CN106950731A - A kind of liquid-supplying system - Google Patents

A kind of liquid-supplying system Download PDF

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Publication number
CN106950731A
CN106950731A CN201710269238.8A CN201710269238A CN106950731A CN 106950731 A CN106950731 A CN 106950731A CN 201710269238 A CN201710269238 A CN 201710269238A CN 106950731 A CN106950731 A CN 106950731A
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CN
China
Prior art keywords
room
liquid level
liquid
feed flow
cleaning fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201710269238.8A
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Chinese (zh)
Inventor
魏德萌
王浩
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Wuhan China Star Optoelectronics Technology Co Ltd
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Wuhan China Star Optoelectronics Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wuhan China Star Optoelectronics Technology Co Ltd filed Critical Wuhan China Star Optoelectronics Technology Co Ltd
Priority to CN201710269238.8A priority Critical patent/CN106950731A/en
Publication of CN106950731A publication Critical patent/CN106950731A/en
Pending legal-status Critical Current

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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303Apparatus specially adapted to the manufacture of LCDs
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1316Methods for cleaning the liquid crystal cells, or components thereof, during manufacture: Materials therefor

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Cleaning By Liquid Or Steam (AREA)

Abstract

The invention provides a kind of liquid-supplying system.The liquid-supplying system includes:Feed flow room, is provided with for storing cleaning fluid, in it for controlling stable the first temperature control component in the first temperature of cleaning fluid;Feed pipe, for connecting feed flow room and purge chamber, so that feed flow room conveys cleaning fluid by the feed pipe to purge chamber;Fluid infusion room, is provided with for storing pre-warmed cleaning fluid, in it for controlling stable the second temperature control component in second temperature of cleaning fluid;The fluid infusion room is connected by transmission channel with feed flow room, and first switch is provided with the transmission channel, and the first switch is used to control the fluid infusion room to convey the cleaning fluid with second temperature to feed flow room, wherein, the first temperature is suitable with second temperature;Return duct, for connecting fluid infusion room and purge chamber so that purge chamber by the return duct to fluid infusion room flow back cleaning fluid.The program ensures that the temperature of cleaning fluid in feed flow room is uniform, accurately controls the temperature of cleaning fluid in liquid crystal panel manufacture process.

Description

A kind of liquid-supplying system
Technical field
Field, more particularly to a kind of liquid-supplying system are made the present invention relates to liquid crystal panel.
Background technology
In the present age of information-intensive society, the importance as the display of visual information transmission medium is further being strengthened, and is Occupy leading position in future, display is just towards lighter, thinner, more low energy consumption, more inexpensive and more preferable picture quality Trend development.
Liquid crystal panel industry, the development temperature of developer solution is most important to the characteristic specifications of product, it is therefore desirable to accurate control Make its process temperatures.Heater strip causes the feed flow room top developer solution without heater strip laterally to arrange in existing feed flow room Temperature is relatively low.Designing topmost problem at present is, equipment without cleaning glass substrate state under developer solution liquid level compared with Height, when processing procedure starts cleaning glass substrate, the liquid level of developer solution can be beaten because of developer solution to cleaning glass substrate in feed flow room Purge chamber in and decline, and the height of heater strip no more than decline after liquid level, otherwise can make heater strip dry combustion method and damage, There is the temperature difference so as to lead top and the bottom decoction in feed flow room.
Therefore, the prior art is defective, need to improve.
The content of the invention
It is an object of the invention to provide a kind of improved liquid-supplying system.
To solve the above problems, the technical scheme that the present invention is provided is as follows:
The present invention provides a kind of liquid-supplying system, including:Feed flow room, feed pipe, fluid infusion room and return duct;
Feed flow room, is provided with for storing cleaning fluid, in it for controlling cleaning fluid stabilization in the first temperature of the first temperature Control component;
Feed pipe, for connecting feed flow room and purge chamber, is cleaned so that feed flow room is conveyed by the feed pipe to purge chamber Liquid;
Fluid infusion room, is provided with for storing pre-warmed cleaning fluid, in it for controlling cleaning fluid stable in second temperature The second temperature control component;The fluid infusion room is connected by transmission channel with feed flow room, and first switch is provided with the transmission channel, The first switch be used for control the fluid infusion room to feed flow room convey with second temperature cleaning fluid, wherein, the first temperature with Second temperature is suitable;
Return duct, for connecting fluid infusion room and purge chamber, is cleaned so that purge chamber is flowed back by the return duct to fluid infusion room Liquid.
In certain embodiments, the liquid-supplying system includes being provided with a demarcation strip in a casing, the casing, by institute State casing and be separated into the feed flow room and the fluid infusion room, the transmission channel is arranged on the demarcation strip.
In certain embodiments, the first Liquid level component is provided with the liquid supply box, in control feed flow room The liquid level of cleaning fluid.
In certain embodiments, the first Liquid level component includes the first controller and the first liquid level detector;
If the first liquid level detector, which detects current level in feed flow room, is less than the first liquid level, the first controller is then used to control First switch processed is opened, so that fluid infusion room conveys cleaning fluid to feed flow room, until the first liquid level detector detects current level When reaching the second liquid level, the first controller is used to control first switch to close, and is cleaned so that fluid infusion room stops conveying to feed flow room Liquid;Wherein, the second liquid level is higher than the first liquid level, liquid level of first liquid level higher than liquid level where the first temperature control component peak.
In certain embodiments, first switch is Unidirectional solenoid valve controlling switch.
In certain embodiments, the feed flow room, which has, offers on side wall, the side wall with position height difference First opening and the second opening;Circulation pipe is provided with the side wall, one end of the circulation pipe passes through the first opening and the confession Liquid room is connected, and the other end of the circulation pipe is connected by the second opening with the feed flow room;Second is provided with the circulation pipe Switch, the cleaning fluid that the second switch is used to control in the feed flow room is open after circulation pipe defeated from the second opening by first Feed flow room is delivered to, or controls the cleaning fluid in the feed flow room to be delivered to confession from the first opening after circulation pipe by the second opening Liquid room.
In certain embodiments, the first temperature control component includes heater strip, and the heater strip includes multiple bend units, Bottom wall cross direction profiles of the multiple bend unit along the feed flow room and it is sequentially connected.
In certain embodiments, the second Liquid level component is provided with the fluid infusion room, for controlling current fluid infusion The liquid level of indoor cleaning fluid.
In certain embodiments, it is provided with the discharging tube with its chamber, the discharging tube and sets on the fluid infusion room The 3rd switch is equipped with, the 3rd switchs for controlling the cleaning fluid in the fluid infusion room to be discharged outside to by the discharging tube.
In certain embodiments, the second Liquid level component includes second controller and the second liquid level detector;
If the second liquid level detector, which detects current level in fluid infusion room, is higher than the 3rd liquid level, second controller is then used to control The 3rd switch unlatching is made, the cleaning fluid in the fluid infusion room is discharged outside to by the discharging tube, to keep in fluid infusion room The liquid level of cleaning fluid is not higher than the 3rd liquid level, when the second liquid level detector detects current level and is reduced to four liquid levels, Second controller is used to control the 3rd switch to close, so that fluid infusion room stops outwardly discharging cleaning fluid;Wherein, the 3rd liquid level is high In the 4th liquid level, liquid level of the 4th liquid level higher than liquid level where the second temperature control component peak.
Compared to existing liquid-supplying system, the liquid-supplying system that the present invention is provided includes:Feed flow room, feed pipe, fluid infusion room with And return duct;Feed flow room, is provided with for storing cleaning fluid, in it for controlling cleaning fluid stabilization in the first temperature of the first temperature Control component;Feed pipe, for connecting feed flow room and purge chamber, is cleaned so that feed flow room is conveyed by the feed pipe to purge chamber Liquid;Fluid infusion room, is provided with for storing pre-warmed cleaning fluid, in it for controlling cleaning fluid stable the second of second temperature Temperature control component;The fluid infusion room is connected by transmission channel with feed flow room, and first switch, described are provided with the transmission channel One switchs for controlling the fluid infusion room to convey the cleaning fluid with second temperature to feed flow room, wherein, the first temperature and the second temperature Degree is suitable;Return duct, for connecting fluid infusion room and purge chamber, is cleaned so that purge chamber is flowed back by the return duct to fluid infusion room Liquid.The program ensures that the temperature of cleaning fluid in feed flow room is uniform, accurately controls the temperature of cleaning fluid in liquid crystal panel manufacture process.
Brief description of the drawings
Fig. 1 is the first planar structure schematic diagram of liquid-supplying system in the preferred embodiment of the present invention.
Fig. 2 is the structural representation of heater strip in the preferred embodiment of the present invention.
Fig. 3 is second of planar structure schematic diagram of liquid-supplying system in the preferred embodiment of the present invention.
Fig. 4 is the third planar structure schematic diagram of liquid-supplying system in the preferred embodiment of the present invention.
Embodiment
The explanation of following embodiment is the particular implementation implemented to illustrate the present invention can be used to reference to additional schema Example.The direction term that the present invention is previously mentioned, such as " on ", " under ", "front", "rear", "left", "right", " interior ", " outer ", " side " Deng being only the direction with reference to annexed drawings.Therefore, the direction term used is to illustrate and understand the present invention, and is not used to The limitation present invention.
In figure, the similar module of component is represented with identical label.
In addition, term " first ", " second " are only used for describing purpose, and it is not intended that indicating or implying relative importance Or the implicit quantity for indicating indicated technical characteristic.Thus, define " first ", the feature of " second " can express or Implicitly include one or more this feature.In the description of the invention, unless otherwise indicated, " multiple " are meant that two Individual or two or more.In addition, term " comprising " and its any deformation, it is intended that covering is non-exclusive to be included.
Refering to Fig. 1, Fig. 1 is the first solid component schematic diagram of liquid-supplying system in the preferred embodiment of the present invention.Such as Fig. 1 institutes Show, the liquid-supplying system of this preferred embodiment, the cleaning fluid of glass substrate, including feed flow room are rinsed for providing purge chamber 100 11st, feed pipe 12, fluid infusion room 13 and return duct 14, wherein:
Feed flow room 11 is used to store cleaning fluid, is provided with it for controlling cleaning fluid stabilization in the first temperature of the first temperature Control component 111.
Feed pipe 12 is used to connect feed flow room 11 and purge chamber 100 so that feed flow room 11 by the feed pipe 12 to cleaning Room 100 conveys cleaning fluid.
Fluid infusion room 13 is used to store pre-warmed cleaning fluid, is provided with it for controlling cleaning fluid stable in second temperature The second temperature control component 131;The fluid infusion room 13 is connected by transmission channel 15 with feed flow room 11, and is provided with transmission channel 15 One switch 151, first switch 151 is used to control the fluid infusion room 13 to convey the cleaning fluid with second temperature to feed flow room 11, its In, the first temperature is suitable with second temperature.
In practical application, the length of the transmission channel 15 may be designed as it is short as far as possible, to ensure in fluid infusion room 13 to confession During the conveying of liquid room 11 cleaning fluid, the temperature of cleaning fluid will not be reduced.
Return duct 14 is used to connect fluid infusion room 13 and purge chamber 100 so that purge chamber 100 by the return duct 14 to fluid infusion Flow back cleaning fluid for room 13.
Specifically, because the rinse liquid temperature of backflow can decline, in the present embodiment, the cleaning fluid of temperature drop is flowed back To fluid infusion room 13, the influence to the rinse liquid temperature in the feed flow room 11 of purge chamber 100 to feed flow can be avoided.
With continued reference to Fig. 1, in certain embodiments, the first temperature control component 111 includes heater strip 111, and heater strip 111 includes Multiple bend units 1111, bottom wall 112 cross direction profiles of the plurality of bend unit 1111 along feed flow room 11 and are sequentially connected.Tool In body implementation process, the overall lateral length L1 of the heater strip 111 is shorter than longitudinal length L2, so that the cleaning liquid inside of feed flow room 11 It is uniformly heated, reduces the top and the bottom temperature difference.
In practical application, the shape of the heater strip 111 can have a variety of, refer to Fig. 2, and the heater strip 111 can be Fig. 2 institutes Show any structure or other unshowned structures.As illustrated, the bend unit 1111 can be in inverted " v ", " M " shape.This Outside, the bend unit 1111 can also be not specifically limited in shapes such as positive " V " shape, " W " shape or helical forms to this.
In addition, the first temperature control component 111 may also include temperature detector and the control for controlling heater strip to heat Device etc..
Similarly, the second temperature control component 131 includes heater strip 131, and heater strip 131 includes multiple bend units 1311, should Bottom wall 132 cross direction profiles of multiple bend units 1311 along feed flow room 13 and it is sequentially connected.
In addition, the first temperature control component 131 may also include temperature detector and the control for controlling heater strip to heat Device.
In certain embodiments, rinse liquid temperature is taken up space and keeps in transmitting procedure not for night equipment to reduce It can reduce, the transmission channel 15 can be designed as short as possible.With reference to Fig. 3, liquid-supplying system includes a casing 200, the casing 200 A demarcation strip 210 is inside provided with, casing 200 is separated into feed flow room 11 and fluid infusion room 13, the transmission channel 15 is arranged on this On demarcation strip 210.
With reference to Fig. 4, exemplified by supplying night system shown in above-mentioned Fig. 3, the first Liquid level component is provided with the liquid supply box 11 113, for the liquid level of the cleaning liquid inside of control feed flow room 11.
In certain embodiments, the first Liquid level component 113 includes the first controller and the first liquid level detector.Its In, the first controller can be PLC control system, and the first liquid level detector can be floating type liquid level inductor.
With continued reference to Fig. 4, in practical application, it is less than first when the first liquid level detector detects current level in feed flow room During liquid level P1, the first controller then controls first switch 151 to open, so that fluid infusion room 13 conveys cleaning fluid to feed flow room 11, directly When detecting current level to the first liquid level detector and reaching the second liquid level P2, the first controller control first switch 151 is closed, So that fluid infusion room 13 stops conveying cleaning fluid to feed flow room 11.Wherein, the second liquid level P2 is higher than the first liquid level P1, the first liquid level P1 Higher than the liquid level of liquid level where the peak Q1 of the first temperature control component 111.
In certain embodiments, first switch 151 is Unidirectional solenoid valve controlling switch.
With continued reference to Fig. 4, in certain embodiments, feed flow room 11, which has, offer tool on side wall 114, the side wall 114 There are the first opening 1141 and the second opening 1142 of position height difference.Circulation pipe 115 is provided with the side wall 114, the circulation pipe 115 one end is connected by the first opening 1141 with the feed flow room 11, and the other end of the circulation pipe 115 passes through the second opening 1142 Connected with the feed flow room 11.Second switch 1151 is provided with circulation pipe 115, second switch 1151 is used to control the feed flow room 11 Interior cleaning fluid is delivered to feed flow room 11, or control after circulation pipe 115 by the first opening 1141 from the second opening 1152 Cleaning fluid in the feed flow room 11 is delivered to feed flow room after circulation pipe 115 by the second opening 1152 from the first opening 1151 11。
In practical application, the circulation pipe 115 design can as feed flow room 11 internal circulation apparatus so that in feed flow room 11 Cleaning fluid fully flows, it is to avoid the local temperature difference that the cleaning liquid inside of feed flow room 11 has.Wherein, the second switch 1151 can be to take out Water dispenser (i.e. pump).
With continued reference to Fig. 4, in certain embodiments, the second Liquid level component 133 is provided with the fluid infusion room 13, with In the liquid level for controlling the current cleaning liquid inside of fluid infusion room 13.
Specifically, it is provided with fluid infusion room 13 on the discharging tube 16 with its chamber, the discharging tube 16 and is provided with the 3rd Switch 161, the 3rd switch 161 is used to control the cleaning fluid in fluid infusion room 13 to be discharged outside to by discharging tube 16.Practical application In, the 3rd switch 161 can be solenoid valve control switch.
In certain embodiments, the second Liquid level component 133 includes second controller and the second liquid level detector.Equally Ground, second controller can be PLC control system, and the second liquid level detector can be floating type liquid level inductor.
As shown in figure 4, in practical application, being higher than the 3rd when the second liquid level detector detects current level in fluid infusion room 11 During liquid level P3, second controller then controls the 3rd switch 161 to open, and the cleaning fluid in fluid infusion room 13 is discharged by discharging tube 16 To extraneous, the 3rd liquid level P3 is not higher than with the liquid level for keeping the cleaning liquid inside of fluid infusion room 13, until the second liquid level detector is detected When current level is reduced to the 4th liquid level P4, second controller then control the 3rd switch 161 close so that fluid infusion room 13 stop to External world's discharge cleaning fluid.Wherein, the 3rd liquid level P3 is higher than the 4th liquid level P4, and the 4th liquid level P2 is higher than the second temperature control component 131 most The liquid level of liquid level where high point Q2.
In practical application, the 3rd liquid level P3 can be safety levels, cause when the cleaning fluid of backflow is excessive in portion liquid room 13 When the liquid level of cleaning fluid is higher than safety levels, the cleaning fluid in fluid infusion room 13 can then overflow.Therefore, when liquid level is higher than the 3rd liquid level During P3, controllable 3rd switch 161 of second controller is opened, and the cleaning fluid in fluid infusion room 13 is expelled to by discharging tube 16 outer Boundary.
As shown in figure 4, in the embodiment of the present invention, factory service feed pipe 17 is designed as connecting with fluid infusion room 13, makes factory service feed flow The direct feed flow of pipe 17 is to fluid infusion room 13, to avoid the temperature for directly affecting the cleaning liquid inside of feed flow room 11, so as to avoid because of cleaning fluid The characteristic specifications of the glass substrate cleaned in temperature change influence purge chamber 100.
From the foregoing, it will be observed that liquid-supplying system provided in an embodiment of the present invention, including feed flow room, feed pipe, fluid infusion room and backflow Pipe;Feed flow room, is provided with for storing cleaning fluid, in it for controlling stable the first temperature control group in the first temperature of cleaning fluid Part;Feed pipe, for connecting feed flow room and purge chamber, so that feed flow room conveys cleaning fluid by the feed pipe to purge chamber;Mend Liquid room, is provided with for storing pre-warmed cleaning fluid, in it for controlling stable the second temperature control in second temperature of cleaning fluid Component;The fluid infusion room is connected by transmission channel with feed flow room, and first switch is provided with the transmission channel, and described first opens Close and convey the cleaning fluid with second temperature for controlling the fluid infusion room to feed flow room, wherein, the first temperature and second temperature phase When;Return duct, for connecting fluid infusion room and purge chamber so that purge chamber by the return duct to fluid infusion room flow back cleaning fluid.Should Scheme ensures that the temperature of cleaning fluid in feed flow room is uniform, accurately controls the temperature of cleaning fluid in liquid crystal panel manufacture process, lifting production Product yield.
In summary, although the present invention it is disclosed above with preferred embodiment, but above preferred embodiment and be not used to limit The system present invention, one of ordinary skill in the art without departing from the spirit and scope of the present invention, can make various changes and profit Adorn, therefore protection scope of the present invention is defined by the scope that claim is defined.

Claims (10)

1. a kind of liquid-supplying system, the cleaning fluid of glass substrate is rinsed for providing purge chamber, it is characterised in that including:Feed flow Room, feed pipe, fluid infusion room and return duct;
Feed flow room, is provided with for storing cleaning fluid, in it for controlling stable the first temperature control group in the first temperature of cleaning fluid Part;
Feed pipe, for connecting feed flow room and purge chamber, so that feed flow room conveys cleaning fluid by the feed pipe to purge chamber;
Fluid infusion room, is provided with for storing pre-warmed cleaning fluid, in it for controlling cleaning fluid stable the of second temperature Two temperature control components;The fluid infusion room is connected by transmission channel with feed flow room, and first switch is provided with the transmission channel, described First switch is used to control the fluid infusion room to convey the cleaning fluid with second temperature to feed flow room, wherein, the first temperature and second Temperature is suitable;
Return duct, for connecting fluid infusion room and purge chamber so that purge chamber by the return duct to fluid infusion room flow back cleaning fluid.
2. liquid-supplying system as claimed in claim 1, it is characterised in that the liquid-supplying system is included in a casing, the casing A demarcation strip is provided with, the casing is separated into the feed flow room and the fluid infusion room, the transmission channel is arranged on institute State on demarcation strip.
3. liquid-supplying system as claimed in claim 1, it is characterised in that the first Liquid level group is provided with the liquid supply box Part, for the liquid level of cleaning fluid in control feed flow room.
4. liquid-supplying system as claimed in claim 3, it is characterised in that the first Liquid level component includes the first controller and the One liquid level detector;
If the first liquid level detector detects in feed flow room current level and is less than the first liquid level, the first controller is then used to controlling the One switch is opened, so that fluid infusion room conveys cleaning fluid to feed flow room, until the first liquid level detector detects current level and reached During the second liquid level, the first controller is used to control first switch to close, so that fluid infusion room stops conveying cleaning fluid to feed flow room;Its In, the second liquid level is higher than the first liquid level, liquid level of first liquid level higher than liquid level where the first temperature control component peak.
5. liquid-supplying system as claimed in claim 1, it is characterised in that first switch is Unidirectional solenoid valve controlling switch.
6. liquid-supplying system as claimed in claim 1, it is characterised in that the feed flow room had and opened on side wall, the side wall Provided with the first opening and the second opening with position height difference;Circulation pipe, the one of the circulation pipe are provided with the side wall End is connected by the first opening with the feed flow room, and the other end of the circulation pipe is connected by the second opening with the feed flow room;Institute State and second switch is provided with circulation pipe, the cleaning fluid that the second switch is used to control in the feed flow room is passed through by the first opening Feed flow room is delivered to from the second opening after circulation pipe, or controls the cleaning fluid in the feed flow room by the second opening through circulation pipe Afterwards feed flow room is delivered to from the first opening.
7. liquid-supplying system as claimed in claim 1, it is characterised in that the first temperature control component includes heater strip, described to add Heated filament includes multiple bend units, bottom wall cross direction profiles of the multiple bend unit along the feed flow room and is sequentially connected.
8. liquid-supplying system as claimed in claim 1, it is characterised in that the second Liquid level group is provided with the fluid infusion room Part, for controlling the liquid level of cleaning fluid in current fluid infusion room.
9. liquid-supplying system as claimed in claim 8, it is characterised in that the row with its chamber is provided with the fluid infusion room Be provided with the 3rd switch on liquid pipe, the discharging tube, the 3rd switch it is described for controlling the cleaning fluid in the fluid infusion room to pass through Discharging tube is discharged outside to.
10. liquid-supplying system as claimed in claim 9, it is characterised in that the second Liquid level component include second controller and Second liquid level detector;
If the second liquid level detector detects in fluid infusion room current level and is higher than the 3rd liquid level, second controller is then used to controlling the Three switches are opened, and the cleaning fluid in the fluid infusion room is discharged outside to by the discharging tube, to keep cleaning in fluid infusion room The liquid level of liquid is not higher than the 3rd liquid level, when the second liquid level detector detects current level and is reduced to four liquid levels, and second Controller is used to control the 3rd switch to close, so that fluid infusion room stops outwardly discharging cleaning fluid;Wherein, the 3rd liquid level is higher than the Four liquid levels, liquid level of the 4th liquid level higher than liquid level where the second temperature control component peak.
CN201710269238.8A 2017-04-24 2017-04-24 A kind of liquid-supplying system Pending CN106950731A (en)

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CN106950731A true CN106950731A (en) 2017-07-14

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Publication number Priority date Publication date Assignee Title
CN108380624A (en) * 2018-02-28 2018-08-10 武汉华星光电技术有限公司 Liquid feed device
CN113238591A (en) * 2021-07-13 2021-08-10 北京力耘柯创医学研究院 Liquid conveying temperature control equipment
WO2023241733A1 (en) * 2022-06-14 2023-12-21 Tcl Zhonghuan Renewable Energy Technology Co., Ltd. Liquid storage tanks and cleaners including the same

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CN204007056U (en) * 2014-08-20 2014-12-10 中芯国际集成电路制造(北京)有限公司 A kind of liquid delivery system
CN105093594A (en) * 2015-09-18 2015-11-25 京东方科技集团股份有限公司 Stripping device and display substrate production line
CN105785605A (en) * 2015-01-13 2016-07-20 芝浦机械电子株式会社 Substrate processing device

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Publication number Priority date Publication date Assignee Title
KR20110059123A (en) * 2009-11-27 2011-06-02 세메스 주식회사 Liquid crystal supplying unit and apparatus of dispensing liquid crystal with the same
CN102896104A (en) * 2012-10-15 2013-01-30 京东方科技集团股份有限公司 Base plate washing equipment and base plate washing system
CN203218224U (en) * 2012-12-04 2013-09-25 京东方科技集团股份有限公司 Fluid supply box and etching device
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108380624A (en) * 2018-02-28 2018-08-10 武汉华星光电技术有限公司 Liquid feed device
CN113238591A (en) * 2021-07-13 2021-08-10 北京力耘柯创医学研究院 Liquid conveying temperature control equipment
WO2023241733A1 (en) * 2022-06-14 2023-12-21 Tcl Zhonghuan Renewable Energy Technology Co., Ltd. Liquid storage tanks and cleaners including the same

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Application publication date: 20170714