CN106940385B - A kind of temperature-compensation method for molecular-electronics induction type accelerometer - Google Patents
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Abstract
The present invention proposes a kind of temperature-compensation method for molecular-electronics induction type accelerometer, belongs to instrument and meter survey control technology technical field.For solving the problems, such as that temperature change influences molecular-electronics induction type accelerometer output-consistence.This method initially sets up the Ion transfer model of molecular-electronics induction type accelerometer, then pass through its amplitude-frequency characteristic of Ion transfer model foundation, and temperature sensor equivalent-circuit model is established based on this, to release the corresponding relationship of the amplitude-frequency response characteristic of temperature change and temperature sensor equivalent-circuit model;Finally, establishing amplitude-frequency correction link according to corresponding relationship.The work temperature that this method can effectively increase molecular-electronics induction type accelerometer is wide, effectively reduces influence of the temperature change to molecular-electronics induction type accelerometer output-consistence.
Description
Technical Field
The invention relates to a temperature compensation method for a molecular-electronic induction type accelerometer, and belongs to the technical field of measurement and control of instruments and meters.
Background
The consistency of the output of the molecular-electronic induction type accelerometer at different temperatures directly influences the performance index of the molecular-electronic induction type accelerometer. Thermodynamic noise caused by internal temperature difference of electrolyte in a reaction cavity of the reactor and coupled in the original signal output is one of main reasons for influencing output consistency of the original signal output at different temperatures so as to cause inconsistency of output signals at different temperatures. Based on the equivalent circuit of the molecular-electronic induction type accelerometer, the influence of different temperatures on the amplitude-frequency characteristics of the molecular-electronic induction type accelerometer is established, the output consistency of the molecular-electronic induction type accelerometer at different temperatures is further improved through amplitude correction and frequency domain correction, and the method has positive significance for improving the quality of the molecular-electronic induction type accelerometer.
For the problem, the conventional solutions in the fields at home and abroad at present are only limited to carry out active (electrically driven heat preservation mechanism) or passive (heat preservation material) temperature compensation on the molecular-electronic induction type accelerometer to improve the output consistency of the molecular-electronic induction type accelerometer at different temperatures, namely, the molecular-electronic induction type accelerometer works in a specific temperature wide environment by controlling the temperature of the external working environment of the molecular-electronic induction type accelerometer, and the method not only limits the working environment temperature range of the molecular-electronic induction type accelerometer, but also cannot effectively ensure the output consistency of the molecular-electronic induction type accelerometer at different temperatures.
Disclosure of Invention
In order to solve the technical problems in the prior art, the invention provides a temperature compensation method for a molecular-electronic induction type accelerometer, which adopts the following technical scheme:
the temperature compensation method comprises the following steps:
the first step is as follows: establishing an ion migration model of the molecular-electronic induction type accelerometer;
the second step is that: establishing the amplitude-frequency characteristic of the molecular-electronic induction type accelerometer according to the ion migration model in the first step;
the third step: establishing an equivalent circuit model of the temperature sensor according to the amplitude-frequency characteristic of the molecular-electronic induction type accelerometer in the second step;
the fourth step: determining the corresponding relation between the temperature change and the amplitude-frequency response characteristic of the equivalent circuit model of the temperature sensor according to the equivalent circuit model in the third step;
the fifth step: establishing an amplitude-frequency correction link, namely an amplitude-frequency correction equivalent circuit, according to the corresponding relation in the fourth step;
and a sixth step: determining an equivalent circuit of the temperature sensor according to the equivalent circuit model in the third step; determining an amplitude-frequency correction equivalent circuit according to the amplitude-frequency correction link in the fifth step; and establishing a temperature compensation mechanism through an equivalent circuit of the temperature sensor and an amplitude-frequency correction equivalent circuit.
Preferably, ion migration of electrolyte in a reaction cavity of the molecular-electronic induction type accelerometer is described by using a Navier-Stokes equation, and an ion migration model of the molecular-electronic induction type accelerometer in the first step is established, wherein the structure of the ion migration model is as follows:
wherein,represents the ion migration velocity; t represents time;expressed as pressure; μ represents the electrolyte viscosity; rho is the electrolyte density;acceleration excited by external vibration.
Preferably, the amplitude-frequency characteristic of the molecular-electronic induction type accelerometer in the second step is established as follows:
step A1: method for utilizing Nernst-Plank equation to carry out ion treatment on electrolyte in reaction cavity of molecular-electron induction type accelerometerI-And K+The migration effects of (a) are described:
wherein,m=D/(RT);representing a velocity vector;andrespectively represent ions in the electrolyteI-And K+Current density of (d);andrespectively represent ions in the electrolyteI-And K+The ion concentration of (a);andrespectively represent ions in the electrolyteI-And K+The conductivity of (a); f represents a Faraday constant; r represents a gas constant, and R is 8.314J/(kg · mol); t is expressed as absolute temperature;
step A2: the ion concentration-current relationship on the sensitive element of the molecular-electron induction type accelerometer is described by using a Butler-Volmer equation:
wherein,representing normal vector parameters of the surface of the electrode; k is a radical ofaAnd kcRespectively representing the reaction constants of the cathode and the anode; n represents the number of charges of the charged ions, and n is 1; α represents a conversion coefficient of an electrode electron to a charge, and is 0.5; u represents the voltage applied between the cathode and the anode; e0Is the equilibrium potential of the electrochemical reaction; v represents a voltage;
step A3: carrying out simulation solution analysis on the partial differential equations in the step A1 and the step A2 by using finite element simulation software to obtain an ion migration model of the electronic induction type accelerometer;
step A4: and D, according to the ion migration model obtained in the step A3, obtaining the amplitude-frequency response characteristic of the ion migration model through computer simulation, and further obtaining the amplitude-frequency characteristic of the molecular-electronic induction type accelerometer.
Preferably, the equivalent circuit model of the temperature sensor in the third step is as follows:
preferably, the temperature compensation method establishes a corresponding relationship between the temperature change in the fourth step and the amplitude-frequency response characteristic of the equivalent circuit model of the temperature sensor by performing temperature-centric simulation on the equivalent circuit model in the third step.
Preferably, the temperature compensation method comprises the following steps:
s1: describing the ion migration of electrolyte in a reaction cavity of the molecular-electronic induction type accelerometer by using a Navier-Stokes equation, and establishing an ion migration model of the molecular-electronic induction type accelerometer, wherein the structure of the ion migration model is as follows:
wherein,represents the ion migration velocity; t represents time;expressed as pressure; μ represents the electrolyte viscosity; rho is the electrolyte density;acceleration excited by external vibration;
s2: firstly, Nernst-Plank equation is utilized to carry out ion treatment on electrolyte in a reaction cavity of the molecular-electronic induction type accelerometerI-And K+The migration effects of (a) are described:
wherein,m=D/(RT);representing a velocity vector;andrespectively represent ions in the electrolyteI-And K+Current density of (d);andrespectively represent ions in the electrolyteI-And K+The ion concentration of (a);andrespectively represent ions in the electrolyteI-And K+The conductivity of (a); f represents a Faraday constant; r represents a gas constant, and R is 8.314J/(kg · mol); t is expressed as absolute temperature;
then, the ion concentration-current relationship on the sensitive element of the molecular-electron induction type accelerometer is described by using a Butler-Volmer equation:
wherein,representing normal vector parameters of the surface of the electrode; k is a radical ofaAnd kcRespectively representing the reaction constants of the cathode and the anode; n represents the number of charges of the charged ions, and n is 1; α represents a conversion coefficient of an electrode electron to a charge, and is 0.5; u represents the voltage applied between the cathode and the anode; e0Is the equilibrium potential of the electrochemical reaction; v represents a voltage;
then, carrying out simulation solution analysis on the partial differential equation by using finite element simulation software to obtain an ion migration model of the electronic induction type accelerometer, and carrying out simulation by using a sine excitation method by using a computer as a tool according to the ion migration model to obtain the amplitude-frequency response characteristic of the electronic induction type accelerometer so as to obtain the amplitude-frequency characteristic of the molecular-electronic induction type accelerometer;
s3: establishing an equivalent circuit model of the temperature sensor according to the amplitude-frequency characteristic of the molecular-electronic induction type accelerometer of S2; the equivalent circuit model of the temperature sensor is as follows:
s4: performing temperature-based simulation on the temperature sensor equivalent circuit model in S3, and establishing a corresponding relation between temperature change and amplitude-frequency response characteristics of the temperature sensor equivalent circuit model;
s5: establishing an amplitude-frequency correction link according to the corresponding relation of S4;
s6: determining an equivalent circuit of the temperature sensor according to the equivalent circuit model of S3; determining an amplitude-frequency correction equivalent circuit according to the amplitude-frequency correction link of S5; and establishing a temperature compensation mechanism through an equivalent circuit of the temperature sensor and an amplitude-frequency correction equivalent circuit.
The invention has the beneficial effects that:
(1) the temperature compensation method for the molecular-electronic induction type accelerometer provided by the invention analyzes the principles of ion migration and temperature influence in the molecular-electronic induction type accelerometer, starts from the root of the influence of temperature change on output consistency, the problem that the output of the molecular-electronic induction type accelerometer is inconsistent due to the influence of temperature change is solved by increasing the temperature compensation for the internal structure of the molecular-electronic induction type accelerometer, the defect that the traditional method only takes the limitation of the external working environment of the molecular-electronic induction type accelerometer as the starting point is overcome, the technical prejudice that the molecular-electronic induction type accelerometer works in a small temperature range environment with weaker output consistency due to temperature change by forcibly enabling the molecular-electronic induction type accelerometer to work in a specific temperature range through controlling the external working environment of the molecular-electronic induction type accelerometer;
(2) the temperature compensation method for the molecular-electronic induction type accelerometer effectively reduces the influence of temperature change on the output consistency of the molecular-electronic induction type accelerometer, and under the condition that other conditions are the same, the output consistency (shown in figure 8) of the molecular-electronic induction type accelerometer using the temperature compensation method is obviously improved compared with the output consistency (shown in figure 6) of the molecular-electronic induction type accelerometer not using the temperature compensation method;
(3) the temperature compensation method for the molecular-electronic induction type accelerometer can realize that the molecular-electronic induction type accelerometer can still keep high output consistency when working in a large temperature difference environment of-10 ℃ to 70 ℃, and the working temperature of the molecular-electronic induction type accelerometer is only applied to the field with small environmental temperature fluctuation, such as underwater working, and the like, due to the traditional temperature compensation means, so that the working temperature width of the molecular-electronic induction type accelerometer is greatly increased, and the application occasion and the application field of the molecular-electronic induction type accelerometer are fully expanded.
Drawings
Fig. 1 is a schematic diagram of the internal structure of a reaction chamber of a molecular-electron induction type accelerometer.
Fig. 2 is a schematic diagram of the operating principle of the molecular-electronic induction type accelerometer.
FIG. 3 shows the simulation result of the ion concentration distribution at any time inside the reaction chamber.
FIG. 4 shows the amplitude-frequency response characteristic of the molecular-electronic induction type accelerometer.
FIG. 5 shows an equivalent circuit model of a molecular-electron induction type accelerometer.
FIG. 6 is an amplitude-frequency characteristic curve of the molecular-electronic induction type accelerometer at different temperatures.
The amplitude-frequency correction link equivalent circuit added in figure 7.
FIG. 8 shows the amplitude-frequency characteristic curve of the molecular-electronic induction accelerometer at different temperatures after the addition of the amplitude-frequency correction step.
Detailed Description
The present invention will be further described with reference to specific embodiments, but the present invention is not limited to the specific embodiments.
The molecular-electronic induction type accelerometer is composed of a reaction cavity (M.E.T. cavity), an electromagnetic feedback compensation system, a temperature compensation system, a signal acquisition/processing circuit, a power supply, a shell package and the like. The reaction chamber is a core component of the molecular-electronic induction type accelerometer, and the internal structure of the reaction chamber is shown in figure 1. The molecular-electronic induction type accelerometer generally adopts a single cylindrical reaction cavity structure, and comprises an electrolyte sealed cavity, electrolyte, an electrode, an insulating interlayer and a lead, wherein the electrode and the insulating interlayer are generally integrated and packaged in the same chip, and are called as "Sensing Element" which is a core component of the reaction cavity.
The electrolyte sealed cavity 1 is filled with water-based salt solution 3, the anode 5 and the cathode 6 are arranged in the electrolyte sealed cavity and are separated by the insulating interlayer 4, and the electrodes 5 and 6 are connected with a signal acquisition/processing circuit outside the electrolyte sealed cavity through the lead 2. Wherein the electrodes 5 and 6 are packaged together with the insulating interlayer 4 to form a sensitive element.
The principle of operation of the molecular-electron induction accelerometer is shown in fig. 2, when a voltage V is applied across the electrodes for a short transition time, a constant current is generated between the electrodes and the external bridge circuit. When the posture of the reaction cavity changes, the electrolyte flows along with the change (in practical conditions, the change amount of the electrolyte flow is very small), the concentration of the charged ions between the electrodes is changed, and then a changed current is generated on an external circuit, and the current changes along with the change of the electrolyte flow.
The invention provides a temperature compensation method for a molecular-electronic induction type accelerometer, which comprises the steps of firstly establishing an ion migration model and amplitude-frequency characteristics of the molecular-electronic induction type accelerometer according to the structure and the principle of the molecular-electronic induction type accelerometer, and establishing an equivalent circuit model of a temperature sensor for acquiring temperature signals of the molecular-electronic induction type accelerometer by utilizing the ion migration model and the amplitude-frequency characteristics; and then determining the corresponding relation between the temperature change and the amplitude-frequency response characteristic of the equivalent circuit model of the temperature sensor by using the equivalent circuit model, and designing an amplitude-frequency correction link correspondingly used for adjusting the temperature influence.
The temperature compensation method comprises the following steps:
the first step is as follows: establishing an ion migration model of the molecular-electronic induction type accelerometer;
the second step is that: establishing the amplitude-frequency characteristic of the molecular-electronic induction type accelerometer according to the ion migration model in the first step;
the third step: establishing an equivalent circuit model of the temperature sensor according to the amplitude-frequency characteristic of the molecular-electronic induction type accelerometer in the second step;
the fourth step: determining the corresponding relation between the temperature change and the amplitude-frequency response characteristic of the equivalent circuit model of the temperature sensor according to the equivalent circuit model in the third step;
the fifth step: establishing an amplitude-frequency correction link, namely an amplitude-frequency correction equivalent circuit, according to the corresponding relation in the fourth step;
and a sixth step: determining an equivalent circuit of the temperature sensor according to the equivalent circuit model in the third step, wherein one form of the equivalent circuit of the temperature sensor is shown in FIG. 5; determining an amplitude-frequency correction equivalent circuit according to the amplitude-frequency correction link in the fifth step, wherein one circuit form of the amplitude-frequency correction equivalent circuit is shown in fig. 7; and establishing a temperature compensation mechanism through an equivalent circuit of the temperature sensor and an amplitude-frequency correction equivalent circuit.
Describing the ion migration of electrolyte in a reaction cavity of the molecular-electronic induction type accelerometer by using a Navier-Stokes equation, and establishing an ion migration model of the molecular-electronic induction type accelerometer in the first step, wherein the structure of the ion migration model is as follows:
wherein,represents the ion migration velocity; t represents time;expressed as pressure; μ represents the electrolyte viscosity; rho is the electrolyte density;acceleration excited by external vibration.
Meanwhile, the amplitude-frequency characteristic establishing process of the molecular-electronic induction type accelerometer in the second step is as follows:
step A1: let's use Nernst-Plank equationIons of electrolyte in reaction chamber of the pair of molecular-electronic induction type accelerometersI-And K+The migration effects of (a) are described:
wherein,m=D/(RT);representing a velocity vector;andrespectively represent ions in the electrolyteI-And K+Current density of (d);andrespectively represent ions in the electrolyteI-And K+The ion concentration of (a);andrespectively represent ions in the electrolyteI-And K+The conductivity of (a); f represents a Faraday constant; r represents a gas constant, and R is 8.314J/(kg · mol); t represents an absolute temperature.
Step A2: the ion concentration-current relationship on the sensitive element is described by using a Butler-Volmer equation:
wherein,representing normal vector parameters of the surface of the electrode; k is a radical ofaAnd kcRespectively representing the reaction constants of the cathode and the anode; n represents the number of charges of the charged ions, and n is 1; α represents a conversion coefficient of an electrode electron to a charge, and is 0.5; u represents the voltage applied between the cathode and the anode; e0Is the equilibrium potential of the electrochemical reaction; v represents a voltage.
Step A3: performing simulation solution analysis on the partial differential equations in the steps A1 and A2 by using finite element simulation software to obtain an ion migration model of the electronic induction type accelerometer, wherein the model represents the ion concentration distribution condition of the electronic induction type accelerometer at any time t under the same conditions (the same water-based electrolyte, the same external temperature difference and the same multilayer electrode structure), and the specific distribution is shown in FIG. 3;
step A4: according to the ion migration model obtained in the step a3, a computer is used as a tool, and a sine excitation method is used for simulation to obtain the amplitude-frequency response characteristic, so that the amplitude-frequency characteristic of the molecular-electronic induction type accelerometer is obtained as shown in fig. 4.
Wherein, the equivalent circuit model of the temperature sensor in the third step is as follows:
according to the equivalent circuit model of the temperature sensor of the molecular-electronic induction type accelerometer, the amplitude-frequency response characteristic of the temperature sensor is influenced by the change of the temperature, namely the output consistency of the temperature sensor at different temperatures is influenced. Therefore, the temperature compensation method carries out temperature-centered simulation on the temperature sensor equivalent circuit model and establishes the corresponding relation between the temperature change and the amplitude-frequency response characteristic of the temperature sensor equivalent circuit model in the fourth step. Under the same conditions (same water-based electrolyte, same external temperature difference and same multilayer electrode structure), the simulation result of the influence of the temperature change on the amplitude-frequency response characteristic of the equivalent circuit model of the temperature sensor is shown in fig. 6.
Finally, determining an equivalent circuit of the temperature sensor according to the equivalent circuit model of the temperature sensor; and the amplitude-frequency correction link determines an amplitude-frequency correction equivalent circuit; and establishing a temperature compensation mechanism through an equivalent circuit of the temperature sensor and an amplitude-frequency correction equivalent circuit.
The form of one of the equivalent circuits of the amplitude-frequency correction link is shown in fig. 7, the amplitude-frequency response characteristics of the molecular-electronic induction type accelerometer at different temperatures can be improved after the amplitude-frequency correction link is added, and the improved amplitude-frequency response characteristics are shown in fig. 8. As can be clearly seen from fig. 6 and 8, the temperature compensation method provided by the present invention can effectively improve the output consistency of the molecular-electronic induction type accelerometer at different temperatures. The invention is based on the ion movement model of the molecular-electronic induction type accelerometer, establishes the equivalent circuit model of the temperature sensor for collecting temperature signals, establishes the influence of different temperatures on the amplitude-frequency characteristic of the equivalent circuit model of the temperature sensor, further improves the output consistency of the equivalent circuit model at different temperatures through amplitude correction and frequency domain correction, overcomes the technical prejudice of carrying out active (electrically driven heat preservation mechanism) or passive (heat preservation material) temperature compensation on the reaction cavity of the molecular-electronic induction type accelerometer commonly adopted by the traditional temperature compensation method, and has very positive significance for improving the quality of the molecular-electronic induction type accelerometer.
Meanwhile, the temperature compensation method for the molecular-electronic induction type accelerometer effectively reduces the influence of temperature change on the output consistency of the molecular-electronic induction type accelerometer, and under the condition that other conditions are the same, the output consistency (shown in figure 8) of the molecular-electronic induction type accelerometer using the temperature compensation method is remarkably improved compared with the output consistency (shown in figure 6) of the molecular-electronic induction type accelerometer not adopting the temperature compensation method. Furthermore, the temperature compensation method for the molecular-electronic induction type accelerometer provided by the invention can realize that the molecular-electronic induction type accelerometer can still keep high output consistency when working in a large temperature difference environment of-10 ℃ to 70 ℃ (as shown in fig. 8), while the output consistency of the ion-electronic induction type accelerometer which does not adopt the temperature compensation method provided by the invention is obviously changed at different temperatures (as shown in fig. 6), which greatly limits the practical application of the molecular-electronic induction type accelerometer, and enables the molecular-electronic induction type accelerometer to be only used in the fields with small temperature change of the working environment, such as underwater and the like. Therefore, the temperature compensation method provided by the invention greatly increases the working temperature width of the molecular-electronic induction type accelerometer, and fully expands the application occasions and application fields of the molecular-electronic induction type accelerometer.
Although the present invention has been described with reference to the preferred embodiments, it should be understood that various changes and modifications can be made therein by those skilled in the art without departing from the spirit and scope of the invention as defined in the appended claims.
Claims (5)
1. A temperature compensation method for a molecular-electronic induction type accelerometer is characterized by comprising the following steps:
the first step is as follows: establishing an ion migration model of the molecular-electronic induction type accelerometer;
the second step is that: establishing the amplitude-frequency characteristic of the molecular-electronic induction type accelerometer according to the ion migration model in the first step;
the third step: establishing an equivalent circuit model of the temperature sensor according to the amplitude-frequency characteristic of the molecular-electronic induction type accelerometer in the second step;
the fourth step: determining the corresponding relation between the temperature change and the amplitude-frequency response characteristic of the equivalent circuit model of the temperature sensor according to the equivalent circuit model in the third step;
the fifth step: establishing an amplitude-frequency correction link, namely an amplitude-frequency correction equivalent circuit, according to the corresponding relation in the fourth step;
and a sixth step: determining an equivalent circuit of the temperature sensor according to the equivalent circuit model in the third step; determining an amplitude-frequency correction equivalent circuit according to the amplitude-frequency correction link in the fifth step; establishing a temperature compensation mechanism through an equivalent circuit of the temperature sensor and an amplitude-frequency correction equivalent circuit;
the third step of establishing the equivalent circuit model of the temperature sensor comprises the following steps of;
s1: describing the ion migration of electrolyte in a reaction cavity of the molecular-electronic induction type accelerometer by using a Navier-Stokes equation, and establishing an ion migration model of the molecular-electronic induction type accelerometer
S2: firstly, Nernst-Plank equation is utilized to carry out ion I on electrolyte in a reaction cavity of the molecular-electronic induction type accelerometer3 -、I-And K+Respectively describe the migration effect of
Then, the ion concentration-current relationship on the sensitive element of the molecular-electron induction type accelerometer is described by using a Butler-Volmer equation:
then, carrying out simulation solution analysis on the partial differential equation by using finite element simulation software to obtain an ion migration model of the electronic induction type accelerometer, and carrying out simulation by using a sine excitation method by using a computer as a tool according to the ion migration model to obtain the amplitude-frequency response characteristic of the electronic induction type accelerometer so as to obtain the amplitude-frequency characteristic of the molecular-electronic induction type accelerometer;
s3: establishing an equivalent circuit model of the temperature sensor according to the amplitude-frequency characteristic of the molecular-electronic induction type accelerometer of S2; the equivalent circuit model of the temperature sensor is as follows:
2. the temperature compensation method according to claim 1, wherein ion migration of an electrolyte in a reaction chamber of the molecular-electronic induction type accelerometer is described by using a Navier-Stokes equation, and an ion migration model of the molecular-electronic induction type accelerometer is established in the first step, and the structure of the ion migration model is as follows:
wherein,represents the ion migration velocity; t represents time;expressed as pressure; μ represents the electrolyte viscosity; rho is the electrolyte density;acceleration excited by external vibration.
3. The temperature compensation method according to claim 1 or 2, wherein the amplitude-frequency characteristic of the molecular-electronic induction type accelerometer in the second step is established as follows:
step A1: method for utilizing Nernst-Plank equation to carry out ion treatment on electrolyte in reaction cavity of molecular-electron induction type accelerometerI-And K+The migration effects of (a) are described:
wherein,m=D/(RT);representing a velocity vector;andrespectively represent ions in the electrolyteI-And K+Current density of (d);andrespectively represent ions in the electrolyteI-And K+The ion concentration of (a);andrespectively represent ions in the electrolyteI-And K+The conductivity of (a); f represents a Faraday constant; r represents a gas constant, and R is 8.314J/(kg · mol); t is expressed as absolute temperature;
step A2: the ion concentration-current relation on the sensitive element of the molecular-electronic induction type accelerometer is described by using a Butler-Volmer equation:
wherein,representing normal vector parameters of the surface of the electrode; k is a radical ofaAnd kcRespectively representing the reaction constants of the cathode and the anode; n represents the number of charges of the charged ions, and n is 1; α represents a conversion coefficient of an electrode electron to a charge, and is 0.5; u represents the voltage applied between the cathode and the anode; e0Is the equilibrium potential of the electrochemical reaction; v represents a voltage;
step A3: carrying out simulation solution analysis on the partial differential equations in the step A1 and the step A2 by using finite element simulation software to obtain an ion migration model of the electronic induction type accelerometer;
step A4: and D, according to the ion migration model obtained in the step A3, obtaining the amplitude-frequency response characteristic of the ion migration model through computer simulation, and further obtaining the amplitude-frequency characteristic of the molecular-electronic induction type accelerometer.
4. The temperature compensation method according to claim 1, wherein the temperature compensation method establishes a fourth step of correspondence between the temperature change and amplitude-frequency response characteristics of the equivalent circuit model of the temperature sensor by performing temperature-centric simulation on the equivalent circuit model of the third step.
5. The temperature compensation method of claim 1, wherein the temperature compensation method comprises the steps of:
s1: describing the ion migration of electrolyte in a reaction cavity of the molecular-electronic induction type accelerometer by using a Navier-Stokes equation, and establishing an ion migration model of the molecular-electronic induction type accelerometer, wherein the structure of the ion migration model is as follows:
wherein,represents the ion migration velocity; t represents time;expressed as pressure; μ represents the electrolyte viscosity; rho is the electrolyte density;acceleration excited by external vibration;
s2: firstly, a reaction chamber of a molecular-electron induction type accelerometer is subjected to Nernst-plate equationIons of internal electrolyteI-And K+The migration effects of (a) are described:
wherein,m=D/(RT);representing a velocity vector;andrespectively represent ions in the electrolyteI-And K+Current density of (d);andrespectively represent ions in the electrolyteI-And K+The ion concentration of (a);andrespectively represent ions in the electrolyteI-And K+The conductivity of (a); f represents a Faraday constant; r represents a gas constant, and R is 8.314J/(kg · mol); t is expressed as absolute temperature;
then, the ion concentration-current relationship on the sensitive element of the molecular-electron induction type accelerometer is described by using a Butler-Volmer equation:
wherein,representing normal vector parameters of the surface of the electrode; k is a radical ofaAnd kcRespectively representing the reaction constants of the cathode and the anode; n represents the number of charges of the charged ions, and n is 1; α represents a conversion coefficient of an electrode electron to a charge, and is 0.5; u represents the voltage applied between the cathode and the anode; e0Is the equilibrium potential of the electrochemical reaction; v represents a voltage;
then, carrying out simulation solution analysis on the partial differential equation by using finite element simulation software to obtain an ion migration model of the electronic induction type accelerometer, and carrying out simulation by using a sine excitation method by using a computer as a tool according to the ion migration model to obtain the amplitude-frequency response characteristic of the electronic induction type accelerometer so as to obtain the amplitude-frequency characteristic of the molecular-electronic induction type accelerometer;
s3: establishing an equivalent circuit model of the temperature sensor according to the amplitude-frequency characteristic of the molecular-electronic induction type accelerometer of S2; the equivalent circuit model of the temperature sensor is as follows:
s4: performing temperature-based simulation on the temperature sensor equivalent circuit model in S3, and establishing a corresponding relation between temperature change and amplitude-frequency response characteristics of the temperature sensor equivalent circuit model;
s5: establishing an amplitude-frequency correction link according to the corresponding relation of S4;
s6: determining an equivalent circuit of the temperature sensor according to the equivalent circuit model of S3; determining an amplitude-frequency correction equivalent circuit according to the amplitude-frequency correction link of S5; and establishing a temperature compensation mechanism through an equivalent circuit of the temperature sensor and an amplitude-frequency correction equivalent circuit.
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Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4522072A (en) * | 1983-04-22 | 1985-06-11 | Insouth Microsystems, Inc. | Electromechanical transducer strain sensor arrangement and construction |
CN105277738A (en) * | 2015-11-12 | 2016-01-27 | 中国科学院电子学研究所 | Electrochemical accelerometer and method for integrating thermistor in electrode |
CN105588951A (en) * | 2014-10-23 | 2016-05-18 | 北京自动化控制设备研究所 | Molecular electronic angular accelerometer weak signal processing circuit |
CN105807092A (en) * | 2016-03-21 | 2016-07-27 | 吉林大学 | Method for designing molecule-electron induction type accelerometer elastic film element |
-
2016
- 2016-11-21 CN CN201611018721.0A patent/CN106940385B/en active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4522072A (en) * | 1983-04-22 | 1985-06-11 | Insouth Microsystems, Inc. | Electromechanical transducer strain sensor arrangement and construction |
CN105588951A (en) * | 2014-10-23 | 2016-05-18 | 北京自动化控制设备研究所 | Molecular electronic angular accelerometer weak signal processing circuit |
CN105277738A (en) * | 2015-11-12 | 2016-01-27 | 中国科学院电子学研究所 | Electrochemical accelerometer and method for integrating thermistor in electrode |
CN105807092A (en) * | 2016-03-21 | 2016-07-27 | 吉林大学 | Method for designing molecule-electron induction type accelerometer elastic film element |
Non-Patent Citations (2)
Title |
---|
"Experimental studies of temperature dependence of transfer function of molecular electronic tranducers at high frequencies";Dmitry L 等;《IEEE SENSORS JOURNAL》;20161115;第16卷(第22期);第7864-7869页 * |
"电化学振动传感器的静态动态噪声模型研究";陈永志;《中国优秀硕士学位论文全文数据库信息科技辑》;20160915;I140-56 * |
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