CN111272053A - Self-adaptive displacement detection device and method based on planar magnetic induction sensor - Google Patents
Self-adaptive displacement detection device and method based on planar magnetic induction sensor Download PDFInfo
- Publication number
- CN111272053A CN111272053A CN202010144244.2A CN202010144244A CN111272053A CN 111272053 A CN111272053 A CN 111272053A CN 202010144244 A CN202010144244 A CN 202010144244A CN 111272053 A CN111272053 A CN 111272053A
- Authority
- CN
- China
- Prior art keywords
- planar magnetic
- sensor
- magnetic displacement
- plane
- planar
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/004—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points
Abstract
The invention provides a self-adaptive displacement detection device and a self-adaptive displacement detection method based on a planar magnetic induction sensor, wherein a permanent magnet is fixedly connected to a measured object; one group of planar magnetic displacement sensors are positioned above the center of the active area of the object to be measured, or a plurality of groups of planar magnetic displacement sensors are uniformly distributed in the same plane above the active area of the object to be measured; each group of the planar magnetic displacement sensors is formed by two planar magnetic displacement sensors which are vertically arranged on a horizontal plane, and the two planar magnetic displacement sensors in each group of the planar magnetic displacement sensors have the same position relation; when the measured object moves, each group of planar magnetic displacement sensors respectively collects magnetic fields in two directions perpendicular to each other on the moving plane of the measured object, the planar magnetic displacement sensor with the strongest output signal in each direction is selected, and the coordinate value of the measured object in the direction of the planar magnetic displacement sensor is obtained through conversion according to the output signal of the planar magnetic displacement sensor. The invention has the characteristics of high sensitivity and fast frequency response, and realizes the micro thrust test of the attitude and orbit control engine.
Description
Technical Field
The invention belongs to the technical field of plane displacement track detection, and mainly relates to a plane displacement track detection device for realizing the test of a micro thrust vector of an attitude and orbit control engine under a smoke environment.
Background
In recent years, with the development of domestic solid attitude and orbit control engine technology, the thrust test technology of the solid attitude and orbit control engine is more and more applied. At present, a traditional six-component force testing technology is generally adopted to complete a large thrust test at home, in the field of micro-thrust multi-component force testing, a suspension swing method and a laser interference method under a vacuum environment are adopted, wherein the suspension swing method under the vacuum environment is limited to method research and has no practical application value, and the laser interference method is adopted and mainly aims at an electric thrust test under a smoke-free environment, and a micro-thrust test of a posture control engine ground test under the smoke environment has no relevant test research.
In order to complete the micro thrust test of the attitude and orbit control engine ground test in the smoke environment, an indirect test technology is adopted, and thrust calculation and analysis are completed through plane trajectory displacement. In the field of plane displacement track detection technology, a magnetic sensor is an important part of the technology, in recent years, with the anisotropic magnetoresistance effect of a magnetic film and the high importance of giant magnetoresistance of a ferromagnetic/nonmagnetic metal multilayer structure film in the aspects of basic theory research and application, the thin film magnetoresistance sensor quickly becomes the most active branch of the magnetic sensor technology and is widely applied to the aspects of prospecting, underground drilling, position detection, navigation and the like. The HMC series of anisotropic magnetoresistive sensors produced by Honeywell corporation is a newly developed four-stage bridge type anisotropic magnetoresistive sensor. The anisotropic magnetoresistive sensor measures the linear position (or displacement) and the angular position (or angular displacement) in the geomagnetic field by adopting a method of one-to-one correspondence of output values and magnetic field change values, and has the advantages of low cost, small volume, noise suppression, good reliability and the like. However, a single HMC can only complete displacement detection in a fixed direction, and cannot realize plane trajectory displacement detection in any direction.
Disclosure of Invention
In order to overcome the defects of the prior art, the invention provides a self-adaptive displacement detection device based on a planar magnetic induction sensor, which is used for constructing a saturated magnetic field test environment to avoid the interference of an external magnetic field, and determining the relative coordinate position and the absolute coordinate position of a measured object through the change of a magnetic field signal in the saturated magnetic field, so that the micro thrust is calculated through the displacement track analysis of a measured product.
The technical scheme adopted by the invention for solving the technical problems is as follows: an adaptive displacement detection device based on a planar magnetic induction sensor comprises a signal processor, a permanent magnet and at least one group of planar magnetic displacement sensors. The permanent magnet is fixedly connected to the object to be measured; the group of planar magnetic displacement sensors are positioned above the center of the active area of the object to be measured, or the plurality of groups of planar magnetic displacement sensors are uniformly distributed in the same plane above the active area of the object to be measured; each group of the planar magnetic displacement sensors is formed by two planar magnetic displacement sensors which are vertically arranged on a horizontal plane, and the two planar magnetic displacement sensors in each group of the planar magnetic displacement sensors have the same position relation; when the measured object moves, each group of the planar magnetic displacement sensors respectively collects magnetic fields in two directions which are perpendicular to each other on the moving plane of the measured object, the signal processor selects the planar magnetic displacement sensor with the strongest output signal in each direction, and the coordinate value of the measured object in the direction where the planar magnetic displacement sensor is located is obtained through conversion according to the output signal of the planar magnetic displacement sensor.
The planar magnetic displacement sensor adopts a sensor chip HMC 1512.
The output signal of the sensor chip HMC1512 is amplified by an amplifying circuit to increase the output voltage to 0.8-4.5 VDC.
The planar magnetic displacement sensors are nine groups and form a 3X3 matrix arrangement.
The distance between the plane magnetic displacement sensor and the permanent magnet ensures that the plane magnetic displacement sensor always works in a saturated magnetic field.
The center distance between two adjacent groups of the planar magnetic displacement sensors is 30 mm; the distance between the upper surface of the permanent magnet and the installation plane of the planar magnetic displacement sensor is 5 mm.
The invention also provides a self-adaptive displacement detection method based on the device, which comprises the following steps: setting an X axis and a Y axis which are vertical to each other on a motion plane of a measured object; the maximum value is selected from the received output voltages of the planar magnetic displacement sensors in the X direction, and the sum of Vs sin (2 theta) is obtained according to the formula V
Calculating the current position Lx of the permanent magnet on the X axis, wherein V represents the output voltage of the plane magnetic displacement sensor, Vs represents the reference voltage of the plane magnetic displacement sensor, theta represents the included angle between the permanent magnet and the plane magnetic displacement sensor, and S represents the distance between the upper surface of the permanent magnet and the chip mounting plane; and repeating the steps, calculating the current position Ly of the permanent magnet on the Y axis, and finally determining the position of the measured object.
The invention has the beneficial effects that: the developed high-precision planar magnetic sensor component has the technical characteristics of high sensitivity and fast frequency response, and by taking the technology as a core, a planar magnetic induction sensor self-adaptive following displacement detection device is constructed, a 0.1-50N zero-rigidity and small-air-resistance floating non-contact indirect test system is realized, the technical problem of planar displacement track detection under the condition that smoke ejectors of an attitude and orbit control engine interfere with the environment is solved, the micro-thrust test of the attitude and orbit control engine is realized, and the technical index that the uncertainty of the test system is not more than 1.9 percent Fscal is met. The invention avoids the interference of an external magnetic field through a saturated magnetic field testing environment established by an external magnet fixedly connected with a tested product, determines the relative coordinate position and the absolute coordinate position of the tested product through the change of a magnetic field signal in the saturated magnetic field, acquires and records a space coordinate position signal of the tested product body through a high-speed acquisition system in real time, acquires a displacement and time motion trajectory curve of the tested product, and analyzes and calculates a micro thrust vector according to a determined analytical algorithm according to a calibration curve of the displacement and dynamic force.
At present, no relevant research is available in China. The invention not only carries out the research of a test method, but also designs the self-adaptive displacement detection device based on the plane magnetic induction sensor assembly, can quickly realize the plane displacement track detection of the product in real time, and carries out test verification through an attitude and orbit control engine to obtain accurate thrust vector data. The invention has great military significance and wide application prospect. By the design technology and the calibration method of the self-adaptive following displacement detection device based on the planar magnetic sensor, the attitude and orbit control engine micro-thrust multi-component testing method can be formed, and the blank in the technical field of solid attitude and orbit control engine micro-thrust multi-component testing under the condition of smoke jet interference environment in China is filled.
Drawings
FIG. 1 is a plan magnetic sensor block diagram;
FIG. 2 is a schematic block diagram of a core acquisition card signal conditioning circuit;
FIG. 3 is a block diagram of a planar magnetic sensor according to an embodiment;
FIG. 4 is a schematic view of the positional relationship of a magnet and a magnetic sensor;
FIG. 5 is a graph of voltage output versus magnet distance for the D, E, F three chips of FIG. 3;
fig. 6 is a graph of the motion trajectory of a product detected by the planar magnetic induction sensor assembly adaptive displacement detection device in a certain product test.
Detailed Description
The present invention will be further described with reference to the following drawings and examples, which include, but are not limited to, the following examples.
In order to solve the problem of plane track displacement detection in any direction and complete the micro-thrust multi-component force test of the attitude and orbit control engine in a smoke environment, the invention discloses a self-adaptive displacement detection device based on a plane magnetic sensor, which selects an HMC1512 device of the Honeyville company, designs a set of high-precision plane magnetic sensor components, collects each signal output of the magnetic sensor after a magnetic target (integrated with a tested product) enters a saturated magnetic field range constructed by the magnetic sensor components, calls a related algorithm to calculate the relative position and the absolute position of the target, and is used for indirectly measuring the micro-thrust multi-component force of the attitude and orbit control engine in a 0.1N-50N non-contact indirect test system air flotation environment.
The invention provides a self-adaptive following displacement detection device based on a planar magnetic induction sensor, which consists of a shell, a planar magnetic displacement sensor and a DSP core acquisition card.
The permanent magnet is fixed on a measured object, the self-adaptive following displacement detection device based on the planar magnetic induction sensor carries out displacement test on the measured object through a constructed saturated magnetic field, and when the measured object moves, the device can judge the position of the current measured object according to the acquired maximum magnetic field signal and carries out real-time tracking.
The material used for the structure of the shell needs to be non-magnetic material. The magnetic sensor shell is made of aluminum alloy, and the internal chip mounting plate, the positioning block and the whole structure are made of non-magnetic materials, so that the influence on the magnetic flux of the magnetic field is reduced. The bottom of the sensor is provided with a protective cover to achieve the dustproof purpose.
The planar magnetic displacement sensors HMC1512 are arranged in an array of 18 in groups of 2. Three groups of magnetoresistive sensor chips are designed in the X-axis direction, and each group comprises three magnetoresistive sensor chips; three groups of magnetoresistive sensor chips are designed in the Y-axis direction, each group comprises three magnetoresistive sensor chips, and the center distance is 30 mm. The structure of a planar magnetic sensor is shown in fig. 1.
The output voltage range of the magnetic sensor chip HMC1512 is + -40 mV, which is too small to be swamped by the interference signal and its spurious signals. It is necessary to add an amplifying circuit to the signal. The output voltage value of the HMC1512 is increased to 0.8-4.5 VDC through the amplifying circuit, and the generation of interference is greatly restrained.
The planar magnetic displacement sensor can be a 1X1 array, a 2X2 array arrangement, a 3X3 array and other array modes according to practical test requirements. However, the 18 magnetic sensors are arranged in a 3X3 array mode to achieve the best effect in combination with the requirements of test accuracy and cost.
The DSP system is loaded with an acquisition module, an algorithm module and a communication module. The acquisition module is responsible for receiving all voltage outputs and filtering the output voltage; and the algorithm module calculates the current position of the magnet according to the voltage value of each module. The communication module is responsible for sending the result of the algorithm module to the motion controller through the serial port and controlling the motor to act; and simultaneously, the voltage signals of all the chips are sent to a data acquisition system for display.
The DSP core acquisition card is used for acquiring voltage output signals of the magnetic sensor chip, calculating displacement signals of the product by applying a BP (back propagation) neuron algorithm through signal conditioning and A/D (analog to digital) conversion, and transmitting the displacement signals to the follow-up controller through the Ethernet to finish real-time follow-up of the motion trail of the product. When a magnetic field is applied to the sensor, all of the HMCs 1512 have a voltage output, and the core acquisition card principle is shown in FIG. 2.
Fig. 2 is a sensor signal conditioning circuit, and it is assumed that different outputs of 9 sensors in the X direction are received and connected to a multiplexer, the multiplexer selects according to the output voltages of 9 HMC1512 chips, selects the maximum value of the output voltage each time, and then enters a signal processor through a differential amplifier and an a/D converter, and the signal processor performs position calculation according to the current input parameters in the X direction, and outputs a specific position signal in the X axis.
The voltage output of each HMC1512 chip is related to the position of the magnet distance by:
V＝Vs·sin(2θ)………………………………………………(1)
wherein V represents the output voltage of the chip; vs represents the reference voltage of the chip, and takes 5 VDC; theta represents the included angle between the magnet and the chip; lx represents the current position of the magnet on the X-axis; s represents the distance between the magnet movement plane and the chip mounting plane, and is 5 mm.
Therefore, when the output voltage value of the chip in the X direction is received, the position of the magnet on the X axis can be obtained.
Similarly, the outputs of the 9Y sensors are also fed to the signal processor via a multiplexer, a differential amplifier and an a/D converter, and the position of the magnet on the Y-axis can be obtained by means of magnetic sensors arranged on the Y-axis.
The core acquisition card is developed based on a DSP chip, 32-bit floating point DSP, and the main frequency is 150 MHz. 24 paths of 16-bit AD inputs are designed, 18 paths of magnetoresistive sensor chip signal inputs can be accessed, and allowance is reserved. The collection frequency is 1 KHZ. The output voltage of the magnetic sensor chip is 0.8-4.5V, the collection channel is considered according to the voltage value of-10V to + 10V, and the first bit is removed as a sign bit.
The embodiment of the invention relates to a self-adaptive displacement detection device based on a planar magnetic sensor in a 0.1N-50N multi-component non-contact indirect test system, which comprises a shell, the planar magnetic sensor and a TMS320F28335DSP core acquisition card. In the present embodiment, there are 18 planar magnetic sensors, and the planar magnetic sensor arrangement is shown in fig. 3.
An OXY coordinate system is established on the planar magnetic sensor as shown in fig. 3. The origin of coordinates O is at the geometric center of the device. The planar magnetic sensor is divided into 16 areas according to the characteristic value output by the chip, and the coordinate of each area is determined. Taking region number 10 as an example, the coordinate points of the four boundaries are: (0,0),(30,0),(0, 30),(30, 30).
When the tested object moves, the device firstly judges which region the magnet (arranged on the tested object) is in at present according to the characteristic value in the logic layer, and then calls an algorithm to calculate the relative coordinates △ Lx and △ Ly of the magnet in the region.
The HMC1512 must apply a magnetic field of at least 80 gauss across the bridge to achieve accurate output due to the magnetic sensor chip. Therefore, the sensor must be ensured to work in a saturated magnetic field, and the magnetic induction intensity at the magnetic resistance sensor needs to be more than 80 GS; the magnet is integrated with the product to be tested, 5mm below the magnetic sensor assembly, and the relationship is shown in fig. 4. The magnet can be selected according to the following formula.
Wherein, B0Magnetic induction at the magnetic sensor B for magnet inductionxThe strength is more than or equal to 80Gs, the distance between the magnet and the magnetic sensing piece is 5mm, and L is the height of the magnet;
and the magnetic induction intensity of the magnet is required to be more than 1220 gauss when the height of the magnet is 15mm by substituting the formula, so that the magnetic sensor can work in a saturated magnetic field environment.
The example is satisfied by selecting a Ru magnet with a diameter of 6mm and a height of 15mm according to the above calculation.
The absolute coordinates of the magnet in the entire planar magnetic sensor are:
Lx＝Lx0+△Lx………………………………………(3)
Ly＝Ly0+△Ly……………………………………(4)
here, Lx0 and Ly0 are boundary coordinates of the region where the magnet is located.
By the optimization algorithm, the calculation period of each algorithm of the DSP system is less than 1 ms.
For the calculation of the relative coordinates △ Lx, △ Ly, a method of piecewise calculation is adopted, since the calculation methods of △ Lx, △ Ly are consistent, the calculation of △ Lx is taken as an example, and one line is taken for analysis as follows.
When the magnet passes through zones 43, 40, 10 and 13 in turn along the X-axis, the voltage output waveforms of D, E, F three chips are shown in fig. 5 as the position of the X-axis changes.
As shown in fig. 5, the vertical axis represents the output voltage (V) of the HMC1512 chip in the X direction, and the horizontal axis represents the position (Lx) of the magnet. Line 1 is the voltage output of chip D, line 2 is the voltage output of chip E, and line 3 is the voltage output of chip F. The three dividing lines i, ii, iii divide the pattern into four parts, corresponding to the areas 43, 40, 10 and 13 of the magnetic sensor plane, respectively. The middle ii-division line passes through the origin of coordinates, and its horizontal axis Lx is 0.
When the magnet passes through the 43 zones, the voltage output change of the chip D satisfies V ═ Vs · sin (2 theta);
when the magnet passes through the 40 zones, the voltage output changes of the rear half part of the chip D and the front half part of the chip E satisfy Vs sin (2 theta);
when the magnet passes through 10 zones, the voltage output changes of the rear half part of the chip E and the front half part of the chip F satisfy Vs sin (2 theta);
when the magnet passes through the 13 zones, the voltage output change of the chip F satisfies V ═ Vs · sin (2 θ).
The calculation method of the 10 regions △ Lx, △ Ly is as follows:
the voltage waveform in region 10 is divided into three regions A, B, C, the conditions for the division are:
a section A is defined from the left boundary II to UEmin, and a section C is defined from the right boundary III to UFmax, and in the section 2, the relation between the voltage and the coordinate axis satisfies the formulas (1) and (2).
Solving the formula can obtain:
in section A, △ Lx is the distance of the magnet from the dividing line II, and in section C, △ Lx is the distance of the magnet from the dividing line III.
Segment A, Lx ═ Lx0+ △ Lx ═ 0+ △ Lx ═ △ Lx … … … … … … … … … (6)
Segment C, Lx ═ Lx0+ △ Lx ═ 30- △ Lx … … … … … … … … … (7)
The section B is in the area of Uemin and UFmax, the total length of the area is approximately equal to 3mm, and a relation of △ Lx being BP (UE, UF) is established in the area by adopting a BP neuron method.
In section B, △ Lx is the distance of the magnet from the dividing line ii, and its absolute coordinates are:
Lx＝Lx0+△Lx＝0+△Lx＝△Lx…………………………………(8)
thus, when the magnet is located in the 10-zone, the abscissa Lx of the magnet can be obtained from the values of UD, UE, UF.
The ordinate Ly in the region 10 is then derived from the voltages UM, UQ, UT of the chip M, Q, T.
Fig. 6 is a graph of the motion trajectory of a product detected by the planar magnetic induction sensor assembly adaptive displacement detection device in a certain product test.
Claims (7)
1. The utility model provides an adaptive displacement detection device based on plane magnetic induction sensor, includes signal processor, a permanent magnet and at least a set of plane magnetic displacement sensor, its characterized in that: the permanent magnet is fixedly connected to the object to be measured; the group of planar magnetic displacement sensors are positioned above the center of the active area of the object to be measured, or the plurality of groups of planar magnetic displacement sensors are uniformly distributed in the same plane above the active area of the object to be measured; each group of the planar magnetic displacement sensors is formed by two planar magnetic displacement sensors which are vertically arranged on a horizontal plane, and the two planar magnetic displacement sensors in each group of the planar magnetic displacement sensors have the same position relation; when the measured object moves, each group of the planar magnetic displacement sensors respectively collects magnetic fields in two directions which are perpendicular to each other on the moving plane of the measured object, the signal processor selects the planar magnetic displacement sensor with the strongest output signal in each direction, and the coordinate value of the measured object in the direction where the planar magnetic displacement sensor is located is obtained through conversion according to the output signal of the planar magnetic displacement sensor.
2. The adaptive displacement detection device based on planar magnetic induction sensors according to claim 1, characterized in that: the planar magnetic displacement sensor adopts a sensor chip HMC 1512.
3. The adaptive displacement detection device based on planar magnetic induction sensors according to claim 2, characterized in that: the output signal of the sensor chip HMC1512 is amplified by an amplifying circuit to increase the output voltage to 0.8-4.5 VDC.
4. The adaptive displacement detection device based on planar magnetic induction sensors according to claim 1, characterized in that: the planar magnetic displacement sensors are nine groups and form a 3X3 matrix arrangement.
5. The adaptive displacement detection device based on planar magnetic induction sensors according to claim 1, characterized in that: the distance between the plane magnetic displacement sensor and the permanent magnet ensures that the plane magnetic displacement sensor always works in a saturated magnetic field.
6. The adaptive displacement detection device based on planar magnetic induction sensors according to claim 1, characterized in that: the center distance between two adjacent groups of the planar magnetic displacement sensors is 30 mm; the distance between the upper surface of the permanent magnet and the installation plane of the planar magnetic displacement sensor is 5 mm.
7. The adaptive displacement detection method based on planar magnetic induction sensor according to claim 1, which utilizes the device of claim 1, characterized by comprising the following steps: setting an X axis and a Y axis which are vertical to each other on a motion plane of a measured object; the maximum value is selected from the received output voltages of the planar magnetic displacement sensors in the X direction, and the sum of Vs sin (2 theta) is obtained according to the formula V
Calculating the current position Lx of the permanent magnet on the X axis, wherein V represents the output voltage of the plane magnetic displacement sensor, Vs represents the reference voltage of the plane magnetic displacement sensor, theta represents the included angle between the permanent magnet and the plane magnetic displacement sensor, and S represents the distance between the upper surface of the permanent magnet and the chip mounting plane; and repeating the steps, calculating the current position Ly of the permanent magnet on the Y axis, and finally determining the position of the measured object.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010144244.2A CN111272053A (en) | 2020-03-04 | 2020-03-04 | Self-adaptive displacement detection device and method based on planar magnetic induction sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010144244.2A CN111272053A (en) | 2020-03-04 | 2020-03-04 | Self-adaptive displacement detection device and method based on planar magnetic induction sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN111272053A true CN111272053A (en) | 2020-06-12 |
Family
ID=71003802
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010144244.2A Pending CN111272053A (en) | 2020-03-04 | 2020-03-04 | Self-adaptive displacement detection device and method based on planar magnetic induction sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN111272053A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111750904A (en) * | 2020-07-08 | 2020-10-09 | 南京航空航天大学 | Long-stroke position detection device and method |
| CN111830903A (en) * | 2020-06-16 | 2020-10-27 | 天津大学 | Absolute zero sensor applied to linear displacement table and positioning method |
| CN114739277A (en) * | 2022-04-28 | 2022-07-12 | 重庆理工大学 | Planar magnetic resistance type two-dimensional displacement sensor |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20150285611A1 (en) * | 2013-04-26 | 2015-10-08 | Andrew D. Lowery | Near-field magnetic object tracking |
| CN106949822A (en) * | 2017-01-24 | 2017-07-14 | 瑞声科技(新加坡)有限公司 | The real-time displacement reponse system and its feedback method of microdevice |
| CN107621220A (en) * | 2017-08-03 | 2018-01-23 | 大连理工大学 | A kind of space geometry scaling method of eddy current displacement sensor display |
| DE102017202835A1 (en) * | 2017-02-22 | 2018-08-23 | Festo Ag & Co. Kg | Sensor element and sensor device |
| CN109916287A (en) * | 2019-01-30 | 2019-06-21 | 西安维控自动化科技有限公司 | A kind of in-plane displancement sensor, displacement detecting method and system based on magnetic induction |
-
2020
- 2020-03-04 CN CN202010144244.2A patent/CN111272053A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20150285611A1 (en) * | 2013-04-26 | 2015-10-08 | Andrew D. Lowery | Near-field magnetic object tracking |
| CN106949822A (en) * | 2017-01-24 | 2017-07-14 | 瑞声科技(新加坡)有限公司 | The real-time displacement reponse system and its feedback method of microdevice |
| DE102017202835A1 (en) * | 2017-02-22 | 2018-08-23 | Festo Ag & Co. Kg | Sensor element and sensor device |
| CN107621220A (en) * | 2017-08-03 | 2018-01-23 | 大连理工大学 | A kind of space geometry scaling method of eddy current displacement sensor display |
| CN109916287A (en) * | 2019-01-30 | 2019-06-21 | 西安维控自动化科技有限公司 | A kind of in-plane displancement sensor, displacement detecting method and system based on magnetic induction |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111830903A (en) * | 2020-06-16 | 2020-10-27 | 天津大学 | Absolute zero sensor applied to linear displacement table and positioning method |
| CN111750904A (en) * | 2020-07-08 | 2020-10-09 | 南京航空航天大学 | Long-stroke position detection device and method |
| CN114739277A (en) * | 2022-04-28 | 2022-07-12 | 重庆理工大学 | Planar magnetic resistance type two-dimensional displacement sensor |
| CN114739277B (en) * | 2022-04-28 | 2023-06-09 | 重庆理工大学 | Plane magnetic resistance type two-dimensional displacement sensor |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN111272053A (en) | Self-adaptive displacement detection device and method based on planar magnetic induction sensor | |
| CN103115593B (en) | Scanning test head calibrating method | |
| CN103267520B (en) | A kind of three axle digital compasses | |
| CN103995048B (en) | Steel wire rope Magnetic Memory on-line measuring device | |
| CN109883450B (en) | Method for positioning magnetic marker of detector in buried steel pipeline | |
| CN205066775U (en) | High accuracy movement track detection device | |
| CN104535062A (en) | Movable type location method based on magnetic gradient tensor and geomagnetic vector measurement | |
| CN108267701A (en) | A kind of environment magnetic disturbance Active Compensation system for magnetic field reproduction coil | |
| CN106643792A (en) | Inertial measurement unit and geomagnetic sensor integrated calibration apparatus and calibration method | |
| CN111398649A (en) | TMR array based on DSP open-close type flexible detector for measuring large current | |
| CN104834021A (en) | Method for calculating sensitivity of geomagnetic sensor | |
| CN103323795A (en) | Integrated three-axis magnetic sensor | |
| CN103645369A (en) | Current sensing apparatus | |
| CN109324298B (en) | Magnetic source magnetic field signal detection method based on detection array motion planning | |
| CN103308039B (en) | A kind of Digital Magnetic Compass and compensation for calibrating errors method, system | |
| CN207007092U (en) | A kind of magneto-resistor linear position sensor | |
| CN109459711A (en) | A kind of underwater high-precision magnetic field measurement system | |
| CN207440306U (en) | A kind of buried abandoned well detection device | |
| CN105737793B (en) | Rolling angle measurement unit and measuring method | |
| US2400552A (en) | Range finder | |
| CN103575295B (en) | A kind of inertial element magnetic-field sensitivity measuring system | |
| CN109725361A (en) | A kind of locating magnetic objects method based on magnetic gradient tensor invariant | |
| CN116736199A (en) | Space static magnetic field distribution measurement system and method | |
| CN211180162U (en) | Wide-range vertical sensitive magnetic sensor with feedback on closed-loop core | |
| CN203011938U (en) | Target direction-finding velocity-measuring system based on quadrature static detection array |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20200612 |
|
| RJ01 | Rejection of invention patent application after publication |