CN106996947A - A kind of irregular geometry shape capacitance tomography sensor and evaluation method - Google Patents
A kind of irregular geometry shape capacitance tomography sensor and evaluation method Download PDFInfo
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- CN106996947A CN106996947A CN201610056785.3A CN201610056785A CN106996947A CN 106996947 A CN106996947 A CN 106996947A CN 201610056785 A CN201610056785 A CN 201610056785A CN 106996947 A CN106996947 A CN 106996947A
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
Abstract
The present invention provides a kind of irregular geometry shape capacitance tomography sensor, the sensor includes measuring electrode, bucking electrode and external shielding layer, the measuring electrode also serves as exciting electrode in actually measurement, on the insulation outer wall for being close to irregular geometry shape measurand, 0 degree of starting point that its riding position is justified by the normative reference of measurand cross section is determined, the bucking electrode is homogeneously disposed between adjacent measurement electrodes, point to the round heart of normative reference in its radially installed direction, the external shielding layer is located at the outside of measurand insulation outer wall, its circular in cross-section and center of circle is overlapped with the center of circle that normative reference is justified.The evaluation method of irregular geometry shape capacitance tomography sensor is provided simultaneously.Beneficial effect is can to meet ECT to carry out the object of random geometry the requirement of actual measurement, and proposes new ECT sensor evaluation method the performance of sensor is estimated, so as to widen application and the field of ECT technologies.
Description
Technical field
The present invention relates to detection technique field, more particularly to a kind of irregular geometry shape capacitance tomography sensor and evaluation side
Method.
Background technology
Capacitance chromatography imaging (Electrical Capacitance Tomography, ECT) technology is used as a kind of process tomographic imaging skill
Art, due to having the advantages that non-intruding, radiationless, fast response time and security are good, receives extensive concern and obtains
Larger and faster development.ECT systems are the electricity being tested by the sensor array measurement being placed on outside measurand in field domain
Capacitance, so as to obtain the dielectric distribution on tested field domain section, finally reappears each phase medium point using the relative program of image reconstruction
The image of cloth.Common ECT systems are made up of three essential parts:ECT sensor, data collection control unit and image weight
Build computer.Wherein ECT sensor is the entrance of system data acquisition, therefore capacitance sensor design is influence systematic entirety
The key component of energy.At present, it is the symmetrical square structure of circular or rule that known ECT, which is used for sensor section, and it is designed
Relative maturity.However, the ECT sensor application for irregular geometry section has not yet seen.
In ECT, sensitivity field is with sensitivity profile is uneven everywhere and exists positive and negative in " soft field " effect, i.e. sensitivity field
Sensitizing range, the sensitivity close to the remolding sensitivity field domain center of sensor array field domain is higher by a lot.Sensitivity is to retouch for convenience
The concept that ECT is tested the relation in field domain between dielectric distribution and measurement capacitance and drawn is stated, it is substantially in tested field domain
The relative dielectric constant of subdivision unit by low uprise when caused capacitance relative change.During ECT sensor is ECT systems
Key components, it directly affect sensitivity field sensitivity profile, measured capacitance value precision and influence the quality of image reconstruction.
Generally using single sensitive field uniformity as evaluation index, and all it is to quick in the ECT sensor evaluation and optimization that appear in the newspapers
Sense field, which is done, waits the progress sensitivity profile calculating of grid uniform subdivision.However, the measurement to random geometry in this way
Object, which carries out sensitivity field subdivision, to be realized.And the very low even negative value of the sensitivity of ECT centers field domain, become in curvature
The change of sensitivity for changing larger border field domain is also very violent, and ECT sensor evaluation index is used as using single sensitive field uniformity
It is inappropriate.Thus, in order to reach the application requirement measured to irregular geometry shape objects, it is necessary to design new ECT
Capacitance sensor and the new evaluation method of use.
The content of the invention
The technical problems to be solved by the invention are in view of the above-mentioned drawbacks of the prior art and not enough, are proposed a kind of irregular several
What shape capacitance tomography sensor and evaluation method, to meet the measurement demand to random geometry object.
The present invention uses following technical scheme to solve above-mentioned technical problem:
A kind of irregular geometry shape capacitance tomography sensor, is made up of measuring electrode, bucking electrode and external shielding layer, institute
State measuring electrode and also serve as exciting electrode in actually measurement, on the insulation outer wall for being close to irregular geometry shape measurand;
The bucking electrode is homogeneously disposed between adjacent measurement electrodes, in ground state;The external shielding layer is located at measurand outer wall
Outside, be connected with bucking electrode.
Further, a kind of irregular geometry shape capacitance tomography sensor of the invention, the measuring electrode number is N,
N is greater than 2 natural number, and measuring electrode number is determined according to the shape of actual measurand.
Further, a kind of irregular geometry shape capacitance tomography sensor of the invention, the subtended angle of the measuring electrode is
θ, subtended angle θ are determined by the normative reference circle of measuring electrode number N and measurand cross section.
Further, a kind of irregular geometry shape capacitance tomography sensor of the invention, the measurand cross section
Normative reference circle refer to it is circumscribed with chord length on measurand cross section maximum 2 points, while the minimum circumscribed circle of radius.
Further, a kind of irregular geometry shape capacitance tomography sensor of the invention, the axial direction of the measuring electrode is long
Spend for L, it is identical with the axial length of bucking electrode and external shielding layer.
Further, a kind of irregular geometry shape capacitance tomography sensor of the invention, the placement position of the measuring electrode
Put and determined by 0 degree of starting point of the normative reference circle of measurand cross section, in order that the cross sectional shape of measuring electrode is more regular
And the placement of sensor electrode more facilitates, 0 degree of starting point of normative reference circle can suitably do rotation adjustment.
Further, a kind of irregular geometry shape capacitance tomography sensor of the invention, the bucking electrode is homogeneously disposed in
Between adjacent measurement electrodes, refer to that bucking electrode is identical relative to the central angle that normative reference is justified with two-sided measurement electrode, its footpath
The round heart of normative reference is pointed to installation direction.
Further, a kind of irregular geometry shape capacitance tomography sensor of the invention, the section of the external shielding layer is in
Circle, the center of circle that its center of circle is justified with the normative reference of measurand cross section is overlapped, and radius is R.
The present invention also provides a kind of irregular geometry shape capacitance tomography sensor evaluation method, comprises the following steps:
Step one, according to the shape in section where actual irregular geometry shape measurand, to field domain progress unequalization grid
Subdivision, the unequalization mesh generation carries out roughening subdivision for psychological field domain in cross section, and becomes in border field domain particularly curvature
Change big border field domain and carry out refinement subdivision, to improve the sensitivity of center field domain and the sensitivity of uniform boundary field domain.
Step 2, will be N number of for the ECT sensor for having N number of measuring electrode placed in irregular geometry shape measurand
Measuring electrode is since 0 degree of starting point that normative reference is justified by marked as n-th measuring electrode (1≤n≤N) counterclockwise.Based on 1
The incentive mode of individual exciting electrode and 1 measuring electrode, since 0 degree of starting point that normative reference is justified, by making successively counterclockwise
1 measuring electrode is in excitation state, and remaining N-1 measuring electrode is measured respectively, and measurement obtains N* (N-1)/2
Effective capacitance value, according to the subdivision grid of step one, so as to calculate the sensitivity profile of sensitivity field, such as SijFor electrode pair i-j it
Between sensitivity profile.The computational methods of sensitivity are:
Wherein, Sij(e) it is sensitivity profile SijThe sensitivity of (i ≠ j) on e-th of subdivision unit;Represent e-th of subdivision
The relative dielectric constant of unit is high-k εB, and the dielectric constant in remaining subdivision unit is all low-k εAWhen,
Measuring electrode is to the capacitance between i-j;Represent that it is high-k ε that relative dielectric constant is full of in the field domain of sectionBWhen measure
Capacitance between electrode pair i-j;Represent that it is low-k ε that relative dielectric constant is full of in the field domain of sectionAWhen measuring electrode
To the capacitance between i-j;μ (e) represents the area correction factor of e-th of subdivision unit.
Step 3, obtained sensitivity profile is calculated according to step 2, to bear sensitive area ratio PnregWith sensitivity extreme difference RS
For optimization aim, the negative sensitive area ratio PnregRefer to N* (N-1)/2 sensitivity profile on each subdivision unit
Calculating is overlapped, so as to obtain overall sensitivity of each subdivision unit under different exciting electrodes and measuring electrode, is finally united
The ratio of whole subdivision units shared by the subdivision unit that overall sensitivity is negative value is counted out, formula is expressed as:
Wherein, S (e) represents overall sensitivity of e-th of subdivision unit under different exciting electrodes and measuring electrode;NnregRepresent
Overall sensitivity is the subdivision unit number of negative value, NregFor total subdivision unit number;
The sensitivity extreme difference RS, refer to being based on being overlapped each subdivision unit overall sensitivity obtained from calculating,
Maximum overall sensitivity makees poor with minimum overall sensitivity, and formula is expressed as:
RS=MAXALL_S-MINALL_S (4)
Wherein, MAXALL_SFor overall sensitivity maximum in subdivision unit, MINALL_SFor overall spirit minimum in subdivision unit
Sensitivity;
Sensitive area ratio P is born according to optimization aimnregWith sensitivity extreme difference RS, evaluate the property of designed ECT sensor
Can, PnregAnd RSThe smaller performance for representing ECT sensor is better.
Further, a kind of irregular geometry shape capacitance tomography sensor evaluation method of the invention, the step 2 meter
Sensitivity profile is calculated, measurand is irregular geometry shape, in the absence of symmetrical sensitivity profile, therefore calculate and obtain
N* (N-1)/2 sensitivity profile;Assuming that section field domain is N by subdivisionregIndividual subdivision unit, then each sensitivity profile SijBy
NregThe sensitivity composition of individual subdivision unit.
Further, in a kind of irregular geometry shape capacitance tomography sensor evaluation method of the invention, the step 3
To bear sensitive area proportion PnregWith sensitivity extreme difference RSFor optimization aim, for the ECT sensor under each structure
Calculate and obtain corresponding PnregAnd RS, described ECT sensor structure is by parameter N, θ, L, R composition, i.e. PnregAnd RSIt is excellent
Change target to be determined by the influence of ECT sensor parameter.Therefore, PnregAnd RSDuring in optimization, obtained parameter N, θ, L, R group
It is combined into the ECT sensor of best performance.Formula is expressed as:
Wherein, OPT (N, θ, L, R) is represented by the optimization evaluation target of the most optimized parameter N, θ, L, the R ECT sensor constituted,
minPnregTo evaluate the optimal value that target bears sensitive area ratio, minRSTo evaluate the optimal value of target sensitivity extreme difference,
F, g represent to evaluate target P respectivelynreg、RSRelation between ECT sensor structure.
The effect of the present invention is can to meet ECT to carry out the requirement of actual measurement to the object of random geometry, and is carried
Go out new ECT sensor evaluation method to be estimated the performance of sensor, so as to widen the application of ECT technologies
And field.
Brief description of the drawings
Fig. 1 is the dimensional structure diagram of irregular geometry shape capacitance tomography sensor of the embodiment of the present invention;
Fig. 2 is Fig. 1 A-A sectional views;
Fig. 3 is Fig. 1 along the field domain subdivision graph at A-A;
In figure:
1st, irregular geometry shape measurand 2, measuring electrode (exciting electrode) 3, bucking electrode
4th, external shielding layer 5, normative reference circle 6,0 degree of starting point 7, subdivision unit
Embodiment
The irregular geometry shape capacitance tomography sensor and evaluation method of the present invention are said with reference to drawings and Examples
It is bright.
Fig. 1 is the dimensional structure diagram of irregular geometry shape capacitance tomography sensor of the embodiment of the present invention.In Fig. 1,
The sensor includes measuring electrode 2, bucking electrode 3, external shielding layer 4, irregular geometry shape measurand 1;It is described to survey
Amount electrode 2 also serves as exciting electrode 2 in actually measurement, on the insulation outer wall for being close to irregular geometry shape measurand 1;
The bucking electrode 3 is homogeneously disposed between adjacent measurement electrodes 2, in ground state;The external shielding layer 4 is located at irregular
The outside of the outer wall of geometry measurand 1, is connected with bucking electrode 3, and ground connection keeps zero potential, so as to eliminate electrostatic interference
Influence;The length L of the measuring electrode 2, bucking electrode 3, external shielding layer 4 in axial direction is identical, axis of the embodiment of the present invention
It is 65mm to length L.
Fig. 2 is the transversal profile view at A in Fig. 1.The main body of described irregular geometry shape capacitance tomography sensor
Include 8 measuring electrodes 2,8 bucking electrodes 3 and external shielding layer 4.According to measuring electrode 2 relative to irregular geometry shape
The subtended angle θ of the normative reference circle 5 in the place section of shape measurand 1, determines the shape and installation site of measuring electrode 2, can fit
When 0 degree of starting point 6 of rotation adjustment normative reference circle 5, so that the cross sectional shape of measuring electrode 2 is more regular and installs more
Plus conveniently.The radially installed direction of bucking electrode 3 points to normative reference and justifies 5 centers of circle, and its outside is external shielding layer 4.The present invention
The radius of normative reference circle 5 is 40mm, subtended angle θ=31 ° of measuring electrode 2, the radius of external shielding layer 4 in embodiment
R=47mm.
The present invention irregular geometry shape capacitance tomography sensor evaluation method be achieved in that this method include with
Lower step:
Step one:Unequalization mesh generation is carried out according to the cross sectional shape of actual irregular geometry shape measurand 1, it is described
Unequalization mesh generation carries out roughening subdivision for psychological field domain in cross section, and in the big field domain of border field domain particularly Curvature varying
Refinement subdivision is carried out, to improve the sensitivity of central area and the sensitivity in uniform boundary region.It is illustrated in figure 3 of the invention real
The electrode ECT sensor of example 8 is applied along the field domain subdivision graph at A-A, the number N of subdivision unit 7reg=395, in order to show sensitivity field
The subdivision structure in domain, does not draw measuring electrode 2, bucking electrode 3 and external shielding layer 4.
Step 2:ECT sensor for being placed with N number of measuring electrode 2 on the section of irregular geometry shape measurand 1,
By N number of measuring electrode 2 since normative reference justify 50 degree of starting point 6 by marked as n-th measuring electrode counterclockwise
2(1≤n≤N).Incentive mode based on 1 exciting electrode 2 and 1 measuring electrode 2, measurement obtains N* (N-1)/2
Effective capacitance value, according to the subdivision grid of step one, so as to calculate the sensitivity profile of sensitive field domain.In embodiments of the present invention,
8 measuring electrodes 2 of ECT sensor are pressed counterclockwise marked as 1~No. 8 since normative reference justifies 50 degree of starting point 6,
Using 1 exciting electrode 2 and the incentive mode of 1 measuring electrode 2, C can be measured12, C13..., C78Totally 28 solely
Vertical capacitance.Wherein, C12Represent the capacitance between 2 pairs of 1-2 measuring electrodes.Fig. 3 according to embodiments of the present invention, it is sensitive
Field domain is 395 subdivision units 7 by subdivision, so each sensitivity profile is made up of 395 sensitivity, such as Sij(1),
Sij(2) ..., Sij(395) sensitivity profile S is represented respectivelyij395 sensitivity.Calculate altogether and obtain 28 sensitivity point
Cloth Sij.With water as high-k phase, air is as low-k phase, with S12(1) exemplified by, its computational methods is expressed as:
Wherein, S12(1) it is sensitivity profile S12The 1st subdivision unit 7 sensitivity;For the 1st subdivision unit 7
Relative dielectric constant be water dielectric constant 80, and dielectric constant in remaining subdivision unit 7 is all the dielectric constant 1 of air
When, measuring electrode 2 is to the capacitance between 1-2;Surveyed when representing in the field domain of section full of the water that relative dielectric constant is 80
Electrode 2 is measured to the capacitance between 1-2;Measuring electrode during full of the air that relative dielectric constant is 1 is represented in the field domain of section
Capacitance between 2 couples of 1-2;μ (1) represents the area correction factor of the 1st subdivision unit 7, value 0.5.
Step 3:28 obtained sensitivity profile S are calculated according to step 2ij, to bear sensitive area ratio PnregWith it is sensitive
Spend extreme difference RSFor optimization aim, the performance of designed ECT sensor, P are evaluatednregAnd RSSmaller expression ECT sensor
Performance is better.Specifically calculation procedure is:
(1) overall sensitivity of each subdivision unit 7 is calculated:
Wherein, S (e) represents e subdivisions 7 overall sensitivity under different exciting electrodes 2 and measuring electrode 2 of unit, N=8;
(2) ECT sensor constituted under current parameter N, θ, L, R, calculates its negative sensitive area ratio PnregAnd spirit
Sensitivity extreme difference RS:
RS=MAXALL_S-MINALL_S (4)
Wherein, NnregRepresent the number of subdivision unit 7 that overall sensitivity is negative value, NregFor total number of subdivision unit 7;
MAXALL_SFor overall sensitivity maximum in subdivision unit 7, MINALL_SFor overall sensitivity minimum in subdivision unit 7.
(3) for each by parameter N, θ, L, the ECT sensor that R is constituted can calculate its corresponding PnregAnd RS,
Therefore the relation between ECT sensor parameter and optimization aim is can obtain, so that it is determined that so that optimization aim is in when optimizing
ECT sensor parameter N, θ, L, R combination, that is, determine the ECT sensor of the best performance of irregular geometry shape measurand 1.
It is formulated as:
Wherein, OPT (N, θ, L, R) is represented by the optimization evaluation target of the most optimized parameter N, θ, L, the R ECT sensor constituted,
minPnregTo evaluate the optimal value that target bears sensitive area ratio, minRSTo evaluate the optimal value of target sensitivity extreme difference,
F, g represent to evaluate target P respectivelynreg、RSRelation between ECT sensor structure.
In the present embodiment, including measuring electrode 2 and bucking electrode 3 each 8, but can also use other electrode numbers, such as 4,5,
6th, the number such as 7,9,10, is determined according to the shape of actual irregular geometry shape measurand 1.
In the present embodiment, ECT sensor cross section be irregular ellipse, but the present invention irregular geometry shape capacitance chromatographic
Imaging sensor and evaluation method are also applied to irregular polygon or other non-regular shapes.
The above embodiment of the present invention is only used for schematically describing the present invention, it is not limited to this, only it is shown in accompanying drawing
One of embodiments of the present invention, all equivalence changes or replacement without departing from the spirit and scope of the present invention, done, all should be wrapped
It is contained within protection scope of the present invention.
Claims (5)
1. a kind of irregular geometry shape capacitance tomography sensor, it is characterized in that:The sensor include measuring electrode (2),
Bucking electrode (3) and external shielding layer (4), the measuring electrode (2) also serve as exciting electrode (2) in actually measurement, tightly
On the insulation outer wall for being affixed on irregular geometry shape measurand (1), riding position is by irregular geometry shape measurand (1)
0 degree of starting point (6) of the normative reference circle (5) of cross section determines, in order that the cross sectional shape of measuring electrode (2) is more advised
Then and sensor electrode placement more facilitate, normative reference circle (5) 0 degree starting point (6) can suitably do rotation adjust;
The bucking electrode (3) is homogeneously disposed between adjacent measurement electrodes (2), and normative reference circle (5) circle is pointed in radially installed direction
The heart, in ground state;The external shielding layer (4) is located at the outside of irregular geometry shape measurand (1) insulation outer wall,
It is connected with bucking electrode (3), the reference in circular in cross-section and the center of circle and irregular geometry shape measurand (1) cross section
The center of circle of standard round (5) is overlapped.
2. irregular geometry shape capacitance tomography sensor according to claim 1, it is characterized in that:It is described irregular
The normative reference circle (5) of geometry measurand (1) cross section refers to horizontal with irregular geometry shape measurand (1)
Chord length is maximum on section 2 points it is circumscribed, while the minimum circumscribed circle of radius.
3. irregular geometry shape capacitance tomography sensor according to claim 1, it is characterized in that:The measurement electricity
The number of pole (2) is more than 2, is determined according to the shape of actual irregular geometry shape measurand (1);The measuring electrode
(2) subtended angle justifies (5) by the number of measuring electrode (2) and the normative reference of irregular geometry shape measurand (1) cross section
Determine;The axial length of the measuring electrode (2) is identical with the axial length of bucking electrode (3), external shielding layer (4).
4. a kind of irregular geometry shape capacitance tomography sensor evaluation method based on described in claim 1, its feature
It is that the evaluation method comprises the following steps:
Step one, according to the shape in section where actual irregular geometry shape measurand (1), to field domain progress unequalization
Mesh generation, the unequalization mesh generation carries out roughening subdivision for psychological field domain in cross section, and particularly bent in border field domain
The border field domain of rate change greatly carries out refinement subdivision, to improve the sensitivity of center field domain and the sensitivity of uniform boundary field domain;
Step 2, is sensed for the ECT for having N number of measuring electrode (2) placed in irregular geometry shape measurand (1)
Device, by N number of measuring electrode (2) since normative reference justify (5) 0 degree of starting point (6) by counterclockwise marked as n-th
Measuring electrode (2) (1≤n≤N), the incentive mode based on 1 exciting electrode (2) with 1 measuring electrode (2), from ginseng
Examine standard round (5) 0 degree of starting point (6) start, by make successively counterclockwise 1 measuring electrode (2) be in excitation state,
Remaining N-1 measuring electrode (2) is measured respectively, and measurement obtains N* (N-1)/2 effective capacitance value, according to step one
Subdivision grid, so as to calculate the sensitivity profile of sensitivity field, such as SijFor the sensitivity profile between electrode pair i-j, sensitivity
Computational methods be:
Wherein, Sij(e) it is sensitivity profile SijThe sensitivity of (i ≠ j) on e-th of subdivision unit (7);Represent e-th
The relative dielectric constant of subdivision unit (7) is high-k εB, and the dielectric constant in remaining subdivision unit (7) is all to be low
Permittivity εAWhen, measuring electrode (2) is to the capacitance between i-j;Represent to be full of relative dielectric constant in the field domain of section
For high-k εBWhen measuring electrode (2) to the capacitance between i-j;Represent normal full of relative dielectric in the field domain of section
Number is low-k εAWhen measuring electrode (2) to the capacitance between i-j;μ (e) e-th of subdivision unit (7) of expression
The area correction factor;
Step 3, obtained sensitivity profile is calculated according to step 2, to bear sensitive area ratio PnregWith sensitivity extreme difference RS
For optimization aim, the performance of designed ECT sensor, P are evaluatednregAnd RSThe smaller performance for representing ECT sensor is better,
The negative sensitive area ratio PnregRefer to be folded N* (N-1)/2 sensitivity profile on each subdivision unit (7)
Plus calculate, so that overall sensitivity of each subdivision unit (7) under different exciting electrodes (2) and measuring electrode (2) is obtained,
The ratio of whole subdivision units (7) shared by the subdivision unit (7) that overall sensitivity is negative value is finally counted, formula is expressed as:
Wherein, S (e) represents overall spirit of e-th of subdivision unit (7) under different exciting electrodes (2) and measuring electrode (2)
Sensitivity;NnregRepresent subdivision unit (7) number that overall sensitivity is negative value, NregFor total subdivision unit (7) number;
The sensitivity extreme difference RS, refer to being based on totality obtained from calculating is overlapped to each subdivision unit (7) sensitive
Maximum overall sensitivity, is made poor, formula is expressed as by degree with minimum overall sensitivity:
RS=MAXALL_S-MINALL_S (4)
Wherein, MAXALL_SFor overall sensitivity maximum in subdivision unit (7), MINALL_SFor in subdivision unit (7) most
Small overall sensitivity.
5. irregular geometry shape capacitance tomography sensor evaluation method according to claim 4, it is characterized in that:Institute
State in step 3 to bear sensitive area proportion PnregWith sensitivity extreme difference RSFor optimization aim, for each by parameter
The ECT sensor that N, θ, L, R are constituted, can calculate its corresponding PnregAnd RS, therefore work as PnregAnd RSIn optimization
When, obtained parameter N, θ, L, R is combined as the ECT sensor of irregular geometry shape measurand (1) best performance, public
Formula is expressed as:
Wherein, N is the number of measuring electrode (2), and θ is the subtended angle of measuring electrode (2), and L is the axle of measuring electrode (2)
To length, R is the radius of external shielding layer (4), and OPT (N, θ, L, R) represents the ECT being made up of the most optimized parameter N, θ, L, R
The optimization evaluation target of sensor, min PnregTo evaluate the optimal value that target bears sensitive area ratio, min RSTo evaluate
The optimal value of target sensitivity extreme difference, f, g represents to evaluate target P respectivelynreg、RSRelation between ECT sensor structure.
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