CN106950804B - A kind of novel high-precision three-dimensional laser exposure curing equipment - Google Patents
A kind of novel high-precision three-dimensional laser exposure curing equipment Download PDFInfo
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- CN106950804B CN106950804B CN201710354544.1A CN201710354544A CN106950804B CN 106950804 B CN106950804 B CN 106950804B CN 201710354544 A CN201710354544 A CN 201710354544A CN 106950804 B CN106950804 B CN 106950804B
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
- G03F7/70833—Mounting of optical systems, e.g. mounting of illumination system, projection system or stage systems on base-plate or ground
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70358—Scanning exposure, i.e. relative movement of patterned beam and workpiece during imaging
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- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
The present invention provides a kind of novel high-precision three-dimensional laser exposure curing equipment, including rack and is arranged at the controller of machine frame inside, three-dimensional rotation chucking appliance system and Three-Dimensional Dynamic focusing system；Three-Dimensional Dynamic focusing system includes laser, beam expanding lens, Three-Dimensional Dynamic and focuses on galvanometer, scanning galvanometer and field lens；The light beam directive beam expanding lens first launched by laser, then Three-Dimensional Dynamic is entered by beam expanding lens and focuses on galvanometer, scanning galvanometer region is finally reached, and three-dimensional focal face is formed on object to be processed；Further include for adjusting the transmission device between beam expanding lens and Three-Dimensional Dynamic focusing galvanometer along optical axis direction apart from size；The design is very suitable for the exposure curing working process for different height curved surface, 160 millimeters x160 millimeters of scanning range can be achieved, the focal beam spot of smaller can be obtained relative to prefocusing formula system, and can significantly improve the uniformity of focal beam spot, using effect is good.
Description
[technical field]
The present invention relates to laser process equipment technical field, more particularly to it is a kind of reasonable in design, scanning range is wide, and
It can obtain smaller, the novel high-precision three-dimensional laser exposure curing equipment of focal beam spot evenly.
[background technology]
In recent years, with the fast development of electronic technology, printed circuit board correlation technique obtained it is quick development and into
Step, also makes it be widely used in every field, corresponding printed circuit board is all included in almost all of electronic equipment.
In the manufacturing process of PCB circuit board, exposure-processed is the key link in whole process of manufacture, however,
Exposure for wiring board at present carries out the film with doing generally be directed to the curing process under flat state under ultra violet lamp
The optical polymerization reaction of film, photoinitiator absorb luminous energy and resolve into free radical, and free radical triggers photo polymerization monomer to be polymerize again
Cross-linking reaction, forms the build macromolecular structure insoluble in dilute alkaline soln after reaction, due to can not preferably be carried out for curved surface
Cure processing, so such processing method can not meet the exposure-processed requirement of current high-precision, high complexity.
Based on the above problem, those skilled in the art have developed using laser explosure, to photoresists, photosensitive-ink into
The cured processing method of row, since laser has high brightness, high directivity, high monochromaticity and high coherence, it is possible to reach
Higher requirement on machining accuracy, and fabrication cycle is short, increasingly receives an acclaim.
In laser explosure solidification process, for nonplanar structure, it is necessary to fast and flexible adjusting focal beam spot height and
Size, forms the machined surface of surface modeling, could smoothly complete to process, however, currently for such case, general solution
Mode is to utilize different laser Machining heads, adjusts the height size of each processing head respectively, so that the focusing surface of curved surface is produced, this
The cost of equipment is not only greatly improved in the design of sample, but also maintenance cost is high, and manipulation is complicated, is unfavorable for pushing away extensively for equipment
Extensively.
Based on the above problem, those skilled in the art has carried out substantial amounts of research and development and experiment, from the processing of laser curing
Principle and process flow, which are set out, to be improved and improves, and is targetedly researched and developed, and achieve preferable achievement.
[content of the invention]
To overcome the problems of prior art, present invention offer is a kind of reasonable in design, and scanning range is wide, and can
To obtain smaller, the novel high-precision three-dimensional laser exposure curing equipment of focal beam spot evenly.
The scheme that the present invention solves technical problem is to provide a kind of novel high-precision three-dimensional laser exposure curing equipment, including
Rack and it is arranged at the controller of machine frame inside, three-dimensional rotation chucking appliance system and Three-Dimensional Dynamic focusing system；The three-dimensional
Dynamic focusing system include with controller be electrically connected laser, beam expanding lens, Three-Dimensional Dynamic focus on galvanometer, scanning galvanometer and
Field lens；The light beam directive beam expanding lens first launched by laser, then Three-Dimensional Dynamic is entered by beam expanding lens and focuses on galvanometer, finally reach
Scanning galvanometer region, and three-dimensional focal face is formed on object to be processed；Further include and gather for adjusting beam expanding lens with Three-Dimensional Dynamic
Transmission device between burnt galvanometer along optical axis direction apart from size, the Three-Dimensional Dynamic focus on galvanometer and are arranged at the transmission device
On；The three-dimensional rotation chucking appliance system includes the first swivel mount, the first swivel mount of driving rotating first drives motor and solid
Second due to the first swivel mount one end drives motor；Object to be processed is arranged in the first swivel mount, and with the first rotation
Pivoted frame rotates；The Three-Dimensional Dynamic focusing system is arranged at three-dimensional rotation chucking appliance system top.
Preferably, the three-dimensional rotation chucking appliance system, which further includes, is arranged at machine frame inside, for placing the first swivel mount
Pedestal；The first swivel mount both ends set left contiguous block and right contiguous block respectively；Second driving motor is fixedly installed on
On right contiguous block, and rotatable positioning member is both provided with the left contiguous block and right contiguous block middle part；Object to be processed
Fixed by two rotatable positioning members, and the drive shaft of the second driving motor is connected with the rotatable positioning member of right contiguous block, driving rotation
Locating piece and object axial direction rotation to be processed.
Preferably, the Three-Dimensional Dynamic focusing system includes the laser storehouse for placing laser and expands for disposing
Shu Jing and Three-Dimensional Dynamic focus on the focus lamp storehouse of galvanometer；Scanning galvanometer is arranged on the outside of focus lamp storehouse；In the beam expanding lens and three
The reflective mirror for changing the light direction of propagation is additionally provided between dimension dynamic focusing vibration mirror to combine；Laser light from beam expanding lens
Then beam is irradiated to Three-Dimensional Dynamic and is focused in galvanometer by the reflection of reflective mirror.
Preferably, the Three-Dimensional Dynamic focusing system, which further includes, is arranged at laser storehouse and focus lamp storehouse lower part, plays branch
The supporting rack of support effect；The supporting rack is arranged on the processing platform of machine frame inside setting；Supporting rack and laser storehouse and focusing
Jing Cang is fixedly connected；
The rack includes the upper shell positioned at processing platform top and the lower housing shell positioned at processing platform lower part；It is described
Three-dimensional rotation chucking appliance system and Three-Dimensional Dynamic focusing system are arranged inside upper shell；Controller is arranged inside lower housing shell；And
Maintenance door is additionally provided with the outside of the lower housing shell.
Preferably, it is additionally provided with the outside of the three-dimensional rotation chucking appliance system and is electrically connected, with controller for avoiding setting
The safety screen for causing personnel to injure during received shipment row；Safe grating is provided with the safety screen, equipment was run
After the sensing range of safe grating is stretched at Cheng Zhong, human hand or other positions, controller control device operation suspension.
Preferably, a kind of novel high-precision three-dimensional laser exposure curing equipment, which further includes, is arranged at outside the upper shell
Display, control button and the keyboard on processing platform in portion；The upper shell is at three-dimensional rotation chucking appliance system position
Offer processing hole；And the processing hole is between safety screen and display and control button；On the upper shell top also
It is provided with the alarm lamp being electrically connected with controller.
Preferably, it is provided with protective cover on the upper shell, close to the Three-Dimensional Dynamic focusing system position of machine frame inside；Should
The protective cover is positioned at processing hole top.
Preferably, the quantity of the reflective mirror inside the focus lamp storehouse is two；And it is additionally provided with inside focus lamp storehouse
The focusing galvanometer storehouse of galvanometer is focused on for placing Three-Dimensional Dynamic；In the focusing galvanometer storehouse thang-kng is offered towards reflective mirror side
Hole；The beam expanding lens and Three-Dimensional Dynamic focus on galvanometer and are arranged in parallel.
Preferably, the scanning galvanometer is located at Three-Dimensional Dynamic and focuses on rear side of galvanometer；And the scanning galvanometer is fixed on focus lamp
On storehouse；Field lens is fixed on scanning galvanometer lower part；The field lens and the first rotation rack position pair in three-dimensional rotation chucking appliance system
Should.
Preferably, the laser is ultraviolet laser.
Compared with prior art, a kind of novel high-precision three-dimensional laser exposure curing equipment of the present invention passes through in machine frame inside
While three-dimensional rotation chucking appliance system and Three-Dimensional Dynamic focusing system are set, the laser transmitting in Three-Dimensional Dynamic focusing system
Light beam directive beam expanding lens first, then Three-Dimensional Dynamic is entered by beam expanding lens and focuses on galvanometer, scanning galvanometer region is finally reached, and treating
Process and three-dimensional focal face is formed on object, during actual processing, beam expanding lens focuses on the distance between galvanometer no with Three-Dimensional Dynamic
Disconnected adjustment, so as to change the position of focal spot in two dimension or three dimensions, reaches the effect of " 3-D scanning ", very
It is adapted to the exposure curing working process for different height curved surface, the design can realize 160 millimeters x160 millimeters of scanning range,
The focal beam spot of smaller can be obtained relative to prefocusing formula system, and can significantly improve the uniformity of focal beam spot, is made
It is good with effect.
[brief description of the drawings]
Fig. 1 is a kind of stereoscopic-state structure diagram of novel high-precision three-dimensional laser exposure curing equipment of the present invention.
Fig. 2 is a kind of internal state structure diagram of novel high-precision three-dimensional laser exposure curing equipment of the present invention.
Fig. 3 is the enlarged diagram at A in Fig. 2.
Fig. 4 is the solid of Three-Dimensional Dynamic focusing system in a kind of novel high-precision three-dimensional laser exposure curing equipment of the present invention
Status architecture schematic diagram.
Three-Dimensional Dynamic focusing system is plane in a kind of novel high-precision three-dimensional laser exposure curing equipment of Fig. 5 present invention
State structure diagram.
Fig. 6 is the enlarged diagram at B in Fig. 4.
[embodiment]
To make the purpose of the present invention, technical solution and advantage are more clearly understood, with reference to the accompanying drawings and embodiments, to this
Invention is further elaborated.It should be appreciated that specific embodiment described herein is used only for explaining the present invention, not
For limiting the invention.
Please refer to Fig.1 to Fig. 6, a kind of novel high-precision three-dimensional laser exposure curing equipment 1 of the present invention include rack 11 with
And it is arranged at controller, three-dimensional rotation chucking appliance system 13 and Three-Dimensional Dynamic focusing system 15 inside rack 11；The three-dimensional
Dynamic focusing system 15 include with controller be electrically connected laser 153, beam expanding lens 154, Three-Dimensional Dynamic focus on galvanometer 156,
Scanning galvanometer 157 and field lens 158；The light beam directive beam expanding lens 154 first launched by laser 153, then by beam expanding lens 154 into
Enter Three-Dimensional Dynamic and focus on galvanometer 156, finally reach 157 region of scanning galvanometer, and three-dimensional focal is formed on object 2 to be processed
Face；Further include and filled for adjusting the transmission between beam expanding lens 154 and Three-Dimensional Dynamic focusing galvanometer 156 along optical axis direction apart from size
1541 are put, the Three-Dimensional Dynamic focuses on galvanometer 156 and is arranged on the transmission device 1561；The three-dimensional rotation chucking appliance system 13 wraps
Include the rotating first driving motor of the first swivel mount 131, the first swivel mount of driving 131 and be fixed on first swivel mount 131
The second driving motor 133 of one end；Object 2 to be processed is arranged in the first swivel mount 131, and is revolved with the first swivel mount 131
Turn；The Three-Dimensional Dynamic focusing system 15 is arranged at 13 top of three-dimensional rotation chucking appliance system.
It is three-dimensional by setting three-dimensional rotation chucking appliance system 13 and Three-Dimensional Dynamic focusing system 15 at the same time in the inside of rack 11
The light beam directive beam expanding lens 154 first that laser 153 in dynamic focusing system 15 is launched, then three-dimensional is entered by beam expanding lens 154
Dynamic focusing vibration mirror 156, finally reaches 157 region of scanning galvanometer, and three-dimensional focal face is formed on object 2 to be processed, actual
In process, beam expanding lens 154 and Three-Dimensional Dynamic focus on the constantly adjustment of the distance between galvanometer 156, so as in two dimension or
Change the position of focal spot in three dimensions, reach the effect of " 3-D scanning ", be very suitable for for different height curved surface
Exposure curing working process, the design can realize 160 millimeters x160 millimeters of scanning range, can be with relative to prefocusing formula system
The focal beam spot of smaller is obtained, and can significantly improve the uniformity of focal beam spot, using effect is good, reaches high-precision exposure
Cure.
Preferably, the three-dimensional rotation chucking appliance system 13, which further includes, is arranged inside rack 11, for placing the first rotation
The pedestal 135 of frame 131；First swivel mount, 131 both ends set left contiguous block 1311 and right contiguous block 1313 respectively；The
Two driving motors 133 are fixedly installed on right contiguous block 1313, and among the left contiguous block 1311 and right contiguous block 1313
Position is both provided with rotatable positioning member；Object 2 to be processed is fixed by two rotatable positioning members, and the drive of the second driving motor 133
Moving axis is connected with the rotatable positioning member of right contiguous block 1313, drives rotatable positioning member and the axial rotation of object to be processed 2.It is three-dimensional
During the structure design of rolling clamp system 13 can cause actual processing, can flexibly treat processing object 2 it is each not
It is processed with corner, avoids producing processing dead angle, improve processing efficiency, which answers, and stability is good, uses
Reliability is high.
Preferably, the Three-Dimensional Dynamic focusing system 15 includes being used for laser storehouse 152 and the use for placing laser 153
The focus lamp storehouse 151 of galvanometer 156 is focused in placement beam expanding lens 154 and Three-Dimensional Dynamic；Scanning galvanometer 157 is arranged at focus lamp storehouse
151 outsides；It is additionally provided between the beam expanding lens 154 and Three-Dimensional Dynamic focus on galvanometer 156 for changing the light direction of propagation
Reflective mirror 155 combine；Then laser beam from beam expanding lens 154 is irradiated to Three-Dimensional Dynamic by the reflection of reflective mirror 155
Focus in galvanometer 156.
Preferably, the Three-Dimensional Dynamic focusing system 15, which further includes, is arranged under laser storehouse 152 and focus lamp storehouse 151
Portion, the supporting rack 158 played a supporting role；The supporting rack 158 is arranged on the processing platform 117 that the inside of rack 11 is set；Branch
Support 158 is fixedly connected with laser storehouse 152 and focus lamp storehouse 151；
The rack 11 is included positioned at the upper shell on 117 top of processing platform and under 117 lower part of processing platform
Housing；The three-dimensional rotation chucking appliance system 13 and Three-Dimensional Dynamic focusing system 15 are arranged inside upper shell；Controller is arranged at
Inside lower housing shell；And it is additionally provided with maintenance door on the outside of the lower housing shell.Reasonable in design, reliability is high.
Preferably, the outside of three-dimensional rotation chucking appliance system 13 is additionally provided with is electrically connected, for avoiding with controller
The safety screen 113 for causing personnel to injure in equipment running process；Safe grating is provided with the safety screen 113
1131, in equipment running process, after the sensing range of safe grating 1131 is stretched at human hand or other positions, controller control device
Operation suspension.The setting of safety screen 113 can effectively improve the security performance of equipment entirety.
Preferably, a kind of novel high-precision three-dimensional laser exposure curing equipment 1, which further includes, is arranged at the upper shell
Exterior display 114, control button 115 and the keyboard 116 on processing platform；The upper shell is pressed from both sides in three-dimensional rotation
13 position of tool system offers processing hole；And the processing hole be located at safety screen 113 and display 114 and control button 115 it
Between；The alarm lamp 111 being electrically connected with controller is additionally provided with the upper shell top.
Preferably, 15 position of Three-Dimensional Dynamic focusing system on the upper shell, inside rack 11 is provided with protection
Cover 112；The protective cover 112 is positioned at processing hole top.
Preferably, the quantity of the reflective mirror 155 inside the focus lamp storehouse 151 is two；And inside focus lamp storehouse 151
It is additionally provided with the focusing galvanometer storehouse that galvanometer 156 is focused on for placing Three-Dimensional Dynamic；In the focusing galvanometer storehouse towards reflective mirror 155 1
Side offers light hole；The beam expanding lens 154 and Three-Dimensional Dynamic focus on galvanometer 156 and are arranged in parallel.
Preferably, the scanning galvanometer 157 is located at Three-Dimensional Dynamic and focuses on rear side of galvanometer 156；And the scanning galvanometer 157 is fixed
In on focus lamp storehouse 151；Field lens 158 is fixed on 157 lower part of scanning galvanometer；The field lens 158 and three-dimensional rotation chucking appliance system
131 position correspondence of the first swivel mount in 13.
Preferably, the laser 153 is ultraviolet laser 153.It is well known that laser have high brightness, high directivity,
High monochromaticity and high coherence, so the design is exposed curing processing using laser, have more significant than ultraviolet lamp
Working process effect.
In Three-Dimensional Dynamic scanning system, scanning galvanometer 157 is placed on Three-Dimensional Dynamic and focuses on 156 rear of galvanometer, laser
Beam is introduced into beam expanding lens 154, enters back into Three-Dimensional Dynamic and focuses on galvanometer 156, is then scanned through the reflection of galvanometer 157, just finally
Reach focal plane, using transmission device 1561 along optical axis direction moving three dimension dynamic focusing vibration mirror 156, change beam expanding lens 154 with
Three-Dimensional Dynamic focuses on the distance between galvanometer 156, so as to change the position of focal spot in two dimension or three dimensions, reaches
To " 3-D scanning ", the focusing surface of this system is a curved surface, and flat field can be by coordinating the rotation of scanning galvanometer 1574 micro-
Beam expanding lens 154 is adjusted to focus on the distance between galvanometer 156 with Three-Dimensional Dynamic to realize.
Compared with prior art, a kind of novel high-precision three-dimensional laser exposure curing equipment 1 of the present invention is by rack 11
It is internal that three-dimensional rotation chucking appliance system 13 and Three-Dimensional Dynamic focusing system 15 be set at the same time, swashing in Three-Dimensional Dynamic focusing system 15
The light beam directive beam expanding lens 154 first that light device 153 is launched, then Three-Dimensional Dynamic is entered by beam expanding lens 154 and focuses on galvanometer 156, finally
157 region of scanning galvanometer is reached, and three-dimensional focal face is formed on object 2 to be processed, during actual processing, beam expanding lens 154
The constantly adjustment of the distance between galvanometer 156 is focused on Three-Dimensional Dynamic, light is focused on so as to change in two dimension or three dimensions
The position of point, reaches the effect of " 3-D scanning ", is very suitable for the exposure curing working process for different height curved surface, originally sets
160 millimeters x160 millimeters of scanning range can be achieved in meter, and the focal beam spot of smaller can be obtained relative to prefocusing formula system, and
The uniformity of focal beam spot can be significantly improved, using effect is good, reaches high-precision exposure curing.
The embodiments of the present invention described above are not intended to limit the scope of the present invention.It is any in the present invention
Spirit and principle within the modifications, equivalent substitutions and improvements made etc., should be included in the claim protection model of the present invention
Within enclosing.
Claims (9)
- A kind of 1. novel high-precision three-dimensional laser exposure curing equipment, it is characterised in that：Including rack and it is arranged in rack Controller, three-dimensional rotation chucking appliance system and the Three-Dimensional Dynamic focusing system in portion；The Three-Dimensional Dynamic focusing system includes and control Laser, beam expanding lens, Three-Dimensional Dynamic focusing galvanometer, scanning galvanometer and the field lens that device processed is electrically connected；By laser transmitting Light beam directive beam expanding lens first, then Three-Dimensional Dynamic is entered by beam expanding lens and focuses on galvanometer, scanning galvanometer region is finally reached, and treating Process and three-dimensional focal face is formed on object；Further include for adjusting between beam expanding lens and Three-Dimensional Dynamic focusing galvanometer along optical axis direction Apart from the transmission device of size, the Three-Dimensional Dynamic focuses on galvanometer and is arranged on the transmission device；The three-dimensional rotation fixture system System includes the rotating first driving motor of the first swivel mount, the first swivel mount of driving and is fixed on the first swivel mount one end Second driving motor；Object to be processed is arranged in the first swivel mount, and is rotated with the first swivel mount；The Three-Dimensional Dynamic is gathered Burnt system is arranged at three-dimensional rotation chucking appliance system top；It is additionally provided with the outside of the three-dimensional rotation chucking appliance system electrical with controller Connection, the safety screen for avoiding causing personnel to injure in equipment running process；Peace is provided with the safety screen Full raster, in equipment running process, after the sensing range of safe grating is stretched at human hand or other positions, controller control device is temporary Stop transport and go.
- A kind of 2. novel high-precision three-dimensional laser exposure curing equipment as claimed in claim 1, it is characterised in that：The three-dimensional Rolling clamp system, which further includes, is arranged at machine frame inside, the pedestal for placing the first swivel mount；First swivel mount two End sets left contiguous block and right contiguous block respectively；Second driving motor is fixedly installed on right contiguous block, and in the left company Connect block and right contiguous block middle part is both provided with rotatable positioning member；Object to be processed is fixed by two rotatable positioning members, and the The drive shaft of two driving motors is connected with the rotatable positioning member of right contiguous block, drives rotatable positioning member and object to be processed axial Rotation.
- A kind of 3. novel high-precision three-dimensional laser exposure curing equipment as claimed in claim 1, it is characterised in that：The three-dimensional Dynamic focusing system is including for placing the laser storehouse of laser and for disposing beam expanding lens and Three-Dimensional Dynamic to focus on galvanometer Focus lamp storehouse；Scanning galvanometer is arranged on the outside of focus lamp storehouse；Also set between the beam expanding lens and Three-Dimensional Dynamic focus on galvanometer The reflective mirror for changing the light direction of propagation is equipped with to combine；Laser beam from beam expanding lens is by the reflection of reflective mirror, so After be irradiated to Three-Dimensional Dynamic focus on galvanometer in.
- A kind of 4. novel high-precision three-dimensional laser exposure curing equipment as claimed in claim 3, it is characterised in that：The three-dimensional Dynamic focusing system, which further includes, is arranged at laser storehouse and focus lamp storehouse lower part, the supporting rack played a supporting role；The supporting rack It is arranged on the processing platform of machine frame inside setting；Supporting rack is fixedly connected with laser storehouse and focus lamp storehouse；The rack includes the upper shell positioned at processing platform top and the lower housing shell positioned at processing platform lower part；The three-dimensional Rolling clamp system and Three-Dimensional Dynamic focusing system are arranged inside upper shell；Controller is arranged inside lower housing shell；And institute State and be additionally provided with maintenance door on the outside of lower housing shell.
- A kind of 5. novel high-precision three-dimensional laser exposure curing equipment as claimed in claim 4, it is characterised in that：Further include and set Display, control button and the keyboard on processing platform being placed in outside the upper shell；The upper shell is in three-dimensional Rolling clamp system position offers processing hole；And the processing hole is between safety screen and display and control button； The upper shell top is additionally provided with the alarm lamp being electrically connected with controller.
- A kind of 6. novel high-precision three-dimensional laser exposure curing equipment as claimed in claim 5, it is characterised in that：The upper casing Protective cover is provided with body, close to the Three-Dimensional Dynamic focusing system position of machine frame inside；The protective cover is on processing hole Portion.
- A kind of 7. novel high-precision three-dimensional laser exposure curing equipment as claimed in claim 3, it is characterised in that：The focusing The quantity of reflective mirror inside mirror storehouse is two；And it is additionally provided with inside focus lamp storehouse and focuses on galvanometer for placing Three-Dimensional Dynamic Focusing galvanometer storehouse；In the focusing galvanometer storehouse light hole is offered towards reflective mirror side；The beam expanding lens and Three-Dimensional Dynamic are gathered Burnt galvanometer is arranged in parallel.
- A kind of 8. novel high-precision three-dimensional laser exposure curing equipment as claimed in claim 3, it is characterised in that：The scanning Galvanometer is located at Three-Dimensional Dynamic and focuses on rear side of galvanometer；And the scanning galvanometer is fixed on focus lamp storehouse；Field lens is fixed on scanning galvanometer Lower part；The field lens and the first swivel mount position correspondence in three-dimensional rotation chucking appliance system.
- A kind of 9. novel high-precision three-dimensional laser exposure curing equipment as claimed in claim 1, it is characterised in that：The laser Device is ultraviolet laser.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710354544.1A CN106950804B (en) | 2017-05-19 | 2017-05-19 | A kind of novel high-precision three-dimensional laser exposure curing equipment |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710354544.1A CN106950804B (en) | 2017-05-19 | 2017-05-19 | A kind of novel high-precision three-dimensional laser exposure curing equipment |
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| CN106950804A CN106950804A (en) | 2017-07-14 |
| CN106950804B true CN106950804B (en) | 2018-05-08 |
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| CN109108459A (en) * | 2018-10-18 | 2019-01-01 | 深圳市斯普莱特激光科技有限公司 | A kind of high degree of safety automatized three-dimensional laser process equipment |
| CN109175677A (en) * | 2018-10-18 | 2019-01-11 | 深圳市斯普莱特激光科技有限公司 | A kind of high accurancy and precision automatized three-dimensional laser process equipment |
| CN112117393B (en) * | 2020-09-23 | 2022-06-03 | 江苏洛柳精密科技有限公司 | Laser packaging placement equipment |
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| CN104588884B (en) * | 2014-11-25 | 2017-05-24 | 深圳信息职业技术学院 | Three-dimensional laser processing equipment |
| CN104527070B (en) * | 2014-12-24 | 2018-02-06 | 上海联泰科技股份有限公司 | The light solidifying quick forming device of multiple material can be printed simultaneously |
| CN204771613U (en) * | 2015-04-30 | 2015-11-18 | 深圳市斯普莱特激光科技有限公司 | Work piece adds clamping apparatus |
| CN205200808U (en) * | 2015-12-12 | 2016-05-04 | 深圳市斯普莱特激光科技有限公司 | Two freedoms high accuracy radium carving workstation |
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2017
- 2017-05-19 CN CN201710354544.1A patent/CN106950804B/en active Active
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