CN106935723A - A kind of OLED and preparation method, display panel, drying and electric field generation device - Google Patents

A kind of OLED and preparation method, display panel, drying and electric field generation device Download PDF

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Publication number
CN106935723A
CN106935723A CN201710298988.8A CN201710298988A CN106935723A CN 106935723 A CN106935723 A CN 106935723A CN 201710298988 A CN201710298988 A CN 201710298988A CN 106935723 A CN106935723 A CN 106935723A
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layer
substrate
oled
dried
electric field
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CN106935723B (en
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代青
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BOE Technology Group Co Ltd
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BOE Technology Group Co Ltd
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/10OLEDs or polymer light-emitting diodes [PLED]
    • H10K50/17Carrier injection layers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass

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  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Electroluminescent Light Sources (AREA)

Abstract

The embodiment of the present invention provides a kind of OLED and preparation method, display panel, drying and electric field generation device, is related to display field, the molecular orientation arrangement in the function implanted layer in the OLED, so as to improve the luminous efficiency of the OLED.The OLED is included in the anode and negative electrode being oppositely arranged on substrate, and between anode and negative electrode and the hole transmission layer, luminescent layer, the electron transfer layer that are set in turn on anode;OLED also includes function implanted layer, organic molecule in the function implanted layer oriented alignment on the direction that vertical or near normal this layer is sprawled;Function implanted layer is the hole injection layer between anode and hole transmission layer, and/or, the electron injecting layer between negative electrode and electron transfer layer.

Description

A kind of OLED and preparation method, display panel, drying and electric field generation device
Technical field
The present invention relates to display field, more particularly to a kind of OLED and preparation method, display panel, drying and electric field Generating means.
Background technology
Organic Light Emitting Diode (Organic Light Emitting Diode, abbreviation OLED) device because its have it is spontaneous The advantages of light, frivolous, low in energy consumption, high-contrast, colour gamut high, achievable Flexible Displays, as focus of concern in recent years, And the focus of people is also slowly from previous decades for the synthesis in new material, it is gradually converted into current to device junction The innovation of structure.
Illustrate, as shown in figure 1, generally, OLED includes the anode and negative electrode that are oppositely arranged, and is located at Multiple functional layers between anode and negative electrode, for example, the hole injection layer for setting gradually, hole transmission layer, organic luminous layer, electricity Sub- transport layer, electron injecting layer.In traditional concept, it is believed that organic molecule must be in organic luminous layer in OLED Unbodied, i.e., molecularly oriented is random and isotropic, so just can ensure that the homogeneity of the organic film, then really Protect the performance of device.
But in the last few years, with the mankind to organic semi-conductor further investigate and to intermolecular interaction gradually Pay attention to, people gradually have found that the form and specific orientation of organic molecule in organic luminous layer have significantly to the performance of OLED Improve, for example, in the organic luminous layer molecule in the case of certain specific orientation, its mobility that can improve carrier or Person strengthens light extraction efficiency, then improves the performances such as efficiency or life-span.Wherein, in the prior art for organic point in organic luminous layer The specific orientation of son typically using in vacuum evaporation, tune is reached by the temperature or the specific solvent of selection of control base board Save the purpose of the orientations of organic molecule.
The content of the invention
Embodiments of the invention provide a kind of OLED and preparation method, display panel, drying and electric field generation device, Molecular orientation arrangement in function implanted layer in the OLED, so as to improve the luminous efficiency of the OLED.
To reach above-mentioned purpose, embodiments of the invention are adopted the following technical scheme that:
On the one hand the embodiment of the present invention provides a kind of OLED, is included in the anode and negative electrode being oppositely arranged on substrate, And between the anode and the negative electrode and the hole transmission layer, luminescent layer, the electronics that are set in turn on the anode Transport layer;The OLED also includes function implanted layer, and the organic molecule in the function implanted layer is vertical or approximate Oriented alignment on the direction that vertical this layer is sprawled;The function implanted layer is between the anode and the hole transmission layer Hole injection layer, and/or, the electron injecting layer between the negative electrode and the electron transfer layer.
On the other hand the embodiment of the present invention also provides a kind of OLED display panel, it is characterised in that above-mentioned OLED.
The another aspect of the embodiment of the present invention also provides a kind of preparation method of OLED, including:Formed on substrate according to The step of anode, hole transmission layer, luminescent layer, electron transfer layer, negative electrode of secondary arrangement, the preparation method also includes:In base Function implanted layer to be dried is formed on plate, the function implanted layer to be dried is to include the film layer of solvent composition;To being formed The substrate for having the function implanted layer to be dried applies the electric field perpendicular to the substrate, and carries out dried process, to form work( Energy implanted layer, the function implanted layer is the hole injection layer between the anode and the hole transmission layer, and/or, The electron injecting layer between the negative electrode and the electron transfer layer.
Further, electricity of the described pair of substrate applying for being formed with the function implanted layer to be dried perpendicular to the substrate , and dried process is carried out, it is to form function implanted layer:Substrate to being formed with the function implanted layer to be dried is advanced Row drying, and in drying process, vertical electric field is applied to the substrate, to form function implanted layer.
Further, described in drying process is carried out, applying vertical electric field to the substrate includes:Treated to described in drying When the mass fraction of solvent reaches 10%~20% in dry function implanted layer, vertical electric field is applied to the substrate.
Further, electricity of the described pair of substrate applying for being formed with the function implanted layer to be dried perpendicular to the substrate , and dried process is carried out, it is to form function implanted layer:To be formed with the function implanted layer to be dried substrate simultaneously Vertical electric field is dried and applies, to form function implanted layer.
Further, it is described function implanted layer to be dried is formed on substrate to be:Using inkjet printing or spin coating Method is formed on substrate includes the function implanted layer to be dried of Elements in Organic Solvents.
The another aspect of the embodiment of the present invention also provide it is a kind of dry and electric field generation device, including power supply, substrate rack, Air extractor and the pumping chamber being connected with the air extractor;Wherein, the bottom surface of the pumping chamber is main by metal material shape Into, and the bottom surface is provided with multiple through holes;The substrate rack is used for bearing substrate, so that the substrate is located at described taking out The lower section of air cavity, and be arranged in parallel with the bottom surface of the pumping chamber;The both positive and negative polarity of the power supply connects the pumping chamber respectively First electrode in the OLED that bottom surface and the substrate rack are carried, wherein, the first electrode is the OLED In negative electrode and anode near substrate side electrode;Or, the drying and electric field generation device also include:Positioned at described The loading end of substrate rack is away from the bottom surface side of the pumping chamber and additional with what the bottom surface of the pumping chamber be arranged in parallel Electrode;The both positive and negative polarity of the power supply connects the bottom surface of the pumping chamber and the supplementary electrode respectively.
Further, the electric field for being formed between the bottom surface of the first electrode or the supplementary electrode and the pumping chamber Direction, it is identical with the direction of an electric field between anode and negative electrode in the OLED.
Further, the distribution density of the multiple through hole reduces from the centre position of the bottom surface to marginal position;With/ Or, the distance between first electrode is less than or waits in the OLED that is carried with the substrate rack of the bottom surface of the pumping chamber In 10mm.
The embodiment of the present invention provides a kind of OLED and preparation method, display panel, drying and electric field generation device, should OLED includes:The anode and negative electrode being oppositely arranged on substrate are included in, and are set between anode and negative electrode and successively Hole transmission layer, luminescent layer, the electron transfer layer being placed on anode;The OLED also includes function implanted layer, and the function Organic molecule in the implanted layer oriented alignment on the direction that vertical or near normal this layer is sprawled;Function implanted layer be positioned at Hole injection layer between anode and hole transmission layer, and/or, the electron injecting layer between negative electrode and electron transfer layer.By Organic molecule is sprawled in vertical or near normal this layer in hole injection layer and/or electron injecting layer in the OLED Oriented alignment on direction such that it is able to improve the mobility of carrier, and then improve the luminous efficiency of the OLED.
Brief description of the drawings
In order to illustrate more clearly about the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing The accompanying drawing to be used needed for having technology description is briefly described, it should be apparent that, drawings in the following description are only this Some embodiments of invention, for those of ordinary skill in the art, on the premise of not paying creative work, can be with Other accompanying drawings are obtained according to these accompanying drawings.
Fig. 1 is a kind of structural representation of the OLED for providing in the prior art;
Fig. 2 is a kind of structural representation of OLED provided in an embodiment of the present invention;
Fig. 3 is the structural representation of another OLED provided in an embodiment of the present invention;
Fig. 4 is a kind of part schematic flow sheet of the preparation method of OLED provided in an embodiment of the present invention;
Fig. 5 is provided in an embodiment of the present invention a kind of to prepare one of structural representation of OLED;
Fig. 6 is provided in an embodiment of the present invention a kind of to prepare one of structural representation of OLED;
Fig. 7 is the structural representation of a kind of drying provided in an embodiment of the present invention and electric field generation device;
Fig. 8 is the structural representation of another dry and electric field generation device provided in an embodiment of the present invention.
Reference:
01-OLED devices;10- substrates;101- anodes;102- negative electrodes;02- is dried and electric field generation device;21- power supplys; 22- substrate racks;23- air extractors;24- pumping chambers;The bottom surface of 241- pumping chambers;2411- through holes;25- supplementary electrodes.
Specific embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete Site preparation is described, it is clear that described embodiment is only a part of embodiment of the invention, rather than whole embodiments.It is based on Embodiment in the present invention, it is every other that those of ordinary skill in the art are obtained under the premise of creative work is not made Embodiment, belongs to the scope of protection of the invention.
The embodiment of the present invention provides a kind of OLED, as shown in Fig. 2 the OLED 01 is including relative on the substrate 10 The anode 101 and negative electrode 102 of setting, and between anode 101 and negative electrode 102 and the sky that is set in turn on anode 101 Cave transport layer (Hole Transportation Layer, HTL), luminescent layer (Emission Layer, EML), electron transfer layer (Electron Transportation Layer, ETL).
As shown in Fig. 2 the OLED also includes function implanted layer, the function implanted layer is positioned at anode 101 and hole Hole injection layer (Hole Injection Layer, HIL) between transport layer HTL, and/or, passed positioned at negative electrode 102 and electronics Electron injecting layer (Electron Injection Layer, EIL) between defeated layer ETL;And the function implanted layer, namely hole Implanted layer HIL, and/or, organic molecule is upwardly-directed in the side that vertical or near normal this layer is sprawled in electron injecting layer EIL Arrangement such that it is able to improve the mobility of carrier, and then improve the luminous efficiency of the OLED.
Herein it should be noted that above-mentioned hole injection layer HIL, and/or, organic molecule is hanging down in electron injecting layer EIL Oriented alignment refers on the direction that straight or near normal this layer is sprawled:
Can be with as shown in Fig. 2 including cave two functions of implanted layer HIL and electron injecting layer EIL simultaneously in the OLED In the case of implanted layer, then in two function implanted layers at least one functional layer organic molecule in vertical or near normal Oriented alignment on the direction that this layer is sprawled, naturally it is also possible to be organic molecule in two function implanted layers vertical or Oriented alignment on the direction that near normal this layer is sprawled.
It is also possible that the One function note in the OLED only includes hole injection layer HIL and electron injecting layer EIL In the case of entering layer, for example, shown in Fig. 3, when only including hole injection layer HIL, then organic molecule is hanging down in the function implanted layer Oriented alignment on the direction that straight or near normal this layer is sprawled.
Certainly, this area technology it is to be understood that in existing OLED mostly include hole injection layer HIL, and Electron injecting layer EIL can according to the actual needs carry out selection setting, in the present invention, be injected including hole in the OLED In the case of layer HIL, at least ensure the direction that organic molecule in hole injection layer HIL is sprawled in vertical or near normal this layer Upper oriented alignment.
Herein also, it should be noted that normal luminous in order to ensure OLED, general, it should be ensured that above-mentioned anode At least one of 101 and negative electrode 102 are made of transparent conductive material, for example, ITO (Indium Tin Oxide) is transparent leading Electric material.
The embodiment of the present invention also provides a kind of OLED display panel, including above-mentioned OLED, specifically, the OLED is aobvious Show that panel is generally comprised on TFT (Thin Film Transistor, thin film transistor (TFT)) substrate, and setting and the TFT substrate And the above-mentioned OLED of array arrangement.Due to the OLED display panel include OLED as described above, therefore with OLED identical structure and beneficial effect that previous embodiment is provided.Because previous embodiment is to the knot of OLED Structure and beneficial effect are described in detail, and here is omitted.
Herein it should be noted that above-mentioned OLED display panel can be the OLED array before being packaged, It can be the oled display substrate after encapsulation.
The embodiment of the present invention also provides a kind of preparation method of OLED, including:Formed on the substrate 10 and arranged successively Anode 101, hole transmission layer HTL, luminescent layer EML, electron transfer layer ETL, negative electrode 102 the step of (refer to Fig. 2), wherein, The anode 101 arranged successively, hole transmission layer HTL, luminescent layer EML, electron transfer layer ETL, negative electrode 102 can be from top to bottom Arrange successively, or arrange successively from top to bottom, the invention is not limited in this regard.
As shown in figure 4, the preparation method also includes:
Step 101, function implanted layer to be dried is formed on substrate, wherein, function implanted layer to be dried is to include The film layer of solvent composition.
Specifically, can be using inkjet printing (Ink-Jet Printing) or the method for spin coating (Spin-Coating) Being formed on substrate 10 (including electrode) includes the function implanted layer to be dried of Elements in Organic Solvents.
Step 102, the substrate to being formed with function implanted layer to be dried apply the electric field perpendicular to the substrate, and carry out Dried process, to form function implanted layer.Wherein, function implanted layer is the sky between anode 101 and hole transmission layer HTL Cave implanted layer HIL, and/or, the electron injecting layer EIL between negative electrode 102 and electron transfer layer ETL.
In sum, hole injection layer in the OLED, and/or, the dipole of polar organic molecule in electron injecting layer Square is rearranged under electric field action, along direction of an electric field arrangement from beginning to end, i.e., in the vertical or near normal layer There is oriented alignment on the direction sprawled such that it is able to improve the mobility of the carrier of the OLED, and then improve luminous Efficiency.
Below to above-mentioned steps S102 in, to be formed with function implanted layer to be dried substrate apply perpendicular to the substrate Electric field, and carry out dried process, be further explained explanation to form function implanted layer.
For example, it may be to being formed with the substrate of function implanted layer to be dried while being dried and applying vertical electricity , to form function implanted layer;Namely to being formed with the substrate of function implanted layer to be dried during the entire process of drying Apply vertical electric field.
Again for example, it is also possible to be that the substrate for being formed with function implanted layer to be dried is first dried, and dried In Cheng Jinhang, vertical electric field is applied to the substrate, to form function implanted layer;I.e. drying process and apply electric field and it is asynchronous enter OK, after certain hour is dried, start to apply vertical electric field to substrate.
On this basis, in order to avoid because drying time it is more long, cause the solvent in function implanted layer to be dried a large amount of Volatilization, causes that the organic molecule concentration in the function implanted layer to be dried is excessive, causes a certain degree of non-directional to arrange, and And effective oriented alignment cannot be carried out in the presence of electric field, therefore, it is currently preferred, drying to function to be dried When the mass fraction of solvent reaches 10%~20% in implanted layer, such as 15%, vertical electric field is applied to the substrate.
, wherein it is desired to explanation, the mass fraction of solvent reaches in above-mentioned drying to function implanted layer to be dried 10%~20% refers to, when drying to a certain moment, solvent accounts for the moment whole film layer in function implanted layer to be dried Mass fraction.In actual drying process, the sliminess of the function implanted layer to be dried can be rule of thumb observed, with Judge the mass fraction of solvent in the function implanted layer to be dried;Can certainly be by waving of determining that drying device is collected into The solvent quality of hair estimates the function implanted layer to be dried to calculate the remaining solvent of function implanted layer to be dried The mass fraction of middle solvent.
As a example by making OLED display panel, by specific embodiment, the preparation method to above-mentioned OLED is done into one The explanation of step.
Specifically, the manufacturing process of OLED display panel, the substrate in above-mentioned OLED is TFT substrate (TFT Array)。
First, as shown in figure 5, forming the first electrode of array arrangement in TFT substrate 10, for example, it may be ITO materials The anode 101 of formation, is not restricted to this certainly;Next pixel defining layer is formed on the substrate 10 of the formation anode 101, Kept apart with causing the anode 101 of array arrangement to be defined by the barrier wall (Bank) in pixel defining layer.
Then, as shown in fig. 6, using inkjet printing on the substrate 10 of the formation anode 101 and pixel defining layer Method forms hole injection layer HIL to be dried, now the hole injection layer HIL to be dried have substantial amounts of organic solvent into Point.
Next, treat dry hole injection layer HIL and be dried and apply vertical electric field E, to form organic molecule The hole injection layer HIL of oriented alignment on the direction that vertical or near normal this layer is sprawled.
The embodiment of the present invention also provide it is a kind of dry and electric field generation device, as shown in Fig. 7 or Fig. 8, the drying and electric field Generating means 02, including power supply 21, substrate rack 22, air extractor 23 and the pumping chamber 24 that is connected with air extractor 23.
The bottom surface 241 of pumping chamber is mainly formed by metal material, and the bottom surface 241 of the pumping chamber is provided with multiple through holes 2411.General, the pumping chamber 24 is up-small and down-big taper bell cover structure, causes to be located at pumping by opening air extractor 23 Solvent on the substrate of the lower section of bottom surface 241 in chamber 24 can quickly be volatilized by pumping chamber 24, to reach dry purpose.
Substrate rack 22 be used for bearing substrate 10, so as to substrate 10 be located at pumping chamber 24 lower section, and with pumping chamber 24 Bottom surface 241 be arranged in parallel.
In the case, there is part for electric field:
Can be with as shown in fig. 7, the both positive and negative polarity of power supply 21 connects the bottom surface 241 of pumping chamber respectively and substrate rack 22 is carried OLED in first electrode, wherein, first electrode is near the side of substrate 10 in negative electrode and anode in OLED 01 Electrode, for example, can be anode 101, so, can between bottom surface 241 of the anode 101 with pumping chamber formation it is vertical In the electric field of substrate 10, to cause that the hole injection layer HIL on anode 101 is located in the vertical electric field.
Can also be as shown in figure 8, the drying and electric field generation device 02 also include:Positioned at the loading end of substrate rack 22 Away from the side of bottom surface 241 of pumping chamber and the supplementary electrode 25 that is be arranged in parallel with the bottom surface 241 of pumping chamber;Power supply 21 it is positive and negative Pole connects bottom surface 241 and the supplementary electrode 25 of pumping chamber respectively, so, can be in the bottom surface 241 of pumping chamber and additional electrical The electric field perpendicular to substrate 10 is formed between pole 25.
Herein it should be noted that the connection of the both positive and negative polarity for above-mentioned power supply 21, in practice can be by above-mentioned electricity The both positive and negative polarity in source 21 exchanges mutually connection, as long as ensureing the bottom surface 241 of above-mentioned first electrode or supplementary electrode 25 and pumping chamber Between formed vertical electric field.
However, in order to ensure in drying process as far as possible, the direction of an electric field residing for function implanted layer to be dried, with OLED direction of an electric field in normal operation residing for function implanted layer is consistent, to cause what is formed in drying process The molecular arrangement trend of function implanted layer, has identical arrangement trend with the molecule of function implanted layer is descended in working order, enters And ensure the function implanted layer stability.Therefore, it is currently preferred, above-mentioned first electrode or supplementary electrode 25 and pumping chamber Bottom surface 241 between formed direction of an electric field, it is identical with the direction of an electric field between the anode in OLED and negative electrode.
Specifically, with the first electrode on substrate 10 be anode 101, and be formed with the substrate of anode 101 formed treat As a example by dry function implanted layer (hole injection layer HIL), can with as shown in fig. 7, the positive pole of power supply 21 is connected with anode 101, Negative pole is connected with the bottom surface 214 of pumping chamber;Or, as shown in figure 8, the positive pole of power supply 21 is connected with supplementary electrode 25, negative pole with The bottom surface 214 of pumping chamber connects;So, the electric field formed between the bottom surface 241 of first electrode and pumping chamber is enabled to Direction, it is identical with the direction of an electric field between the anode in OLED and negative electrode, to ensure the stability of the OLED.
In addition, it should be appreciated by those skilled in the art arriving, during drying and applying electric field, substrate rack 22 Substrate 10 in the OLED of carrying is directly contacted with substrate rack 22, and other film layers direction for making on the substrate 10 should Dry and electric field generation device 02.
In addition, currently preferred, the distribution density of multiple through holes 2411 of the above-mentioned bottom surface 241 positioned at pumping chamber is the bottom of from The centre position in face reduces to marginal position, during causing to be dried the substrate for being formed with function implanted layer to be dried, Ensure that whole function implanted layer to be dried is uniformly dried.
Specifically, because the environment at function implanted layer middle position to be dried and marginal position has difference, i.e., Centre position is in solvent volatilization process the solvent effect by surrounding, and degree of volatility is difficult to the solvent volatilization at marginal position Degree, therefore, the distribution density for setting the through hole in the bottom surface of pumping chamber reduces from the centre position of bottom surface to marginal position, with Enable that function implanted layer to be dried is uniformly dried.
Herein it should be noted that the distribution density of above-mentioned through hole refers to, in the case where the size shape of through hole is consistent, The distribution number of unit area inner via hole.
Additionally, currently preferred, the first electricity in the OLED of the bottom surface 241 of pumping chamber and substrate rack carrying 22 The distance between pole is less than or equal to 10mm, for example, the bottom surface 241 of setting pumping chamber and substrate rack can be made to carry 22 The distance between first electrode is 1mm in OLED;So, on the one hand ensure that effective volatilization of solvent;It is another Aspect, the in the both positive and negative polarity of power supply 21 connects the OLED that the bottom surface 241 of pumping chamber and substrate rack 22 are carried respectively One electrode, and in the case that power is certain, ensure that the function implanted layer to be dried in first electrode can In stronger electric field, to cause that organic molecule is effectively aligned along direction of an electric field.
One of ordinary skill in the art will appreciate that:Realizing all or part of step of above method embodiment can pass through Programmed instruction related hardware is completed, and foregoing program can be stored in a computer read/write memory medium, the program Upon execution, the step of including above method embodiment is performed;And foregoing storage medium includes:ROM, RAM, magnetic disc or light Disk etc. is various can be with the medium of store program codes.
The above, specific embodiment only of the invention, but protection scope of the present invention is not limited thereto, and it is any Those familiar with the art the invention discloses technical scope in, change or replacement can be readily occurred in, should all contain Cover within protection scope of the present invention.Therefore, protection scope of the present invention should be based on the protection scope of the described claims.

Claims (10)

1. a kind of OLED, it is characterised in that be included in the anode and negative electrode being oppositely arranged on substrate, and positioned at the sun Between pole and the negative electrode and the hole transmission layer, luminescent layer, the electron transfer layer that are set in turn on the anode;
The OLED also includes function implanted layer, and the organic molecule in the function implanted layer is in vertical or near normal Oriented alignment on the direction that this layer is sprawled;
The function implanted layer is the hole injection layer between the anode and the hole transmission layer, and/or, positioned at institute State electron injecting layer between negative electrode and the electron transfer layer.
2. a kind of OLED display panel, it is characterised in that including the OLED described in claim 1.
3. a kind of preparation method of OLED, including:The anode, hole transmission layer, luminous arranged successively is formed on substrate The step of layer, electron transfer layer, negative electrode, it is characterised in that the preparation method also includes:
Function implanted layer to be dried is formed on substrate, the function implanted layer to be dried is to include the film of solvent composition Layer;
Substrate to being formed with the function implanted layer to be dried applies the electric field perpendicular to the substrate, and is dried place Reason, to form function implanted layer, the function implanted layer is the hole note between the anode and the hole transmission layer Enter layer, and/or, the electron injecting layer between the negative electrode and the electron transfer layer.
4. preparation method according to claim 3, it is characterised in that described pair is formed with the function injection to be dried The substrate of layer applies the electric field perpendicular to the substrate, and carries out dried process, is to form function implanted layer:
Substrate to being formed with the function implanted layer to be dried is first dried, and in drying process is carried out, to the base Plate applies vertical electric field, to form function implanted layer.
5. preparation method according to claim 4, it is characterised in that described in drying process, applies to hang down to the substrate Straight electric field includes:It is right when the dry mass fraction to solvent in the function implanted layer to be dried reaches 10%~20% The substrate applies vertical electric field.
6. preparation method according to claim 3, it is characterised in that described pair is formed with the function injection to be dried The substrate of layer applies the electric field perpendicular to the substrate, and carries out dried process, is to form function implanted layer:
To being formed with the substrate of the function implanted layer to be dried while being dried and applying vertical electric field, to form function Implanted layer.
7. the preparation method according to claim any one of 3-6, it is characterised in that described to form to be dried on substrate Function implanted layer is:
Being formed on substrate using inkjet printing or the method for spin coating includes the function injection to be dried of Elements in Organic Solvents Layer.
8. a kind of drying of preparation method for being applied to the OLED described in claim any one of 3-7 and electric field are filled Put, it is characterised in that including power supply, substrate rack, air extractor and the pumping chamber being connected with the air extractor;Its In, the bottom surface of the pumping chamber is mainly formed by metal material, and the bottom surface is provided with multiple through holes;The substrate rack For bearing substrate, the lower section of the pumping chamber is located at so as to the substrate, and be arranged in parallel with the bottom surface of the pumping chamber;
The both positive and negative polarity of the power supply is connected in the OLED that the bottom surface of the pumping chamber and the substrate rack are carried respectively First electrode, wherein, the first electrode is the electrode of close substrate side in negative electrode and anode in the OLED;
Or, the drying and electric field generation device also include:Loading end positioned at the substrate rack deviates from the pumping The bottom surface side in chamber and the supplementary electrode being be arranged in parallel with the bottom surface of the pumping chamber;The both positive and negative polarity of the power supply is connected respectively The bottom surface of the pumping chamber and the supplementary electrode.
9. drying according to claim 8 and electric field generation device, it is characterised in that the first electrode is described attached Between anode and negative electrode in the direction of an electric field formed between power-up pole and the bottom surface of the pumping chamber, with the OLED Direction of an electric field is identical.
10. drying according to claim 8 and electric field generation device, it is characterised in that the distribution of the multiple through hole is close Degree reduces from the centre position of the bottom surface to marginal position;And/or,
In the OLED that the bottom surface of the pumping chamber carries with the substrate rack the distance between first electrode be less than or Equal to 10mm.
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Cited By (7)

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CN107623021A (en) * 2017-09-28 2018-01-23 深圳市华星光电半导体显示技术有限公司 The preparation method and OLED display of OLED display
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CN108215490A (en) * 2017-12-29 2018-06-29 深圳市华星光电技术有限公司 The drying device and ink jet printing device of a kind of oled substrate
CN110504389A (en) * 2019-08-14 2019-11-26 昆山国显光电有限公司 A kind of preparation method of luminescent device, luminescent device and display panel
CN113410419A (en) * 2021-08-18 2021-09-17 深圳市华星光电半导体显示技术有限公司 Manufacturing method of display panel and drying equipment
CN113471396A (en) * 2021-07-02 2021-10-01 合肥福纳科技有限公司 Electroluminescent device, light-emitting diode, and preparation method and application of thin film
JP2023541725A (en) * 2021-08-18 2023-10-04 深▲セン▼市▲華▼星光▲電▼半▲導▼体▲顕▼示技▲術▼有限公司 Display panel manufacturing method and drying equipment

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CN107623021A (en) * 2017-09-28 2018-01-23 深圳市华星光电半导体显示技术有限公司 The preparation method and OLED display of OLED display
CN107732021A (en) * 2017-11-23 2018-02-23 京东方科技集团股份有限公司 A kind of organic electroluminescence device and preparation method thereof and display device
CN107732021B (en) * 2017-11-23 2019-09-03 京东方科技集团股份有限公司 A kind of organic electroluminescence device and preparation method thereof and display device
CN108215490A (en) * 2017-12-29 2018-06-29 深圳市华星光电技术有限公司 The drying device and ink jet printing device of a kind of oled substrate
CN108215490B (en) * 2017-12-29 2019-08-02 深圳市华星光电技术有限公司 A kind of drying device and ink jet printing device of oled substrate
CN110504389A (en) * 2019-08-14 2019-11-26 昆山国显光电有限公司 A kind of preparation method of luminescent device, luminescent device and display panel
CN110504389B (en) * 2019-08-14 2022-07-05 昆山国显光电有限公司 Preparation method of light-emitting device, light-emitting device and display panel
CN113471396A (en) * 2021-07-02 2021-10-01 合肥福纳科技有限公司 Electroluminescent device, light-emitting diode, and preparation method and application of thin film
CN113410419A (en) * 2021-08-18 2021-09-17 深圳市华星光电半导体显示技术有限公司 Manufacturing method of display panel and drying equipment
WO2023019635A1 (en) * 2021-08-18 2023-02-23 深圳市华星光电半导体显示技术有限公司 Manufacturing method for display panel and drying device
JP2023541725A (en) * 2021-08-18 2023-10-04 深▲セン▼市▲華▼星光▲電▼半▲導▼体▲顕▼示技▲術▼有限公司 Display panel manufacturing method and drying equipment

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