CN106996995A - A kind of flexible stylet - Google Patents

A kind of flexible stylet Download PDF

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Publication number
CN106996995A
CN106996995A CN201610045067.6A CN201610045067A CN106996995A CN 106996995 A CN106996995 A CN 106996995A CN 201610045067 A CN201610045067 A CN 201610045067A CN 106996995 A CN106996995 A CN 106996995A
Authority
CN
China
Prior art keywords
microprobe
probe
flexible
soft contact
support arm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201610045067.6A
Other languages
Chinese (zh)
Inventor
杨霏
郑柳
王方方
李玲
夏经华
田亮
王嘉铭
桑玲
李嘉琳
钮应喜
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
State Grid Corp of China SGCC
Smart Grid Research Institute of SGCC
Original Assignee
State Grid Corp of China SGCC
Smart Grid Research Institute of SGCC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by State Grid Corp of China SGCC, Smart Grid Research Institute of SGCC filed Critical State Grid Corp of China SGCC
Priority to CN201610045067.6A priority Critical patent/CN106996995A/en
Publication of CN106996995A publication Critical patent/CN106996995A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/06711Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716Elastic
    • G01R1/06722Spring-loaded
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851Testing of integrated circuits [IC]
    • G01R31/2886Features relating to contacting the IC under test, e.g. probe heads; chucks

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Measuring Leads Or Probes (AREA)

Abstract

A kind of flexible stylet that the present invention is provided, probe includes support arm, soft contact microprobe and flexible connection point, and flexibility can be fixedly connected or detachably, soft contact microprobe is two dimension or three-dimensional structure;Soft contact microprobe is tobacco pipe shape or soupspoon shape and its spatial volume is 1 μm3~0.1m3.The probe that the present invention is provided, which is carried, to be fixed, dismountable flexible contact point, be conveniently replaceable impaired probe;Using the tobacco pipe shape or soupspoon shape structure of two dimension or three-dimensional structure, the probe of one-dimensional point contact structures of the prior art is replaced, is avoided that and chip surface metal level and damage electrical part is damaged in chip testing process;The probe is big with chip electrode contact surface, CURRENT DISTRIBUTION can be made in high-current device test process evenly, it is to avoid device is burnt in the one-dimensional powered sparking of point-like probe tip, significantly improves the security of electrical part chip-scale test process.

Description

A kind of flexible stylet
Technical field
The present invention relates to a kind of probe, specifically, it is related to a kind of flexible stylet.
Background technology
It is required to carry out chip-scale detection before electric device package, its detection method is to utilize probe in super-clean environment Performance detection is carried out to chip, detection content includes the detection of forward and reverse the quasi-static characteristics and dynamic characteristic detection etc..
Existing detection probe is one-dimensional dots structure, and the probe is in contact chip surface metal-layer to be non-flexible Easily cause chip surface metal level to damage in contact, detection process, damage metal electrode, cause chip to exist It is damaged in detection process, brings serious economic loss.In addition, the point-contact junction structure that prior art is used is visited Pin, contact point is smaller, is easily caused forward current skewness in detection process or the problems such as reversed electric field is assembled, Influence testing result even damages chip, causes the damage of electrical part.
Accordingly, it is desirable to provide a kind of improved technology scheme not enough for above-mentioned prior art.
The content of the invention
The purpose of the present invention is the damage for overcoming easily damaged chip in above-mentioned existing probe techniques to cause electrical part Ruin, the problem of also resulting in terms of forward current skewness and reversed electric field aggregation proposes a kind of two dimension Or three-dimensional structure flexible stylet, damage chip and electrical part, and security are avoided that during the probe use Can be high
To achieve the above object, the present invention uses following technical scheme:
A kind of flexible stylet, the probe includes support arm, soft contact microprobe and connection support arm and flexibility connects The flexible connection point of feeler inspection pin, the flexible connection includes fixing or detachable, and the soft contact microprobe is two Dimension or three-dimensional structure.
Further, the soft contact microprobe be tobacco pipe shape or soupspoon shape, the tobacco pipe shape or soupspoon shape it is soft Property probe spatial volume be 1 μm3~0.1m3
Further, the support arm is metal material, and the metal material is copper, aluminium, silver, gold.
Further, the support arm is rectangular parallelepiped structure, wherein, the value of length is 1 μm~100cm.
Further, the support arm is cylindrical structure, wherein, the length of the cylinder and taking for radius It is worth for 1 μm~100cm.
Further, the flexible connection includes screw thread, neck or spring.
Further, the soft contact microprobe is prepared by cylinder or cuboid processing;The flexible contact Probe is metal material, and the metal material is copper, aluminium, silver, gold.
Compared with immediate prior art, the technical scheme that the present invention is provided has following excellent effect:
1st, the probe that the present invention is provided, which is carried, to fix, dismountable flexible contact point, be conveniently replaceable impaired Probe.
2nd, the probe that the present invention is provided replaces existing using the tobacco pipe shape or soupspoon shape structure of two dimension or three-dimensional structure There is the probe of the one-dimensional point contact structures in technology, be avoided that the damage chip surface metal in chip detection process Layer and damage electrical part.
3rd, the probe and chip electrode contact surface that the present invention is provided are big, can make in high-current device detection process CURRENT DISTRIBUTION is evenly, it is to avoid device is burnt in the one-dimensional powered sparking of point-like probe tip, significantly improves electrical part The security of chip-scale detection process.
Brief description of the drawings
, below will be attached to what is used required in embodiment in order to illustrate more clearly of the technical scheme in the present invention Figure is briefly described, it should be apparent that, drawings in the following description are only some embodiments of the present invention, For those of ordinary skill in the art, on the premise of not paying creative work, can also be according to these Accompanying drawing obtains other accompanying drawings.
One-dimensional point-like probe structure schematic diagram used in Fig. 1 prior arts;
Fig. 2 tobacco pipe shape flexible stylet three dimensional structure diagrams of the present invention;
Fig. 3 soupspoon shape flexible stylet two-dimensional structure schematic diagrames of the present invention.
In figure:11st, support arm;12nd, it is flexibly connected point;13rd, soft contact microprobe.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out it is clear, It is fully described by, it is clear that described embodiment is only a part of embodiment of the present invention, rather than all Embodiment.Based on the embodiment in the present invention, the every other implementation that those of ordinary skill in the art are obtained Example, belongs to the scope of protection of the invention.
As shown in Figures 2 and 3, a kind of flexible stylet for providing of the present invention, probe includes support arm 11, soft Property contact probe 13 and connection support arm 11 and soft contact microprobe 13 flexible connection point 12, flexible connection It can be fixedly connected or detachably, soft contact microprobe 13 is two dimension or three-dimensional structure;Soft contact microprobe 13 For tobacco pipe shape or soupspoon shape, the flexible stylet spatial volume of tobacco pipe shape or soupspoon shape is 1 μm3~0.1m3
Support arm 11 is metal material, and the metal material is copper, aluminium, silver, gold.The support arm 11 For rectangular parallelepiped structure or cylindrical structure, wherein, when being rectangular parallelepiped structure, the value of length is 1 μ M~100cm;During for cylindrical structure, the length of cylinder and the value of radius are 1 μm~100cm.It is flexible The mode that is fixedly connected of tie point 12 is screw thread, neck or spring.Soft contact microprobe 13 be by cylinder or Cuboid processing prepare, soft contact microprobe 13 be metal material, the metal material be copper, aluminium, silver, Gold.
In addition, in a specific embodiment, a kind of flexible stylet, including support arm 11, flexible connection point 12nd, soft contact microprobe 13, flexible connection can be fixedly connected, detachably, and soft contact microprobe 13 is tobacco pipe Shape, is three-dimensional structure.The support arm 11 is made up of metallic material of aluminum;Support arm 11 is rectangular parallelepiped structure, The value of length is 4cm, 100mm and 300um.The fixed form of flexible connection point 12 is solid for screw thread It is fixed.The material of tobacco pipe shape soft contact microprobe 13 be metal material of copper, be by length be 2cm, radius is 60 μm cylinder process, therefore its spatial volume be 5.35 × 10-5cm3
It is preferred that, a kind of flexible stylet, including support arm 11, flexible connection point 12, soft contact microprobe 13, Flexible connection can be fixedly connected, detachably, and soft contact microprobe 13 is tobacco pipe shape, is three-dimensional structure.It is described Support arm 11 is made up of metal material silver;Support arm 11 is cylindrical structure, and the length of cylinder is 15cm, Radius is 500 μm.The fixed form of flexible connection point 12 is fixed for neck.Tobacco pipe shape soft contact microprobe 13 material is metallic material of aluminum, is rectangular for 3cm, 200mm and 260um by the value of length Body is processed, therefore its spatial volume is 8.15 × 10-5cm3
It is preferred that, in a specific embodiment, a kind of flexible stylet, including support arm 11, flexible connection Point 12, soft contact microprobe 13, flexible connection can be fixedly connected, detachably, and soft contact microprobe 13 is soup Spoon-shaped, is two-dimensional structure.The support arm 11 is made up of metal material of copper;Support arm 11 is cylindrical structure, The length of cylinder is 6cm, and radius is 200 μm.The fixed form of flexible connection point 12 is fixed for neck. The material of soupspoon shape soft contact microprobe 13 be metal material of copper, be by length be 1cm, radius be 50 μm Cylinder process, therefore its spatial volume be 7.85 × 10-5cm3
It is preferred that, in a specific embodiment, a kind of flexible stylet, including support arm 11, flexible connection Point 12, soft contact microprobe 13, flexible connection can be fixedly connected, detachably, and soft contact microprobe 13 is soup Spoon-shaped, is two-dimensional structure.The support arm 11 is made up of metal material of copper;Support arm 11 is rectangular parallelepiped structure, The value of length is 6cm, 69mm and 260um.The fixed form of flexible connection point 12 is solid for spring It is fixed.The material of the tobacco pipe shape soft contact microprobe 13 be metallic material of aluminum, be by length be 1cm, radius Cylinder for 80 μm is processed, therefore its spatial volume is about 4.65 × 10-5cm3
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all in the present invention Spirit and principle within, any modification, equivalent substitution and improvements made etc., in pending right of the invention Within the scope of claimed.

Claims (10)

1. a kind of flexible stylet, it is characterised in that the probe includes support arm, soft contact microprobe and connects the support arm Flexible connection point with soft contact microprobe, the flexible connection includes fixing or detachable, and the soft contact microprobe is two dimension Or three-dimensional structure.
2. a kind of flexible stylet as claimed in claim 1, it is characterised in that the soft contact microprobe is tobacco pipe shape or soupspoon Shape.
3. a kind of flexible stylet as claimed in claim 2, it is characterised in that the flexible stylet of the tobacco pipe shape or soupspoon shape is empty Between volume be 1 μm3~0.1m3
4. a kind of flexible stylet as claimed in claim 1, it is characterised in that the support arm is metal material.
5. a kind of flexible stylet as claimed in claim 4, it is characterised in that the metal material is copper, aluminium, silver, gold.
6. a kind of flexible stylet as claimed in claim 4, it is characterised in that the support arm is that the value of length is 1 μm~100cm cuboid.
7. a kind of flexible stylet as claimed in claim 4, it is characterised in that the support arm is length and the value 1 of radius μm~100cm cylinder.
8. a kind of flexible stylet as claimed in claim 1, it is characterised in that the flexible connection includes screw thread, neck or bullet Spring.
9. a kind of flexible stylet as claimed in claim 1, it is characterised in that the soft contact microprobe is by cylinder or length It is prepared by cube processing.
10. a kind of flexible stylet as claimed in claim 1, it is characterised in that the soft contact microprobe is metal material; The metal material is copper, aluminium, silver, gold.
CN201610045067.6A 2016-01-22 2016-01-22 A kind of flexible stylet Pending CN106996995A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201610045067.6A CN106996995A (en) 2016-01-22 2016-01-22 A kind of flexible stylet

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Application Number Priority Date Filing Date Title
CN201610045067.6A CN106996995A (en) 2016-01-22 2016-01-22 A kind of flexible stylet

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CN106996995A true CN106996995A (en) 2017-08-01

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109856526A (en) * 2018-12-06 2019-06-07 北京长城华冠汽车科技股份有限公司 Circuit board continuity test tooling

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1421675A (en) * 2001-11-30 2003-06-04 布朗和沙普·特萨有限公司 Trigger probe and method for assembling the same trigger probe
CN2757136Y (en) * 2004-12-28 2006-02-08 中国铝业股份有限公司 Probe contact head for carbon product resistivity detection
CN101793914A (en) * 2009-01-23 2010-08-04 微探测株式会社 Contact type probe using flexible wire
TW201115152A (en) * 2009-10-20 2011-05-01 Nat Univ Tsing Hua Soft three-dimensional micro probe structure
CN202903311U (en) * 2012-10-12 2013-04-24 东莞清溪光荣塑胶五金厂 Multifunctional ladle temperature measurement electronic scale
CN203270215U (en) * 2013-05-19 2013-11-06 新昌县洪伟机械有限公司 Flexible contact self-recovery type fault sensing device
CN205539079U (en) * 2016-01-22 2016-08-31 国网智能电网研究院 Flexible probe

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1421675A (en) * 2001-11-30 2003-06-04 布朗和沙普·特萨有限公司 Trigger probe and method for assembling the same trigger probe
CN2757136Y (en) * 2004-12-28 2006-02-08 中国铝业股份有限公司 Probe contact head for carbon product resistivity detection
CN101793914A (en) * 2009-01-23 2010-08-04 微探测株式会社 Contact type probe using flexible wire
TW201115152A (en) * 2009-10-20 2011-05-01 Nat Univ Tsing Hua Soft three-dimensional micro probe structure
CN202903311U (en) * 2012-10-12 2013-04-24 东莞清溪光荣塑胶五金厂 Multifunctional ladle temperature measurement electronic scale
CN203270215U (en) * 2013-05-19 2013-11-06 新昌县洪伟机械有限公司 Flexible contact self-recovery type fault sensing device
CN205539079U (en) * 2016-01-22 2016-08-31 国网智能电网研究院 Flexible probe

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109856526A (en) * 2018-12-06 2019-06-07 北京长城华冠汽车科技股份有限公司 Circuit board continuity test tooling

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