CN106990090A - Strengthen the device and method of Raman spectrum detection for dynamic surface - Google Patents

Strengthen the device and method of Raman spectrum detection for dynamic surface Download PDF

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Publication number
CN106990090A
CN106990090A CN201710237085.9A CN201710237085A CN106990090A CN 106990090 A CN106990090 A CN 106990090A CN 201710237085 A CN201710237085 A CN 201710237085A CN 106990090 A CN106990090 A CN 106990090A
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stepper motor
raman spectrum
ratch
dynamic surface
sample
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CN106990090B (en
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翁士状
梁栋
徐超
王年
黄林生
张东彦
赵晋陵
郑玲
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Anhui University
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Anhui University
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/65Raman scattering
    • G01N21/658Raman scattering enhancement Raman, e.g. surface plasmons
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/0289Field-of-view determination; Aiming or pointing of a spectrometer; Adjusting alignment; Encoding angular position; Size of measurement area; Position tracking
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/44Raman spectrometry; Scattering spectrometry ; Fluorescence spectrometry

Abstract

Strengthen the device of Raman spectrum detection for dynamic surface the present invention is more particularly directed to a kind of, Confocal laser-scanning microscopy instrument is located above double yardstick movable detecting platforms and obtained the image and spectral information for being placed on sample on double yardstick movable detecting platforms, computing terminal receives sample image information and outputs control signals to step motor control module after analyzing and processing, and step motor control module drive motor action realizes focusing of the Confocal laser-scanning microscopy instrument to sample;And disclose detection method.Computing terminal generates reliable step motor control signal according to the image got on spectrometer ccd sensor, focusing of the Confocal laser-scanning microscopy instrument to sample is realized by repeatedly reciprocal control, continuous focusing in whole dynamic surface enhancing raman spectroscopy measurement successfully solves the continuous accurate acquisition of dynamic Raman spectrum, simultaneously, whole process is without manual intervention, it is fully automated, it is very convenient.

Description

Strengthen the device and method of Raman spectrum detection for dynamic surface
Technical field
It is more particularly to a kind of to be used for dynamic surface enhancing Raman spectrum inspection the present invention relates to Raman spectrum detection technique field The device and method of survey.
Background technology
Dynamic surface strengthens Raman spectrum and developed on the basis of dry state with wet surfaces enhancing Raman spectrum A kind of novel detection method, comprises the concrete steps that and is sufficiently mixed enhancing substrate and measured object (both are liquid) uniformly, then It is added dropwise on silicon chip, the critical condition between drop is dry and wet carries out spectral measurement.The Raman spectrum that this process is obtained has Outstanding stable reappearance and more preferable signal intensity, conventional method is substantially better than in material context of detection, is before one kind is applied The big good detection technique of scape.But in detection practical operation, however it remains problem.Because the opportunity of measurement is critical in dry and wet Under state, and the evaporation of mixed solution result in the change of liquid level position, and this is accomplished by artificial constantly regulate object lens or sample Position.This artificial intervention causes dynamic spectrum not continuously acquire, and limits dynamic surface enhancing Raman spectrum detection Unique advantage is played, and the application technology is carried out to material to cause more significantly to disturb in accurately detection.
The content of the invention
The primary and foremost purpose of the present invention is to provide a kind of device for dynamic surface enhancing Raman spectrum detection, it is ensured that dynamic The continuous accurate acquisition of state Raman spectrum.
To realize object above, the technical solution adopted by the present invention is:One kind is used for dynamic surface enhancing Raman spectrum inspection The device of survey, including double yardstick movable detecting platforms, Confocal laser-scanning microscopy instrument, computing terminal and step motor control mould Block, described Confocal laser-scanning microscopy instrument, which is located above double yardstick movable detecting platforms and obtained, is placed on double yardstick movement detections The image and spectral information of sample on platform, output control is believed after computing terminal receives sample image information and analyzed and processed Number to step motor control module, the motor action in the double yardstick movable detecting platforms of step motor control module drive is realized altogether Focus on focusing of the Raman spectrometer to sample.
Compared with prior art, there is following technique effect in the present invention:Computing terminal is according to Confocal laser-scanning microscopy instrument CCD The image got on sensor generates reliable step motor control signal, and confocal is realized by repeatedly reciprocal control Continuous focusing in focusing of the spectrometer to sample, whole dynamic surface enhancing raman spectroscopy measurement successfully solves dynamic The continuous accurate acquisition of state Raman spectrum, meanwhile, whole process is fully automated without manual intervention, very convenient.
Another primary and foremost purpose of the present invention is that providing a kind of dynamic surface that is used for strengthens the method for Raman spectrum detection, Ensure the continuous accurate acquisition of dynamic Raman spectrum.
To realize object above, the technical solution adopted by the present invention is:One kind is used for dynamic surface enhancing Raman spectrum inspection Survey method, comprises the following steps:(A) ccd sensor of Confocal laser-scanning microscopy instrument obtains the image of sample and exported extremely Computing terminal;(B) computing terminal provides quantization assessed value J according to the definition of image;(C) computing terminal sends control signal extremely Step motor control module, step motor control module drives the motor in double yardstick movable detecting platforms according to the control signal Action regulation sample position;Repeat step A and step B, obtains the quantitative evaluation value J of new definition, according to definition Quantitative evaluation value J change constantly regulate sample position until the quantitative evaluation value J of definition is maximum, complete focusing; (D) laser is opened, laser is disconnected after completing spectral collection;(E) repeat step A~D is until single dynamic surface-enhanced Raman light The detection of spectrum is completed.
Compared with prior art, there is following technique effect in the present invention:Computing terminal is according to Confocal laser-scanning microscopy instrument CCD The image got on sensor generates reliable step motor control signal, and confocal is realized by repeatedly reciprocal control Continuous focusing in focusing of the spectrometer to sample, whole dynamic surface enhancing raman spectroscopy measurement successfully solves dynamic The continuous accurate acquisition of state Raman spectrum, meanwhile, whole process is fully automated without manual intervention, very convenient.
Brief description of the drawings
Fig. 1 is the theory diagram of the present invention;
Fig. 2 is the structural representation of double yardstick movable detecting platforms of the invention;
Fig. 3 is the circuit block diagram of step motor control module of the present invention;
Fig. 4 is the circuit diagram of step motor control module of the present invention;
Fig. 5 is the schematic flow sheet of the present invention.
Embodiment
With reference to Fig. 1 to Fig. 5, the present invention is described in further detail.
It is a kind of to strengthen the device of Raman spectrum detection, including double yardstick movable detecting platforms for dynamic surface refering to Fig. 1 10th, Confocal laser-scanning microscopy instrument 20, computing terminal 30 and step motor control module 40, described Confocal laser-scanning microscopy instrument 20 are located at double tops of yardstick movable detecting platform 10 and obtain the figure for being placed on sample on double yardstick movable detecting platforms 10 Picture and spectral information, first obtain image information here, then obtain spectral information again to defocused by a series of processing;Calculate eventually End 30 receives sample image information and outputs control signals to step motor control module 40, step motor control after analyzing and processing Module 40 drives the motor action in double yardstick movable detecting platforms 10 to realize Confocal laser-scanning microscopy instrument 20 to sample Focusing.The image that computing terminal 30 is got on the ccd sensor according to Confocal laser-scanning microscopy instrument 20 generates reliable stepping Motor control signal, realizes focusing of the Confocal laser-scanning microscopy instrument 20 to sample, whole dynamic by repeatedly reciprocal control Continuous focusing in SERS measurement successfully solves the continuous accurate acquisition of dynamic Raman spectrum, meanwhile, Whole process is fully automated without manual intervention, very convenient.
Refering to Fig. 2, the structure of double yardstick movable detecting platforms 10 has many kinds, in order to ensure the accuracy of control, this hair Bright middle use stepper motor is controlled, also possible using other apparatus for adjusting position, as long as guaranteeing accurate, fast The position of the regulation sample of speed, can rapid focus.In the present embodiment preferably, described double yardsticks movement Detection platform 10 includes base 11, ratch 12 and fixed the first stepper motor 13 on the pedestal 11, and ratch 12 can be along base 11 move up and down and the tooth of ratch 12 be meshed with the fluted disc 131 on the first stepper motor 13;The top of ratch 12 is fixedly installed There is lower component 14, the top of lower component 14 is provided with component 15, and the silicon chip 50 for holding sample is placed on component 15, Spring and the second stepper motor 16 are provided between upper and lower component 15,14, upper component 15 is transported downwards under the elastic force effect of spring It is dynamic, it can adjust when cam 161 and the cam 161 rotation are installed on the axle of the second stepper motor 16 between upper and lower component 15,14 Spacing.Here the fluted disc 131 by the first stepper motor 13 of setting and thereon is engaged with ratch 12, realizes detected sample grade The quick regulation put;Again by the second stepper motor 16 and cam 161, the accurate adjustment of sample position is realized;So After setting, it is ensured that it is very accurate that focal length can complete regulation in a short period of time and can adjust.Cam 161 is in 180 ° Lift it is smaller, then regulation get up it is more accurate.
Preferably, lift of the cam 161 in 180 °, the tooth pitch of ratch 12, fluted disc 131 on the first stepper motor 13 Tooth pitch three it is equal.So regulation gets up quite reasonable, the driving going up or down stairway formula displacement of ratch 12 of the first stepper motor 13, displacement It is finely adjusted to after correct position, then by cam 161, the lift expression equal with the tooth pitch of ratch 12 of cam 161 is in cam During 161 180 ° of rotations, the optimal position of focal length can be found.
The frame mode of base is various, in the present embodiment preferably, described base 11 by set from up to down first, 2nd, three aluminum crossbeams 111,112,113 and the first, second and third aluminum vertical beam 114,115,116 that sets from left to right are by spiral shell Silk or bolt, which are fixed, to be formed;First and third aluminum crossbeam 111,113 and first and third aluminum vertical beam 114,116 are enclosed in square frame Shape;The lower end of second aluminum vertical beam 115 is fixed on the 3rd aluminum crossbeam 113, and the upper end of the second aluminum vertical beam 115 is fixedly installed There is the first stepper motor 13;The two ends of second aluminum crossbeam 112 are separately fixed on first and second aluminum vertical beam 114,115, the First, through hole is offered respectively on two aluminum crossbeams 111,112 for ratch 12 to pass through;It is provided with the body of rod of ratch 12 for spacing Upper fastener 121 and lower fastener 122, upper and lower fastener 121,122 respectively positioned at the first aluminum crossbeam 111 through hole up and down two Side.The base being made up of three aluminum crossbeams and three aluminum vertical beams, simple in construction, cost is low, steadiness is good, uses It is very convenient.Upper fastener 121 and lower fastener 122 can be welded to two projections on ratch 12, because first and second aluminum is horizontal The through hole opened up on beam 111,112 is slightly larger than the profile of ratch 12, ensure that the smoothly upper and lower displacement of ratch 12;When ratch 12 When being moved to the upper surface of the aluminum crossbeam 111 of upper fastener 121 and first downwards and offseting, upper fastener will limit ratch 12 continue to Bottom offset;When the lower surface that ratch 12 is shifted up to the aluminum crossbeam 111 of lower fastener 122 and first offsets, lower fastener will Limitation ratch 12 continues up displacement, so, it can be ensured that ratch 12 is moved in normal scope.
Preferably, described upper and lower component 15,14 is that the profile of square plate and upper component 15 is more than lower component 14, under Four circular holes are symmetrically arranged with component 14, T-bolt 17 is passed through from circular hole and is fixed on the lower face of upper component 15, T Stage clip 18 is provided between the lower face of the T connector of type bolt 17 and lower component 14;Second stepper motor 16 is fixed on lower component On 14 upper face.Pass through the cooperation of T-bolt 17 and circular hole, it is ensured that the upper displacement along the vertical direction of component 15, Bu Huifa Raw deflection.
Refering to Fig. 3, it is preferable that described step motor control module 40 include main control unit 41, phototube coupling unit 42, The power supply 44,45 of driving stepper motor unit 43 and first and second;The signal that main control unit 41 is used to receive computing terminal 30 is concurrent Go out corresponding motor control signal, phototube coupling unit 42 is used to isolate between main control unit 41 and driving stepper motor unit 43 Interference, driving stepper motor unit 43 receive isolation after motor control signal and directly control first and second stepper motor 13, 16 steering and rotational angle, the first power supply 44 are used for main control unit 41 and the supplying power for input end of phototube coupling unit 42, second Power supply 45 is used to power to the output end of phototube coupling unit 42 and driving stepper motor unit 43, control here and drive part , can be with the interference of two isolated parts power supply using two the first independent power supplys 44, second sources 45.Described main control unit 41 Including main control chip, clock circuit and telecommunication circuit, main control chip is STM32 family chips, and main control chip passes through the electricity that communicates Road carries out data exchange, clock circuit connection main control chip with computing terminal 30;Phototube coupling unit 42 is by photo-coupler and three Pole pipe is formed by connecting;Driving stepper motor unit 43 includes ring distributor, sub-circuit and power amplifier, annular distribution The output end of device and sub-circuit is connected with the input of power amplifier;Described computing terminal 30 is computer or industry control Machine or mobile terminal.Foregoing is the theory diagram of step motor control module 40, during practical application, can be selected integrated There is the chip of multiple units to realize, shown in Fig. 4 is exactly a kind of specific embodiment, here directly using power river LC2054DA chips, this chip is the stepper motor driver of specialty, is integrated with light-coupled isolation unit 42 in chip, using rising Come very convenient, reduce the complexity of circuit.
Refering to Fig. 5, a kind of dynamic surface that is used for as previously described is also disclosed in the present invention strengthens Raman spectrum detection dress The detection method put, comprises the following steps:(A) ccd sensor of Confocal laser-scanning microscopy instrument 20 obtains the image of sample And export to computing terminal 30;(B) computing terminal 30 provides quantization assessed value J according to the definition of image;(C) computing terminal 30 Control signal is sent to step motor control module 40, step motor control module 40 drives double yardsticks to move according to the control signal Motor action regulation sample position in dynamic detection platform 10;Repeat step A and step B, obtains the amount of new definition Change assessed value J, according to the quantitative evaluation value J of definition change constantly regulate sample position until the quantization of definition is commented Valuation J is maximum, completes focusing;(D) laser is opened, laser is disconnected after completing spectral collection;(E) repeat step A~D is until single The detection of dynamic surface enhancing Raman spectrum is completed, such as under the routine test environment that temperature is 20 DEG C, humidity is 60%, single The detection of dynamic surface enhancing Raman spectrum about needs 200s, and drop focusing needs to carry out once in 20s or so, i.e., whole measurement is needed Want the focusing of 9 times.By above-mentioned steps, a variety of deficiencies manually focused can be avoided well, be dynamic surface enhancing Raman Continuous uninterrupted obtain of spectrum provides new approach.
Preferably, in described step B, the quantitative evaluation value J=∑ M ∑ NL4 (x, y) of definition, L4 is four necks in formula Domain Laplace operator, M, N are the pixel of image laterally and longitudinally.The definition quantitative evaluation calculated by the formula Value has more referential, and its value is bigger, represents that definition is better, definition is better, represents that focus effects are good.
Preferably, described double yardstick movable detecting platforms 10 include base 11, ratch 12 and fixed on the pedestal 11 The first stepper motor 13, ratch 12 can move up and down and the fluted disc on the tooth of ratch 12 and the first stepper motor 13 along base 11 131 are meshed;The top of ratch 12 is fixedly installed lower component 14, and the top of lower component 14 is provided with component 15, hold by The silicon chip 50 of test sample product is placed on component 15, and spring and the second stepper motor 16 are provided between upper and lower component 15,14, on Component 15 is moved downward under the elastic force effect of spring, and cam 161 and the cam 161 are provided with the axle of the second stepper motor 16 The spacing between upper and lower component 15,14 is can adjust during rotation;
In described step C, it is adjusted make it that the quantitative evaluation value J of definition is maximum as follows:
(C1) the first stepper motor 13 of control is moved up and down, and the change of contrast definition obtains turning for the first stepper motor 13 Dynamic direction;If J becomes big when the first stepper motor 13 is rotated forward, the rotation direction of the first stepper motor 13 is rotates forward, into step C2; If J becomes big when the first stepper motor 13 is inverted, the rotation direction of the first stepper motor 13 is reversion, into step C2;If first Stepper motor 13 rotate forward when J diminish and the first stepper motor reversion when J diminish, then stop operating the first stepper motor 13, enter Step C3;
(C2) rotation direction of the first stepper motor 13 is determined after forward or reverse, first is persistently rotated according to rotation direction Stepper motor 13, until when definition variation tendency is opposite, stop operating the first stepper motor 13, into step C3;
(C3) the second stepper motor 16 is controlled according to step C1 and step C2 control strategy, stop operating the second stepping electricity Focusing is completed during machine 16.
During above-mentioned regulation, not necessarily the quantitative evaluation value J of definition have to be adjusted to maximum, as long as this value reaches The threshold value of setting, expression has completed focusing, it is possible to without being further continued for being adjusted.In addition, increasing on single dynamic surface The detection of strong Raman spectrum, it is necessary to be adjusted according to step C1-C3 when adjusting first;Obtain after a spectral information again When being focused, due to focal length variations less, the second stepper motor 16 can be only adjusted i.e. without adjusting the first stepper motor 13 Can, it so can significantly shorten focusing time.

Claims (10)

1. a kind of strengthen the device of Raman spectrum detection for dynamic surface, it is characterised in that:It is flat including the movement detection of double yardsticks Platform (10), Confocal laser-scanning microscopy instrument (20), computing terminal (30) and step motor control module (40), described copolymerization are burnt Raman spectrometer (20), which is located above double yardstick movable detecting platforms (10) and obtained, is placed on double yardstick movable detecting platforms (10) image and spectral information of sample on, computing terminal (30) receive sample image information and export control after analyzing and processing Signal processed is to step motor control module (40), and step motor control module (40) is driven in double yardstick movable detecting platforms (10) Motor action realize focusing of the Confocal laser-scanning microscopy instrument (20) to sample.
2. strengthen the device of Raman spectrum detection for dynamic surface as claimed in claim 1, it is characterised in that:Described is double Yardstick movable detecting platform (10) includes base (11), ratch (12) and the first stepper motor being fixed on base (11) (13), ratch (12) can move up and down and the fluted disc on the tooth and the first stepper motor (13) of ratch (12) along base (11) (131) it is meshed;The top of ratch (12) is fixedly installed above lower component (14), lower component (14) and is provided with component (15) silicon chip (50) for, holding sample is placed on component (15), be provided between upper and lower component (15,14) spring and Second stepper motor (16), upper component (15) moves downward under the elastic force effect of spring, on the axle of the second stepper motor (16) The spacing between upper and lower component (15,14) is can adjust when cam (161) and the cam (161) rotation are installed.
3. strengthen the device of Raman spectrum detection for dynamic surface as claimed in claim 2, it is characterised in that:The cam (161) lift in 180 °, the tooth pitch of ratch (12), the tooth pitch three of fluted disc (131) is equal on the first stepper motor (13).
4. strengthen the device of Raman spectrum detection for dynamic surface as claimed in claim 2, it is characterised in that:Described bottom Seat (11) by the first, second and third aluminum crossbeam (111,112,113) set from up to down and set from left to right first, 2nd, three aluminum vertical beams (114,115,116) are fixed by screw or bolt and formed;First and third aluminum crossbeam (111,113) and First and third aluminum vertical beam (114,116) is enclosed in square frame shape;It is horizontal that the lower end of second aluminum vertical beam (115) is fixed on the 3rd aluminum On beam (113), the upper end of the second aluminum vertical beam (115) is fixedly installed the first stepper motor (13);Second aluminum crossbeam (112) Two ends be separately fixed on first and second aluminum vertical beam (114,115), first and second aluminum crossbeam is opened up respectively on (111,112) There is through hole to pass through for ratch (12);It is provided with the body of rod of ratch (12) for spacing upper fastener (121) and lower fastener (122), upper and lower fastener (121,122) is located at the both sides up and down of the through hole of the first aluminum crossbeam (111) respectively.
5. strengthen the device of Raman spectrum detection for dynamic surface as claimed in claim 2, it is characterised in that:Described Upper and lower component (15,14) is that the profile of square plate and upper component (15) is more than on lower component (14), lower component (14) and symmetrically set Four circular holes are equipped with, T-bolt (17) is passed through from circular hole and is fixed on the lower face of upper component (15), T-bolt (17) T connector and lower component (14) lower face between be provided with stage clip (18);Second stepper motor (16) is fixed on lower component (14) on upper face.
6. strengthen the device of Raman spectrum detection for dynamic surface as claimed in claim 2 or claim 3, it is characterised in that:It is described Step motor control module (40) include main control unit (41), phototube coupling unit (42), driving stepper motor unit (43) And first and second power supply (44,45);Main control unit (41) is used to receive the signal of computing terminal (30) and sends corresponding motor Control signal, phototube coupling unit (42) is used to isolate dry between main control unit (41) and driving stepper motor unit (43) Disturb, driving stepper motor unit (43) receive isolation after motor control signal and directly control first and second stepper motor (13, 16) steering and rotational angle, the first power supply (44) are used for the input to main control unit (41) and phototube coupling unit (42) Power supply, second source (45) is used to power to the output end and driving stepper motor unit (43) of phototube coupling unit (42).
7. strengthen the device of Raman spectrum detection for dynamic surface as claimed in claim 6, it is characterised in that:Described master Controlling unit (41) includes main control chip, clock circuit and telecommunication circuit, and main control chip is STM32 family chips, main control chip Data exchange, clock circuit connection main control chip are carried out by telecommunication circuit and computing terminal (30);Phototube coupling unit (42) It is formed by connecting by photo-coupler and triode;Driving stepper motor unit (43) includes ring distributor, sub-circuit and work( The output end of rate amplifier, ring distributor and sub-circuit is connected with the input of power amplifier;Described calculating is whole It is computer or industrial computer or mobile terminal to hold (30).
8. a kind of detection method as claimed in claim 1 for dynamic surface enhancing Raman spectrum detecting device, including such as Lower step:
(A) ccd sensor of Confocal laser-scanning microscopy instrument (20) obtains the image of sample and exported to computing terminal (30);
(B) computing terminal (30) provides quantization assessed value J according to the definition of image;
(C) computing terminal (30) sends control signal to step motor control module (40), step motor control module (40) root The motor action regulation sample position in double yardstick movable detecting platforms (10) is driven according to the control signal;Repeat step A With step B, the quantitative evaluation value J of new definition is obtained, it is tested according to the quantitative evaluation value J of definition change constantly regulate Sample position is until the quantitative evaluation value J of definition is maximum, and completion is focused;
(D) laser is opened, laser is disconnected after completing spectral collection;
(E) repeat step A~D is until the detection of single dynamic SERS is completed.
9. strengthen the method for Raman spectrum detection for dynamic surface as claimed in claim 8, it is characterised in that:Described step In rapid B, the quantitative evaluation value J=∑s of definitionMNL4L in (x, y), formula4For four field Laplace operators, M, N are image Pixel laterally and longitudinally.
10. strengthen the method for Raman spectrum detection for dynamic surface as claimed in claim 8, it is characterised in that:Described Double yardstick movable detecting platforms (10) include base (11), ratch (12) and the first stepper motor being fixed on base (11) (13), ratch (12) can move up and down and the fluted disc on the tooth and the first stepper motor (13) of ratch (12) along base (11) (131) it is meshed;The top of ratch (12) is fixedly installed above lower component (14), lower component (14) and is provided with component (15) silicon chip (50) for, holding sample is placed on component (15), be provided between upper and lower component (15,14) spring and Second stepper motor (16), upper component (15) moves downward under the elastic force effect of spring, on the axle of the second stepper motor (16) The spacing between upper and lower component (15,14) is can adjust when cam (161) and the cam (161) rotation are installed;
In described step C, it is adjusted make it that the quantitative evaluation value J of definition is maximum as follows:
(C1) the first stepper motor of control (13) is moved up and down, and the change of contrast definition obtains turning for the first stepper motor (13) Dynamic direction;
If J becomes big when the first stepper motor (13) is rotated forward, the first stepper motor (13) rotation direction is rotates forward, into step C2;
If J becomes big when the first stepper motor (13) is inverted, the first stepper motor (13) rotation direction is reversion, into step C2;
If the first stepper motor (13) rotate forward when J diminish and the first stepper motor reversion when J diminish, stop operating the first stepping Motor (13), into step C3;
(C2) the first stepper motor (13) rotation direction is determined after forward or reverse, the first step is persistently rotated according to rotation direction Stepper motor (13), until when definition variation tendency is opposite, stop operating the first stepper motor (13), into step C3;
(C3) the second stepper motor (16) is controlled according to step C1 and step C2 control strategy, stop operating the second stepper motor (16) focusing is completed when.
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