CN106938409A - A kind of ultra-high speed and ultraprecise magnetically grinding Micro fabrication device - Google Patents

A kind of ultra-high speed and ultraprecise magnetically grinding Micro fabrication device Download PDF

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Publication number
CN106938409A
CN106938409A CN201710224936.6A CN201710224936A CN106938409A CN 106938409 A CN106938409 A CN 106938409A CN 201710224936 A CN201710224936 A CN 201710224936A CN 106938409 A CN106938409 A CN 106938409A
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CN
China
Prior art keywords
permanent magnet
ultraprecise
poles
fixed seat
ultra
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CN201710224936.6A
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Chinese (zh)
Inventor
王锐
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Individual
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Individual
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Priority to CN201710224936.6A priority Critical patent/CN106938409A/en
Publication of CN106938409A publication Critical patent/CN106938409A/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B1/00Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
    • B24B1/005Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes using a magnetic polishing agent
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/14Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the temperature during grinding
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B55/00Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
    • B24B55/02Equipment for cooling the grinding surfaces, e.g. devices for feeding coolant
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B55/00Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
    • B24B55/04Protective covers for the grinding wheel
    • B24B55/045Protective covers for the grinding wheel with cooling means incorporated

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

The present invention relates to a kind of ultra-high speed and ultraprecise magnetically grinding Micro fabrication device, belong to lapping device technical field, including:Workbench and the magnet assembly and drive component being arranged on workbench;Magnet assembly includes the first permanent magnet, the second permanent magnet and two pole pieces;The N poles of first permanent magnet are oppositely arranged with the S poles of the second permanent magnet, and the wide end of two pole pieces is connected with the N poles of the first permanent magnet and the S poles of the second permanent magnet respectively, and the narrow end of two pole pieces is relative and with interval;Drive component includes the driving rotor for being used to drive machined object to rotate, and drives rotor towards interval setting.The present invention not only can reduce process time, but also can meet the high efficiency of the various parts for having accurate demand of fine and very minor diameter machining object and part irregular shape, the magnetically grinding Micro fabrication of ultraprecise, improve the service life of part;Meanwhile, its also have it is simple in construction, the advantages of easy to operate.

Description

A kind of ultra-high speed and ultraprecise magnetically grinding Micro fabrication device
Technical field
The invention belongs to lapping device technical field, in particular to a kind of ultra-high speed and ultraprecise magnetically grinding micron Processing unit (plant).
Background technology
The fast development and the continuous improvement of people's living standard of modern science and technology so that provided as each department of national economy The mechanical industry of technical equipment, either requires that acquirement is developed rapidly in terms of process technology or process equipment.People couple The performance of many products, quality is proposed higher and higher requirement, to the precision component and precision electronic element of complicated shape Surface quality precise measure have higher requirement, expect with cheap price, obtain multiple functional, it is functional, use Reliable quality product.
Medically, the interior table of joint prosthesis, human coronaries' support, the surface of artificial tooth and artificial capillary Face can threaten the health of patient due to System of Detecting Surface Defects For Material, and serious may result in is fatal;In machinery manufacturing industry, parts list Face Quality Down, roughness value is big and bad micro-geometrical structure can not only influence the presentation quality of material, and wear-resisting Coefficient is reduced, and perishable and fatiguability can all have significant effect to the performance of material;In semi-conductor industry, the appearance of gas is conveyed Device pipeline, pharmaceutical machine, food machinery the cleaning of logistics pipeline inner surface it is same most important, tubing during fabrication, on the one hand Uneven and pollutant the attachment of inner surface of pipeline is unavoidable, exactly because and these unavoidable influences The factor, the purity to gas, liquid generates big influence, and the Quality Down of another aspect inner surface of pipeline can equally influence defeated Send efficiency.For the product that some products especially withstand shocks with alternate load, the roughness value reduction on its general surface, Its service life can reduce by 50% or so.
In order to realize that these materials can show classic mechanical property and to have given play to prominent function, as new One kind in special processing method, magnetically grinding processing method is applied by each field.Magnetically grinding processing is to utilize magnetic The magnetic force that abrasive grains are produced in magnetic field greatly improves the surface roughness of machined object, a kind of processing side of precision size degree Method.The quality in Precision Machining face is the surface grade of machined surface, i.e. surface roughness, can according to the presence or absence of residual stress come Judge.Wherein, the main cause on the grade influence of machined surface is fine including plastic deformation, the change of residual stress and material Change of tissue etc., and the formation of the plastic deformation layer in Precision Machining face has various forms of to the physical property of machine components Influence.
The content of the invention
The problem of in order to solve to can not meet demand on traditional diamond-making technique, it is an object of the invention to provide a kind of superelevation Fast ultraprecise magnetically grinding Micro fabrication device, with the surface roughness to machining object, precision size degree has what is significantly improved Meanwhile, the service life of part is improved, process time is reduced, fine and very minor diameter machining object is met and part is not advised The then high efficiency of the various parts for having accurate demand of shape, the magnetically grinding Micro fabrication of ultraprecise, and make it have structure Simply, easy to operate advantage.
The technical solution adopted in the present invention is:
A kind of ultra-high speed and ultraprecise magnetically grinding Micro fabrication device, it includes:Workbench and it is arranged at the work Magnet assembly and drive component on platform;The magnet assembly includes the first permanent magnet, the second permanent magnet and two Pole pieces;The relative two ends of the pole pieces are respectively wide end and narrow end;The N poles of first permanent magnet with it is described The S poles of second permanent magnet are oppositely arranged, and the wide end N poles respectively with first permanent magnet of described two pole pieces Connected with the S poles of second permanent magnet, the narrow end of described two pole pieces is relative and with interval;The drive component Including the driving rotor for driving machined object to rotate, the driving rotor is towards the interval setting.
Ultra-high speed and ultraprecise magnetically grinding Micro fabrication device based on said structure, is easy to control quilt by driving rotor The rotation of machining object, and machined object is placed in the interval between two pole pieces;Pass through what is be oppositely arranged in magnet assembly First permanent magnet and the second permanent magnet can utilize the magnetically grinding material shape being filled in the interval between two pole pieces Into the magnetically grinding brush of strength, and the narrow end for two pole pieces being arranged on the first permanent magnet and the second permanent magnet Magnetic intensity can be made to form the magnetic force of maximal density on the surface of machined object, the operating efficiency of magnetically grinding is improved, so that Have to the surface roughness of machining object, precision size degree significantly improve while, will not produce and be kept away in basic processing method The presence of unavoidable residual stress, i.e., will not produce plastic deformation layer in process, can be with many raising parts Service life;Moreover, it is also possible to reduce process time, it is satisfied with fine and very minor diameter machining object and part is not advised The then high efficiency of the various parts for having accurate demand of shape, the magnetically grinding Micro fabrication of ultraprecise, and it has structure Simply, easy to operate advantage.
Meanwhile, the ultra-high speed and ultraprecise magnetically grinding Micro fabrication device can reach 80000rmp High Speed machining, At present in magnetically grinding manufacture field without that can reach such High Speed machining, 80000rmp process velocity is world-class One breakthrough.
Wherein, magnetically grinding material can be the mixing with ferromagnetic graininess abrasive material or ferromagnetic material and abrasive material Thing.
Further, the magnet assembly also includes mounting, the S poles of first permanent magnet and second permanent magnet N poles connected by the mounting;The mounting is made of magnetic material.
In order to preferably improve the mounting for being also provided with being made in processing efficiency, magnet assembly of magnetic material, and make The S poles of first permanent magnet are connected with the N poles of the second permanent magnet by mounting, can so make the first permanent magnet and second What the magnetic field between permanent magnet was concentrated links together, and preferably provides the action effect of magnet assembly, makes processing effect more Improve well.
Further, the mounting includes support column, crossbeam and the first linking arm and the second linking arm;The crossbeam is set In on the support column;One end of first linking arm is connected with the S poles of first permanent magnet, first linking arm The other end fit and be slidably matched with the crossbeam with the crossbeam;One end of second linking arm and described second permanent The N poles connection of magnet, two one end of second linking arm are fitted with the crossbeam and are slidably matched with the crossbeam.
Mounting based on said structure, by the first linking arm and the second linking arm fitted and be slidably matched with crossbeam, During the distance at interval of the first permanent magnet and the second permanent magnet is adjusted so that the S poles of the first permanent magnet and the The N poles of two permanent magnets remain connection status by crossbeam, so as to be conducive to the first permanent magnet and the second permanent magnet Interval distance regulation, it is applied to the different machined object of size specification.
Further, be provided with the workbench in base panel, the base panel be provided with the first permanent magnet consolidate Reservation and the second permanent magnet fixed seat, and the first permanent magnet fixed seat and the second permanent magnet fixed seat are relative Set, first permanent magnet and second permanent magnet are respectively arranged at the first permanent magnet fixed seat and described In second permanent magnet fixed seat;The base panel is made of nonmagnetic substance, and the mounting is arranged at the base surface On plate.
For the ease of being fixedly installed for the first permanent magnet and the second permanent magnet, especially for avoiding in ultrahigh rotating speed When vibration influence, on the table be provided with base panel, and in base panel be provided with corresponding first permanent magnet Fixed seat and the second permanent magnet fixed seat, so that the installation for not only facilitating the first permanent magnet and the second permanent magnet is consolidated It is fixed, and improve the stability that the first permanent magnet and the second permanent magnet are fixed, it is ensured that the processing effect in ultrahigh rotating speed Really.
Meanwhile, base panel is made of nonmagnetic substance can prevent the first permanent magnet and the second permanent magnet to base Plinth panel passes on magnetic force, makes what the magnetic force of the first permanent magnet and the second permanent magnet more concentrated to act on machined object, from And reach the magnetically grinding processing effect of more efficient fruit.
Further, guide rail and the first telescoping mechanism and the second telescoping mechanism are provided with the base panel;Described One permanent magnet fixed seat and the second permanent magnet fixed seat may be contained within the guide rail;First telescoping mechanism Expansion link is connected with the first permanent magnet fixed seat, the expansion link of second telescoping mechanism and second permanent magnet Fixed seat is connected;First telescoping mechanism and second telescoping mechanism control the first permanent magnet fixed seat and second Permanent magnet fixed seat is moved back and forth along the guide rail, and adjusts the distance at the interval between described two pole pieces.
For the ease of control to adjust two pole pieces between interval distance, in base panel be provided with guide rail and First telescoping mechanism and the second telescoping mechanism, so, can be divided by the expansion link of the first telescoping mechanism and the second telescoping mechanism Do not drive the first permanent magnet fixed seat and the second permanent magnet fixed seat done on guide rail towards or away from reciprocating motion, from And the regulation of the distance at interval between two pole pieces is realized, the machined object for making it be applied to different width dimensions expands The big scope of application.
Further, it is additionally provided with vibrating mechanism on the workbench;The base panel is slideably positioned in the workbench On, and the actuating station of the vibrating mechanism is connected with the base panel, the vibrating mechanism controls the base panel direction The driving rotor is moved back and forth.
In order that ultra-high speed and ultraprecise magnetically grinding Micro fabrication device goes for the machined object of different length, especially It is to improve processing effect to coordinate High-speed machining, vibrating mechanism is also provided with the table, and slide base panel It is dynamic to be arranged on workbench, so drive axis direction of the base panel along driving rotor reciprocal by the actuating station of vibrating mechanism Motion, makes axis direction vibrations of the magnet assembly along driving rotor, it is achieved thereby that the necessarily regulation of processing distance, makes it can be with Suitable for the machined object of different length, processing efficiency is preferably provided;More importantly for processing efficiency, surface is thick Processing effect of the precision such as rough value, micron order diameter, out of roundness under vibrations is considerable.Experiment shows, does not shake Processing effect under the conditions of dynamic is the processing effect for being nothing like adding under the conditions of vibrations, and according to different processing materials Material, the index of the vibrations of vibrating mechanism is that diversification can be adjusted, such as vibration frequency is 3Hz, 5Hz, 10Hz or 20Hz.
Meanwhile, in order to improve the stable phase of base panel movement, guide rail can be on the table set, base panel is slided It is dynamic to be arranged on guide rail, so as to improve the stability of base panel movement.
As other implementations, it can also fix magnet assembly, drive component is slideably positioned on workbench, this Sample drives the reciprocating motion of drive component by vibrating mechanism.
Further, enclosed hood is additionally provided with the base panel, and the enclosed hood and the base panel are detachable Connection;The enclosed hood is arranged in the confined space with base panel formation confined space, the magnetic mechanism.
In order to provide the security of processing, prevent that other debris from falling into magnet assembly and machined object is in process In come off and fly out, enclosed hood is provided with base panel, magnet assembly can be played a protective role, prevented by enclosed hood Other debris are fallen into magnet assembly and machined object comes off fly out in process, so as to improve the safety of processing Property.
Further, the enclosed hood is provided with inert gas inlet, and the inert gas inlet with it is described closed Space is connected.
In process, in order to prevent because high temperature causes the chemistry such as the generation oxidation of machined object surface, nitridation and hydrogenation instead Should, inert gas inlet is provided with enclosed hood, consequently facilitating being injected inert gas into by inert gas inlet close Close in cover, the machined object in magnet assembly is played a protective role, it is to avoid the generation of chemical reaction.
Further, the enclosed hood is provided with coolant or cooling gas inlet, and the coolant or cooling gas Inlet is connected with the confined space.
Further, temperature sensor is provided with the enclosed hood, and the temperature sensor is electrically connected with control system; The temperature sensor is used to detect the temperature in the confined space, and produces induced signal;The control system receives institute State the induced signal of temperature sensor, and according to actuated signal control the coolant of coolant or cooling gas inlet or The injection rate of cooling gas.
By the coolant or cooling gas inlet set on enclosed hood, it is easy to coolant or cooling gas being passed through close In sealing cover, the machined object in magnet assembly is played a part of cooling, can bigizationner the precision machined mistake of reduction Difference.Wherein, portion of material can be using the cold processing mode processed.
Meanwhile, the injection rate for the ease of control coolant or cooling gas can set TEMP in seal closure Device, and temperature sensor is electrically connected with control system, so, control system can according to the monitoring temperature of temperature sensor and When automatically adjust the injection rate and injection rate of coolant or cooling gas.
Above-mentioned enclosed hood can also avoid the loss of inert gas and coolant or cooling gas, so as to improve inertia The action effect of gas and coolant or cooling gas.
Beneficial effects of the present invention:
Ultra-high speed and ultraprecise magnetically grinding Micro fabrication device provided by the present invention, in the rough surface to machining object Degree, precision size degree have while significantly improve, and will not produce depositing for residual stress unavoidable in basic processing method , i.e., plastic deformation layer will not be produced in process, can be with the service life of many raising parts;Moreover, may be used also To reduce process time, the accurate demand that has of fine and very minor diameter machining object and part irregular shape is satisfied with The high efficiency of various parts, the magnetically grinding Micro fabrication of ultraprecise, and it has advantage simple in construction, easy to operate.
Brief description of the drawings
In order to illustrate more clearly about the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing The accompanying drawing to be used needed for having technology description is briefly described, it should be apparent that, drawings in the following description are only this Some embodiments of invention, for those of ordinary skill in the art, on the premise of not paying creative work, can be with Other accompanying drawings are obtained according to these accompanying drawings.
Fig. 1 is the structural representation of the ultra-high speed and ultraprecise magnetically grinding Micro fabrication device described in embodiment;
Fig. 2 is the top view of the ultra-high speed and ultraprecise magnetically grinding Micro fabrication device described in embodiment;
Fig. 3 is the structural representation of magnet assembly described in embodiment and drive component;
Fig. 4 is the structural representation of the pole pieces described in embodiment;
Fig. 5 is the front view of the pole pieces described in embodiment.
Marked in figure:
Workbench 101, drive component 102 drives rotor 103, magnet assembly 104, vibrating mechanism 105, the first permanent magnetic Iron 106, the second permanent magnet 107, the first telescoping mechanism 108, the second telescoping mechanism 109, pole pieces 110, the first linking arm 111, the second linking arm 112, the first permanent magnet fixed seat 113, the second permanent magnet fixed seat 114, support column 115, crossbeam 116, base panel 117, narrow end 118.
Embodiment
To make the object, technical solutions and advantages of the present invention clearer, technical scheme will be carried out below Detailed description.Obviously, described embodiment is only a part of embodiment of the invention, rather than whole embodiments.Base Embodiment in the present invention, those of ordinary skill in the art are resulting on the premise of creative work is not made to be owned Other embodiment, belongs to the scope that the present invention is protected.
Embodiment
As Figure 1-Figure 5, a kind of ultra-high speed and ultraprecise magnetically grinding Micro fabrication device is present embodiments provided, it is wrapped Include:Workbench 101 and the magnet assembly 104 and drive component 102 being arranged on workbench 101.
Wherein, magnet assembly 104 includes the first permanent magnet 106, the second permanent magnet 107 and two pole pieces 110;The relative two ends of pole pieces 110 are respectively wide end and narrow end 118;N poles of first permanent magnet 106 and second permanent The S poles of magnet 107 are oppositely arranged, and the wide end N poles and second respectively with the first permanent magnet 106 of two pole pieces 110 The S poles connection of permanent magnet 107, the narrow end 118 of two pole pieces 110 is relative and with interval;Drive component 102 includes using The driving rotor 103 rotated in driving machined object, drives rotor 103 towards interval setting.
As a kind of preferred scheme of the present embodiment, above-mentioned magnet assembly 104 also includes mounting, the first permanent magnet 106 S poles be connected with the N poles of the second permanent magnet 107 by mounting;Mounting is made of magnetic material.
Specifically, mounting includes support column 115, the linking arm 111 of crossbeam 116 and first and the second linking arm 112;Crossbeam 116 are arranged on support column 115;One end of first linking arm 111 is connected with the S poles of the first permanent magnet 106, the first linking arm 111 other end is fitted with crossbeam 116 and is slidably matched with crossbeam 116;One end of second linking arm 112 and the second permanent magnet 107 N poles connection, two one end of the second linking arm 112 are fitted with crossbeam 116 and are slidably matched with crossbeam 116.
Meanwhile, it is provided with workbench 101 and is provided with the first permanent magnet in base panel 117, base panel 117 and fixes The permanent magnet fixed seat 114 of seat 113 and second, and the first permanent magnet fixed seat 113 and the phase of the second permanent magnet fixed seat 114 To setting, the first permanent magnet 106 and the second permanent magnet 107 are respectively arranged at the first permanent magnet fixed seat 113 and second In permanent magnet fixed seat 114;Base panel 117 is made of nonmagnetic substance, and mounting is arranged at the base panel 117 On.
Guide rail and the first telescoping mechanism 108 and the second telescoping mechanism 109 are provided with base panel 117;First is permanent The permanent magnet fixed seat 114 of magnet fixed seat 113 and second may be contained within guide rail;The expansion link of first telescoping mechanism 108 with First permanent magnet fixed seat 113 is connected, and the expansion link of the second telescoping mechanism 109 is connected with the second permanent magnet fixed seat 114; First telescoping mechanism 108 and the second telescoping mechanism 109 control the first permanent magnet fixed seat 113 and the second permanent magnet fixed seat 114 move back and forth along guide rail, and adjust the distance at the interval between two pole pieces 110.
As the progressive optimization of above-mentioned preferred scheme, vibrating mechanism 105 is additionally provided with workbench 101;Base panel 117 It is slideably positioned on workbench 101, and the actuating station of vibrating mechanism 105 is connected with base panel 117, vibrating mechanism 105 is controlled Axis direction of the base panel 117 along driving rotor 103 is moved back and forth toward and away from driving rotor 103.
Enclosed hood is additionally provided with the security of processing, base panel 117 in order to provide, and enclosed hood and base panel 117 are detachably connected;Enclosed hood is arranged in confined space with the formation confined space of base panel 117, magnetic mechanism.
Enclosed hood is provided with inert gas inlet and coolant or cooling gas inlet;Inert gas inlet and Coolant or cooling gas inlet are connected with confined space respectively.
Wherein, temperature sensor is provided with enclosed hood, and temperature sensor is electrically connected with control system;Temperature sensor For detecting the temperature in confined space, and produce induced signal;Control system receives the induced signal of temperature sensor, and root According to the injection rate and injection rate of the coolant or cooling gas of actuated signal control coolant or cooling gas inlet.
In the present embodiment, the first telescoping mechanism 108, the second telescoping mechanism 109 and vibrating mechanism 105 can be selected electronic Expansion link, hydraulically extensible bar or screw mechanism etc..
In the present embodiment, in order to avoid manually operated, realize ultra-high speed and ultraprecise magnetically grinding Micro fabrication device from Dynamicization is controlled, and can also be connected its each mechanism with control system with component, is controlled by the control program of control system each The collaborative work of mechanism and component, so as to realize Automated condtrol.
In the present embodiment, in order to improve the stabilization that the expansion link of the first telescoping mechanism 108 and the second telescoping mechanism 109 works Property, push pedal can be set in the end of the first telescoping mechanism 108 and the expansion link of the second telescoping mechanism 109, so as to pass through push pedal So that the first permanent magnet fixed seat 113 and the second permanent magnet fixed seat 114 are more uniformly stressed, so that expansion link Work more stablize.
In the present embodiment, in order to improve the stability of the movement of base panel 117, guide rail can be set on workbench 101, Base panel 117 is slidably arranged on guide rail, moved so that base panel 117 can be improved by the spacing guide effect of guide rail Dynamic stability.
Ultra-high speed and ultraprecise magnetically grinding Micro fabrication device based on said structure, essence is processed using magnetically grinding material The surface of close part, it not only can reduce process time, but also can meet fine and very minor diameter machining object The magnetically grinding Micro fabrication of high efficiency, ultraprecise;Its also have it is simple in construction, the advantages of easy to operate.
Meanwhile, the ultra-high speed and ultraprecise magnetically grinding Micro fabrication device based on said structure breaches 80000rpm's Ultrahigh rotating speed is processed, and it is a world-class breakthrough, and the rough surface value Ra of material can be made in the several seconds from 0.35 μm or so Reduce to 0.03 μm or so, the processing of ultraspeed not only can significantly increase processing efficiency, also reached and significantly subtract The processing efficiency of small process time;And the fixed seat in base panel can also preferably avoid 80000rpm ultrahigh speed from turning Dynamic vibration influence.
The foregoing is only a specific embodiment of the invention, but protection scope of the present invention is not limited thereto, any Those familiar with the art the invention discloses technical scope in, change or replacement can be readily occurred in, should all be contained Cover within protection scope of the present invention.Therefore, protection scope of the present invention should be based on the protection scope of the described claims.

Claims (10)

1. a kind of ultra-high speed and ultraprecise magnetically grinding Micro fabrication device, it is characterised in that including:Workbench and it is arranged at institute State the magnet assembly and drive component on workbench;The magnet assembly include the first permanent magnet, the second permanent magnet with And two pole pieces;The relative two ends of the pole pieces are respectively wide end and narrow end;The N poles of first permanent magnet Be oppositely arranged with the S poles of second permanent magnet, and described two pole pieces wide end respectively with first permanent magnetic The N poles of iron and the connection of the S poles of second permanent magnet, the narrow end of described two pole pieces are relative and with interval;It is described Drive component includes the driving rotor for being used to drive machined object to rotate, and the driving rotor is towards the interval setting.
2. ultra-high speed and ultraprecise magnetically grinding Micro fabrication device according to claim 1, it is characterised in that the magnetic Component also includes mounting, and the S poles of first permanent magnet are connected with the N poles of second permanent magnet by the mounting; The mounting is made of magnetic material.
3. ultra-high speed and ultraprecise magnetically grinding Micro fabrication device according to claim 2, it is characterised in that the mounting Including support column, crossbeam and the first linking arm and the second linking arm;The crossbeam is arranged on the support column;Described first One end of linking arm is connected with the S poles of first permanent magnet, and the other end of first linking arm is fitted with the crossbeam And be slidably matched with the crossbeam;One end of second linking arm is connected with the N poles of second permanent magnet, and described second Fit and be slidably matched with the crossbeam with the crossbeam in two one end of linking arm.
4. ultra-high speed and ultraprecise magnetically grinding Micro fabrication device according to claim 3, it is characterised in that the work It is provided with platform in base panel, the base panel and is provided with the first permanent magnet fixed seat and the second permanent magnet is fixed Seat, and the first permanent magnet fixed seat and the second permanent magnet fixed seat be oppositely arranged, first permanent magnet It is respectively arranged at second permanent magnet in the first permanent magnet fixed seat and the second permanent magnet fixed seat; The base panel is made of nonmagnetic substance, and the mounting is arranged in the base panel.
5. ultra-high speed and ultraprecise magnetically grinding Micro fabrication device according to claim 4, it is characterised in that the basis Guide rail and the first telescoping mechanism and the second telescoping mechanism are provided with panel;The first permanent magnet fixed seat and described Two permanent magnet fixed seats may be contained within the guide rail;The expansion link of first telescoping mechanism and first permanent magnet Fixed seat is connected, and the expansion link of second telescoping mechanism is connected with the second permanent magnet fixed seat;Described first stretches Mechanism and second telescoping mechanism control the first permanent magnet fixed seat and the second permanent magnet fixed seat to be led described in Rail is moved back and forth, and adjusts the distance at the interval between described two pole pieces.
6. ultra-high speed and ultraprecise magnetically grinding Micro fabrication device according to claim 4, it is characterised in that the work Vibrating mechanism is additionally provided with platform;The base panel is slideably positioned on the workbench, and the execution of the vibrating mechanism End is connected with the base panel, and the vibrating mechanism controls the base panel to be moved back and forth towards the driving rotor.
7. ultra-high speed and ultraprecise magnetically grinding Micro fabrication device according to claim 4, it is characterised in that the basis Enclosed hood is additionally provided with panel, and the enclosed hood is detachably connected with the base panel;The enclosed hood and the base Plinth panel formation confined space, the magnetic mechanism is arranged in the confined space.
8. ultra-high speed and ultraprecise magnetically grinding Micro fabrication device according to claim 7, it is characterised in that described closed Cover is provided with inert gas inlet, and the inert gas inlet is connected with the confined space.
9. ultra-high speed and ultraprecise magnetically grinding Micro fabrication device according to claim 7, it is characterised in that described closed Cover is provided with coolant or cooling gas inlet, and the coolant or cooling gas inlet connect with the confined space It is logical.
10. ultra-high speed and ultraprecise magnetically grinding Micro fabrication device according to claim 9, it is characterised in that described close Close and temperature sensor is provided with cover, and the temperature sensor is electrically connected with control system;The temperature sensor is used to examine The temperature surveyed in the confined space, and produce induced signal;The control system receives the sensing letter of the temperature sensor Number, and according to actuated signal control the coolant or cooling gas of coolant or cooling gas inlet injection rate.
CN201710224936.6A 2017-04-07 2017-04-07 A kind of ultra-high speed and ultraprecise magnetically grinding Micro fabrication device Pending CN106938409A (en)

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Application publication date: 20170711