CN106996942B - A kind of optical path switching system - Google Patents
A kind of optical path switching system Download PDFInfo
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- CN106996942B CN106996942B CN201710277779.5A CN201710277779A CN106996942B CN 106996942 B CN106996942 B CN 106996942B CN 201710277779 A CN201710277779 A CN 201710277779A CN 106996942 B CN106996942 B CN 106996942B
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- 230000003287 optical effect Effects 0.000 title claims abstract description 114
- 238000013519 translation Methods 0.000 claims description 21
- 230000005284 excitation Effects 0.000 abstract description 8
- 238000012360 testing method Methods 0.000 abstract description 7
- 238000005457 optimization Methods 0.000 description 6
- 238000001514 detection method Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 239000011343 solid material Substances 0.000 description 2
- 108010083687 Ion Pumps Proteins 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 238000001941 electron spectroscopy Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000007903 penetration ability Effects 0.000 description 1
- 238000010248 power generation Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 238000009738 saturating Methods 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 230000005533 two-dimensional electron gas Effects 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/227—Measuring photoelectric effect, e.g. photoelectron emission microscopy [PEEM]
- G01N23/2273—Measuring photoelectron spectrum, e.g. electron spectroscopy for chemical analysis [ESCA] or X-ray photoelectron spectroscopy [XPS]
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- Spectroscopy & Molecular Physics (AREA)
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Abstract
The present invention provides a kind of optical path switching system, and the optical path switching system includes at least: vacuum line；The sample system chamber of vacuum line one end is set, for placing sample to be tested；At least two light source optical path chambers is set on the vacuum line, for introducing different light sources respectively, wherein each light source optical path chamber is equipped with ionic pump and vacuum valve；Vacuum conditions chamber on the vacuum line and between the sample system chamber and the light source optical path chamber is set.Optical path switching system of the invention can solve angle resolved photoelectron spectroscope instrument and integrate mutual switching problem after different excitation light sources between each light source, realize that various light sources during the test are capable of the actual demand of mutually free switching.
Description
Technical field
The invention belongs to photoelectron spectrograph fields, more particularly to a kind of optical path switching system.
Background technique
Angle resolved photoelectron spectroscope instrument (ARPES) is directly to observe solid material using photoelectric effect under ultra-high vacuum environment
The method of the electronic structure of material is known as " one can see that the microscope of electronic structure ", is observation solid material electronics knot
The best sharp weapon of structure.And motivating light source is the key that angle resolved photoelectron spectroscope instrument can work normally composition, effect is sharp
Power generation son evolution measured material surface.Routine angle resolved photoelectron spectroscope instrument generally uses rare gas ionization as excitation at present
Light source.But with the development of angle resolved photoelectron spectroscope instrument technology, more and more equipment are initially configured deep ultraviolet laser light source
(DUV) and there is the advanced light sources such as time-resolved period ultrashort pulse higher hamonic wave light source (HHG) to give full play to angle point
Distinguish the advantage of photoelectron spectrograph.Angle resolved photoelectron spectroscope instrument integrates deep ultraviolet laser light source, is greatly improved sample penetration
Ability can be used for the Interface Electronic States of certain depth under surface so as to screen surface and body electronic effect very well
Research (as phenomena such as studying interface two-dimensional electron gas or interface superconduction), breaks through the research range of tradition ARPES；Integrated week
Phase ultra-short pulse source can develop double-photon optical electron spectrum technology, under the time domain behavior and nonequilibrium condition that obtain electronics
Electronic structure, break through traditional electron spectroscopy measurement do not have time resolution limitation.
In the case where angle resolved photoelectron spectroscope instrument is equipped with a variety of excitation light sources, equipment can be realized under service state
The various mutual free switchings of light source are increasingly important.Therefore, the present invention provides a kind of optical path switching system, realizes between various light sources
Free switching.
Summary of the invention
In view of the foregoing deficiencies of prior art, it the purpose of the present invention is to provide a kind of optical path switching system, is used for
It solves angle resolved photoelectron spectroscope instrument in the prior art and integrates mutual switching problem after different excitation light sources between each light source.
In order to achieve the above objects and other related objects, the present invention provides a kind of optical path switching system, the optical path switching
System includes at least:
Vacuum line；
The sample system chamber of vacuum line one end is set, for placing sample to be tested；
At least two light source optical path chambers is set on the vacuum line, for introducing different light sources respectively, wherein every
A light source optical path chamber is equipped with ionic pump and vacuum valve；
Vacuum tune on the vacuum line and between the sample system chamber and the light source optical path chamber is set
Save chamber.
A kind of scheme of optimization as optical path switching system of the present invention is equipped with electric translation in the light source optical path chamber
Platform, height adjustment platform, electronic mirror holder and diaphragm；
The motorized precision translation stage is fixed on the height adjustment platform；
The electronic mirror holder is fixed on the motorized precision translation stage, is equipped with reflecting mirror on the electronic mirror holder,
The diaphragm is mounted on height adjustment platform, for adjusting optical path.
A kind of scheme of optimization as optical path switching system of the present invention, the motorized precision translation stage are fixed by screws in institute
It states on height adjustment platform, the electronic mirror holder is fixed by screws on the motorized precision translation stage.
A kind of scheme of optimization as optical path switching system of the present invention is equipped with diaphragm and work in the vacuum conditions chamber
Dynamic condenser lens.
The light entrance port of a kind of scheme of optimization as optical path switching system of the present invention, the sample system chamber also has
There is vacuum valve.
A kind of scheme of optimization as optical path switching system of the present invention, the sample system chamber are angle resolved photoelectron light
Spectrometer.
A kind of scheme of optimization as optical path switching system of the present invention, the light source optical path chamber are two, a definition
For first light source optical path chamber, the first light source optical path chamber detects the coaxial conjunction of light and infrared pump light for realizing ultrashort pulse
Beam；Another is defined as second light source optical path chamber, and the second light source optical path chamber is used as the optical path adjusting of deep ultraviolet laser.
As described above, optical path switching system of the invention, comprising: vacuum line；The sample of vacuum line one end is set
System chamber, for placing sample to be tested；At least two light source optical path chambers is set on the vacuum line, for introducing respectively not
Same light source, wherein each light source optical path chamber is equipped with ionic pump and vacuum valve；It is arranged on the vacuum line and is located at
Vacuum conditions chamber between the sample system chamber and the light source optical path chamber.Optical path switching system of the invention can solve angle
It differentiates photoelectron spectrograph and integrates mutual switching problem after different excitation light sources between each light source, realize each during the test
Kind light source is capable of the actual demand of mutually free switching.
Detailed description of the invention
Fig. 1 is optical path switching system overall schematic of the present invention.
Fig. 2 is light source optical path cavity configuration top view in optical path switching system of the present invention.
Fig. 3 is light source optical path chamber side view in optical path switching system of the present invention.
Component label instructions
1 vacuum line
2 sample system chambers
3 samples to be tested
4 light source optical path chambers
41 first light source optical path chambers
42 second light source optical path chambers
401 motorized precision translation stages
402 height adjustment platforms
403 electronic mirror holders
404 diaphragms
51,52 ionic pump
61,62,63,64 vacuum valve
7 vacuum conditions chambers
71 lens telescoping mechanisms
8 angle valves
Specific embodiment
Illustrate embodiments of the present invention below by way of specific specific example, those skilled in the art can be by this specification
Other advantages and efficacy of the present invention can be easily understood for disclosed content.The present invention can also pass through in addition different specific realities
The mode of applying is embodied or practiced, the various details in this specification can also based on different viewpoints and application, without departing from
Various modifications or alterations are carried out under spirit of the invention.
Please refer to attached drawing.It should be noted that only the invention is illustrated in a schematic way for diagram provided in the present embodiment
Basic conception, only shown in schema then with related component in the present invention rather than component count, shape when according to actual implementation
Shape and size are drawn, when actual implementation kenel, quantity and the ratio of each component can arbitrarily change for one kind, and its component cloth
Office's kenel may also be increasingly complex.
The present invention provides a kind of optical path switching system, and the optical path switching system includes at least: vacuum line, sample system
Chamber, at least two light source optical path chambers and vacuum conditions chamber.Vacuum line one end is arranged in the sample system chamber, for putting
Set sample to be tested；The light source optical path chamber is arranged on the vacuum line, for introducing different light sources respectively, wherein every
A light source optical path chamber is equipped with ionic pump and vacuum valve；The vacuum conditions chamber is arranged on the vacuum line and is located at institute
It states between sample system chamber and the light source optical path chamber.
It is illustrated by taking two light source optical path chambers as an example below.Referring specifically to attached FIG. 1 to FIG. 3.
System specifically includes that two light source optical path chambers 4 and a vacuum conditions chamber 7 and a sample system chamber 2, each
It is connected, then assisted with various vacuum valves, ionic pump and optical element etc. by vacuum line 1 between cavity.
One of light source optical path chamber 4 is defined as first light source optical path chamber 41, and the first light source optical path chamber 41 is mainly used
The coaxial conjunction beam for making time-resolved ultrashort pulse detection light and infrared pump light is used, and may also be referred to as closing beam vacuum chamber.This
Two kinds of light enter first light source optical path chamber 41 along different paths respectively, and synthesize light beam in first light source optical path chamber 41.Separately
One light source optical path chamber 4 is defined as second light source optical path chamber 42, and the second light source optical path chamber 42 is mainly used as deep ultraviolet laser
Optical path adjusting be used, may also be referred to as reflective vacuum chamber.
7 purpose of vacuum conditions chamber is vacuum difference so that 1 vacuum of vacuum line reaches can want with ultrahigh vacuum
The degree for sample system chamber 2 (such as the angle resolved photoelectron spectroscope instrument system) connection asked, while being mounted with to live in the chamber
Dynamic diaphragm and movable condenser lens (not illustrated) play the purpose of optical path adjusting and light beam focusing.The condenser lens is logical
The lens telescoping mechanism 71 crossed on vacuum conditions chamber 7 realizes movement.
In order to make optical path reach the requirement of ultrahigh vacuum, two light source optical path chambers 4 and vacuum conditions chamber 7 are provided with high pumping
The ionic pump 51,52 of speed.Using ionic pump 51,52 without being in order to avoid due to optical element using the reason of conventional molecular pump
Deng vibration caused by optical path it is unstable.Motorized precision translation stage and electronic mirror are assembled in two light source optical path chambers 4 simultaneously
Frame adjusts the requirement of optical path to realize under vacuum conditions.
It specifically, is as shown in Figures 2 and 3 the structural schematic diagram inside two light source optical path chambers 4.The light source optical path chamber 4
In motorized precision translation stage 401, height adjustment platform 402, electronic mirror holder 403 and diaphragm 404 are installed.
The motorized precision translation stage 401 is fixed on the height adjustment platform 402, passes through the height adjustment platform 402
On the adjustable motorized precision translation stage 401 of knob arrive suitable position and height.The diaphragm 404 is mounted on the height adjustment
For adjusting optical path on platform 402.The electronic mirror holder 403 is fixed on the motorized precision translation stage 401, the electronic mirror holder
Reflecting mirror is installed on 403, by the movement of the motorized precision translation stage 401, reflecting mirror is made to be mounted on suitable position, thus make into
Entering the light in chamber can smoothly enter in the vacuum conditions chamber 7 along vacuum line, finally be radiated at the table of sample to be tested 3
Face.
Preferably, the motorized precision translation stage 401 is fixed on the height adjustment by screw (for example, perforated vacuum screw)
On platform 402, the electronic mirror holder 403 is fixed on the motorized precision translation stage 401 by screw (for example, perforated vacuum screw)
On.
Diaphragm and movable condenser lens are installed in the vacuum conditions chamber 7.Light beam by the light source optical path chamber 4 it
Afterwards, the diaphragm of vacuum conditions chamber 7 is first passed through, then focuses the beam onto the surface of sample to be tested 3 by condenser lens.The focusing
Lens can realize that condenser lens is moveable into and out from vacuum conditions chamber 7 by a lens telescoping mechanism 71.
Also there is vacuum valve 63 in the light entrance port of the sample system chamber 2.In the true of vacuum line 1 and each cavity
Before reciprocal of duty cycle is not matched with the vacuum degree in sample system chamber 2, which is to close, and waits until light source optical path chamber 4 and vacuum tune
When section chamber 7 vacuumizes the degree that reaches and can be connected to sample system chamber 2, which is opened.
The angle valve for assisting each ion pump startup to vacuumize is additionally provided on the vacuum line 1 (to show only in attached drawing 1
Angle valve 8).Before vacuumizing using ionic pump, vacuum line 1 can be made to reach certain vacuum in advance using angle valve 8.
In the present embodiment, the specific operation process for carrying out optical path switching using optical path switching system is as follows:
1) before angle resolved photoelectron spectroscope test, if first needing to close as excitation light source using deep ultraviolet laser
First light source optical path chamber 41 is closed, second light source optical path chamber 42 is opened, specifically: vacuum valve 62 is closed, second light source light is passed through
After second light source optical path chamber 42 and vacuum conditions chamber 7 are evacuated to unlatching ionic pump 52 by the angle valve (not illustrated) of road chamber 42
Angle valve is closed, is vacuumized to ionic pump 52 until reaching it can beat with the degree of angle resolved photoelectron spectroscope instrument system connectivity
Vacuum valve 63 is opened, so that vacuum line 1 is connected to sample system chamber (ARPES main chamber), then adjusts second light source optical path chamber
42 motorized precision translation stage 401 and electronic mirror holder 403 enables deep ultraviolet light straight by the diaphragm in vacuum conditions chamber 7
To the surface for being smoothly irradiated to sample to be tested 3, the condenser lens in vacuum conditions chamber 7 is moved into optical path after mixing up optical path,
It is to focus deep ultraviolet light to keep the hot spot for being irradiated to sample sufficiently small to improve the space of angle resolved photoelectron spectroscope instrument point that it, which is acted on,
It distinguishes power, at this moment can be carried out ARPES and test, test, close vacuum valve 63, the focusing in vacuum conditions chamber 7 is saturating
Mirror removes optical path.
2) if necessary to as excitation light source, then need further to open first light source optical path chamber 41, specifically using HHG
Are as follows: close can through ultrashort pulse detection light vacuum valve 64 (valve have a transparent window, can by transparent window
It can not be passed through with the gas for being used to generate ultrashort pulse detection light through ultrashort pulse detection light, infrared pump light is then from cavity
Top entrance), the vacuum valve 61 of first light source optical path chamber 41 is opened, is vacuumized first light source optical path chamber 41 by angle valve 8
Close angle valve 8 to after opening ionic pump 51, first light source optical path chamber 41 vacuumized to ionic pump 51 until reach it can be with
The degree that second light source optical path chamber 42 is connected to opens vacuum valve 62, at this time first light source optical path 41, second light source optical path chamber
42, the vacuum degree after three-level difference of vacuum conditions chamber 7 reaches the degree that can be connected to sample system chamber 2 (ARPES main chamber),
Vacuum valve 63 is opened, so that vacuum line 1 is connected to sample system chamber 2 (ARPES main chamber), then by second light source optical path chamber
42 reflecting mirror removes optical path by motorized precision translation stage, adjusts the motorized precision translation stage and electronic mirror holder of first light source optical path chamber 41,
HHG light, up to being smoothly irradiated at sample 3, at this moment can be carried out by the diaphragm mounted in vacuum conditions chamber 7
ARPES is tested.
3) it after the completion of testing, is first shut off valve 63 and vacuum line 1 is no longer connected to ARPES main chamber, be then shut off
Valve 62 closes valve 61, opens valve 64.
It should be noted that optical path switching system provided in this embodiment is applied in angle resolved photoelectron spectrometer, but
It is, it is to be understood that optical path switching system actually of the invention can be used for the photoelectron spectrograph system of any required excitation light source
In system.
It can be seen that the optical path switching system that the present embodiment proposes can be realized in angular resolution spectrometer test process deeply
Ultraviolet source and the mutual free switching of ultrashort pulse higher hamonic wave light source.It is said by taking the switching between two kinds of light sources as an example above
It is bright, and for the switching between two or more light sources, it can also be with free switching using system of the invention.
The above-described embodiments merely illustrate the principles and effects of the present invention, and is not intended to limit the present invention.It is any ripe
The personage for knowing this technology all without departing from the spirit and scope of the present invention, carries out modifications and changes to above-described embodiment.Cause
This, institute is complete without departing from the spirit and technical ideas disclosed in the present invention by those of ordinary skill in the art such as
At all equivalent modifications or change, should be covered by the claims of the present invention.
Claims (7)
1. a kind of optical path switching system, which is characterized in that the optical path switching system includes at least:
Vacuum line；
The sample system chamber of vacuum line one end is set, for placing sample to be tested；
At least two light source optical path chambers is set on the vacuum line, for introducing different light sources respectively, wherein Mei Geguang
Source light path chamber is equipped with ionic pump and vacuum valve；
Vacuum conditions chamber on the vacuum line and between the sample system chamber and the light source optical path chamber is set.
2. optical path switching system according to claim 1, it is characterised in that: be equipped in the light source optical path chamber electronic flat
Moving stage, height adjustment platform, electronic mirror holder and diaphragm；
The motorized precision translation stage is fixed on the height adjustment platform；
The electronic mirror holder is fixed on the motorized precision translation stage, is equipped with reflecting mirror on the electronic mirror holder,
The diaphragm is mounted on the height adjustment platform, for adjusting optical path.
3. optical path switching system according to claim 2, it is characterised in that: the motorized precision translation stage is fixed by screws in
On the height adjustment platform, the electronic mirror holder is fixed by screws on the motorized precision translation stage.
4. optical path switching system according to claim 1, it is characterised in that: be equipped in the vacuum conditions chamber diaphragm and
Movable condenser lens.
5. optical path switching system according to claim 1, it is characterised in that: the light entrance port of the sample system chamber
With vacuum valve.
6. optical path switching system according to claim 1, it is characterised in that: the sample system chamber is angle resolved photoelectron
Spectrometer.
7. optical path switching system according to claim 1, it is characterised in that: the light source optical path chamber is two, and one fixed
Justice is first light source optical path chamber, detects being total to for light and infrared pump light for realizing ultrashort pulse in the first light source optical path chamber
Axis closes beam；Another is defined as second light source optical path chamber, and the second light source optical path chamber is used as the optical path adjusting of deep ultraviolet laser.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201710277779.5A CN106996942B (en) | 2017-04-25 | 2017-04-25 | A kind of optical path switching system |
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| CN201710277779.5A CN106996942B (en) | 2017-04-25 | 2017-04-25 | A kind of optical path switching system |
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| CN106996942A CN106996942A (en) | 2017-08-01 |
| CN106996942B true CN106996942B (en) | 2019-08-13 |
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Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06265491A (en) * | 1993-03-12 | 1994-09-22 | Olympus Optical Co Ltd | Secondary electron spectroscope |
| CN1275175A (en) * | 1998-08-25 | 2000-11-29 | 古屋长一 | Soda electrolytic cell provided with gas diffusion electrode |
| CN102192895A (en) * | 2010-03-08 | 2011-09-21 | 中国科学院物理研究所 | Apparatus for resolving time by deep ultraviolet laser |
| CN104049337A (en) * | 2014-07-01 | 2014-09-17 | 中国科学院长春光学精密机械与物理研究所 | Light path precise adjusting and converting device in ultra-high vacuum test cavity |
| CN104330430A (en) * | 2014-09-02 | 2015-02-04 | 北京大学 | Apparatus for evaluating photoelectron emissivity of photocathode material, and evaluation method thereof |
| WO2015022725A1 (en) * | 2013-08-12 | 2015-02-19 | 株式会社日立製作所 | X-ray detection device |
| CN105259197A (en) * | 2015-11-25 | 2016-01-20 | 中国科学院兰州化学物理研究所 | Light and X-ray photoelectron energy spectroscopy synchronous analyzing and testing device |
-
2017
- 2017-04-25 CN CN201710277779.5A patent/CN106996942B/en not_active Expired - Fee Related
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06265491A (en) * | 1993-03-12 | 1994-09-22 | Olympus Optical Co Ltd | Secondary electron spectroscope |
| CN1275175A (en) * | 1998-08-25 | 2000-11-29 | 古屋长一 | Soda electrolytic cell provided with gas diffusion electrode |
| CN102192895A (en) * | 2010-03-08 | 2011-09-21 | 中国科学院物理研究所 | Apparatus for resolving time by deep ultraviolet laser |
| WO2015022725A1 (en) * | 2013-08-12 | 2015-02-19 | 株式会社日立製作所 | X-ray detection device |
| CN104049337A (en) * | 2014-07-01 | 2014-09-17 | 中国科学院长春光学精密机械与物理研究所 | Light path precise adjusting and converting device in ultra-high vacuum test cavity |
| CN104330430A (en) * | 2014-09-02 | 2015-02-04 | 北京大学 | Apparatus for evaluating photoelectron emissivity of photocathode material, and evaluation method thereof |
| CN105259197A (en) * | 2015-11-25 | 2016-01-20 | 中国科学院兰州化学物理研究所 | Light and X-ray photoelectron energy spectroscopy synchronous analyzing and testing device |
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