CN106935307A - Precise control microballoon based on pulse laser carries out the method and device of light suspension - Google Patents
Precise control microballoon based on pulse laser carries out the method and device of light suspension Download PDFInfo
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- CN106935307A CN106935307A CN201710087697.4A CN201710087697A CN106935307A CN 106935307 A CN106935307 A CN 106935307A CN 201710087697 A CN201710087697 A CN 201710087697A CN 106935307 A CN106935307 A CN 106935307A
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- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
- G21K1/006—Manipulation of neutral particles by using radiation pressure, e.g. optical levitation
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
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Abstract
The invention discloses the method and device that a kind of precise control microballoon based on pulse laser carries out light suspension.Using pulsed laser action in substrate surface, substrate absorbs pulse laser, produces thermal expansion, and the targeted microspheres to substrate surface produce acceleration；Targeted microspheres overcome the adhesive force of substrate surface to depart from surface；Depart from the speed and lifting position of substrate surface by controlling pulse laser, control targe microballoon, targeted microspheres enter ligh trap capture region, and gravity and trapping stiffness component balance straight up straight down suffered by microballoon realize the stable suspersion of targeted microspheres.Light levitation device, including substrate, pulse laser, speculum, diaphragm and plus lens.Precise control targeted microspheres of the present invention enter the motion state of ligh trap capture region, the repetition capture of single or multiple targeted microspheres is realized, duration needed for light suspends is extremely short, and the time frame with pulsed laser action is suitable, light suspension success rate is high, and does not need moving component.
Description
Technical field
The present invention relates to the method and device that a kind of precise control microballoon based on pulse laser carries out light suspension, belong to light
Learn engineering and microparticle suspension field.
Background technology
Quick of particulate throws and capture is a technological difficulties in light suspension field in the environment of gas or vacuum.Tradition
Piezoelectric ceramic high-frequency vibrated throwing scheme and ultrasonic atomizatio and played throwing scheme, it is necessary to shed a large amount of microballoons in free space, it is micro-
Ball warp has certain probability to be captured by ligh trap when crossing capture region.These simple throwing modes that directly rise are easy to physical study and are tested
The development that confirmation is tested, but because the light suspension capture rate of microballoon is extremely low, the waste of a large amount of microballoons is caused, and it is at large miscellaneous
Matter microballoon can pollute the exiting surface of light suspension light path, such as lens surface or fiber end face, the distribution of influence capture light field；In vacuum
In the device of chamber, the impurity microballoon of residual and the spraying solvent risen used by throwing can also pollute vacuum chamber environment, destroy vacuum bar
Part.Once external condition disturbance causes captured microballoon to depart from from ligh trap, just it is difficult that targeted microspheres are carried out to repeat capture,
Influence the practical of light suspension technology.
We also once disclosed an a kind of branch method and device of light suspension micro Ball（CN 105759074 A）, main profit
Collided with electromagnetism and realize that microballoon departs from and suspends.
When the size of particulate is less than 100 microns, the adhesive force of particulate and substrate surface include Van der Waals force, capillary force and
Electrostatic force etc..The adhesive force size of particulate and substrate surface is by ambient humidity, substrate surface pattern, microballoon and substrate material and several
The factors such as what characteristic influence, its size is the 10 of microballoon self gravitation4The order of magnitude more than times.In order that microballoon departs from substrate table
Face, it is desirable to provide huge acceleration.
With continuing to develop for light suspension research, light suspension technology is progressively applied to field of inertia measurement by people.It is different
In Physical Experiment research, in application is engineered, it would be desirable to realized on the premise of precise control sensing microballoon it is quick, can be again
Multiple light suspends, and just can guarantee that the uniformity of measurement result.Traditional microballoon light suspension process obviously cannot meet such need
Ask.
The content of the invention
The invention provides the method and device that a kind of precise control microballoon based on pulse laser carries out light suspension.
A kind of method that precise control microballoon based on pulse laser carries out light suspension, using pulsed laser action in substrate
Surface, substrate absorbs pulse laser, produces thermal expansion, and the targeted microspheres to substrate surface produce acceleration；Targeted microspheres overcome
The adhesive force of substrate surface departs from surface；Depart from speed and the rising of substrate surface by controlling pulse laser control targe microballoon
Position, targeted microspheres enter ligh trap capture region, gravity and trapping stiffness component straight up straight down suffered by microballoon
Balance, realizes the stable suspersion of targeted microspheres.
After the stable suspersion of described targeted microspheres terminates, substrate surface is returned to, wait exciting for pulse laser next time,
So as to the repetition light for realizing targeted microspheres suspends.
Described substrate surface places one or more targeted microspheres.
The hot spot of described pulse laser, pulse energy, pulse width, pulse frequency and number controllable.
A kind of light levitation device realized according to methods described, including substrate, pulse laser, speculum, diaphragm and remittance
Poly- lens；Described substrate surface places one or more targeted microspheres, and described pulse laser outgoing pulse laser is successively
By speculum, diaphragm and plus lens, the surface of substrate, the region where the hot spot coverage goal microballoon of light beam are focused on；
Described diaphragm is used for the spot size that the pulsed light of substrate surface is incided in control；Described plus lens can be in optical axis direction
Upper movement, control pulse laser converges the position of focus.
Ligh trap capture region is located at the surface of targeted microspheres, and relative position is adjustable.
Beneficial effects of the present invention are embodied in several aspects：
The present invention can be directed to the motion state before single or multiple targeted microspheres light suspend and carry out precise control, realize the weight of microballoon
Multiple capture, duration needed for light suspends is extremely short, depending on the time that light-pulse generator is acted on, only nanosecond order or smaller.Light hangs
Floating success rate is far above traditional microballoon light suspension scheme, up to absolutely.Will not be in light path be captured in light resuspension procedure
Unnecessary impurity microballoon is produced, the equipment such as vacuum chamber will not be polluted, influence will not be produced on the capture original light field of light path, and not
Need moving component.
Brief description of the drawings
Fig. 1 is a kind of structural representation of device of the invention；
Fig. 2 is the structural representation at a certain moment during pulsed laser irradiation；
Fig. 3 is microballoon by the structural representation after stable suspersion；
In figure, substrate 1, targeted microspheres 2, pulse laser 3, speculum 4, diaphragm 5, plus lens 6, ligh trap capture region 7.
Specific embodiment
Pulsed laser action makes its quick generation thermal expansion in substrate surface, can effective and rapidly remove the micro- of substrate surface
Ball.Although the thermal expansion amount very little of substrate surface, in extremely short pulse operating time（Usually tens nanosecond）, just can be right
Microballoon produces the huge acceleration for being enough to overcome adhesive force.This technological means, has been widely used in laser cleaning field, miscellaneous
From tens microns to tens nanometers, the material of contaminant particles has metal material, organic material and dielectric material to the size of matter particulate
Deng.But laser cleaning application only considers impurity elimination efficiency, the infringement to particulate is not considered, be more indifferent to after particulate removal
Motion state.
We have used for reference this technological means, apply it to microballoon light and suspend and ligh trap control field, can accurately control
Targeted microspheres processed depart from the motion state after substrate, realize that quick, repeatable light suspends, and reduce the time needed for light suspends,
Improve the success rate that light suspends.
The method that a kind of precise control microballoon based on pulse laser of the invention carries out light suspension, target to be suspended is micro-
Ball sticks on the surface of the substrate, and baseplate material is larger to the absorptivity and thermal coefficient of expansion of pulse laser, can be in impulse action
Interior rapid generation thermal expansion.A capture ligh trap for stabilization is formed in surface using capture laser, light well area is close to
Substrate surface, mutual distance is adjustable.
Using pulsed laser action in substrate surface, substrate absorbs pulse laser, thermal expansion is produced, to the mesh of substrate surface
Mark microballoon produces acceleration；Targeted microspheres overcome the adhesive force of substrate surface to depart from surface；Mesh is controlled by controlling pulse laser
Mark microballoon departs from the speed and lifting position of substrate surface, and targeted microspheres enter ligh trap capture region, suffered by microballoon it is vertical to
Under gravity and trapping stiffness component balance straight up, realize the stable suspersion of targeted microspheres.
After the stable suspersion of described targeted microspheres terminates, substrate surface is returned to, wait exciting for pulse laser next time,
So as to the repetition light for realizing targeted microspheres suspends.
Further the present invention is illustrated below in conjunction with accompanying drawing.
As shown in figure 1, a kind of light levitation device realized according to methods described, including substrate 1, pulse laser 3, reflection
Mirror 4, diaphragm 5 and plus lens 6；Place one or more targeted microspheres 2, described pulse laser 3 in the described surface of substrate 1
Outgoing pulse laser sequentially passes through speculum 4, diaphragm 5 and plus lens 6, focuses on the surface of substrate 1, the hot spot covering of light beam
Region where targeted microspheres 2；Described diaphragm 5 is used for the spot size that the pulsed light of substrate surface is incided in control；It is described
Plus lens 6 can move in the direction of the optical axis, control pulse laser converge focus position.
The material of substrate 1 is larger to the absorptivity and thermal coefficient of expansion of pulsed light, can select silicon materials, the surface of substrate 1
Cleaning is clean, the impurity not in addition to targeted microspheres.
Targeted microspheres 2 are the microballoon of micron or nanometer scale, can be metal material, organic material or dielectric material, can quilt
Common ligh trap capture, generally from silicon dioxide microsphere.
The wavelength of pulse laser 3 can choose ultraviolet band, can be using krypton fluorine KrF excimer lasers, wavelength
248nm, pulse width is 30ns, and the energy of individual pulse, width, frequency and number are adjustable.
Described speculum 4 and plus lens 6 are applied to wave band where pulse laser.Such as speculum 4 is to 248nm wavelength
Light reflectivity it is high, absorption loss is small.Such as plus lens 6 is high to the light transmission rate of 248nm wavelength, and absorption loss is small, can be by
Pulse laser focusing is on the surface of substrate 1.
Diaphragm 5 is used for the spot size that the pulsed light of substrate surface is incided in control.
Ligh trap capture region 7 can be by two beam 980nm single-mode lasers to being obtained to transmission, and near targeted microspheres 2, ligh trap is caught
Obtaining region lower edge can be with the upper surface of targeted microspheres 2 at a distance of several microns, and relative position is fine-tuning.
Application Example
As shown in figure 1, targeted microspheres 2 are attached on the surface of substrate 1, open pulse laser 3, pulsed light sequentially pass through speculum 4,
After diaphragm 5 and plus lens 6 are focused on, the surface of substrate 1 is radiated at.As shown in Fig. 2 during pulsed light irradiates, the surface of substrate 1 is rapid
Thermal expansion is produced, targeted microspheres 2 progressively disengage the surface of substrate 1, and targeted microspheres 2 are subject to the adhesive force of substrate 1 to be progressively smaller until
Targeted microspheres 2 completely disengage from the surface of substrate 1.For the ligh trap capture region 7 of ad-hoc location, the energy of individual pulse light is adjusted
Amount, width and launching spot, speed is zero when targeted microspheres 2 is reached ligh trap capture region 7.As shown in figure 3, pulse laser is made
After end, the thermal expansion on the surface of substrate 1 is disappeared, and targeted microspheres 2 are captured, and laser is stable to be captured, and realizes that quick light suspends.
Each light suspends after terminating, and targeted microspheres 2 can under gravity return to the original contact area of substrate 1, be sticked again
Power absorption waits exciting for pulse laser next time, so as to the repeatable light for realizing targeted microspheres 2 suspends on the surface of substrate 1.
Claims (6)
1. a kind of method that precise control microballoon based on pulse laser carries out light suspension, it is characterised in that utilize pulse laser
Substrate surface is acted on, substrate absorbs pulse laser, produces thermal expansion, the targeted microspheres to substrate surface produce acceleration；Mesh
Mark microballoon overcomes the adhesive force of substrate surface to depart from surface；Depart from substrate surface by controlling pulse laser control targe microballoon
Speed and lifting position, targeted microspheres enter ligh trap capture region, and the gravity straight down suffered by microballoon is vertical with trapping stiffness
Upward component balance, realizes the stable suspersion of targeted microspheres.
2. method according to claim 1, it is characterised in that after the stable suspersion of described targeted microspheres terminates, return to
Substrate surface, waits pulse laser next time to excite, so as to the repetition light for realizing targeted microspheres suspends.
3. method according to claim 1, it is characterised in that it is micro- that described substrate surface places one or more targets
Ball.
4. method according to claim 1, it is characterised in that the hot spot of described pulse laser, pulse energy, pulse are wide
Degree, pulse frequency and number controllable.
5. a kind of light levitation device for realizing method according to claim 1, it is characterised in that including substrate（1）, pulse swash
Light device（3）, speculum（4）, diaphragm（5）And plus lens（6）；
Described substrate（1）Place one or more targeted microspheres in surface（2）；
Described pulse laser（3）Outgoing pulse laser sequentially passes through speculum（4）, diaphragm（5）And plus lens（6）, gather
Jiao arrives substrate（1）Surface, the hot spot coverage goal microballoon of light beam（2）The region at place；
Described diaphragm（5）The spot size of the pulsed light for controlling to incide substrate surface；
Described plus lens（6）Can move in the direction of the optical axis, control pulse laser converges the position of focus.
6. smooth levitation device according to claim 5, it is characterised in that ligh trap capture region（7）Positioned at targeted microspheres（2）
Surface, and relative position is adjustable.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201710087697.4A CN106935307B (en) | 2017-02-18 | 2017-02-18 | Accurate control microballoon based on pulse laser carries out the method and device of light suspension |
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| CN201710087697.4A CN106935307B (en) | 2017-02-18 | 2017-02-18 | Accurate control microballoon based on pulse laser carries out the method and device of light suspension |
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| CN106935307B CN106935307B (en) | 2018-07-06 |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111986830A (en) * | 2020-08-17 | 2020-11-24 | 浙江大学 | Method and device for lossless, accurate and repeatable capture of microspheres based on evanescent waves |
| CN112466506A (en) * | 2021-01-29 | 2021-03-09 | 之江实验室 | Vacuum optical trap supporting method and device and application |
| CN112967831A (en) * | 2021-01-30 | 2021-06-15 | 浙江大学 | Method and device for repeatedly supporting and suspending microspheres in optical trap |
| CN114859076A (en) * | 2022-07-06 | 2022-08-05 | 之江实验室 | Acceleration measurement method and device based on optical suspension multi-microsphere array |
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| US5950071A (en) * | 1995-11-17 | 1999-09-07 | Lightforce Technology, Inc. | Detachment and removal of microscopic surface contaminants using a pulsed detach light |
| CN101063830A (en) * | 2006-04-28 | 2007-10-31 | Asml荷兰有限公司 | Methods to clean a surface, a device manufacturing method, a cleaning assembly, cleaning apparatus, and lithographic apparatus |
| US20130340840A1 (en) * | 2012-06-13 | 2013-12-26 | Massachusetts Institute Of Technology | Articles and methods for levitating liquids on surfaces, and devices incorporating the same |
| CN204536686U (en) * | 2015-04-20 | 2015-08-05 | 三峡大学 | The device that a kind of microballoon fast light suspends |
| CN105759074A (en) * | 2016-03-07 | 2016-07-13 | 浙江大学 | Optical suspension-type microballoon rising and supporting method and device |
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2017
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Patent Citations (5)
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|---|---|---|---|---|
| US5950071A (en) * | 1995-11-17 | 1999-09-07 | Lightforce Technology, Inc. | Detachment and removal of microscopic surface contaminants using a pulsed detach light |
| CN101063830A (en) * | 2006-04-28 | 2007-10-31 | Asml荷兰有限公司 | Methods to clean a surface, a device manufacturing method, a cleaning assembly, cleaning apparatus, and lithographic apparatus |
| US20130340840A1 (en) * | 2012-06-13 | 2013-12-26 | Massachusetts Institute Of Technology | Articles and methods for levitating liquids on surfaces, and devices incorporating the same |
| CN204536686U (en) * | 2015-04-20 | 2015-08-05 | 三峡大学 | The device that a kind of microballoon fast light suspends |
| CN105759074A (en) * | 2016-03-07 | 2016-07-13 | 浙江大学 | Optical suspension-type microballoon rising and supporting method and device |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111986830A (en) * | 2020-08-17 | 2020-11-24 | 浙江大学 | Method and device for lossless, accurate and repeatable capture of microspheres based on evanescent waves |
| CN112466506A (en) * | 2021-01-29 | 2021-03-09 | 之江实验室 | Vacuum optical trap supporting method and device and application |
| CN112967831A (en) * | 2021-01-30 | 2021-06-15 | 浙江大学 | Method and device for repeatedly supporting and suspending microspheres in optical trap |
| CN114859076A (en) * | 2022-07-06 | 2022-08-05 | 之江实验室 | Acceleration measurement method and device based on optical suspension multi-microsphere array |
| CN114859076B (en) * | 2022-07-06 | 2022-10-21 | 之江实验室 | Acceleration measurement method and device based on optical suspension multi-microsphere array |
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| CN106935307B (en) | 2018-07-06 |
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