts the air blowing angle of a blowning installation, and multiple blowning installations are for simultaneously from multiple angles to the spy
Needle insufflation.
Further, the blowning installation is additionally provided with filtration core, for filtering the impurity in gas.
Further, the probe cleaning device further includes storage chamber, for storing the cleaning agent, the storage chamber and institute
Rinse bath connection is stated, and is equipped with pump between the storage chamber and the rinse bath, the pump is for by the institute of the storage chamber
It states cleaning agent and injects the rinse bath cleaning probe, or the cleaning agent of the rinse bath is injected into the storage chamber and is stored up
It deposits.
The present invention also provides a kind of probe cleaning methods to provide probe for the probe of clean the surface segment difference measuring device
Cleaning device, the probe cleaning device include that rinse bath, supersonic generator and control mould group, the rinse bath are contained with clearly
Lotion, the probe protrudes into the probe in the rinse bath after carrying out one or many surface section difference measurements, described
Control mould group controls the supersonic generator and the cleaning agent is driven to vibrate to clean the probe, together under ultrasonic frequency
Shi Suoshu control mould group controls the depth that the probe protrudes into the cleaning agent liquid level.
Beneficial effects of the present invention are as follows: probe cleaning device is arranged by workbench can be in non-stop-machine situation
Periodic cleaning probe, avoiding detecting probe surface from speckling with spot or residue influences the accuracy of measurement, ultrasonic cleaning work well and
Stablize, be not in the anomalous effects probe measurement accuracy such as probe inclination, protection probe is not damaged, extends probe and uses the longevity
Life.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this
Some embodiments of invention for those of ordinary skill in the art without creative efforts, can be with
Other obvious modes of texturing are obtained according to these attached drawings.
Fig. 1 is the combination schematic diagram of the probe cleaning device that the embodiment of the present invention one provides and surface section difference measuring device.
Fig. 2 is the structural schematic diagram for the probe cleaning device that the embodiment of the present invention one provides.
Fig. 3 is the combination schematic diagram of probe cleaning device and surface section difference measuring device provided by Embodiment 2 of the present invention.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
Referring to Fig. 1, surface section difference measuring device 100 includes workbench 10, guide rail 20, motion bar 30, probe cleaning
Device 40 and probe unit 50.Specifically, workbench 10 includes opposite bottom surface 112 and working face 110 and connection bottom surface 112
With multiple non-working surfaces of working face 110, bottom surface 112 is fixed on ground or fixed bracket, and working face 110 is placed for tiling
Sample to be tested, in the present embodiment, sample to be tested is the glass for making the display panel of liquid crystal display, and sample to be tested can also
Think that other need to measure the device of thickness, difference in height or flatness.Guide rail 20 is fixed on the non-working surface of fixed platform, a kind of
In preferable embodiment, the quantity of guide rail 20 is two, and further, non-working surface includes a pair of first non-working surface 114
And connect the second non-working surface 116 of a pair of first non-working surface 114, two guide rails 20 be respectively symmetrically fixed on one it is first non-
On working face 114, and the length of guide rail 20 is greater than the size of working face 110 in a first direction.Motion bar 30 is set up in two and leads
On rail 20, and the guide rail 20 that is slidably connected.Specifically, the contact surface of guide rail 20 and motion bar 30 is higher than working face 110, motion bar 30
It is located on working face 110 after being set up on guide rail 20, and covers the size of the second direction of working face 110.It is a kind of preferable
In embodiment, the both ends of motion bar 30 are equipped with idler wheel, and motion bar 30 passes through idler wheel relative motion on guide rail 20.
Sliding block 60 is additionally provided on motion bar 30, sliding block 60 opposite sliding, probe unit 50 can be consolidated on motion bar 30
Dingan County passes through the position of position traveling probe device 50 of the mobile sliding block 60 on motion bar 30 loaded on sliding block 60.Further
, probe unit 50 includes the probe 504 in measuring mechanism 502 and insertion measuring mechanism 502, the direct contact measured of probe 504
The surface to be measured of sample, probe 504 rise and fall in surface stroke to be measured, and according to the fluctuating on surface to be measured, measuring mechanism 502 with
Probe 504 moves together, and the fluctuations of inducing probes 504, records and analyzes the difference in height of sample to be tested.
Motion bar 30 relatively moves on guide rail 20 realizes the freedom degree of probe unit 50 in a first direction, sliding block 60
Relative movement on motion bar 30 realizes the freedom degree of probe unit 50 in a second direction, therefore probe 504 can move
Any position for moving working face 110 carries out the measurement of thickness, flatness or difference in height.
Probe cleaning device 40 is located at workbench 10 along the one end in 20 direction of guide rail, i.e. the second non-working surface 116, is used for
Clean the probe 504 of probe unit 50.Probe cleaning device 40 includes rinse bath 402, supersonic generator 404 and control mould
Group, for holding cleaning agent, supersonic generator 404 is placed in rinse bath 402 rinse bath 402, and control mould group controls ultrasonic wave
Generator 404 drives cleaning agent to vibrate under ultrasonic frequency to clean probe 504, while controlling mould group control probe 504 and stretching
Enter the depth of cleaning agent liquid level.Further, rinse bath 402 is open-topped case type container, and the size of rinse bath 402
It is smaller, it is only used for that probe 504 can be accommodated.When cleaning probe 504, rinse bath is immersed or be totally immersed into 504 part of probe
402, supersonic generator 404 issues the ultrasonic wave that vibration frequency is not less than 20kHz, and ultrasonic wave is propagated in cleaning agent, drives
Cleaning agent vibration under ultrasonic frequency, and pass through the spot or residue on cavitation cleaning 504 surface of probe.
By workbench 10 be arranged probe cleaning device 40 can in non-stop-machine situation periodic cleaning probe 504,
The accuracy that 504 surface of probe speckles with spot or residue influences measurement is avoided, ultrasonic cleaning works well and stablizes, will not go out
504 measurement accuracy of anomalous effects probe such as the existing inclination of probe 504, protection probe 504 is not damaged, extends probe 504 and uses the longevity
Life.
Control mould group further includes first control unit, and first control unit records probe 504 in surface segment difference test device
100 operating time, and according to the working frequency of operating time adjustment supersonic generator 404 and working time.Specifically, visiting
Needle 504 is longer in the operating time of surface segment difference test device 100, and first control unit controls the work of supersonic generator 404
Working frequency is higher, the working time is longer.Further, control mould group further includes the second control unit, the second control unit record
The maximum extension elongation of probe 504 when surface section difference measuring device 100 works, and probe 504 is adjusted according to maximum extension elongation
Protrude into the depth of cleaning agent liquid level.
In the present embodiment, first side of the workbench 10 including placing rinse bath 402, i.e. the second non-working surface 116, first
The elevator (not shown) that side is equipped with elevating screw (not shown) and is sheathed on elevating screw, rinse bath 402 are solid
It is gone up and down due on elevator and driven by the motor by elevating screw.Specifically, motor drives elevating screw rotation, simultaneously
Rise or fall elevator along elevating screw, so that rinse bath 402 be made to rise or fall.Rinse bath 402 rise or under
Opening upwards are remained during drop, and before the rising of rinse bath 402, motion bar 30 first moves 504 position of probe
The surface of rinse bath 402 is moved, after rinse bath 402 rises, i.e., probe 504 declines with respect to rinse bath 402, by probe 504
It is soaked in rinse bath 402.Further, it is gone up and down by control rinse bath 402, can control probe 504 and be soaked in rinse bath
The degree of cleaning agent in 402, rinse bath 402 rise more, and the part that probe 504 is soaked in cleaning agent is more, or even complete
Portion is soaked in cleaning agent, and rinse bath 402 rises fewer, and the part that probe 504 is soaked in cleaning agent is fewer, or even only probe
504 pillow is soaked in cleaning agent.The degree difference that probe 504 is soaked in cleaning agent controls the cleaned portion of probe 504
Position.
In conjunction with Fig. 2, in the present embodiment, probe cleaning device 40 further includes storage chamber 406, for storing cleaning agent, is stored
Chamber 406 is connected to rinse bath 402, and pump 408 is equipped between storage chamber 406 and rinse bath 402, and pump 408 is used for storage chamber
406 cleaning agent injection rinse bath 402 cleans probe 504, or the cleaning agent injection storage chamber 406 of rinse bath 402 is stored.Into
One step, storage chamber 406 is closed cavity, can prevent from being stored in cleaning agent volatilization therein.In probe cleaning device 40
When work, the cleaning agent stored in storage chamber 406 is withdrawn and fed into rinse bath 402 by pump 408, and cleaning agent is in rinse bath 402
Middle cleaning probe 504；After cleaning, or for a long time without cleaning when, pump 408 by cleaning agent from rinse bath 402
Extraction, injects and is stored in storage chamber 406, the storage chamber 406 of sealing can save cleaning agent for a long time, and cleaning agent is avoided to wave
Hair waste, saves production cost.
By workbench 10 be arranged probe cleaning device 40 can in non-stop-machine situation periodic cleaning probe 504,
The accuracy that 504 surface of probe speckles with spot or residue influences measurement is avoided, ultrasonic cleaning works well and stablizes, will not go out
504 measurement accuracy of anomalous effects probe such as the existing inclination of probe 504, protection probe 504 is not damaged, extends probe 504 and uses the longevity
Life.
Referring to Fig. 3, the difference between this embodiment and the first embodiment lies in, surface section difference measurements dress provided in this embodiment
Setting 100 further includes blowning installation 80 and movable arm 70, and movable arm 70 includes the first arm 702 and the second arm 704, the first arm
The outer wall 4020 of rinse bath 402, hinged second arm 704 of the other end are fixed in 702 one end, and 704 other end of the second arm is hingedly blown
Device 80, movable arm 70 are used to adjust angle when blowning installation 80 blows to probe 504.Further, 702 He of the first arm
Second arm 704 can relatively rotate, and blowning installation 80 and the second arm 704 can also relatively rotate, thus by changing the first arm
702 and second the posture of arm 704 blowning installation 80 can be made to move in a certain range, it can adjust the position of blowning installation 80
Set height, tilt angle etc..Blowning installation 80 from different angles blows the probe 504 after the cleaning of rinse bath 402
Gas makes the cleaning agent for remaining on 504 surface of probe quickly volatilize, and shortens the time of the standing of probe 504, probe 504 can be immediately
It comes into operation again, accelerates measuring speed, to improve production capacity.
Control mould group further includes the second driving unit, and the posture of the second driving unit control activity arm 70 is blown with adjusting
Angle when device 80 blows to probe 504.
In the present embodiment, the quantity of blowning installation 80 be it is multiple, the quantity of movable arm 70 is multiple, each activity arm
70 adjust the air blowing angle of a blowning installation 80, and multiple blowning installations 80 are for simultaneously blowing to probe 504 from multiple angles.
Further, multiple blowning installations 80 around probe 504 and simultaneously to probe 504 blow, blowning installation 80 from different height, no
It blows with angle to probe 504, accelerates the volatilization of 504 surface cleaning agent of probe, probe 504 can come into operation again immediately,
Measuring speed is accelerated, to improve production capacity.
In the present embodiment, blowning installation 80 is additionally provided with filtration core, for filtering the impurity in gas.The air blowing of the present embodiment
The gas that device 80 uses is compressed air, may there is some impurity, filtration core impurity screening, one side in compressed air
It is the gas outlet for preventing impurity blocking blowning installation 80, is on the other hand that the impurity in compressed air is avoided to blow on probe 504
It pollutes probe 504 again afterwards, influences the accuracy of measurement.
The embodiment of the present invention also provides a kind of probe cleaning method, is measured using probe cleaning device 40.Probe
Cleaning device 40 includes that rinse bath 402, supersonic generator 404 and control mould group, rinse bath 402 hold cleaning agent and be installed on
10 side of workbench of surface section difference measuring device 100, probe 504 after carrying out one or many surface section difference measurements,
Probe 504 is protruded into rinse bath 402, control mould group control supersonic generator 404 drives cleaning agent under ultrasonic frequency
Vibration controls the depth that mould group control probe 504 protrudes into cleaning agent liquid level to clean probe 504.
S101, the placement sample to be tested of working face 110 in workbench 10.
Specifically, workbench 10 includes opposite bottom surface 112 and working face 110 and connection bottom surface 112 and working face 110
Multiple non-working surfaces, bottom surface 112 is fixed on ground or fixed bracket, and working face 110 places sample to be tested for tiling, this
In embodiment, sample to be tested is the glass for making the display panel of liquid crystal display, and sample to be tested may be that other are needed
Measure the device of thickness, difference in height or flatness.
S102, it is waited for along multiple directions in the traverse measurement of sample to be tested surface by guide rail 20 and the control probe 504 of sliding block 60
The thickness and difference in height of sample, and collect measurement numerical value.
Guide rail 20 is fixed on the non-working surface of fixed platform, and in a kind of preferable embodiment, the quantity of guide rail 20 is two
A, further, non-working surface includes a pair of first non-working surface 114 and connects the second non-of a pair of first non-working surface 114
Working face 116, two guide rails 20 are respectively symmetrically fixed on first non-working surface 114, and the length of guide rail 20 is greater than work
Make the size of face 110 in a first direction.Motion bar 30 is set up on two guide rails 20, and the guide rail 20 that is slidably connected.Specifically, leading
The contact surface of rail 20 and motion bar 30 is higher than working face 110, motion bar 30 be located at after being set up on guide rail 20 working face 110 it
On, and cover the size of the second direction of working face 110.In a kind of preferable embodiment, the both ends of motion bar 30 are equipped with
Idler wheel, motion bar 30 pass through idler wheel relative motion on guide rail 20.
Sliding block 60 is additionally provided on motion bar 30, sliding block 60 opposite sliding, probe unit 50 can be consolidated on motion bar 30
Dingan County passes through the position of position traveling probe device 50 of the mobile sliding block 60 on motion bar 30 loaded on sliding block 60.Further
, probe unit 50 includes the probe 504 in measuring mechanism 502 and insertion measuring mechanism 502, the direct contact measured of probe 504
The surface to be measured of sample, probe 504 rise and fall in surface stroke to be measured, and according to the fluctuating on surface to be measured, measuring mechanism 502 with
Probe 504 moves together, and the fluctuations of inducing probes 504, records and analyzes the difference in height of sample to be tested.
Motion bar 30 relatively moves on guide rail 20 realizes the freedom degree of probe unit 50 in a first direction, sliding block 60
Relative movement on motion bar 30 realizes the freedom degree of probe unit 50 in a second direction, therefore probe 504 can move
Any position for moving working face 110 carries out the measurement of thickness, flatness or difference in height.
S103, traveling probe 504 to probe cleaning device 40 clean probe 504.
Probe cleaning device 40 is located at workbench 10 along the one end in 20 direction of guide rail, i.e. the second non-working surface 116, is used for
Clean the probe 504 of probe unit 50.In the present embodiment, probe cleaning device 40 includes rinse bath 402 and supersonic generator
404, for holding cleaning agent, supersonic generator 404 is placed in rinse bath 402 rinse bath 402, for driving cleaning agent super
Vibration is under frequency of sound wave to clean probe 504.Further, rinse bath 402 is open-topped case type container, and rinse bath
402 size is smaller, is only used for that probe 504 can be accommodated.When cleaning probe 504,504 part of probe is immersed or all leachings
Enter rinse bath 402, supersonic generator 404 issues the ultrasonic wave that vibration frequency is not less than 20kHz, and ultrasonic wave passes in cleaning agent
It broadcasts, drives cleaning agent vibration under ultrasonic frequency, and pass through the cavitation cleaning spot on 504 surface of probe or residual
Slag.
By workbench 10 be arranged probe cleaning device 40 can in non-stop-machine situation periodic cleaning probe 504,
The accuracy that 504 surface of probe speckles with spot or residue influences measurement is avoided, ultrasonic cleaning works well and stablizes, will not go out
504 measurement accuracy of anomalous effects probe such as the existing inclination of probe 504, protection probe 504 is not damaged, extends probe 504 and uses the longevity
Life.
In the present embodiment, first side of the workbench 10 including placing rinse bath 402, i.e. the second non-working surface 116, first
The elevator that side is equipped with elevating screw and is sheathed on elevating screw, rinse bath 402 are fixed on elevator and in the band of motor
Pass through elevating screw under dynamic to go up and down.Specifically, motor drives elevating screw rotation, while increase along elevating screw elevator
Or decline, so that rinse bath 402 be made to rise or fall.Rinse bath 402 remained during rising or falling opening to
On, and before the rising of rinse bath 402,504 position of probe is first moved to the surface of rinse bath 402 by motion bar 30, clearly
After washing trough 402 rises, i.e., probe 504 declines with respect to rinse bath 402, and probe 504 is soaked in rinse bath 402.Further
, it is gone up and down by control rinse bath 402, can control the degree for the cleaning agent that probe 504 is soaked in rinse bath 402, cleaned
Slot 402 rises more, and the part that probe 504 is soaked in cleaning agent is more, or even is all soaked in cleaning agent, rinse bath 402
What is risen is fewer, and the part that probe 504 is soaked in cleaning agent is fewer, or even the pillow of only probe 504 is soaked in cleaning agent.
The degree difference that probe 504 is soaked in cleaning agent controls the cleaned position of probe 504.
In the present embodiment, probe cleaning device 40 further includes storage chamber 406, for storing cleaning agent, storage chamber 406 and clear
Washing trough 402 is connected to, and pump 408 is equipped between storage chamber 406 and rinse bath 402, and pump 408 is used for the cleaning of storage chamber 406
Agent injects rinse bath 402 and cleans probe 504, or the cleaning agent injection storage chamber 406 of rinse bath 402 is stored.Further, it stores up
Depositing chamber 406 is closed cavity, can prevent from being stored in cleaning agent volatilization therein.When probe cleaning device 40 works, pump
408 are withdrawn and fed into the cleaning agent stored in storage chamber 406 in rinse bath 402, and cleaning agent cleans probe in rinse bath 402
504；After cleaning, or for a long time without cleaning when, pump 408 is extracted cleaning agent out from rinse bath 402, and injection is simultaneously
It is stored in storage chamber 406, the storage chamber 406 of sealing can save cleaning agent for a long time, avoid cleaning agent volatilization waste, save
Production cost.
Surface section difference measuring device 100 provided in this embodiment further includes blowning installation 80 and movable arm 70, movable hand
Arm 70 includes the first arm 702 and the second arm 704, and the outer wall 4020 of rinse bath 402, other end hinge are fixed in 702 one end of the first arm
The second arm 704 is connect, the hinged blowning installation 80 of 704 other end of the second arm, movable arm 70 is for adjusting blowning installation 80 to probe
Angle when 504 air blowing.Further, the first arm 702 and the second arm 704 can relatively rotate, blowning installation 80 and the second arm
704 can also relatively rotate, to blowning installation 80 can be made one by the posture for changing the first arm 702 and the second arm 704
Determine to move in range, it can adjust height, the tilt angle etc. of blowning installation 80.Blowning installation 80 is from different angles
It blows to the probe 504 after the cleaning of rinse bath 402, so that the cleaning agent for remaining on 504 surface of probe is quickly volatilized, subtract
The time that short probe 504 is stood, probe 504 can come into operation again immediately, measuring speed be accelerated, to improve production
Energy.
In the present embodiment, the quantity of blowning installation 80 be it is multiple, the quantity of movable arm 70 is multiple, each activity arm
70 adjust the air blowing angle of a blowning installation 80, and multiple blowning installations 80 are for simultaneously blowing to probe 504 from multiple angles.
Further, multiple blowning installations 80 around probe 504 and simultaneously to probe 504 blow, blowning installation 80 from different height, no
It blows with angle to probe 504, accelerates the volatilization of 504 surface cleaning agent of probe, probe 504 can come into operation again immediately,
Measuring speed is accelerated, to improve production capacity.
In the present embodiment, blowning installation 80 is additionally provided with filtration core, for filtering the impurity in gas.The air blowing of the present embodiment
The gas that device 80 uses is compressed air, may there is some impurity, filtration core impurity screening, one side in compressed air
It is the gas outlet for preventing impurity blocking blowning installation 80, is on the other hand that the impurity in compressed air is avoided to blow on probe 504
It pollutes probe 504 again afterwards, influences the accuracy of measurement.
S104, the thickness for reusing 504 sample to be tested of probe and difference in height and cleaning probe 504.
By workbench 10 be arranged probe cleaning device 40 can in non-stop-machine situation periodic cleaning probe 504,
The accuracy that 504 surface of probe speckles with spot or residue influences measurement is avoided, ultrasonic cleaning works well and stablizes, will not go out
504 measurement accuracy of anomalous effects probe such as the existing inclination of probe 504, protection probe 504 is not damaged, extends probe 504 and uses the longevity
Life.
Above disclosed is only several preferred embodiments of the present invention, cannot limit the power of the present invention with this certainly
Sharp range, those skilled in the art can understand all or part of the processes for realizing the above embodiment, and weighs according to the present invention
Benefit requires made equivalent variations, still belongs to the scope covered by the invention.
Claims (9)
1. a kind of probe cleaning device, the probe for clean the surface segment difference measuring device, which is characterized in that the probe cleaning
Device includes rinse bath, supersonic generator and control mould group, and the control mould group is electrically connected the supersonic generator, described
Rinse bath holds cleaning agent and is installed on the workbench side of the surface section difference measuring device, and the supersonic generator is set
In the rinse bath, the control mould group controls the supersonic generator and the cleaning agent is driven to shake under ultrasonic frequency
It moves to clean the probe, while the control mould group controls the depth that the probe protrudes into the cleaning agent liquid level, the table
Face segment difference measuring device includes workbench, and the workbench includes working face, and the working face is to be measured for placement of tiling
Sample, for the probe in the surface stroke to be measured of sample to be tested, it is flat that the rinse bath by elevating screw is mounted on the work
The side of platform, the control mould group include the first driving unit, and the first driving unit control driving motor driving is described clear
Washing trough is gone up and down by the elevating screw, to control the depth that the probe protrudes into the cleaning agent liquid level.
2. probe cleaning device according to claim 1, which is characterized in that the control mould group further includes the first control list
Member, the first control unit record the probe in the operating time of the surface section difference measuring device, and according to the work
Working frequency and the working time of the supersonic generator are adjusted as duration.
3. probe cleaning device according to claim 2, which is characterized in that the control mould group further includes the second control list
Member, second control unit record the maximum extension elongation of probe when surface section difference measuring device work, and root
The depth that the probe protrudes into the cleaning agent liquid level is adjusted according to the maximum extension elongation.
4. probe cleaning device according to claim 3, which is characterized in that the surface section difference measuring device further includes blowing
Device of air and movable arm, the activity arm includes the first arm and the second arm, and the cleaning is fixed in first arm one end
The outer wall of slot, hinged second arm of the other end, the second arm other end hingedly use by the blowning installation, the activity arm
Angle when adjusting the blowning installation and blowing to the probe.
5. probe cleaning device according to claim 4, which is characterized in that the control mould group further includes the second driving list
Member, second driving unit control the posture of the movable arm to adjust when the blowning installation blows to the probe
Angle.
6. probe cleaning device according to claim 4, which is characterized in that the quantity of the blowning installation is multiple, institute
The quantity for stating movable arm is multiple, the air blowing angle of one blowning installation of each movable arm adjusting, Duo Gesuo
State blowning installation for and meanwhile blow from multiple angles to the probe.
7. probe cleaning device according to claim 4, which is characterized in that the blowning installation is additionally provided with filtration core, uses
Impurity in filtering gas.
8. probe cleaning device according to claim 1, which is characterized in that the probe cleaning device further includes storage
Chamber, for storing the cleaning agent, the storage chamber is connected to the rinse bath, and the storage chamber and the rinse bath it
Between be equipped with pump, the pump cleans the probe for the cleaning agent of the storage chamber to be injected the rinse bath, or by institute
The cleaning agent for stating rinse bath injects the storage chamber storage.
9. a kind of probe cleaning method, the probe for clean the surface segment difference measuring device, which is characterized in that provide probe cleaning
Device, the probe cleaning device include that rinse bath, supersonic generator and control mould group, the rinse bath hold cleaning agent simultaneously
It is installed on the workbench side of the surface section difference measuring device, the probe is carrying out one or many surface section difference measurements
Later, the probe is protruded into the rinse bath, the control mould group controls the supersonic generator and drives the cleaning
Agent is vibrated under ultrasonic frequency to clean the probe, while the control mould group controls the probe and protrudes into the cleaning agent
The depth of liquid level, wherein the rinse bath is mounted on the side of the workbench, the control mould group packet by elevating screw
The first driving unit is included, the first driving unit control driving motor drives the rinse bath to rely on the elevating screw liter
Drop, to control the depth that the probe protrudes into the cleaning agent liquid level.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
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| CN110161179A (en) * | 2018-03-27 | 2019-08-23 | 广东华斓汽车材料研究院 | A kind of abrasion resistant materials Element detection instrument |
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| CN103316865A (en) * | 2013-06-07 | 2013-09-25 | 深圳市矽电半导体设备有限公司 | Semiconductor test probe cleaning device and method |
| CN103398664A (en) * | 2013-08-09 | 2013-11-20 | 昆山允可精密工业技术有限公司 | Instrument for measuring thickness of thin plate with high bright reflective surface |
| CN103994741A (en) * | 2014-05-12 | 2014-08-20 | 京东方科技集团股份有限公司 | Method and device for measuring thickness of membrane |
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| JP2009160689A (en) * | 2008-01-07 | 2009-07-23 | Sii Nanotechnology Inc | Foreign substance removal method using scanning probe microscope |
| NL2011710C2 (en) * | 2013-10-31 | 2015-05-04 | F G J Lammertink Beheer B V | Device for cleaning a stylus of a measuring probe. |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103316865A (en) * | 2013-06-07 | 2013-09-25 | 深圳市矽电半导体设备有限公司 | Semiconductor test probe cleaning device and method |
| CN103398664A (en) * | 2013-08-09 | 2013-11-20 | 昆山允可精密工业技术有限公司 | Instrument for measuring thickness of thin plate with high bright reflective surface |
| CN103994741A (en) * | 2014-05-12 | 2014-08-20 | 京东方科技集团股份有限公司 | Method and device for measuring thickness of membrane |
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