CN107024173A - 使用小孔衍射板的共光路点衍射同步移相干涉测试装置 - Google Patents
使用小孔衍射板的共光路点衍射同步移相干涉测试装置 Download PDFInfo
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- CN107024173A CN107024173A CN201610072750.9A CN201610072750A CN107024173A CN 107024173 A CN107024173 A CN 107024173A CN 201610072750 A CN201610072750 A CN 201610072750A CN 107024173 A CN107024173 A CN 107024173A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
- G02B27/283—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising used for beam splitting or combining
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
- G02B27/4205—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having a diffractive optical element [DOE] contributing to image formation, e.g. whereby modulation transfer function MTF or optical aberrations are relevant
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CN201610072750.9A CN107024173B (zh) | 2016-02-01 | 2016-02-01 | 使用小孔衍射板的共光路点衍射同步移相干涉测试装置 |
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CN201610072750.9A CN107024173B (zh) | 2016-02-01 | 2016-02-01 | 使用小孔衍射板的共光路点衍射同步移相干涉测试装置 |
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CN107024173A true CN107024173A (zh) | 2017-08-08 |
CN107024173B CN107024173B (zh) | 2019-05-31 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107830937A (zh) * | 2017-12-07 | 2018-03-23 | 中科院南京天文仪器有限公司 | 双光栅偏振点衍射干涉装置以及波前测试方法 |
CN109343140A (zh) * | 2018-11-19 | 2019-02-15 | 北京理工大学 | 一种基于衍射现象的影院盗录设备的探测识别装置及系统 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5835217A (en) * | 1997-02-28 | 1998-11-10 | The Regents Of The University Of California | Phase-shifting point diffraction interferometer |
JP2002092924A (ja) * | 2000-09-19 | 2002-03-29 | Matsushita Electric Ind Co Ltd | 光学ヘッドの調整方法及びその調整装置 |
CN2599524Y (zh) * | 2003-02-14 | 2004-01-14 | 中国科学院上海光学精密机械研究所 | 检测表面形状的点衍射干涉仪 |
CN102507020A (zh) * | 2011-11-01 | 2012-06-20 | 南京理工大学 | 使用微透镜阵列的同步移相干涉测试方法及装置 |
CN202748541U (zh) * | 2012-07-16 | 2013-02-20 | 西北工业大学 | 基于梯形塞纳克干涉仪产生任意矢量光场的装置 |
CN103983366A (zh) * | 2014-05-30 | 2014-08-13 | 南京理工大学 | 斜入射反射型点衍射板及其干涉测量方法 |
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2016
- 2016-02-01 CN CN201610072750.9A patent/CN107024173B/zh active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5835217A (en) * | 1997-02-28 | 1998-11-10 | The Regents Of The University Of California | Phase-shifting point diffraction interferometer |
JP2002092924A (ja) * | 2000-09-19 | 2002-03-29 | Matsushita Electric Ind Co Ltd | 光学ヘッドの調整方法及びその調整装置 |
CN2599524Y (zh) * | 2003-02-14 | 2004-01-14 | 中国科学院上海光学精密机械研究所 | 检测表面形状的点衍射干涉仪 |
CN102507020A (zh) * | 2011-11-01 | 2012-06-20 | 南京理工大学 | 使用微透镜阵列的同步移相干涉测试方法及装置 |
CN202748541U (zh) * | 2012-07-16 | 2013-02-20 | 西北工业大学 | 基于梯形塞纳克干涉仪产生任意矢量光场的装置 |
CN103983366A (zh) * | 2014-05-30 | 2014-08-13 | 南京理工大学 | 斜入射反射型点衍射板及其干涉测量方法 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107830937A (zh) * | 2017-12-07 | 2018-03-23 | 中科院南京天文仪器有限公司 | 双光栅偏振点衍射干涉装置以及波前测试方法 |
CN107830937B (zh) * | 2017-12-07 | 2019-07-09 | 中科院南京天文仪器有限公司 | 双光栅偏振点衍射干涉装置以及波前测试方法 |
CN109343140A (zh) * | 2018-11-19 | 2019-02-15 | 北京理工大学 | 一种基于衍射现象的影院盗录设备的探测识别装置及系统 |
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Inventor after: Guo Renhui Inventor after: Zhou Xiang Inventor after: Zhang Huiqin Inventor after: Jiang Chao Inventor after: Zheng Donghui Inventor after: Chen Lei Inventor after: Li Jianxin Inventor after: He Yong Inventor before: Zhou Xiang Inventor before: Guo Renhui Inventor before: Zhang Huiqin Inventor before: Jiang Chao Inventor before: Zheng Donghui Inventor before: Chen Lei Inventor before: Li Jianxin Inventor before: He Yong |