CN106940386A - A kind of sensing module and accelerometer - Google Patents
A kind of sensing module and accelerometer Download PDFInfo
- Publication number
- CN106940386A CN106940386A CN201710124433.1A CN201710124433A CN106940386A CN 106940386 A CN106940386 A CN 106940386A CN 201710124433 A CN201710124433 A CN 201710124433A CN 106940386 A CN106940386 A CN 106940386A
- Authority
- CN
- China
- Prior art keywords
- sensing module
- sensing
- accelerometer
- cantilever beam
- pedestal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Pressure Sensors (AREA)
Abstract
The invention discloses a kind of sensing module and accelerometer, the sensing module includes：Pedestal；At least one sensing unit, is arranged at the surface of the pedestal, wherein, the sensing unit is spin electric device；Cantilever beam, the first end of the cantilever beam is connected with the pedestal, and the second end of the cantilever beam is vacantly set；At least one sensitive media, is arranged at the second end of the cantilever beam.The sensing module that one embodiment of the present of invention is provided utilizes the high sensitivity of spin electric device, greatly improves sensitivity and the precision of sensing module, and reduce the volume of sensing module.
Description
Technical field
The present invention relates to accelerometer technical field, more particularly to a kind of sensing module and accelerometer.
Background technology
Conventional resonance formula sensing module is Micromachined Inertial Devices, using resonant element as sensing element, its groundwork
Principle be the force-frequency effect using the beam that shakes by the vibration of harmonic oscillator, so as to detect that resonant frequency variable quantity obtains the acceleration of input
Spend size.
Existing resonance type accelerometer energy storage efficiency is relatively low, antijamming capability is weaker, fail to reach superelevation precision and
The requirement such as sensitivity.
The content of the invention
It is an object of the invention to：For demand of the modern quantum gyroscope to superhigh precision and the accelerometer of sensitivity,
Based on hypersensitivity mtj structure, break through based on the technologies such as the design of resonant vibration type microminiature accelerometer gauge outfit, noise suppressed, hair
A kind of bright microminiature accelerometer with high sensitivity with high-precision potentiality.
In a first aspect, according to one embodiment of present invention there is provided a kind of sensing module, including：
Pedestal；
At least one sensing unit, is arranged at the surface of the pedestal, wherein, the sensing unit is spinning electron device
Part；
Cantilever beam, the first end of the cantilever beam is connected with the pedestal, and the second end of the cantilever beam is vacantly set；
At least one sensitive media, is arranged at the second end of the cantilever beam.
Alternatively, when at least one described sensing unit is N number of, N number of sensing unit differential setting, wherein, N is big
In 1 positive integer.
Alternatively, the sensitive media is high paramagnetic medium.
Alternatively, the sensing unit is giant reluctivity device or tunnel magneto device then.
Second aspect, according to one embodiment of present invention there is provided a kind of accelerometer, including：At least one is above-mentioned
Sensing module.
Alternatively, when sensing module is even number, sensing module is symmetrical arranged with fixed angle.
Alternatively, when the sensing module is 2, the sensing module is symmetrical arranged.
Alternatively, wherein, when the sensing module is 4, the sensing module across is set.
Alternatively, when the sensing module is 8, the sensing module is set into M shape.
Alternatively, the accelerometer also includes：Link, carries the pedestal, to connect external equipment.
Present invention advantage compared with prior art is：
(1) sensing module of the invention utilizes the high sensitivity of spin electric device, greatly improves sensing module
Sensitivity and precision, and reduce the volume of sensing module.
(2) sensing module of the invention is set using electric bridge Differential Detection, and multiple sensitive media points, which are combined, carries out noise suppression
System.
(3) sensitive media of the invention is high paramagnetic medium, and is designed and produced using micro fabrication, extra small to realize
Type, highly integrated accelerometer.
Brief description of the drawings
Technical scheme in order to illustrate more clearly the embodiments of the present invention, below will be to that will make needed for the embodiment of the present invention
Accompanying drawing is briefly described, it should be apparent that, drawings described below is only some embodiments of the present invention, for
For those of ordinary skill in the art, on the premise of not paying creative work, other can also be obtained according to these accompanying drawings
Accompanying drawing.
A kind of structural representation for sensing module that Fig. 1 provides for one embodiment of the invention；
A kind of structural representation for accelerometer that Fig. 2 provides for one embodiment of the invention；
A kind of structural representation for accelerometer that Fig. 3 provides for one embodiment of the invention；
A kind of structural representation for accelerometer that Fig. 4 provides for one embodiment of the invention.
Embodiment
To make the technical scheme of the embodiment of the present invention and becoming apparent from for advantage expression, below by drawings and Examples,
Technical scheme is described in further detail.
The structural representation for a kind of sensing module 100 that Fig. 1 provides for one embodiment of the invention, as shown in figure 1, the biography
Sense module 100 may include：Pedestal 10, sensing unit 20, cantilever beam 30 and at least one sensitive media 40.
At least one sensing unit 20, is arranged at the surface of pedestal 10, wherein, sensing unit 20 is spin electric device.
Alternatively, sensing unit 20 can be giant reluctivity device or tunnel magneto device then.
The first end of cantilever beam 30 is connected with pedestal 10, and the second end of cantilever beam 30 is vacantly set.For example, cantilever beam 30
First end is fixedly connected with pedestal 10, and the second end of cantilever beam 30 is vacantly set, and cantilever beam 30 is with the first end of cantilever beam 30
Freely swing with the tie point of pedestal 10 for axle center.
At least one sensitive media 40 is arranged at the second end of cantilever beam 30.
Alternatively, sensitive media 40 can be high paramagnetic medium.For example, sensitive media 40 can use micro fabrication
(Micro electromechanical system, MEMS) is designed and produced.
Alternatively, when at least one sensing unit 20 is N number of, N number of differential setting of sensing unit 20, wherein, N is more than 1
Positive integer.For example, when N is 2,2 differential settings of sensing unit 20.When N is 4,4 electric bridge differential settings of sensing unit 20,
So that multiple sensitive media points, which are combined, carries out noise suppressed.
The high sensitivity of spin electric device is utilized according to the sensing module of above-mentioned embodiment, sensing is greatly improved
The sensitivity of module and precision, and reduce the volume of sensing module.
A kind of structural representation for accelerometer that Fig. 2 provides for one embodiment of the invention.As shown in Fig. 2 the acceleration
Degree meter 1000 may include：At least one sensing module 100.
Wherein, the sensing module 100 may include：Pedestal 10, sensing unit 20, cantilever beam 30 and at least one sensitive media
40。
At least one sensing unit 20, is arranged at the surface of pedestal 10, wherein, sensing unit 20 is spin electric device.
Alternatively, sensing unit 20 can be giant reluctivity device or tunnel magneto device then.
The first end of cantilever beam 30 is connected with pedestal 10, and the second end of cantilever beam 30 is vacantly set.For example, cantilever beam 30
First end is fixedly connected with pedestal 10, and the second end of cantilever beam 30 is vacantly set, and cantilever beam 30 is with the first end of cantilever beam 30
Freely swing with the tie point of pedestal 10 for axle center.
At least one sensitive media 40 is arranged at the second end of cantilever beam 30.
Alternatively, sensitive media 40 can be high paramagnetic medium.For example, sensitive media 40 can use micro fabrication
(Micro electromechanical system, MEMS) is designed and produced.
Alternatively, when at least one sensing unit 20 is N number of, N number of differential setting of sensing unit 20, wherein, N is more than 1
Positive integer.For example, when N is 2,2 differential settings of sensing unit 20.When N is 4,4 electric bridge differential settings of sensing unit 20,
So that multiple sensitive media points, which are combined, carries out noise suppressed.
Alternatively, the accelerometer 1000 may also include：Link 200, carries the pedestal 10, is set with connecting outside
It is standby.Alternatively, when sensing module 100 is even number, sensing module is symmetrical arranged with fixed angle.For example, as shown in figure 3,
When sensing module 100 is 2,2 sensing modules 100 are symmetrical arranged.As shown in figure 4, when sensing module 100 is 4,
4 across of sensing module 100 are set.
Alternatively, when sensing module 100 is 6,6 sensing modules 100 are set into hexagram.
Alternatively, when sensing module 100 is 8,8 sensing modules 100 are set into M shape.
The high sensitivity of spin electric device is utilized according to the accelerometer of above-mentioned embodiment, acceleration is greatly improved
Sensitivity and the precision of meter are spent, the volume of accelerometer is reduced, to realize microminiature, be easy to integrated accelerometer.
It should be noted last that, the above embodiments are merely illustrative of the technical solutions of the present invention and it is unrestricted, although ginseng
The present invention is described in detail according to preferred embodiment, the specific implementation that the foregoing is only the present invention is should be understood that
Mode, the protection domain being not intended to limit the present invention, within the spirit and principles of the invention, that is done any repaiies
Change, equivalent, improvement etc., should be included within the scope of the present invention.
Claims (10)
1. a kind of sensing module, it is characterised in that the sensing module includes：
Pedestal；
At least one sensing unit, is arranged at the surface of the pedestal, wherein, the sensing unit is spin electric device；
Cantilever beam, the first end of the cantilever beam is connected with the pedestal, and the second end of the cantilever beam is vacantly set；
At least one sensitive media, is arranged at the second end of the cantilever beam.
2. sensing module according to claim 1, it is characterised in that described when at least one described sensing unit is N number of
N number of sensing unit differential setting, wherein, N is the positive integer more than 1.
3. sensing module according to claim 1 or 2, it is characterised in that the sensitive media is high paramagnetic medium.
4. sensing module according to claim 3, it is characterised in that sensing unit tunnelling for giant reluctivity device or then
Magnetoresistance device.
5. a kind of accelerometer, it is characterised in that the accelerometer includes：At least one is such as any one of claim 1-4
Described sensing module.
6. accelerometer according to claim 5, it is characterised in that when sensing module is even number, sensing module with
Fixed angle is symmetrical arranged.
7. accelerometer according to claim 6, it is characterised in that when the sensing module is 2, the sensing mould
Block is symmetrical arranged.
8. accelerometer according to claim 6, it is characterised in that when the sensing module is 4, the sensing mould
Block across is set.
9. accelerometer according to claim 6, it is characterised in that when the sensing module is 8, the sensing mould
Block is set into M shape.
10. the accelerometer according to claim 5 or 6, it is characterised in that the accelerometer also includes：Link, holds
The pedestal is carried, to connect external equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710124433.1A CN106940386A (en) | 2017-03-03 | 2017-03-03 | A kind of sensing module and accelerometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710124433.1A CN106940386A (en) | 2017-03-03 | 2017-03-03 | A kind of sensing module and accelerometer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106940386A true CN106940386A (en) | 2017-07-11 |
Family
ID=59469464
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710124433.1A Pending CN106940386A (en) | 2017-03-03 | 2017-03-03 | A kind of sensing module and accelerometer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106940386A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11054438B2 (en) | 2019-03-29 | 2021-07-06 | Honeywell International Inc. | Magnetic spin hall effect spintronic accelerometer |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20020057333A (en) * | 2001-01-04 | 2002-07-11 | 김철성 | Magnetoesistance-type vibration sensor and a method for sensing vibration using the same |
| CN1693900A (en) * | 2004-04-30 | 2005-11-09 | 爱知制钢株式会社 | Acceleration sensor |
| CN106443069A (en) * | 2016-11-22 | 2017-02-22 | 三峡大学 | Anisotropic-magnetoresistance-effect-based differential single-shaft MEMS accelerometer |
-
2017
- 2017-03-03 CN CN201710124433.1A patent/CN106940386A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20020057333A (en) * | 2001-01-04 | 2002-07-11 | 김철성 | Magnetoesistance-type vibration sensor and a method for sensing vibration using the same |
| CN1693900A (en) * | 2004-04-30 | 2005-11-09 | 爱知制钢株式会社 | Acceleration sensor |
| CN106443069A (en) * | 2016-11-22 | 2017-02-22 | 三峡大学 | Anisotropic-magnetoresistance-effect-based differential single-shaft MEMS accelerometer |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11054438B2 (en) | 2019-03-29 | 2021-07-06 | Honeywell International Inc. | Magnetic spin hall effect spintronic accelerometer |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104931032B (en) | A kind of mass MEMS resonant formula gyroscope of single anchor point four | |
| TWI647425B (en) | Improved gyroscope structure and gyroscope | |
| US7827864B2 (en) | Microelectromechanical gyroscope with suppression of capacitive coupling spurious signals and control method | |
| CN104204815B (en) | A vibration tolerant acceleration sensor structure | |
| CN106932609B (en) | A kind of four mass block MEMS of list anchor point, six axis inertial sensor | |
| CN105606083B (en) | A kind of mass MEMS resonant formula gyroscope of outer support four | |
| CN103453896B (en) | A kind of Magnetic-fluid gyroscope | |
| CN102539832B (en) | Biaxially-resonant silicon-micromachined accelerometer structure in shape of Chinese character 'tian' | |
| KR20170072327A (en) | Tri-axial micro-electro-mechanical gyroscope | |
| TWM575099U (en) | MEMS three-axis gyroscope | |
| CN106369105A (en) | Eight-point damping system for optical fiber inertial unit of spacecraft | |
| US11639852B2 (en) | Three-axis microelectromechanical system (MEMS) gyroscope | |
| Nekrasov et al. | Influence of translational vibrations, shocks and acoustic noise on MEMS gyro performance | |
| CN106940386A (en) | A kind of sensing module and accelerometer | |
| US20180188336A1 (en) | Mems triaxial magnetic sensor with improved configuration | |
| Zhang et al. | Algebraic summation of eigenstates as a novel output metric to extend the linear sensing range of mode-localized sensors | |
| Wang et al. | A micro-machined vibrating ring gyroscope with highly symmetric structure for harsh environment | |
| CN207395750U (en) | Microthrust test device is detected in electromagnetic drive type tunnel magnetoresistive face | |
| CN107532903B (en) | Rotational rate sensor and method | |
| Gando et al. | A catch-and-release drive MEMS gyroscope with enhanced sensitivity by mode-matching | |
| CN109556590B (en) | Resonance ring/multi-resonance ring six-axis inertial sensor | |
| CN209878805U (en) | Accelerometer | |
| CN209214627U (en) | A kind of wineglass mode gyroscope instrument of multiple-unit coupling | |
| Thakur et al. | Analysis of acceleration sensitivity in MEMS tuning fork gyroscope | |
| Zheng et al. | Toward acceleration sensing based on topological gyroscopic metamaterials |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20170711 |