CN107003108A - 改进的机电传感器 - Google Patents

改进的机电传感器 Download PDF

Info

Publication number
CN107003108A
CN107003108A CN201580059641.7A CN201580059641A CN107003108A CN 107003108 A CN107003108 A CN 107003108A CN 201580059641 A CN201580059641 A CN 201580059641A CN 107003108 A CN107003108 A CN 107003108A
Authority
CN
China
Prior art keywords
capacitor
sensor
deformation
sensor according
flexible
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201580059641.7A
Other languages
English (en)
Chinese (zh)
Inventor
本杰明·马克·奥布赖恩
托德·阿兰·吉斯比
安东尼·爱德华·哈尔布兹
塞缪尔·施拉特
伊恩·斯科特-伍兹
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Extended Induction Ltd
Original Assignee
Extended Induction Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Extended Induction Ltd filed Critical Extended Induction Ltd
Publication of CN107003108A publication Critical patent/CN107003108A/zh
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L7/00Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements
    • G01L7/16Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of pistons
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/16Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge
    • G01B7/22Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge using change in capacitance
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00Measuring for diagnostic purposes; Identification of persons
    • A61B5/103Measuring devices for testing the shape, pattern, colour, size or movement of the body or parts thereof, for diagnostic purposes
    • A61B5/11Measuring movement of the entire body or parts thereof, e.g. head or hand tremor or mobility of a limb
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/14Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
    • G01L1/142Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
    • G01L1/146Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors for measuring force distributions, e.g. using force arrays
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/16Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
    • G01L5/165Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in capacitance
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G5/00Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/16Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of distance between electrodes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G7/00Capacitors in which the capacitance is varied by non-mechanical means; Processes of their manufacture
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B2562/00Details of sensors; Constructional details of sensor housings or probes; Accessories for sensors
    • A61B2562/02Details of sensors specially adapted for in-vivo measurements
    • A61B2562/0261Strain gauges
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B2562/00Details of sensors; Constructional details of sensor housings or probes; Accessories for sensors
    • A61B2562/12Manufacturing methods specially adapted for producing sensors for in-vivo measurements
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00Measuring for diagnostic purposes; Identification of persons
    • A61B5/68Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient
    • A61B5/6801Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient specially adapted to be attached to or worn on the body surface
    • A61B5/6802Sensor mounted on worn items
    • A61B5/6804Garments; Clothes

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Power Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Animal Behavior & Ethology (AREA)
  • Biomedical Technology (AREA)
  • Biophysics (AREA)
  • Medical Informatics (AREA)
  • Molecular Biology (AREA)
  • Surgery (AREA)
  • Pathology (AREA)
  • General Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Oral & Maxillofacial Surgery (AREA)
  • Dentistry (AREA)
  • Physiology (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
CN201580059641.7A 2014-09-04 2015-09-04 改进的机电传感器 Pending CN107003108A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
NZ630075 2014-09-04
NZ63007514 2014-09-04
PCT/NZ2015/050130 WO2016036261A1 (en) 2014-09-04 2015-09-04 An improved electro-mechanical sensor

Publications (1)

Publication Number Publication Date
CN107003108A true CN107003108A (zh) 2017-08-01

Family

ID=55440174

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201580059641.7A Pending CN107003108A (zh) 2014-09-04 2015-09-04 改进的机电传感器

Country Status (6)

Country Link
US (1) US20170191819A1 (enExample)
EP (1) EP3189319A4 (enExample)
JP (1) JP2017527830A (enExample)
KR (1) KR20170066391A (enExample)
CN (1) CN107003108A (enExample)
WO (1) WO2016036261A1 (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111512131A (zh) * 2017-12-19 2020-08-07 康蒂泰克振动控制有限公司 弹性支承元件
CN112461433A (zh) * 2020-11-27 2021-03-09 芯海科技(深圳)股份有限公司 电容式压力感测装置以及电子设备
CN115790946A (zh) * 2018-09-20 2023-03-14 日写株式会社 能够算出剪切力的电容检测装置

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11071498B2 (en) 2013-09-17 2021-07-27 Medibotics Llc Smart clothing with inertial, strain, and electromyographic sensors for human motion capture
US11304628B2 (en) 2013-09-17 2022-04-19 Medibotics Llc Smart clothing with dual inertial sensors and dual stretch sensors for human motion capture
US11892286B2 (en) 2013-09-17 2024-02-06 Medibotics Llc Motion recognition clothing [TM] with an electroconductive mesh
DE102016210615A1 (de) * 2016-06-15 2017-12-21 Leoni Kabel Gmbh Vorrichtung, Versorgungsleitung für eine solche, Sensorleitung und Verfahren zur Torsionsmessung
DK179165B9 (en) * 2016-12-01 2018-04-09 Elastisense Aps Press-working apparatus and related method
JP6781648B2 (ja) 2017-03-09 2020-11-04 正毅 千葉 誘電エラストマーセンサシステムおよび誘電エラストマーセンサ要素
US11825605B2 (en) * 2017-07-24 2023-11-21 Sensor Holdings Limited Interconnecting circuit board to stretchable wires
JP7367448B2 (ja) * 2019-10-15 2023-10-24 株式会社ジェイテクト センサ付き構造部材
US20210226264A1 (en) 2020-01-20 2021-07-22 Cirque Corporation Battery Swell Detection
JP2021156607A (ja) 2020-03-25 2021-10-07 株式会社ジャパンディスプレイ センサ装置及びモジュール
JP7560031B2 (ja) * 2021-01-20 2024-10-02 本田技研工業株式会社 3軸力センサ

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5090248A (en) * 1989-01-23 1992-02-25 The University Of Melbourne Electronic transducer
CN1418367A (zh) * 2000-01-14 2003-05-14 Abb股份有限公司 电容性元件及包括这种元件的电力设备
CN1545612A (zh) * 2001-06-20 2004-11-10 1...���޹�˾ 使用弯曲成螺旋线或双螺旋线电敏装置的传感器
US20050274191A1 (en) * 2004-06-15 2005-12-15 Canon Kabushiki Kaisha Piezo resistance type semiconductor device and its manufacturing method
US20070043725A1 (en) * 2005-08-16 2007-02-22 Steve Hotelling Feedback responsive input arrangements
US20110141652A1 (en) * 2009-12-15 2011-06-16 Samsung Electro-Mechanics Co., Ltd. Multilayer ceramic capacitor
US20110243632A1 (en) * 2010-03-31 2011-10-06 Ncr Corporation Media position sensing
US20110279250A1 (en) * 2010-05-12 2011-11-17 Nokia Corporation Detecting Touch Input and Generating Perceptible Touch Stimulus
CN103492832A (zh) * 2011-04-08 2014-01-01 株式会社村田制作所 位移传感器、位移检测装置以及操作设备
CN103714972A (zh) * 2013-11-25 2014-04-09 浙江大学 一种线形的安全的高能量密度的超级电容器及其制备方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5191769B2 (ja) * 2008-03-27 2013-05-08 ルネサスエレクトロニクス株式会社 容量検出装置及び方法
US8633916B2 (en) * 2009-12-10 2014-01-21 Apple, Inc. Touch pad with force sensors and actuator feedback

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5090248A (en) * 1989-01-23 1992-02-25 The University Of Melbourne Electronic transducer
CN1418367A (zh) * 2000-01-14 2003-05-14 Abb股份有限公司 电容性元件及包括这种元件的电力设备
CN1545612A (zh) * 2001-06-20 2004-11-10 1...���޹�˾ 使用弯曲成螺旋线或双螺旋线电敏装置的传感器
US20050274191A1 (en) * 2004-06-15 2005-12-15 Canon Kabushiki Kaisha Piezo resistance type semiconductor device and its manufacturing method
US20070043725A1 (en) * 2005-08-16 2007-02-22 Steve Hotelling Feedback responsive input arrangements
US20110141652A1 (en) * 2009-12-15 2011-06-16 Samsung Electro-Mechanics Co., Ltd. Multilayer ceramic capacitor
US20110243632A1 (en) * 2010-03-31 2011-10-06 Ncr Corporation Media position sensing
US20110279250A1 (en) * 2010-05-12 2011-11-17 Nokia Corporation Detecting Touch Input and Generating Perceptible Touch Stimulus
CN103492832A (zh) * 2011-04-08 2014-01-01 株式会社村田制作所 位移传感器、位移检测装置以及操作设备
CN103714972A (zh) * 2013-11-25 2014-04-09 浙江大学 一种线形的安全的高能量密度的超级电容器及其制备方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111512131A (zh) * 2017-12-19 2020-08-07 康蒂泰克振动控制有限公司 弹性支承元件
CN115790946A (zh) * 2018-09-20 2023-03-14 日写株式会社 能够算出剪切力的电容检测装置
CN112461433A (zh) * 2020-11-27 2021-03-09 芯海科技(深圳)股份有限公司 电容式压力感测装置以及电子设备

Also Published As

Publication number Publication date
EP3189319A1 (en) 2017-07-12
WO2016036261A1 (en) 2016-03-10
EP3189319A4 (en) 2018-05-09
US20170191819A1 (en) 2017-07-06
JP2017527830A (ja) 2017-09-21
KR20170066391A (ko) 2017-06-14

Similar Documents

Publication Publication Date Title
CN107003108A (zh) 改进的机电传感器
TWI338125B (en) Arrayed electrostatic capacitance sensor
CN106092387B (zh) 用于检测诸如冲击、加速度、旋转力等平面内的力的集成压电传感器
CN103492832B (zh) 位移传感器、位移检测装置以及操作设备
US20200141818A1 (en) Capacitive and tactile sensors and related sensing methods
JP7560031B2 (ja) 3軸力センサ
US20150292969A1 (en) Capacitive type 6-axial force/torque sensor
CN107949779A (zh) 阻容变形传感器
US7781940B1 (en) Piezoelectric tactile sensor
JP2006020823A (ja) アレイ型静電容量式圧脈波センサおよびこれを備えた脈波測定装置
TWI627381B (zh) 彎曲感測器
CN103003679A (zh) 物理量传感器及其制造方法
US9972768B2 (en) Actuator structure and method
CN105144049A (zh) 包括柔性基板和由柔性基板支撑的部件的设备
Baldwin et al. Kirigami strain sensors microfabricated from thin-film parylene C
US10444912B2 (en) Sensing method of sensing device and stretchable sensor device
US20190078953A1 (en) Pressure sensor with improved strain gauge
US20220412716A1 (en) Strain gauge, force sensor and interventional medical catheter
US10823546B1 (en) Reinforcements for inducing anisotropic bending in compliant angular displacement sensors
JP6353162B2 (ja) 変形可能な装置および方法
Biswas et al. Design and simulation of piezoresistive MEMS accelerometer for the detection of pathological tremor
CN115014623B (zh) 光波导触觉传感器、传感系统、标定方法、及机器人
TWI596534B (zh) 感測裝置的感測方法及可拉伸感測元件
CN108268159A (zh) 可拉伸感测元件及其感测方法
JP2016020836A (ja) 静電容量型センサとその製造方法

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
WD01 Invention patent application deemed withdrawn after publication

Application publication date: 20170801

WD01 Invention patent application deemed withdrawn after publication