CN106998205A - A kind of coefficient of coup regulation sapphire microwave source and adjusting method - Google Patents

A kind of coefficient of coup regulation sapphire microwave source and adjusting method Download PDF

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Publication number
CN106998205A
CN106998205A CN201710214810.0A CN201710214810A CN106998205A CN 106998205 A CN106998205 A CN 106998205A CN 201710214810 A CN201710214810 A CN 201710214810A CN 106998205 A CN106998205 A CN 106998205A
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China
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probe
values
sapphire
microwave cavity
movable probe
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CN201710214810.0A
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CN106998205B (en
Inventor
陈海波
王非
王一非
刘硕
黄凯
朱玺
高连山
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Beijing Institute of Radio Metrology and Measurement
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Beijing Institute of Radio Metrology and Measurement
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01PWAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P5/00Coupling devices of the waveguide type
    • H01P5/04Coupling devices of the waveguide type with variable factor of coupling

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Abstract

This application discloses a kind of coefficient of coup regulation sapphire microwave source and adjusting method.Sapphire microwave source includes the microwave cavity with coupling aperture, stepper motor, movable probe, step motion control module and Q value monitoring modules.Stepper motor, probe, microwave cavity are located inside Cryo Equipment;Remaining combination is located at outside Cryo Equipment.Step motion control module, by controlling cable and motor connection, the step direction for controlled motor.Q value monitoring modulars, are connected, the Q values for monitoring microwave cavity by monitoring cable with probe.Method and step is:It is respectively mounted two probes;Microwave cavity is in after predetermined low-temperature space, unidirectionally moves movable probe, monitors Q values.According to the change of Q values, probe is moved to Q value maximum points position.Microwave source of the present invention can directly adjust the coefficient of coup of microwave cavity at low temperature, and solving current coefficient of coup regulation needs the problem of normal temperature low temperature switches.

Description

A kind of coefficient of coup regulation sapphire microwave source and adjusting method
Technical field
The application is related to microwave technical field, more particularly to a kind of sapphire microwave source.
Background technology
Low temperature sapphire microwave source is a kind of new microwave source, applied to radar, communication, Aero-Space, metering and base The fields such as plinth physical study.Sapphire microwave cavity is the core component of low temperature sapphire microwave source, the Q values and coupled systemes of microwave cavity Number determines mutually make an uproar index and the Stability index of complete machine.The dysregulation of the current coefficient of coup is cumbersome and time-consuming, it is necessary in normal temperature Under microwave cavity is adjusted manually, be down near liquid helium temperature and tested when temperature.But because microwave cavity is in low-temperature space (4.2~15K), distribution of the coefficient of coup selected during normal temperature in low temperature due to microwave cavity field strength can change, and influence micro- The Q values and the coefficient of coup of ripple chamber, if undesirable, it is necessary to by complete machine recovery room in low-temperature space coefficient of coup test result Temperature, continue to manually change coupling ring or probe in original basis probes into length;General debugging need to carry out multiple complete machine cooling, Recover the processes such as room temperature, coefficient of coup regulation.Due to the device that can not debug directly under cryogenic, therefore, debugging Process is cumbersome, adjustment accuracy is low.
The content of the invention
The present invention provides a kind of coefficient of coup regulation sapphire microwave source and adjusting method, can be direct at low ambient temperatures Adjust the coefficient of coup of sapphire microwave cavity, solve current sapphire microwave source coefficient of coup regulation process exception it is cumbersome time-consuming and The problem of precision is relatively low.
A kind of coefficient of coup regulation sapphire microwave source that the present invention is provided, includes probe, microwave cavity, Cryo Equipment, institute Stating the wall portion of microwave cavity has coupling aperture, wherein, at least one described probe is movable probe;The microwave source also includes stepping electricity Machine, step motion control module and Q value monitoring modules;The stepper motor, the movable probe are located inside the Cryo Equipment;Institute State step motion control module and the Q values monitoring modular is located at outside the Cryo Equipment;The stator of the stepper motor is fixed on The outer wall of the sapphire microwave cavity;Described movable probe one end probes into the coupling aperture, the other end and the stepper motor Rotor is contacted by mechanical drive mode, the rotor is driven the movable probe along perpendicular to the sapphire microwave cavity Outer wall direction stepping, change the movable probe probes into depth;The step motion control module, passes through controlling cable and institute State stepper motor connection, step direction and displacement for controlling the stepper motor;The Q values monitoring modular, passes through monitoring Cable is connected with any one of probe, the Q values for monitoring the sapphire microwave cavity in real time.
The embodiment further optimized as the coefficient of coup regulation sapphire microwave source of the present invention, at least one described spy Head is fixed probe, and the fixed probe is coupling probe or coupling ring, and the length for probeing into the coupling aperture keeps fixing.
The embodiment that sapphire microwave source further optimizes is adjusted as the coefficient of coup of the present invention, the movable probe is Multiple, the movable probe is coupling probe or coupling ring, and the length for probeing into the coupling aperture is adjusted by stepper motor.
The embodiment that sapphire microwave source further optimizes, in addition to fixed component are adjusted as the coefficient of coup of the present invention. The fixed component includes bottom surface and facade, and the bottom surface is fixed on the outer wall of sapphire microwave cavity, the facade and stepping The stator of motor is fixed.
The embodiment that sapphire microwave source further optimizes is adjusted as the coefficient of coup of the present invention, the Cryo Equipment has very Empty flange-interface, the controlling cable and the monitoring cable enter Cryo Equipment by the vacuum flange interface.
The coefficient of coup provided as the present invention adjusts another preferred scheme of sapphire microwave source.Step motion control module The control signal of generation positively or negatively, the step direction for controlling stepper motor.
A kind of further improvement of preferred scheme of the coefficient of coup regulation sapphire microwave source provided as the present invention, step Entering control module also includes power amplification circuit, the power for amplifying the control signal.
The present invention also provides a kind of sapphire microwave source single port coefficient of coup adjusting method, to contain at least one work The sapphire microwave source of dynamic probe and at least one fixation probe, comprises the following steps:According to the excitation shape of sapphire microwave cavity The position of formula, the first coupling aperture of selection and the second coupling aperture.Fixed probe is probeed into the first coupling aperture, length is probeed into and keeps not Become, movable probe is probeed into the second coupling aperture.Sapphire microwave cavity is in after predetermined low-temperature space, starts to monitor sapphire microwave The Q values of chamber.Control movable probe is unidirectionally moved, and monitors the change of the Q values of sapphire microwave cavity:If Q values are changed from small to big and become again It is small, then movable probe is moved backward, the position of maximum point occurs to Q values;If the Q values constantly diminish, first by activity spy Head recovers initial position, then moves backward, to the position of the Q values maximum point.
Further, the present invention also provides a kind of sapphire microwave source two-port coefficient of coup adjusting method, to contain The sapphire microwave source of multiple (such as two) movable probes, comprises the following steps:According to the exiting form of sapphire microwave cavity, Select the position of the first coupling aperture and the second coupling aperture.First movable probe is probeed into the first coupling aperture, length is probeed into and keeps not Become, the second movable probe is probeed into the second coupling aperture.Sapphire microwave cavity is in after predetermined low-temperature space, starts to monitor sapphire The Q values of microwave cavity.Control the second movable probe unidirectionally to move, monitor the change of the Q values of sapphire microwave cavity.If Q values are by small Change diminishes greatly again, then moves backward the second movable probe, the position of maximum point occur to Q values;If Q values constantly diminish, first Second movable probe is recovered into initial position, then moved backward, to the position of Q value maximum points.
Keep the second movable probe constant in the position that the second coupling aperture is probeed into, unidirectionally move first movable probe, Monitor the change of the Q values of the sapphire microwave cavity.If Q values are changed from small to big and diminished again, the first movable probe is moved backward, There is the position of maximum point to Q values;If Q values constantly diminish, the first movable probe is first recovered into initial position, then reversely move It is dynamic, to the position of Q value maximum points.
At least one above-mentioned technical scheme that the embodiment of the present application is used can reach following beneficial effect:
A kind of coefficient of coup regulation sapphire microwave source proposed by the present invention and method, can directly adjust indigo plant in low temperature The coefficient of coup of jewel microwave cavity, it is to avoid sapphire microwave cavity recovers after room temperature, then the cumbersome and uncertainty that is adjusted, Improve the regulation efficiency of the coefficient of coup and Q values.Meanwhile, probe stepping is driven by mechanically operated mode, compared to current Manual regulation, improve the degree of regulation of the coefficient of coup.
Brief description of the drawings
Accompanying drawing described herein is used for providing further understanding of the present application, constitutes the part of the application, this Shen Schematic description and description please is used to explain the application, does not constitute the improper restriction to the application.In the accompanying drawings:
Fig. 1 is that a kind of coefficient of coup adjusts sapphire microwave source schematic diagram;
Fig. 2 is that the coefficient of coup comprising fixed probe adjusts sapphire microwave source conceptual scheme;
Fig. 3 is the coefficient of coup regulation sapphire microwave source conceptual scheme comprising fixed component;
Fig. 4 is a kind of improvement project of step motion control module;
Fig. 5 is a kind of sapphire microwave source single port coefficient of coup adjusting method flow chart;
Fig. 6 is a kind of sapphire microwave source two-port coefficient of coup adjusting method flow chart.
Embodiment
To make the purpose, technical scheme and advantage of the application clearer, below in conjunction with the application specific embodiment and Technical scheme is clearly and completely described corresponding accompanying drawing.Obviously, described embodiment is only the application one Section Example, rather than whole embodiments.Based on the embodiment in the application, those of ordinary skill in the art are not doing Go out the every other embodiment obtained under the premise of creative work, belong to the scope of the application protection.
The main operational principle of low temperature sapphire microwave source is:Using low loss tangent value of the sapphire in low temperature, The microwave of high q-factor is formed, the frequency formation vibration for selecting the microwave cavity of high q-factor by the way of positive energize;In peripheral circuit Phase controlling and the amplitude control of the microwave frequency are carried out, complete machine is formed stable microwave signal output.
Sapphire microwave cavity is the core component of low temperature sapphire microwave source, and Q values and the coefficient of coup decision of microwave cavity are whole The Stability index of machine and index of mutually making an uproar.Directly the device of coefficient of coup regulation can be carried out the invention provides a kind of in low temperature And method, obtain 9E-16@1s stability, -95dBc/Hz@1Hz outstanding index.
Below in conjunction with accompanying drawing, the technical scheme that each embodiment of the application is provided is described in detail.
Fig. 1 is that a kind of coefficient of coup adjusts sapphire microwave source schematic diagram.Sapphire microwave source, comprising probe 3,31, it is micro- Ripple chamber 1, Cryo Equipment 7, the wall portion of the microwave cavity have coupling aperture.The microwave cavity, has at least one coupling aperture 2 in wall portion, 21,22.Coefficient of coup regulation sapphire microwave source also includes stepper motor 4, step motion control module 5 and Q values monitoring module 6.Extremely A few probe is movable probe 3;
Stepper motor, movable probe are located inside the Cryo Equipment 7;Step motion control module and Q value monitoring modulars are located at Outside the Cryo Equipment.
The stator 41 of stepper motor is fixed on the outer wall of sapphire microwave cavity.Movable probe one end probes into coupling aperture 2, another End is contacted with the rotor 42 of stepper motor by mechanical drive mode, makes rotor drive movable probe along micro- perpendicular to sapphire The direction stepping of the outer wall of ripple chamber, change the movable probe probes into depth.
The mechanical drive mode, is to be converted into the circular motion of stepping motor rotor directly by mechanical transmission component 34 Line is moved, such as using gear drive or thread transmission.The movable probe is fixed with the mechanical transmission component. As one embodiment, stepper motor fixed form be rotor axial perpendicular to microwave cavity outer wall, when stepping motor rotor rotation When, the mechanical transmission component drives movable probe to be moved along a straight line along the direction parallel with rotor axial.Due to rotor axial With microwave cavity outer wall vertical, therefore movable probe along perpendicular to microwave cavity outer wall direction move along a straight line.
Step motion control module, is connected by controlling cable with stepper motor, for control stepper motor step direction and Displacement.
Q value monitoring modulars, are connected by monitoring cable with any one probe, for monitoring sapphire microwave cavity in real time Q values.
As the further improvement of coefficient of coup adjusting means of the present invention, Cryo Equipment has vacuum flange interface 8, control line Cable and monitoring cable enter Cryo Equipment by vacuum flange interface.
It should be noted that when sapphire microwave cavity is electric field excitation, the movable probe uses probe geometries, coupling Hole is respectively positioned on the side wall of microwave cavity or is located at the roof and a side wall of microwave cavity respectively;When sapphire microwave cavity is magnetic field During excitation, movable probe is located at two side walls of microwave cavity using coupling loop type, coupling aperture.
As a preferred embodiment of the present invention, step motion control module utilizes chip microcontroller, positive or negative by generating To control signal, for controlling the step direction of stepper motor, thus change i.e. change second probe in sapphire microwave cavity Interior probes into depth.Such as forward voltage signal, represents that stepper motor drives the second probe to advance;Negative voltage signal, is represented Stepper motor drives the second probe to retreat.
It should be noted that single-chip microcomputer is a kind of implementation of step motion control module, other electronics can also be passed through Circuit realiration, but be not specifically limited herein.Using the directional characteristic of voltage signal, the direction of motion of stepper motor is controlled, Simply a kind of control mode of step motion control module, can also transmit control information to stepper motor, example by other forms Such as data signal, it is not specifically limited here.
As a preferred embodiment of the present invention, stepper motor can select the stepping electricity that each stepping-in amount can be adjusted Machine.Less stepping-in amount can improve the degree of regulation of the coefficient of coup, but time-consuming more.When in use, can according to the actual requirements, Rational stepping-in amount is set.In this programme, the stepping-in amount of used stepper motor can be selected in the range of 0.1~1mm, folk prescription It is 8mm to range.
As a preferred embodiment of the present invention, Q value monitoring modules use reference instrument, and Network Analyzer, measurement is blue precious The Q values of stone microwave cavity.The first probe and the second probe connection monitoring cable on sapphire microwave cavity, pass through the true of Cryo Equipment Empty flange is connected to Network Analyzer.Network Analyzer selection S21 or S12 parameter measurements are (because sapphire microwave cavity is reciprocity Network, S21 and S12 are consistent), suitable SPAN parameters are selected, and directly utilize the work(of Bandwidth in Network Analyzer Q values can be measured.
Fig. 2 is that the coefficient of coup comprising fixed probe adjusts sapphire microwave source conceptual scheme.The coefficient of coup adjusts sapphire Microwave source further comprises at least one and fixes probe 31, and fixed probe is coupling probe or coupling ring, probes into coupling aperture, is protected Hold that to probe into length constant.
It should be noted that the coefficient of coup regulation sapphire microwave source comprising fixed probe is generally used for single port coupling Coefficient adjustment.Sapphire microwave cavity is as dual-port device, and one is close coupling end, and one is weak coupling end.Only regulation one Under port case, selection close coupling end is end to be regulated, by coupling aperture movable probe insert close coupling end coupling aperture (for example, Roof coupling aperture 2), the fixed probe of coupling aperture (for example, sidewall coupling hole 31) insertion at weak coupling end.
It should be noted that when sapphire microwave cavity is electric field excitation, movable probe and fixed probe all use probe Form.Two coupling apertures are located in two side walls of microwave cavity or respectively positioned at roof and a side wall respectively;Work as sapphire When microwave cavity is magnetic field excitation, movable probe and fixed probe are all using coupling loop type, and two coupling apertures are located at microwave respectively Two side walls of chamber.
Fig. 3 is the coefficient of coup regulation sapphire microwave source conceptual scheme comprising fixed component.In the coupling shown in Fig. 1 or Fig. 2 Close on the basis of coefficient adjustment sapphire microwave source, add fixed component 9.Fixed component, includes bottom surface 91 and facade 92, group L-shaped metal structure, bottom surface is fixed on the outer wall of sapphire microwave cavity, and the stator of facade and stepper motor is fixed.
It should be noted that bottom surface can be fixed by screws on the outer wall of sapphire microwave cavity, facade can pass through The stator of screw and stepper motor is fixed.This does not limit specific fixed form.
Below by taking 9.2GHz coefficients of coup regulation sapphire microwave source as an example, illustrate that the coefficient of coup shown in Fig. 1~3 is adjustable Save the application method of sapphire microwave source.
Stepper motor, movable probe, or fixed probe, fixed component and 9.2GHz sapphire microwave cavities have been assembled Finish, above-mentioned all parts are arranged in Cryo Equipment.The vacuum method that the controlling cable of step motion control module passes through Cryo Equipment Blue interface connects stepper motor.The monitoring cable of Q value monitoring modulars is visited by the vacuum flange interface connection activity of Cryo Equipment Head.
Cryo Equipment starts cooling, and waiting temperature reaches required temperature spot (generally below 15K), Q value monitoring modulars pair The Q values of sapphire microwave source to be regulated are monitored.Movable probe is driven to enter using step motion control module control stepper motor The movement of the small stepping-in amount of row, while observing Q value changes on Q value monitoring modulars, when Q values are maximum, the coefficient of coup is maximum, stops adjusting Examination.Test proves that, the optimization of the 9.2GHz coefficients of coup that are provided in the present embodiment regulation sapphire microwave source Q value processes can be with By 1E8 lifting values 4E8.
Fig. 4 is a kind of improvement project of step motion control module.If in view of selected stepper motor input power compared with Greatly, step motion control module is except voltage generation circuit 52, and for generating outside voltage signal positively or negatively, in addition to power is put Big circuit 53, the power for amplifying the voltage signal.
Fig. 5 is a kind of sapphire microwave source single port coefficient of coup adjusting method flow chart.This method is applied to the application Sapphire microwave source of the embodiment comprising at least one movable probe, at least one fixation probe.Specifically include following steps:
The position of step 101, the exiting form according to sapphire microwave cavity, the first coupling aperture of selection and the second coupling aperture.
In a step 101, when sapphire microwave cavity is electric field excitation, movable probe, fixed probe use probe geometries, First coupling aperture, the second coupling aperture, positioned at two side walls in microwave cavity or roof, a side wall;When sapphire is micro- When ripple chamber is magnetic field excitation, movable probe, fixed probe are using coupling loop type, the first coupling aperture, the second coupling aperture, positioned at micro- Two side walls of ripple chamber.
Step 102, fixed probe probeed into the first coupling aperture, probe into length and keep constant, movable probe is probeed into second Coupling aperture.
In a step 102, the first coupling aperture is the weak coupling end of sapphire microwave cavity, and fixed probe probes into the first coupling Hole, it is constant that holding probes into depth.Second coupling aperture is the close coupling end of sapphire microwave cavity, is the coupled systemes of sapphire microwave cavity Number port to be regulated.
Movable probe, can be changed by external control module and probe into depth.The coefficient of coup regulation that for example present invention is provided In device, movable probe is contacted with the rotor of stepper motor by mechanical drive mode, makes rotor drive second to pop one's head in along vertical The direction stepping of the straight outer wall in sapphire microwave cavity, change movable probe probes into depth.
Step 103, sapphire microwave cavity are in after predetermined low-temperature space, start to monitor the Q values of the sapphire microwave cavity.
In step 103, sapphire microwave cavity is entered with movable probe, fixed probe and stepper motor by correct mode Row assembling, is placed in Cryo Equipment.The refrigeration plant of Cryo Equipment, which is started working, to cool, and reaches after predetermined low-temperature space, opens The Q values of the beginning monitoring sapphire microwave cavity.
It should be noted that different refrigeration modes, predetermined low-temperature space, temperature is different.For example, using helium liquid Change device refrigeration, predetermined low-temperature space is 4.2K;Liquid nitrogen refrigerating is applicable, predetermined low-temperature space is 77K.
Step 104, control movable probe are unidirectionally moved, and monitor the change of the Q values of sapphire microwave cavity.
At step 104, because movable probe is located in Cryo Equipment, it is necessary to use mechanically operated mode movement activity Probe, is manual regulation without able person.For example, using stepper motor, the rotor of movable probe and stepper motor is passed by machinery Flowing mode is contacted, and rotor is driven direction stepping of the movable probe along the outer wall perpendicular to sapphire microwave cavity, change activity That pops one's head in probes into depth.Rational stepping-in amount and one direction range can be set according to the actual requirements.
Movable probe is often moved to a position, monitors the Q values of sapphire microwave cavity.Q values are used to judge that the activity is visited Whether head reaches optimum position.The maximum point of Q values is optimum position.
The Q values of sapphire microwave cavity are monitored, it is preferable that using reference instrument, Network Analyzer, measurement sapphire is micro- The Q values of ripple chamber.Movable probe and fixed probe connection monitoring cable on sapphire microwave cavity, pass through the vacuum method of Cryo Equipment Blue interface is connected to Network Analyzer.Network Analyzer selection S21 or S12 parameter measurements are (because sapphire microwave cavity is reciprocity Network, S21 and S12 are consistent), suitable SPAN parameters are selected, and directly utilize the work(of Bandwidth in Network Analyzer Q values can be measured.
If step 105, Q values are changed from small to big and diminished again, movable probe is moved backward, the position of maximum point occurs to Q values Put;
In step 105, Q values are changed from small to big and diminished again, illustrate movable probe in the scope entirely unidirectionally moved, are passed through , to Q values there is the position of maximum point in optimum position, it is only necessary to after unidirectional mobile end, the interactive probe of reverse movement.
If step 106, Q values constantly diminish, movable probe is first recovered into initial position, then move backward movable spy Head, to the position of Q value maximum points.
In step 106, Q values constantly diminish, and illustrate movable probe in the scope entirely unidirectionally moved, not by most Best placement, optimum position should be located at the reverse of moving direction.So need after unidirectional mobile end, it is first that movable probe is extensive Multiple initial position, then movable probe is moved backward, there is the position of maximum point to Q values.
Fig. 6 is a kind of sapphire microwave source two-port coefficient of coup adjusting method flow chart.Method shown in Fig. 6, can be adjusted The coefficient of coup of two ports of sapphire microwave cavity is saved, it is necessary to use two movable probes.Comprise the following steps:
The position of step 201, the exiting form according to sapphire microwave cavity, the first coupling aperture of selection and the second coupling aperture.
In step 201, when sapphire microwave cavity is electric field excitation, the first movable probe, the second movable probe are used Probe geometries;First coupling aperture, the second coupling aperture are located at two side walls in microwave cavity respectively;Or first coupling aperture, second Coupling aperture is located at a roof and a side wall for microwave cavity respectively;When sapphire microwave cavity is magnetic field excitation, the first activity Probe, the second movable probe are using coupling loop type, the first coupling aperture, the second coupling aperture, positioned at two side walls of microwave cavity.
Step 202, by the first movable probe insert the first coupling aperture, probe into length keep it is constant, by the second movable probe Probe into the second coupling aperture.
It should be noted that movable probe, can be changed by external control module and probe into depth.For example the present invention is provided In coefficient of coup adjusting means, movable probe is contacted with the rotor of stepper motor by mechanical drive mode, rotor is driven work Direction stepping of the dynamic probe along the outer wall perpendicular to sapphire microwave cavity, change movable probe probes into depth.
Step 203, sapphire microwave cavity are in after predetermined low-temperature space, start to monitor the Q values of the sapphire microwave cavity.
In step 203, by sapphire microwave cavity and the first movable probe, the second movable probe and stepper motor by correct Mode assembled, be placed in Cryo Equipment.The refrigeration plant of Cryo Equipment, which is started working, to cool, and reaches predetermined low temperature Qu Hou, starts to monitor the Q values of the sapphire microwave cavity.
It should be noted that different refrigeration modes, predetermined low-temperature space, temperature is different.For example, using helium liquid Change device refrigeration, predetermined low-temperature space is 4.2K;Liquid nitrogen refrigerating is applicable, predetermined low-temperature space is 77K.
Step 204, the second movable probe of control are unidirectionally moved, and monitor the change of the Q values of sapphire microwave cavity.
In step 204, the second movable probe is often moved to a position, monitors the Q values of sapphire microwave cavity.Q values are used In judging whether the second movable probe reaches optimum position.The maximum point of Q values is optimum position.
The Q values of sapphire microwave cavity are monitored, it is preferable that using reference instrument, Network Analyzer, measurement sapphire is micro- The Q values of ripple chamber.Movable probe and fixed probe connection monitoring cable on sapphire microwave cavity, pass through the vacuum method of Cryo Equipment Blue interface is connected to Network Analyzer.Network Analyzer selection S21 or S12 parameter measurements are (because sapphire microwave cavity is reciprocity Network, S21 and S12 are consistent), suitable SPAN parameters are selected, and directly utilize the work(of Bandwidth in Network Analyzer Q values can be measured.
If step 205, Q values are changed from small to big and diminished again, the second movable probe is moved backward, maximum point occurs to Q values Position;
In step 205, Q values are changed from small to big and diminished again, illustrate the second movable probe in the scope entirely unidirectionally moved, It has passed through optimum position, it is only necessary to after unidirectional mobile end, the interactive probe of reverse movement the position of maximum point occurs to Q values.
If step 206, Q values constantly diminish, the second movable probe is first recovered into initial position, then move backward second Movable probe, to the position of Q value maximum points.
In step 206, Q values constantly diminish, and illustrate that the second movable probe in the scope entirely unidirectionally moved, is not passed through Optimum position is crossed, optimum position should be located at the reverse of moving direction.So needing after unidirectional mobile end, first second is lived Dynamic probe recovers initial position, then moves backward the second movable probe, the position of maximum point occurs to Q values.
Step 207, the second movable probe of holding are constant in the position that the second coupling aperture is probeed into, and unidirectional mobile first activity is visited Head, monitors the change of the Q values of sapphire microwave cavity.
In step 207, the second movable probe has arrived at optimum position by step 205 or step 206, keeps second Movable probe is constant in the position that the second coupling aperture is probeed into.First movable probe is driven along vertical by the rotor of stepper motor In the direction stepping of the outer wall of sapphire microwave cavity, change the first movable probe probes into depth.It can set according to the actual requirements Rational stepping-in amount and one direction range.
First movable probe is often moved to a position, monitors the Q values of sapphire microwave cavity.Q values are used to judge the first spy Whether head reaches optimum position.The maximum point of Q values is optimum position.The Q values of sapphire microwave cavity are monitored, it is preferable that, make With reference instrument, Network Analyzer measures the Q values of sapphire microwave cavity.The first movable probe on sapphire microwave cavity and Two movable probes connection monitoring cable, Network Analyzer is connected to by the vacuum flange interface of Cryo Equipment.Network Analyzer S21 or S12 parameter measurements (because sapphire microwave cavity is reciprocal network, S21 is consistent with S12) are selected, selection is suitable SPAN parameters, and directly utilize the functional measurement Q values of Bandwidth in Network Analyzer.
If step 208, Q values are changed from small to big and diminished again, the first movable probe is moved backward, maximum point occurs to Q values Position.
In a step 208, Q values are changed from small to big and diminished again, illustrate the first movable probe in the scope entirely unidirectionally moved, It has passed through optimum position, it is only necessary to after unidirectional mobile end, move backward the first movable probe, maximum point occur to Q values Position.
If step 209, Q values constantly diminish, the first movable probe is first recovered into initial position, then moved backward, to Q It is worth the position of maximum point.
In step 209, Q values constantly diminish, and illustrate that the first movable probe in the scope entirely unidirectionally moved, is not passed through Optimum position is crossed, optimum position should be located at the reverse of moving direction.So needing after unidirectional mobile end, first first is lived Dynamic probe recovers initial position, then moves backward the first movable probe, the position of maximum point occurs to Q values.
So far, the coefficient of coup regulation of two ports of sapphire microwave cavity is completed.
It should be noted that term " comprising ", "comprising" or its any other variant are intended to the bag of nonexcludability Contain, so that process, method, commodity or equipment including a series of key elements are not only including those key elements, but also including Other key elements being not expressly set out, or also include for this process, method, commodity or the intrinsic key element of equipment. In the absence of more restrictions, the key element limited by sentence "including a ...", it is not excluded that including the key element Process, method, commodity or equipment in also there is other identical element.
Embodiments herein is the foregoing is only, the application is not limited to.For those skilled in the art For, the application can have various modifications and variations.It is all any modifications made within spirit herein and principle, equivalent Replace, improve etc., it should be included within the scope of claims hereof.

Claims (10)

1. a kind of coefficient of coup adjusts sapphire microwave source, probe, microwave cavity, Cryo Equipment, the wall portion of the microwave cavity are included There is coupling aperture, it is characterised in that
At least one described probe is movable probe;
The microwave source also includes stepper motor, step motion control module and Q value monitoring modules;
The stepper motor, the movable probe are located inside the Cryo Equipment;The step motion control module and Q values prison Module is surveyed to be located at outside the Cryo Equipment;
The stator of the stepper motor is fixed on the outer wall of the sapphire microwave cavity;
Described movable probe one end probes into the coupling aperture, and the rotor of the other end and the stepper motor passes through mechanical drive mode Contact, makes the rotor drive direction stepping of the movable probe along the outer wall perpendicular to the sapphire microwave cavity, changes Become the movable probe probes into depth;
The step motion control module, is connected by controlling cable with the stepper motor, the step for controlling the stepper motor Enter direction and displacement;
The Q values monitoring modular, is connected by monitoring cable with any one of probe, for monitoring the sapphire in real time The Q values of microwave cavity.
2. according to claim 1 the coefficient of coup regulation sapphire microwave source, it is characterised in that at least one it is described probe be Fixed probe, the fixed probe is coupling probe or coupling ring, and the length for probeing into the coupling aperture keeps fixing.
3. the coefficient of coup adjusts sapphire microwave source according to claim 1, it is characterised in that the movable probe is many It is individual.
4. the coefficient of coup regulation sapphire microwave source according to claims 1 to 3 any one, it is characterised in that also wrap Include fixed component, the fixed component, comprising bottom surface and facade, the bottom surface is fixed on the outer wall of the sapphire microwave cavity On, the stator of the facade and the stepper motor is fixed.
5. the coefficient of coup regulation sapphire microwave source according to claims 1 to 3 any one, it is characterised in that described Cryo Equipment has vacuum flange interface, and the controlling cable and the monitoring cable enter described by the vacuum flange interface Cryo Equipment.
6. the coefficient of coup regulation sapphire microwave source according to claims 1 to 3 any one, it is characterised in that described Movable probe is coupling probe or coupling ring.
7. the coefficient of coup regulation sapphire microwave source according to claims 1 to 3 any one, it is characterised in that described Step motion control module generates positively or negatively control signal, the step direction for controlling the stepper motor.
8. the coefficient of coup regulation sapphire microwave source according to claims 1 to 3 any one, it is characterised in that described Step motion control module control module also includes power amplification circuit, the power for amplifying the control signal.
9. a kind of sapphire microwave source single port coefficient of coup adjusting method, for the sapphire microwave source described in claim 2, It is characterised in that it includes following steps:
According to the exiting form of the sapphire microwave cavity, the position of the first coupling aperture of selection and the second coupling aperture;
Fixed probe is probeed into first coupling aperture, length is probeed into and keeps constant, movable probe is probeed into second coupling Hole;
The sapphire microwave cavity is in after predetermined low-temperature space, starts to monitor the Q values of the sapphire microwave cavity;
Control the movable probe unidirectionally to move, monitor the change of the Q values of the sapphire microwave cavity.
Diminish again if the Q values are changed from small to big, move backward the movable probe, the position of maximum point occur to the Q values Put;
If the Q values constantly diminish, the movable probe is first recovered into initial position, then moved backward, to the Q values most A little bigger position.
10. a kind of sapphire microwave source two-port coefficient of coup adjusting method, the indigo plant for movable probe described in claim 3 is precious Stone microwave source, it is characterised in that comprise the following steps:
According to the exiting form of the sapphire microwave cavity, the position of the first coupling aperture of selection and the second coupling aperture;
First movable probe is probeed into first coupling aperture, length is probeed into and keeps constant, the second movable probe is probeed into described Second coupling aperture;
The sapphire microwave cavity is in after predetermined low-temperature space, starts to monitor the Q values of the sapphire microwave cavity;
Control second movable probe unidirectionally to move, monitor the change of the Q values of the sapphire microwave cavity.
Diminish again if the Q values are changed from small to big, move backward second movable probe, maximum point occur to the Q values Position;
If the Q values constantly diminish, second movable probe is first recovered into initial position, then moved backward, to the Q It is worth the position of maximum point.
Keep second movable probe constant in the position that second coupling aperture is probeed into, unidirectionally move first activity and visit Head, monitors the change of the Q values of the sapphire microwave cavity.
Diminish again if the Q values are changed from small to big, move backward first movable probe, maximum point occur to the Q values Position;
If the Q values constantly diminish, first movable probe is first recovered into initial position, then moved backward, to the Q It is worth the position of maximum point.
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