CN105807092B - Design method based on molecular-electronic induction type accelerometer elastic thin film element - Google Patents
Design method based on molecular-electronic induction type accelerometer elastic thin film element Download PDFInfo
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- CN105807092B CN105807092B CN201610158449.XA CN201610158449A CN105807092B CN 105807092 B CN105807092 B CN 105807092B CN 201610158449 A CN201610158449 A CN 201610158449A CN 105807092 B CN105807092 B CN 105807092B
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- 230000006698 induction Effects 0.000 title claims abstract description 56
- 238000005442 molecular electronic Methods 0.000 title claims abstract description 52
- 239000010409 thin film Substances 0.000 title claims abstract description 36
- 238000000034 method Methods 0.000 title claims abstract description 22
- 238000013461 design Methods 0.000 title claims abstract description 16
- 239000003792 electrolyte Substances 0.000 claims abstract description 58
- 150000002500 ions Chemical class 0.000 claims abstract description 17
- 238000006243 chemical reaction Methods 0.000 claims abstract description 13
- 230000000694 effects Effects 0.000 claims abstract description 13
- 239000012530 fluid Substances 0.000 claims abstract description 11
- 238000013508 migration Methods 0.000 claims abstract description 6
- 230000005012 migration Effects 0.000 claims abstract description 6
- 239000010408 film Substances 0.000 claims description 23
- 230000001133 acceleration Effects 0.000 claims description 20
- 239000000126 substance Substances 0.000 claims description 12
- 239000012528 membrane Substances 0.000 claims description 10
- 238000010586 diagram Methods 0.000 claims description 9
- 239000007788 liquid Substances 0.000 claims description 9
- 230000005514 two-phase flow Effects 0.000 claims description 6
- 238000013178 mathematical model Methods 0.000 claims description 5
- 238000003487 electrochemical reaction Methods 0.000 claims description 3
- 230000005484 gravity Effects 0.000 claims description 3
- 238000012216 screening Methods 0.000 claims description 3
- 238000012546 transfer Methods 0.000 claims description 3
- 238000005259 measurement Methods 0.000 abstract description 7
- 230000002411 adverse Effects 0.000 abstract description 3
- 230000005284 excitation Effects 0.000 description 7
- 238000011156 evaluation Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000035939 shock Effects 0.000 description 2
- 238000004088 simulation Methods 0.000 description 2
- 230000006978 adaptation Effects 0.000 description 1
- 238000004422 calculation algorithm Methods 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 230000003750 conditioning effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010921 in-depth analysis Methods 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 238000013441 quality evaluation Methods 0.000 description 1
- 230000000452 restraining effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/003—Kinematic accelerometers, i.e. measuring acceleration in relation to an external reference frame, e.g. Ferratis accelerometers
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Abstract
A design method based on a molecular-electronic induction type accelerometer elastic thin film element belongs to the technical field of sensors. The invention aims to design an elastic thin film element of an accelerometer, which can effectively perform matching design on the elastic thin film element aiming at different accelerometer cavity types, so that the elastic thin film element can match the optimal elastic performance with a cavity in a specific measurement task based on a design method of the elastic thin film element of the molecular-electronic induction type accelerometer. The fluid dynamics working principle model of the molecular-electronic induction type accelerometer comprises the following steps: the motion of the electrolyte in the reaction cavity is described through a Navier-Stokes equation, an output equation of the molecular-electronic induction type accelerometer and the ion migration effect of the electrolyte are described through a Nernst-Plank equation, and a thin film structure and an electrolyte interface equation are established to be solved through the combination of the equations. The invention adjusts the movement change of the concentration of the electrolyte ions in the cavity, thereby eliminating the adverse effect brought by the non-movement direction interference signal generated by the external vibration in the cavity.
Description
Technical Field
The invention belongs to the technical field of sensors.
Background
The molecular-electronic induction type accelerometer is a novel low-frequency accelerometer, and the novel accelerometer can realize accurate measurement of low-frequency acceleration through the ion migration effect of electrolyte. In the using process of the sensor, the elastic film structure of the molecular-electronic induction type accelerometer can generate an elastic force effect on the movement of the electrolyte. When the accelerometer is excited by external acceleration, the electrolyte moves along with the excitation of the external acceleration, so that an electrochemical current signal which is in direct proportion to the acceleration is formed on the electrode. In order to adjust the motion state of the electrolyte, a group of elastic thin film elements are arranged on two sides of the cavity for sealing the electrolyte. Through the elastic thin film element, the movement posture of the electrolyte under external excitation can be adjusted and corrected, so that the suppression of the accelerometer on the non-effective movement mode in the vibration process is realized. At present, the common elastic membrane for restraining the electrolyte of the molecule-electron induction type accelerometer has a plurality of problems in the application process. For sensors of different types, for different measurement tasks and with different measurement ranges, there is currently no way to obtain a more optimal elastic membrane element. In order to compensate for the defect, a plurality of other circuit structures are additionally constructed in the aspect of subsequent conditioning, and errors and influences caused by the elastic membrane element are compensated and eliminated.
Disclosure of Invention
The invention aims to design an elastic thin film element of an accelerometer, which can effectively perform matching design on the elastic thin film element aiming at different accelerometer cavity types, so that the elastic thin film element can match the optimal elastic performance with a cavity in a specific measurement task based on a design method of the elastic thin film element of the molecular-electronic induction type accelerometer.
The fluid dynamics working principle model of the molecular-electronic induction type accelerometer comprises the following steps:
the movement of the electrolyte in the reaction cavity is completely described by a Navier-Stokes equation:
wherein the content of the first and second substances,
is time;
is the electrolyte density;
is the electrolyte viscosity;
acceleration excited by external vibration;
the output equation of the molecular-electron induction type accelerometer and the ion migration effect of the electrolyte are described by using a Nernst-Plank equation:
wherein the content of the first and second substances,
is the current density;
,
and
is the conductivity of the ions in the electrolyte;
,
and
represents the concentration of various ions in the electrolyte;
representing the potential difference between the cathode and the anode;
is a vector of velocity; f is a Faraday constant;
is the gas constant;
wherein the content of the first and second substances,
is an electrode meterA face normal vector parameter;
and
is the reaction constant of the cathode and anode;n=1 is the number of charges of the dotted ions;
0.5, which is the conversion coefficient of electrode electrons to charges;Uis the voltage applied between the cathode and the anode;
is the equilibrium potential of the electrochemical reaction;
the model is established as follows:
establishing an interface equation of the thin film structure and the electrolyte:
wherein the content of the first and second substances,
is the contour line of the interface, which determines the position of the elastic membrane structure at a certain time;
then represents the velocity vector of the fluid;
is the thickness distribution of the elastic film;
the global structural equation for density and viscosity across the interface is as follows:
wherein the content of the first and second substances,
and
respectively the density and viscosity of the electrolyte, and
and
density and viscosity of the elastic film;
in terms of kinetics, the Cahn-hilard equation is used to describe the kinetic relationship between solid-liquid two-phase flows:
wherein the content of the first and second substances,
is the mobility of the electrolyte;
is the mixed energy density at the interface of the solid-liquid two-phase flow;
the mixed energy density and film thickness can be described by the surface tension equation, which is:
throughout the process, the mass and momentum transfer equations incorporate a fluid dynamics model with the following form of relationship:
wherein, the first and the second end of the pipe are connected with each other,
is the density of the electrolyte;
is time;
is the velocity vector of the electrolyte;
is the acceleration of gravity;
is a vector of the surface tension of a liquid.
The invention provides a novel design method for the elastic thin film element of the molecular-electronic induction type accelerometer by fully researching a working principle model of the molecular-electronic induction type accelerometer and combining the actual situation of the elastic thin film of the molecular-electronic induction type accelerometer, and the elastic thin film element can be effectively designed in a matching way for different accelerometer cavity types by adopting the algorithm, so that the elastic thin film element can be matched with the cavity with the optimal elastic performance in a specific measurement task. Thereby, the specified acceleration measurement task is well completed. When the cavity is excited by external acceleration, the charged ion migration in the electrolyte can be influenced, and the dynamic motion form of the electrolyte in the reaction cavity can be effectively corrected through the elastic film element. When the accelerometer is excited by an external acceleration signal, the elastic membrane element can effectively eliminate acceleration components in other directions through elastic force generated by self deformation, so that the movement change of the concentration of electrolyte ions in the cavity is adjusted, and the adverse effect caused by non-movement direction interference signals generated by external vibration in the cavity is eliminated.
Drawings
FIG. 1 is a diagram of a molecular-electronic induction accelerometer cavity structure and an elastic mold structure;
FIG. 2 is a modeling diagram of a cavity structure and an elastic mode structure of the molecular-electronic induction type accelerometer;
FIG. 3 is a diagram of the shock response state of the elastic mode structure of the molecular-electronic induction type accelerometer;
FIG. 4 is a diagram of the effect of the elastic mode structure of the molecular-electronic induction type accelerometer at the end of response;
FIG. 5 is a view of the elastic modulus structure of the present invention in a state of motion under impact;
fig. 6 is a diagram showing a state of motion of a conventional membrane structure under impact.
Detailed Description
The fluid dynamics working principle model of the molecular-electronic induction type accelerometer comprises the following steps:
the movement of the electrolyte in the reaction cavity is completely described by a Navier-Stokes equation:
wherein the content of the first and second substances,
is time;
is the electrolyte density;
is the electrolyte viscosity;
acceleration excited by external vibration;
the output equation of the molecular-electron induction type accelerometer and the ion migration effect of the electrolyte are described by using a Nernst-Plank equation:
wherein the content of the first and second substances,
is the current density;
,
and
is the conductivity of the ions in the electrolyte;
,
and
represents the concentration of various ions in the electrolyte;
representing the potential difference between the cathode and the anode;
is a vector of velocity; f is a Faraday constant;
is the gas constant;
wherein the content of the first and second substances,
is the electrode surface normal vector parameter;
and
is the reaction constant of the cathode and anode;n=1 is the number of charges of the dotted ions;
0.5, the conversion coefficient of electrode electrons to charges;Uis the voltage applied between the cathode and the anode;
is the equilibrium potential of the electrochemical reaction;
the model is established as follows:
establishing an interface equation of the thin film structure and the electrolyte:
wherein, the first and the second end of the pipe are connected with each other,
is the contour line of the interface, which determines the position of the elastic membrane structure at a certain time;
then represents the velocity vector of the fluid;
is the thickness distribution of the elastic film;
the global structural equation for density and viscosity across the interface is as follows:
wherein the content of the first and second substances,
and
respectively the density and viscosity of the electrolyte, and
and
density and viscosity of the elastic film;
in terms of kinetics, the Cahn-hilard equation is used to describe the kinetic relationship between solid-liquid two-phase flows:
wherein, the first and the second end of the pipe are connected with each other,
is the mobility of the electrolyte;
is the mixed energy density at the interface of the solid-liquid two-phase flow;
the mixed energy density and film thickness can be described by the surface tension equation, which is:
throughout the process, the mass and momentum transfer equations incorporate a fluid dynamics model with the following form of relationship:
wherein, the first and the second end of the pipe are connected with each other,
is the density of the electrolyte;
is time;
is the velocity vector of the electrolyte;
is the acceleration of gravity;
is a vector of the surface tension of a liquid.
Through the joint solution of the above equations, the elastic film structure of the molecular-electronic induction type accelerometer can be effectively modeled.
The cavity and the thin film structure of the molecular-electronic induction type accelerometer are shown in figure 2. Wherein, the top is an elastic membrane structure, and the lower end is a cavity for packaging electrolyte.
The invention relates to a design method of an elastic thin film element for a molecular-electronic induction type accelerometer. The invention is based on the establishment of a working principle model of the molecular-electronic induction type accelerometer, and can carry out in-depth analysis on the structure and the material of the elastic thin film element forming the molecular-electronic induction type accelerometer. Through software analysis and simulation calculation, the required elastic thin film element can be customized, so that the influence of the mismatching of the elastic thin film element of the sensor on the dynamic noise of the sensor is eliminated, the elastic thin film element can be adapted to the molecular-electronic induction type accelerometer with any structure, the dynamic noise generated by the mismatching of the thin film is reduced, and the adverse influence caused by the dynamic noise is eliminated.
1. Determining the single-cavity structure parameters of the molecular-electronic induction type accelerometer according to design indexes and requirements;
2. establishing a mathematical model of the elastic film element of the molecular-electronic induction type accelerometer according to a working principle model of the molecular-electronic induction type accelerometer;
3. solving and realizing the mathematical model by using finite element analysis software to obtain an impact response state diagram of the elastic film element of the molecular-electronic induction type accelerometer;
4. and screening and evaluating the elastic film element of the molecular-electronic induction type accelerometer by using the impact response state diagram.
For the cavity with the same parameter size, two elastic die structures with different hardness are designed. Meanwhile, the same acceleration shock response signal is given to the molecular-electronic induction type accelerometer. And the quality evaluation of the elastic mold structures with two different hardness is completed by observing the motion condition of the film structure on the reaction cavity.
FIG. 3 shows the same acceleration signal as excitation for two accelerometer cavities of the same shape;
under the excitation of the same acceleration signal, the elastic mode structure above generates deformation and vibration to a certain extent due to the impact motion response of the electrolyte. Meanwhile, the elastic die element above the electrolyte also eliminates the impact response to a certain degree, so that the elastic die element can be quickly recovered to a stable state, and the next acceleration impact signal can be timely reacted.
After 0.3 second, the movement of the electrolyte under acceleration excitation has been completed by providing the elastic mold with higher hardness. The elastic module structure with lower hardness is still excited by residual energy under the impact response of the electrolyte, and the impact signal which should be suppressed cannot be effectively eliminated.
Through the method mentioned in the summary of the invention, not only can qualitative evaluation be carried out on different types of elastic modulus effects from corresponding time, but also the real-time motion situation of the elastic modulus structure can be obtained through relevant operations in the method. Its relationship in time and speed.
As can be seen from fig. 5 and 6, at the beginning, the elastic modes of two different materials are excited by the same degree of acceleration signal. Within the following 0.5 second, the elastic die structure with high hardness can effectively inhibit the movement of the electrolyte generated by the signal within the time period, and finally the electrolyte is recovered to a stable state within 0.5 second; in the case of the structure with the softer elastic mode, the elastic force generated by the elastic mode under vibration excitation cannot effectively restrict the electrolyte in the moving direction, so that the moving state of the elastic thin-film element is unstable, and is accompanied by a self-excitation phenomenon, which causes aliasing of the current residual signal and the next excitation signal, and seriously affects the measuring range and the using effect of the sensor.
Therefore, the application result of the invention can effectively evaluate and screen the elastic film element of the molecular-electronic induction type accelerometer; the effect of the elastic thin film element of the molecular-electronic induction type accelerometer on the electrolyte flow velocity field can be described in detail. Through comprehensive description of an electrolyte fluid equation and an elastic mode element modeling method, an adaptation relation curve of different molecular-electronic induction type accelerometer elastic mode structures can be drawn, and screening and evaluation of the molecular-electronic induction type accelerometer elastic mode structures can be achieved through the curve.
The invention is designed based on a working principle model of a molecular-electronic induction type accelerometer elastic mode structure. The elastic film element of the molecular-electronic induction type accelerometer can be effectively designed through the modeling method, and the elastic film element can be ensured to accurately and reliably work in accelerometers with different cavity structures.
The invention provides a design method for an elastic film element of a molecular-electronic induction type accelerometer, which is established for the first time based on the working principle of the molecular-electronic induction type accelerometer and provides a motion curve of the elastic film in the working process through the numerical operation of a computer. The specific requirements are as follows:
1. a mathematical model of the elastic thin film element is established based on a molecular-electronic induction type accelerometer model;
2. and (3) obtaining a motion curve of the elastic film element of the molecular-electronic induction type accelerometer in the working process based on the model.
Specific examples are as follows:
TABLE 1 Performance index of the molecular-electronic induction accelerometer Chamber and external Circuit
The structural design of the elastic thin film element of the molecular-electronic induction type accelerometer (detailed technical indexes are shown in table 1):
1. the cavity and the elastic thin film element of the molecular-electronic induction type accelerometer are shown in figure 1.
2. The structural parameters of the molecular-electronic induction velocimeter are as follows:
the simulation parameters such as the size of a via hole, the concentration of electrolyte, the viscosity, the size of a reaction cavity and the like are given by a table;
3. and (3) obtaining a graph of the impact response effect of the elastic thin film element of the molecular-electronic induction type accelerometer through numerical modeling (figures 5 and 6).
Claims (1)
1. A design method based on a molecular-electronic induction type accelerometer elastic thin film element is characterized by comprising the following steps: the method comprises the following steps:
(1) determining the single-cavity structure parameters of the molecular-electronic induction type accelerometer according to design indexes and requirements;
(2) establishing a mathematical model of the elastic film element of the molecular-electronic induction type accelerometer according to a working principle model of the molecular-electronic induction type accelerometer;
(3) solving and realizing the mathematical model by using finite element analysis software to obtain an impact response state diagram of the elastic film element of the molecular-electronic induction type accelerometer;
(4) screening and evaluating an elastic thin film element of the molecular-electronic induction type accelerometer by using the impact response state diagram;
the fluid dynamic working principle model of the molecular-electronic induction type accelerometer is as follows:
the movement of the electrolyte in the reaction cavity is completely described by a Navier-Stokes equation:
wherein t is time; rho is the electrolyte density; mu is the viscosity of the electrolyte;
acceleration excited by external vibration;
the output equation of the molecular-electron induction type accelerometer and the ion migration effect of the electrolyte are described by using a Nernst-Plank equation:
m＝D/(RT) (7)
wherein the content of the first and second substances,
is the current density;
D I -and D K+ Is the conductivity of the ions in the electrolyte;
and
represents the concentration of various ions in the electrolyte;
representing the potential difference between the cathode and the anode;
is a vector of velocity; f is a Faraday constant; r is 8.314J/(kg · mol) is the gas constant;
wherein the content of the first and second substances,
is the electrode surface normal vector parameter; k is a radical of a And k c Is the reaction constant of the cathode and anode; n is 1, the number of charges of the dotted ions; alpha is 0.5, which is the conversion coefficient of electrode electrons and charges; u is the voltage applied between the cathode and the anode; e 0 Is the equilibrium potential of the electrochemical reaction;
the model is established as follows:
establishing an interface equation of the thin film structure and the electrolyte:
wherein phi is the contour line of the interface and determines the position of the elastic membrane structure at a certain time;
then represents the velocity vector of the fluid; epsilon is the thickness distribution of the elastic membrane;
the global structural equation for density and viscosity across the interface is as follows:
ρ＝ρ l +(ρ m -ρ l )Φ (10)
μ＝μ l +(μ m -μ l )Φ (11)
where ρ is l And mu l Density and viscosity of the electrolyte, respectively, and ρ m And mu m Density and viscosity of the elastic film;
in terms of kinetics, the Cahn-hilard equation is used to describe the kinetic relationship between solid-liquid two-phase flows:
wherein γ is the mobility of the electrolyte; lambda is the mixed energy density at the interface of the solid-liquid two-phase flow;
the mixed energy density and film thickness can be described by the surface tension equation, which is:
throughout the process, the mass and momentum transfer equations incorporate a fluid dynamics model with the following form of relationship:
wherein rho is the density of the electrolyte; t is time;
is the velocity vector of the electrolyte; g is the acceleration of gravity;
is a vector of the surface tension of a liquid.
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