CN106969994A - A kind of environmental abnormality monitoring sensor based on nonlinear organization - Google Patents
A kind of environmental abnormality monitoring sensor based on nonlinear organization Download PDFInfo
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- CN106969994A CN106969994A CN201710086290.XA CN201710086290A CN106969994A CN 106969994 A CN106969994 A CN 106969994A CN 201710086290 A CN201710086290 A CN 201710086290A CN 106969994 A CN106969994 A CN 106969994A
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- perforate
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- piezoelectric membrane
- cantilever beam
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N5/00—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid
- G01N5/02—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid by absorbing or adsorbing components of a material and determining change of weight of the adsorbent, e.g. determining moisture content
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
Abstract
The present invention provides a kind of environmental abnormality monitoring sensor based on nonlinear organization, it is characterised in that including：Fixing end, excitation piezoelectric membrane, perforate cantilever beam, detection piezoelectric membrane, adsorbed film and nonlinear beam；Described perforate cantilever beam one end is fixed in the fixing end, in the perforate cantilever beam excitation piezoelectric membrane is connected with the position fixed with the fixing end, in the other end free end of the perforate cantilever beam provided with the nonlinear beam is connected with above perforate and perforate, the detection piezoelectric membrane and the adsorbed film are connected to the upper surface of the nonlinear beam.When adsorbed film adsorbs measured object, thus detection piezoelectric membrane output acute variation judges the dosage of adsorbate.The present invention can be used for the monitoring such as gas concentration, microparticle quality and microorganism, have the advantages that simple in construction, response is fast, sensitivity is high, influence not dampened.
Description
Technical field
The invention belongs to sophisticated sensor field, more particularly to a kind of environmental abnormality monitoring sensing based on nonlinear organization
Device, available for the monitoring such as gas concentration, microparticle quality and microorganism.
Background technology
The linear resonance mass sensor that declines mainly is made up of piezoelectric membrane and cantilever beam, utilizes cantilever beam absorption measured object
The change of front and rear resonant frequency can accurately identify the quality of measured object, i.e. S=Δs f/ Δ m, and wherein S is transducer sensitivity,
Δ m is measured object quality, and Δ f is resonant frequency variable quantity.Sensitivity is one of measurement resonant mode micro-mass sensor important
Performance indications, size, structure type and the mode of operation of sensor etc. all have a significant impact to sensitivity.In recent years, it is many
Many researchers lift the sensitivity of sensor by changing sensor material attribute, structure type and size etc..
Chinese patent (CN103424327A) proposes a kind of high order mode micro-mass sensor based on Varying-thickness girder construction
And its sensitivity enhancement method, the cantilever beam only one of which ladder is, it is necessary to which amplitude, high-frequency excitation obtain high frequent vibration
Mode.But in practical engineering application, high frequency pumping source is difficult to, and sensitivity improves few, therefore practical application
Value is not high.
Chinese patent (CN102954829A) proposes a kind of microparticle weighing sensor of V-type foldable suspension arm girder construction, V-type
The introducing of folding cantilever beam of special, effectively changes the rigidity of sensor and the distribution of effective mass, increases substantially sensor
Sensitivity, but the contact area of piezoelectric patches and V-type beam reduces, the drive efficiency reduction of piezoelectric patches.
Chinese patent (CN102269615A) proposes a kind of micro-mass sensor of groove-shaped cantilever beam structure, on a cantilever beam
Plus groove, it is possible to increase the natural frequency of vibration and adsorption area, improve sensitivity, but the patent it is similar to patent CN103424327A, it is necessary to
High frequency pumping source, practicality is low.
More than, the sensor proposed in the prior art belongs to linear resonance and declined mass sensor, and primary structure is all line
Property structure, in addition to respective shortcoming, also have the shortcoming of some general character, such as linear resonance declines the sensitive of mass sensor
Degree is influenceed very big by environmental damping, and measuring apparatus is complicated, therefore such sensor engineering practicability is low, the scope of application
It is small, it is only applicable to laboratory environment.
Due to the shortcoming that linear structure is present, in recent years, numerous researchers are directed to the non-linear micro- mass sensitivity of research
Device lifts quality factor and the sensitivity of sensor, can be prevented effectively from the influence of the factors such as environmental damping.Such as document
“Nonlinear-based switch triggered by gas using electrostatically actuated
Microbeams ", " Linear and nonlinear mass sensing using piezoelectrically-
Amplitude jumping phenomenon detects micro- quality when actuated microcantilevers " etc. are jumped using construct bifurcation, but needs
The complicated measuring apparatus such as laser displacement sensor, reduces its engineering practicability.
Comprehensive analysis find, existing linear resonance decline mass sensor mainly by change sensor construction form,
Geometric parameter and mode of operation lift transducer sensitivity, but measurement species is single, and sensor difficulty of processing is big, and sensitive
Degree is influenceed very big by factors such as environmental dampings.In recent years, existing many scholars are directed to studying non-linear micro-mass sensor,
But its measuring apparatus is complicated, engineering practicability is low.Therefore, in order to improve the engineering practicability of micro-mass sensor, it is necessary to design
Go out measuring apparatus simple, sensitivity and quality factor are high, are avoided that the micro-mass sensor of the factors such as environmental damping influence.
The content of the invention
Single according to existing sensor measurement species set forth above, sensor difficulty of processing is big, the skill such as poor sensitivity
Art problem, and a kind of environmental abnormality monitoring sensor based on nonlinear organization is provided, it is that one kind integrates excitation with sensing
Testing agency.It is of the invention main using the setting of openend on a cantilever beam nonlinear beam, then pass through adsorbed film and detection piezoelectricity
Film is monitored to gas concentration, microparticle quality etc., and when adsorbed film adsorbs measured object, detection piezoelectric membrane output is violent
Change, thus judges the dosage of adsorbate.The present invention there is low simple in construction, cost, self-excitation, self-induction, its quality because
Number and sensitivity are high, and very little is influenceed by environmental damping, and measuring apparatus is simple, it is not necessary to electric impedance analyzer etc., therefore engineering
Practicality is high, has a wide range of application, available for microorganisms such as detection gas, dust, virus and bacteriums.
The technological means that the present invention is used is as follows：
A kind of environmental abnormality monitoring sensor based on nonlinear organization, it is characterised in that including：Fixing end, excitation pressure
Conductive film, perforate cantilever beam, detection piezoelectric membrane, adsorbed film and nonlinear beam；Described perforate cantilever beam one end is fixed on described
In fixing end, the excitation piezoelectric membrane is connected with the position fixed with the fixing end in the perforate cantilever beam,
It is provided with the other end free end of the perforate cantilever beam above perforate and perforate and is connected with the nonlinear beam, the detection
Piezoelectric membrane and the adsorbed film are connected to the upper surface of the nonlinear beam.
Nonlinear beam of the present invention rigidly fixed in the free end of the perforate cantilever beam, and perforate cantilever beam shakes
It is dynamic that excitation is produced to nonlinear beam.When the excitation amplitude and frequency that perforate cantilever beam is produced reach certain value, nonlinear beam hair
Raw stable state change, i.e., change to the second stable state by the first stable state, and response amplitude produces great variety, and detection piezoelectric membrane output is violent
Change.The selective absorption film set in nonlinear beam, can adsorb special object.Such as, particular organisms adsorbed film can be only
Adsorbed target pathogenic bacteria, and other pathogenic bacteria are not adsorbed, therefore whether can detect certain pathogenic bacteria using this adsorbed film
In the presence of；And dust can be detected using the adsorbed film of static electrification, electrostatic force size determines the microparticle quality size of absorption, setting
The microparticle quality size of absorption, goes beyond the scope, does not adsorb, therefore only needs to observation detection piezoelectric membrane output situation, you can
Know whether in the presence of certain microparticle.And for different measurands, this type sensor only needs to change adsorbed film, just
The detection to different measured objects can be realized, easy to operate, simply, engineering practicability is strong.
Further, the two ends of the nonlinear beam are fixed on the upper surface of the perforate cantilever beam and are across described open
The both sides in hole, the horizontal span of the nonlinear beam is more than or equal to the length of the perforate, and (perforate is along the perforate cantilever beam
Length direction set), the width of the nonlinear beam is less than the width of the perforate.
Further, described excitation piezoelectric membrane one end is connected under the fixing end, and the excitation piezoelectric membrane
Surface is connected with the upper surface of the perforate cantilever beam, and conducting resinl is used between the perforate cantilever beam and the excitation piezoelectric membrane
It is seamlessly connected.
Further, the length of the excitation piezoelectric membrane is less than the length of the perforate cantilever beam, the excitation piezoelectricity
The width of film is equal to the width of the perforate cantilever beam.
Further, the detection piezoelectric membrane is pasted on the upper surface of the nonlinear beam, and the detection piezoelectricity is thin
The length of film is less than the length of the nonlinear beam, and the width of the detection piezoelectric membrane is equal to the width of nonlinear beam.
Further, the material of the detection piezoelectric membrane is multiple using macromolecule flexible piezoelectric thin-film material or piezoelectric fabric
Condensation material.
Further, the nonlinear beam is one in cosine beam, precompressed buckled beam, V-type beam, Curved beam or arched girder
Kind.
The present invention can also be used as weighing type mass sensor as threshold-type quality switches sensor.Work as conduct
During threshold-type quality switches working sensor, this type sensor excitation frequency is less than nonlinear organization and produces fork jump
When frequency, nonlinear organization do not occur fork jump, detection piezoelectric membrane output very little.When adsorbed film absorption is tested
Thing, and quality threshold of the quality more than threshold-type quality switches sensor of measured object, then nonlinear organization generation fork jump,
Piezoelectric membrane output acute variation is detected, it is possible thereby to detect measured object.Under certain excitation amplitude, driving frequency is closer to non-
The fork frequency of linear structure, the quality threshold of threshold-type quality switches sensor is smaller, i.e., by adjusting driving frequency size,
The quality threshold of threshold-type quality switches sensor can be just adjusted, the detection to different target is realized.
When being worked as weighing type mass sensor, it is possible to use the change of fork frequency is to quilt during absorption different quality
Thing is surveyed accurately to be measured.The determination of environmental abnormality monitoring sensor response frequency designed by the present invention is not by impedance point
The complicated equipment such as analyzer measures its corresponding frequency in response amplitude peak point place, and only needs to monitoring detection piezoelectric membrane
Exporting change.By measuring frequency and absorption before quality of adsorption corresponding to detection piezoelectric membrane output generation great variety
The driving frequency corresponding to piezoelectric membrane output generation great variety is detected after quality, can be demarcated using difference between the two
Micro- quality size of absorption.Utilize before and after quality of adsorption, the skew of nonlinear organization fork frequency is entered to quality of adsorption size
Rower is determined.
The present invention is due to using above technical scheme, and it has advantages below：
1st, the environmental abnormality monitoring sensor main proposed by the invention based on nonlinear organization will by perforate cantilever beam and
Nonlinear beam is constituted, and nonlinear beam occurs to diverge when jumping, and the slope of curve is therefore, of the invention not with damping change at bifurcation point
Performance with stronger resistance environmental disturbances, accuracy, the reliability of testing result is higher.
2nd, when environmental abnormality monitoring sensor works as threshold-type mass sensor, when adsorbed film adsorbs measured object
When, detection piezoelectric membrane output acute variation, observation detection piezoelectric membrane exporting change, you can be monitored, grasp to measured object
Make convenient and simple.And change driving frequency can just change the quality threshold of threshold-type mass sensor, i.e. minimum detection matter
Amount, then coordinate selective absorption film, it is possible to the detection to different target is realized, it is easy to operate, available for the tested quality testing of difference
Survey, applied widely, engineering practicability is strong.
3rd, when environmental abnormality monitoring sensor works as weighing type mass sensor, existed by measuring nonlinear organization
The change of fork frequency before and after quality of adsorption, i.e. measurement detection the piezoelectric membrane output before and after sensor adsorbs micro- quality produce huge
Corresponding driving frequency during big change, and both differences are calculated, rower just can be entered to quality of adsorption size by this difference
It is fixed.The measuring apparatus for not needing electric impedance analyzer etc. complicated, applied widely, engineering practicability is high.
Brief description of the drawings
In order to illustrate more clearly about the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing
There is the accompanying drawing used required in technology description to do simply to introduce, it should be apparent that, drawings in the following description are this hairs
Some bright embodiments, for those of ordinary skill in the art, without having to pay creative labor, can be with
Other accompanying drawings are obtained according to these accompanying drawings.
Fig. 1 monitors the structural representation of sensor for environmental abnormality of the present invention based on nonlinear organization.
Fig. 2 is nonlinear beam, perforate cantilever beam amplitude-versus-frequency curve figure in the present invention.
Fig. 3 for the present invention in nonlinear beam, perforate cantilever beam response displacement with quality of adsorption situation of change.
Fig. 4 be sensor of the invention under different quality of adsorption, the amplitude-versus-frequency curve figure of nonlinear beam.
Fig. 5 is the curve map that nonlinear organization fork frequency changes and changed with quality of adsorption.
In figure：1st, fixing end；2nd, piezoelectric membrane is encouraged；3rd, perforate cantilever beam；4th, piezoelectric membrane is detected；5th, adsorbed film；6、
Nonlinear beam.
Embodiment
To make the purpose, technical scheme and advantage of the embodiment of the present invention clearer, below in conjunction with the embodiment of the present invention
In accompanying drawing, the technical scheme in the embodiment of the present invention is clearly and completely described, it is clear that described embodiment is
A part of embodiment of the present invention, rather than whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art
The every other embodiment obtained under the premise of creative work is not made, belongs to the scope of protection of the invention.
As shown in figure 1, a kind of environmental abnormality monitoring sensor based on nonlinear organization, including：Fixing end 1, excitation pressure
Conductive film 2, perforate cantilever beam 3, detection piezoelectric membrane 4, adsorbed film 5 and nonlinear beam 6；Described one end of perforate cantilever beam 3 is fixed
In in the fixing end 1, the excitation is connected with the position fixed with the fixing end 1 in the perforate cantilever beam 3
Piezoelectric membrane 2, described excitation piezoelectric membrane 2 one end is connected to the fixing end 1, and the lower surface of the excitation piezoelectric membrane 2
It is connected with the upper surface of the perforate cantilever beam 3, conducting resinl is used between the perforate cantilever beam 3 and the excitation piezoelectric membrane 2
It is seamlessly connected；The length of the excitation piezoelectric membrane 2 is less than the length of the perforate cantilever beam 3, and the excitation piezoelectricity is thin
The width of film 2 is equal to the width of the perforate cantilever beam 3.
It is provided with the other end free end of the perforate cantilever beam 3 above perforate and perforate and is connected with the nonlinear beam
6, the detection piezoelectric membrane 4 and the adsorbed film 5 are connected to the upper surface of the nonlinear beam 6, the vibration of perforate cantilever beam 3
Excitation is produced to nonlinear beam 6.The two ends of the nonlinear beam 6 are fixed on the upper surface of the perforate cantilever beam 3 and are across
The both sides of the perforate, the horizontal span of the nonlinear beam 6 is more than or equal to the length of the perforate, and (perforate is along the perforate
The length direction of cantilever beam is set), the width of the nonlinear beam 6 is less than the width of the perforate.
The detection piezoelectric membrane 5 is pasted on the upper surface of the nonlinear beam 6, and the length of the detection piezoelectric membrane 5
Degree is less than the length of the nonlinear beam 6, width of the width equal to nonlinear beam 6 of the detection piezoelectric membrane 5.
The material of the detection piezoelectric membrane 5 uses macromolecule flexible piezoelectric thin-film material or piezoelectric fibre composite material.
The nonlinear beam 6 is one kind in cosine beam, precompressed buckled beam, V-type beam, Curved beam or arched girder.
Embodiment
Using the structural parameters of such as table 1- tables 3, the monitoring sensor of the present invention is tested and illustrates effect.In excitation
Apply sinusoidal voltage on piezoelectric membrane 2 and enter row energization, as shown in Fig. 2 driving voltage amplitude is set to 22V, within the specific limits, with
Driving frequency gradually to increase, the displacement very little always that perforate cantilever beam 3 occurs, but when driving frequency reaches certain value, it is non-
Fork jump occurs for linear beam 6 (taken in the present embodiment cosine beam exemplified by), produces very big displacement.As shown in Figure 2, fork frequency
Rate is 35.51Hz.Next, holding driving voltage amplitude is constant, driving frequency is set to 35.03Hz, and excitation piezoelectric membrane 2 is entered
Row energization, then gradually increases quality of adsorption, non-linear when the quality of absorption exceedes the quality threshold of threshold-type mass sensor
Fork jump occurs for beam 6, and response amplitude is undergone mutation.Nonlinear Jump at bifurcation point the slope of curve not with damping change, because
This, sensor of the invention has the performance of stronger resistance environmental disturbances, and accuracy, the reliability of testing result are higher.
The nonlinear beam of table 1 (cosine beam) structural parameters
The perforate cantilever beam parameter of table 2
Table 3 encourages piezoelectric membrane parameter
The present invention is when as threshold-type quality switches working sensor, and this type sensor excitation frequency is less than non-
Linear structure produces frequency during fork jump, and fork jump does not occur for nonlinear organization, and the output of detection piezoelectric membrane is very
It is small.As shown in Fig. 2 nonlinear organization fork frequency is 35.51Hz, driving frequency is now set as 35.03Hz, then nonlinear organization
Do not occur fork jump, respond displacement very little, detection piezoelectric membrane output very little.When adsorbed film absorption measured object, and it is tested
The quality of thing exceedes the quality threshold of threshold-type quality switches sensor, then fork jump occurs for nonlinear organization, detects piezoelectricity
Film exports acute variation, it is possible thereby to measured object be detected, as shown in figure 3, when quality of adsorption reaches 300ug, nonlinear organization
Generation fork jump, detection piezoelectric membrane output acute variation.And under certain excitation amplitude, driving frequency is closer to non-linear
The fork frequency of structure, the quality threshold of threshold-type quality switches sensor is smaller, i.e., by adjusting driving frequency size, so that it may
To adjust the quality threshold of threshold-type quality switches sensor, the detection to different target is realized.
When environmental abnormality monitoring sensor works as weighing type mass sensor, it is possible to use during absorption different quality
The change of fork frequency is accurately measured measured object.When occurring fork jump due to nonlinear organization, response displacement is produced
Great variety, detection piezoelectric membrane output produces great variety.Therefore, the environmental abnormality monitoring sensor designed by the present invention rings
Answer the determination of frequency, it is only necessary to monitoring detection piezoelectric membrane exporting change.It is thin by measuring detection piezoelectricity before quality of adsorption
Film output, which is produced, detects piezoelectric membrane output generation great variety institute after driving frequency and quality of adsorption corresponding to great variety
Corresponding driving frequency, micro- quality size of absorption can be demarcated using both differences.I.e. utilize quality of adsorption before and after, non-thread
The skew of property construct bifurcation frequency is demarcated to quality of adsorption size.As shown in figure 4, when sensor adsorbs different quality,
Nonlinear organization fork frequency shifts.As shown in figure 5, changing for nonlinear organization fork frequency with quality of adsorption and changing
Curve map, by figure can calculate the environmental abnormality monitoring sensor sensitivity be 0.415Hz/mg.The biography that this example is calculated
Sensor sensitivity it is low mainly due to designed sensor construction size than larger, it is sensitive when reducing sensor construction size
Degree will be lifted greatly.
Finally it should be noted that：Various embodiments above is merely illustrative of the technical solution of the present invention, rather than its limitations；To the greatest extent
The present invention is described in detail with reference to foregoing embodiments for pipe, it will be understood by those within the art that：Its according to
The technical scheme described in foregoing embodiments can so be modified, or which part or all technical characteristic are entered
Row equivalent substitution；And these modifications or replacement, the essence of appropriate technical solution is departed from various embodiments of the present invention technology
The scope of scheme.
Claims (7)
1. a kind of environmental abnormality monitoring sensor based on nonlinear organization, it is characterised in that including：Fixing end (1), excitation pressure
Conductive film (2), perforate cantilever beam (3), detection piezoelectric membrane (4), adsorbed film (5) and nonlinear beam (6)；The perforate cantilever beam
(3) one end is fixed in the fixing end (1), in the perforate cantilever beam (3) close to the position fixed with the fixing end (1)
On be connected with it is described excitation piezoelectric membrane (2), the perforate cantilever beam (3) other end free end be provided with perforate and perforate
Top is connected with the nonlinear beam (6), and the detection piezoelectric membrane (4) and the adsorbed film (5) are connected to described non-linear
The upper surface of beam (6).
2. the environmental abnormality monitoring sensor according to claim 1 based on nonlinear organization, it is characterised in that described non-
The two ends of linear beam (6) are fixed on the upper surface of the perforate cantilever beam (3) and are across the both sides of the perforate, the non-thread
Property beam (6) horizontal span be more than or equal to the length of the perforate, the width of the nonlinear beam (6) is less than the perforate
Width.
3. the environmental abnormality monitoring sensor according to claim 1 based on nonlinear organization, it is characterised in that described to swash
Encourage piezoelectric membrane (2) one end and be connected to the fixing end (1), and lower surface and the perforate of the excitation piezoelectric membrane (2)
The upper surface connection of cantilever beam (3).
4. the environmental abnormality monitoring sensor according to claim 1 based on nonlinear organization, it is characterised in that described to swash
The length for encouraging piezoelectric membrane (2) is less than the length of the perforate cantilever beam (3), and the width of the excitation piezoelectric membrane (2) is equal to
The width of the perforate cantilever beam (3).
5. the environmental abnormality monitoring sensor according to claim 1 based on nonlinear organization, it is characterised in that the spy
Pressure measurement conductive film (5) is pasted on the upper surface of the nonlinear beam (6), and the length of the detection piezoelectric membrane (5) is less than institute
The length of nonlinear beam (6) is stated, the width of the detection piezoelectric membrane (5) is equal to the width of nonlinear beam (6).
6. the environmental abnormality monitoring sensor according to claim 5 based on nonlinear organization, it is characterised in that the spy
The material of pressure measurement conductive film (5) uses macromolecule flexible piezoelectric thin-film material or piezoelectric fibre composite material.
7. the environmental abnormality monitoring sensor according to claim 1 based on nonlinear organization, it is characterised in that described non-
Linear beam (6) is one kind in cosine beam, precompressed buckled beam, V-type beam, Curved beam or arched girder.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109900607A (en) * | 2019-02-28 | 2019-06-18 | 中国科学院合肥物质科学研究院 | A kind of fine particle quality concentration detection method based on cantilever beam tunnel current |
| CN111077346A (en) * | 2019-12-30 | 2020-04-28 | 武汉市陆刻科技有限公司 | Micro-cantilever-beam-based soil humidity monitoring method, device, equipment and medium |
| CN111797503A (en) * | 2020-06-05 | 2020-10-20 | 中国飞机强度研究所 | Method for controlling buckling of piezoelectric film connector |
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| CN109900607A (en) * | 2019-02-28 | 2019-06-18 | 中国科学院合肥物质科学研究院 | A kind of fine particle quality concentration detection method based on cantilever beam tunnel current |
| CN111077346A (en) * | 2019-12-30 | 2020-04-28 | 武汉市陆刻科技有限公司 | Micro-cantilever-beam-based soil humidity monitoring method, device, equipment and medium |
| CN111797503A (en) * | 2020-06-05 | 2020-10-20 | 中国飞机强度研究所 | Method for controlling buckling of piezoelectric film connector |
| CN111797503B (en) * | 2020-06-05 | 2023-10-20 | 中国飞机强度研究所 | Method for controlling piezoelectric film connector to break away from buckling |
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| CN106969994B (en) | 2020-07-14 |
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