CN106949822B - Real-time displacement feedback system and feedback method of micro device - Google Patents
Real-time displacement feedback system and feedback method of micro device Download PDFInfo
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- CN106949822B CN106949822B CN201710063126.7A CN201710063126A CN106949822B CN 106949822 B CN106949822 B CN 106949822B CN 201710063126 A CN201710063126 A CN 201710063126A CN 106949822 B CN106949822 B CN 106949822B
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- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
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Abstract
The invention provides a real-time displacement feedback system of a micro device, which comprises: a magnet; the Hall sensors are used for detecting and outputting a plurality of voltage values generated by the magnet at the positions of the Hall sensors correspondingly; and the control chip is used for receiving the voltage value and calculating the real-time position information of the magnet according to the voltage value and the position parameter. The invention also provides a real-time displacement feedback method of the micro device, which is applied to the real-time displacement feedback system of the micro device. The real-time displacement feedback system and the feedback method of the micro device provided by the invention directly realize the accurate control of the displacement, not only can directly output the displacement information of the magnet, but also the control precision of the displacement is irrelevant to the assembly position of the magnet, the demagnetization of the magnet has no influence on the displacement information, and the calibration is not needed before the use.
Description
[ technical field ] A method for producing a semiconductor device
The invention relates to a real-time displacement feedback system of a micro device and a feedback method thereof.
[ background of the invention ]
With the development of electronic technology, mobile communication terminal devices such as mobile phones and the like generally have a plurality of micro devices therein, such as a built-in micro motor that generates vibration, a voice coil motor that drives an image pickup lens, and the like. These micro components have movable components inside, and the user cannot know the real-time displacement of the movable components when the movable components move, so that the displacement of the movable components of the micro components cannot be precisely controlled.
Therefore, it is necessary to provide a new real-time displacement feedback system of micro device and a feedback method thereof to solve the above problems.
[ summary of the invention ]
The invention aims to provide a real-time displacement feedback system and a feedback method of a micro device, which effectively solve the technical problem that the displacement of a moving part of the existing motor cannot be accurately controlled.
The technical scheme of the invention is as follows: a real-time displacement feedback system for a micro device, the micro device including a reciprocally movable moving part, the feedback system comprising:
a magnet disposed on the moving member;
the Hall sensors are arranged according to preset position parameters and are used for detecting and outputting a plurality of voltage values correspondingly generated by the magnet at the positions of the Hall sensors;
and the control chip is electrically connected with the Hall sensors and is used for receiving the voltage values and calculating the real-time position information of the magnet according to the voltage values and the position parameters.
Preferably, the micro device further comprises a housing spaced from the moving part; the plurality of Hall sensors are arranged on the shell at intervals along the moving direction of the moving component.
Preferably, the magnet has an arc surface protruding toward the housing.
Preferably, the control chip comprises a multiplexer connected with each hall sensor, and a preamplifier, an analog-to-digital converter, a digital processor and a digital-to-analog converter which are sequentially connected with the multiplexer in series.
Preferably, the hall sensor comprises a sensing unit for detecting magnetic induction, and the sensing unit is formed by a semiconductor sheet.
Preferably, the sensing unit is integrated with the control chip.
The invention also provides a real-time displacement feedback method of the micro device, which is applied to the real-time displacement feedback system of the micro device; the feedback method comprises the following steps:
s1, detecting and outputting a plurality of voltage values generated by the magnet at the positions of the Hall sensors by the Hall sensors;
s2, the control chip receives the voltage values and calculates the magnetic induction intensity value corresponding to each voltage value according to a Hall effect formula;
s3, fitting by adopting a data fitting mode to obtain a function formula of the magnetic induction intensity value and the position parameter of the Hall sensor;
s4, calculating according to the function formula to obtain real-time position information of the magnet when the magnetic induction intensity value is maximum;
and S5, outputting the real-time position information.
Preferably, the micro device further comprises a housing spaced from the moving part; the plurality of Hall sensors are arranged on the shell at intervals along the moving direction of the moving component.
Preferably, the magnet has an arc surface protruding toward the housing.
Preferably, the hall sensor comprises a sensing unit for detecting magnetic induction intensity, and the sensing unit is composed of a semiconductor thin sheet;
in the step S2, the hall effect formula is UHK × IB/d; wherein, UHThe voltage value detected by the hall sensor in the step S1; k is the Hall coefficient of the sensitive unit; i is the current density flowing through the sensitive unit; b is a magnetic induction intensity value; d is the thickness of the sensitive unit.
Compared with the prior art, the real-time displacement feedback system and the feedback method of the micro device provided by the invention have the advantages that the displacement information of the magnet can be directly fed back to the application end in real time through the Hall sensor array and the control chip, so that the accurate control of the displacement is directly realized, the displacement information of the magnet can be directly output, the control accuracy of the displacement is irrelevant to the assembly position of the magnet, the demagnetization of the magnet has no influence on the displacement information, and the calibration is not needed before the use.
[ description of the drawings ]
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the description of the embodiments are briefly introduced below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and other drawings can be obtained by those skilled in the art without inventive efforts, wherein:
FIG. 1 is a block diagram of a real-time displacement feedback system for a micro device according to the present invention;
FIG. 2 is a schematic diagram of the position relationship between the magnet and the Hall sensor according to the present invention;
FIG. 3 is a schematic diagram of the position of the Hall sensor of the present invention on the X-axis;
FIG. 4 is a graph showing the relationship between the position of the Hall sensor and the detected magnetic induction intensity;
FIG. 5 is a flowchart illustrating the overall operation of the algorithm according to the present invention;
fig. 6 is a flow chart of a real-time displacement feedback method of a micro device according to the present invention.
[ detailed description ] embodiments
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1, fig. 1 is a block diagram of a real-time displacement feedback system of a micro device according to the present invention. The present invention provides a real-time displacement feedback system 100 for a micro device (not shown) that includes a reciprocally movable moving member. The real-time displacement feedback system 100 of the micro device generally includes a magnet 1, a plurality of hall sensors 2, and a control chip 3.
Wherein the magnet 1 is disposed on the moving member and reciprocally vibrates with the moving member, and the magnet 1 is used to generate a magnetic field. In this embodiment, the magnet 1 may be a separate component fixed to the moving component; of course, in other embodiments, the magnet 1 may be part of the moving part, for example, a magnet with a voice coil motor or a vibration motor. Wherein the magnet is a permanent magnet.
The plurality of hall sensors 2 are set according to a predetermined position parameter, that is, each hall sensor 2 has one of the position parameters determined by itself. The hall sensor 2 can be used for detecting and outputting a plurality of voltage values U generated by the magnet 1 correspondingly at the position of each hall sensor 2H. In a preferred embodiment of the present invention, the plurality of hall sensors 2 are arranged in a spaced array in the same direction and fixed in position with respect to each other.
Referring to fig. 2, fig. 2 is a schematic diagram illustrating a positional relationship between a magnet and a hall sensor according to the present invention. The micro device further comprises a spacer spaced from the moving partThe Hall sensor 2 can be arranged on the shell 4 at intervals along the moving direction of the moving component, and the magnet 1 is positioned above the Hall sensor 2 and reciprocates along the moving direction of the moving component. Therefore, each hall sensor 2 can sense the voltage U corresponding to the magnetic induction generated by the magnet 1 at the position thereofH(ii) a As the distance between the hall sensor 2 and the magnet 1 changes, the voltage value changes accordingly. In an embodiment, the magnet 1 has a cambered surface 10 protruding towards the housing 4, so that the cambered surface 10 faces the hall sensor 2, thereby improving the detection accuracy of the displacement feedback system. Of course, in other embodiments, the magnet 1 may be rectangular, i.e. its direction towards the housing 4 is parallel to the plane of the housing.
The hall sensor 2 comprises a sensitive unit 20 for detecting magnetic induction, and the sensitive unit 20 is formed by a semiconductor sheet. The hall sensor 2 can be integrated on the control chip 3.
The control chip 3 may be an ASIC chip, and includes a multiplexer 30 connected to each hall sensor 2, and a preamplifier 31, an analog-to-digital converter 32, a digital processor 33, and a digital-to-analog converter 34 connected to the multiplexer 30 in series. The multiplexer 30 is used for connecting a plurality of the hall sensors 2 and receiving the voltage value U output by each hall sensor 2H. The analog-to-digital converter 32 and the digital-to-analog converter 34 are used for converting an analog signal into a digital signal and converting a digital signal into an analog signal, respectively. The digital processor 33 is used for processing the digital signal converted by the analog-to-digital converter 32, and the digital processor 33 stores an operation method comprising a step of calculating according to a voltage value UHCalculating a Hall effect formula of the magnetic induction B, a data fitting polynomial function and the like.
The control chip 3 is electrically connected with the plurality of Hall sensors 2 and is used for receiving the voltage value UHAnd according to the voltage value UHCalculating the real-time position information of the magnet 1 according to the position parameters. In particular, according to the Hall-effect formula UHCalculating a plurality of voltage values UHAnd the corresponding magnetic induction intensity value B, where K is a hall coefficient of the sensing unit 20, d is a thickness of the sensing unit 20, and I is a current density flowing through the sensing unit 20.
And fitting the position parameters of each hall sensor 2 with the magnetic induction intensity value B calculated by means of a hall effect formula in a data fitting manner to obtain a position relational expression (in the embodiment, a polynomial function) of the magnetic induction intensity value B and the hall sensor 2, and calculating according to the relational expression to obtain position information of the magnet 1 when the magnetic induction intensity value B is maximum, wherein the position information is real-time position information of the magnet 1.
For a more detailed explanation of the present invention, it is assumed that the number of the hall sensors 2 is five, and five hall sensors 2 are arrayed in the X direction. The magnet 1 is reciprocally vibrated in the X direction, and magnetic induction values B1, B2, B3, B4, and B5 at five positions are sensed by the five hall sensors 2. Since the positions of the five hall sensors 2 are relatively unchanged, the magnetic induction intensity sensed by the hall sensor 2 closest to the center point of the magnet 1 is the largest.
Referring to fig. 3 and 5 together, fig. 3 is a schematic diagram of the position of the hall sensor on the X-axis according to the present invention, and fig. 5 is a flowchart of the overall operation of the algorithm according to the present invention. An X coordinate axis is established according to the arrangement direction of the five Hall sensors 2, and the first Hall sensor 2, the second Hall sensor 2, the third Hall sensor 2, the fourth Hall sensor 2 and the fifth Hall sensor 2 are arranged in sequence along the X direction. The position of the third hall sensor 2 is defined as a zero coordinate point, that is, X3 is 0mm, the distance between the second hall sensor 2 and the third hall sensor 2 is X2-0.5 mm, and so on, X1 is-1.0 mm, X4 is 0.5mm, and X5 is 1.0 mm.
Based on the magnetic induction intensity values B acquired by the five hall sensors 2 and the respective position parameters, five data points (Xi, Bi) can be obtained, where i is 1,2,3,4,5. Using the polynomial formula Y ═ a + bX + cX2+dX3+eX4Fitting a relational expression of the displacement X and the magnetic induction intensity value B: b ═ a + bX + cX2+dX3+eX4。
Then according to the above relation B ═ a + bX + cX2+dX3+eX4And calculating the position corresponding to the maximum position of the magnetic induction intensity value B. Specifically, as shown in fig. 4, fig. 4 is a graph showing a relationship between a position of the hall sensor and a detected magnetic induction intensity. In fig. 4, a four-time curve is obtained by fitting five (X, B) data, and the curve can obtain the maximum magnetic induction intensity value B and the corresponding position S.
The above is given with an example of five hall sensor detections, however, according to other embodiments of the invention, 2, 3, 4 or more sensors may be provided; the polynomial fit to this is a polynomial of order n-1 (where n is the number of hall sensors). It can be understood that the greater the number of hall sensors, the higher the detection accuracy thereof.
Referring to fig. 6, fig. 6 is a flowchart illustrating a real-time displacement feedback method of a micro device according to the present invention. The real-time displacement feedback method of the micro device is applied to the real-time displacement feedback system 100 of the micro device, and comprises the following steps:
s1, the hall sensors 2 detect and output a plurality of voltage values U generated by the magnet 1 at the positions of the hall sensors 2H；
S2, the control chip 3 receives the voltage value UHCalculating each voltage value U according to a Hall effect formulaHCorresponding magnetic induction intensity value B;
s3, obtaining a function formula of the magnetic induction intensity value B and the position parameter of the Hall sensor 2 according to the position parameter and the magnetic induction intensity value B by adopting a data fitting mode;
s4, calculating according to the function formula to obtain real-time position information of the magnet 1 when the magnetic induction intensity value B is maximum;
and S5, outputting the real-time position information.
Wherein, in the step S2, the Hall effect formula is UHK × IB/d; wherein, UHThe voltage value detected by the hall sensor 2 in the step S1; k is the hall coefficient of the sensing unit 20; i is the current density flowing through the sensing unit 20; b is a magnetic induction intensity value; d is the thickness of the sensitive unit 20.
Compared with the prior art, the real-time displacement feedback system 100 and the feedback method thereof of the micro device provided by the invention have the advantages that the displacement information of the magnet 1 can be directly fed back to the application end in real time through the Hall sensor array and the control chip 3, so that the accurate control of the displacement is directly realized; the displacement information of the magnet 1 can be directly output, the control precision of the displacement is irrelevant to the assembly position of the magnet 1, the demagnetization of the magnet 1 has no influence on the displacement information, and the magnet does not need to be calibrated before use.
While the foregoing is directed to embodiments of the present invention, it will be understood by those skilled in the art that various changes may be made without departing from the spirit and scope of the invention.
Claims (9)
1. A real-time displacement feedback system for a micro device, the micro device including a reciprocally movable moving part, the feedback system comprising:
a magnet disposed on the moving member;
the Hall sensors are arranged according to preset position parameters and are used for detecting and outputting a plurality of voltage values correspondingly generated by the magnet at the positions of the Hall sensors;
the control chip is electrically connected with the Hall sensors and is used for receiving the voltage values and calculating the real-time position information of the magnet according to the voltage values and the position parameters;
the control chip comprises a multiplexer connected with each Hall sensor, and a preamplifier, an analog-to-digital converter, a digital processor and a digital-to-analog converter which are sequentially connected with the multiplexer in series;
the digital processor is internally stored with an operation method which comprises a Hall effect formula used for calculating the magnetic induction intensity according to the voltage value, a data fitting polynomial function,
wherein the data fitting polynomial function is established in the following manner: and fitting the position parameters of the Hall sensors with the magnetic induction intensity values calculated by means of a Hall effect formula in a data fitting manner to obtain a position relation formula of the magnetic induction intensity values and the Hall sensors.
2. The real-time displacement feedback system of a micro device according to claim 1, further comprising a housing spaced from the moving part; the plurality of Hall sensors are arranged on the shell at intervals along the moving direction of the moving component.
3. The real-time displacement feedback system of a micro device according to claim 2, wherein the magnet has a curved surface protruding toward the housing.
4. The real-time displacement feedback system of a micro device according to claim 1, wherein the hall sensor comprises a sensing unit for detecting magnetic induction, and the sensing unit is formed by a semiconductor thin sheet.
5. The real-time displacement feedback system of the micro device as claimed in claim 4, wherein the sensing unit is integrated with the control chip.
6. A real-time displacement feedback method of a micro device, wherein the feedback method is applied to a real-time displacement feedback system of a micro device according to any one of claims 1 to 5; the feedback method comprises the following steps:
s1, detecting and outputting a plurality of voltage values generated by the magnet at the positions of the Hall sensors by the Hall sensors;
s2, the control chip receives the voltage values and calculates the magnetic induction intensity value corresponding to each voltage value according to a Hall effect formula;
s3, fitting by adopting a data fitting mode to obtain a function formula of the magnetic induction intensity value and the position parameter of the Hall sensor;
s4, calculating according to the function formula to obtain real-time position information of the magnet when the magnetic induction intensity value is maximum;
and S5, outputting the real-time position information.
7. The method of claim 6, wherein the micro device further comprises a housing spaced apart from the moving part; the plurality of Hall sensors are arranged on the shell at intervals along the moving direction of the moving component.
8. The real-time displacement feedback method of a micro device according to claim 7, wherein the magnet has a curved surface protruding toward the housing.
9. The real-time displacement feedback method of the micro device as claimed in claim 6, wherein the hall sensor comprises a sensing unit for detecting magnetic induction intensity, the sensing unit is composed of a semiconductor thin sheet;
in the step S2, the hall effect formula is UHK × IB/d; wherein, UHThe voltage value detected by the hall sensor in the step S1; k is the Hall coefficient of the sensitive unit; i is the current density flowing through the sensitive unit; b is a magnetic induction intensity value; d is the thickness of the sensitive unit.
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| CN110324455B (en) * | 2018-03-31 | 2021-01-29 | Oppo广东移动通信有限公司 | Electronic device and control method of electronic device |
| CN111272053A (en) * | 2020-03-04 | 2020-06-12 | 西安长峰机电研究所 | Self-adaptive displacement detection device and method based on planar magnetic induction sensor |
| CN111486779B (en) * | 2020-04-14 | 2022-08-16 | 瑞声科技(新加坡)有限公司 | Signal processing method and device and electronic equipment |
| CN112190463A (en) * | 2020-09-15 | 2021-01-08 | 上海钧控机器人有限公司 | Moxa stick propeller, moxa head and moxa stick combustion length measuring and calculating method |
| CN112748385A (en) * | 2020-12-29 | 2021-05-04 | 山东省科学院海洋仪器仪表研究所 | Calibration device and method for bivalve aquatic organism behavior monitoring sensing probe |
| CN113418440A (en) * | 2021-08-05 | 2021-09-21 | 重庆编福科技有限公司 | Non-contact position detection method |
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| JP3477837B2 (en) * | 1994-08-05 | 2003-12-10 | 住友電気工業株式会社 | Magnet position measurement method |
| JP5051918B2 (en) * | 2006-04-27 | 2012-10-17 | 旭化成エレクトロニクス株式会社 | Position detection apparatus and position detection method |
| JP4853496B2 (en) * | 2007-07-30 | 2012-01-11 | 株式会社デンソー | Position detection sensor |
| JP5212226B2 (en) * | 2009-03-31 | 2013-06-19 | 富士通モバイルコミュニケーションズ株式会社 | Electronics |
| CN102878916B (en) * | 2012-08-30 | 2015-01-21 | 杨会峰 | Device and method for measuring long stroke displacement based on Hall effect |
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| 小型霍尔位移传感器及多路变换器;张淑美;魏俊英;《中国工程物理研究院科技年报（1999）》;19991231;218-219 * |
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