CN106931221B - Fluid control valve and control method thereof - Google Patents
Fluid control valve and control method thereof Download PDFInfo
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- CN106931221B CN106931221B CN201610874019.8A CN201610874019A CN106931221B CN 106931221 B CN106931221 B CN 106931221B CN 201610874019 A CN201610874019 A CN 201610874019A CN 106931221 B CN106931221 B CN 106931221B
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- valve seat
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- 239000012530 fluid Substances 0.000 title claims abstract description 65
- 238000000034 method Methods 0.000 title claims abstract description 9
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- 238000013459 approach Methods 0.000 claims abstract description 9
- 238000005259 measurement Methods 0.000 description 54
- 238000012937 correction Methods 0.000 description 9
- 238000011144 upstream manufacturing Methods 0.000 description 7
- 230000008859 change Effects 0.000 description 6
- 230000007246 mechanism Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 230000006870 function Effects 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000004891 communication Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 239000000806 elastomer Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
- F16K1/32—Details
- F16K1/34—Cutting-off parts, e.g. valve members, seats
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K37/00—Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
- F16K37/0075—For recording or indicating the functioning of a valve in combination with test equipment
- F16K37/0083—For recording or indicating the functioning of a valve in combination with test equipment by measuring valve parameters
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
- F16K1/12—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with streamlined valve member around which the fluid flows when the valve is opened
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/004—Actuating devices; Operating means; Releasing devices actuated by piezoelectric means
- F16K31/007—Piezoelectric stacks
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K37/00—Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
- F16K37/0025—Electrical or magnetic means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K37/00—Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
- F16K37/0025—Electrical or magnetic means
- F16K37/0041—Electrical or magnetic means for measuring valve parameters
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K37/00—Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
- F16K37/0075—For recording or indicating the functioning of a valve in combination with test equipment
- F16K37/0091—For recording or indicating the functioning of a valve in combination with test equipment by measuring fluid parameters
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D3/00—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups
- G01D3/02—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups with provision for altering or correcting the law of variation
- G01D3/022—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups with provision for altering or correcting the law of variation having an ideal characteristic, map or correction data stored in a digital memory
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
- G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
- G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
- G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
- G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8158—With indicator, register, recorder, alarm or inspection means
- Y10T137/8225—Position or extent of motion indicator
- Y10T137/8242—Electrical
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Automation & Control Theory (AREA)
- Fluid Mechanics (AREA)
- Technology Law (AREA)
- Indication Of The Valve Opening Or Closing Status (AREA)
- Flow Control (AREA)
Abstract
The invention provides a fluid control valve and a control method thereof, which are used for eliminating misunderstanding of users and improving use convenience, and the fluid control valve comprises: a valve seat (31); a valve body (32) that is provided so as to be able to approach or separate from the valve seat (31); an actuator (33) that moves the valve body (32) in a direction toward or away from the valve body; a position information detection unit (7) that detects a value corresponding to the relative position of the valve body (32) with respect to the valve seat (31); and a position output unit (42) that sets the position at which the valve element (32) starts to open as a zero position regardless of the position information obtained by the position information detection unit (7).
Description
Technical Field
The present invention relates to a fluid control valve for controlling a flow rate and a pressure of a fluid, and a control program for the fluid control valve.
Background
As shown in patent document 1, a conventional fluid control valve includes: a valve seat; a valve body disposed so as to be able to approach or separate from the valve seat; and an actuator that moves the valve body. The fluid control valve is configured to control the flow rate and pressure of the fluid to target values by adjusting the opening degree between the valve seat and the valve body by the actuator.
As shown in patent document 2, there is a fluid control valve having a position sensor that measures the position of a valve body with respect to a valve seat. The fluid control valve performs position control using the position of the valve body obtained by the position sensor. This makes it possible to control the flow rate without being affected by hysteresis of the actuator with respect to the drive voltage (current), creep of the valve body, or temporal change of the fluid control valve.
Documents of the prior art
Patent document 1: japanese patent laid-open publication No. 2013-50158
Patent document 2: japanese patent laid-open publication No. 2015-121898
In the fluid control valve, a user can confirm the position of the valve body based on the output of the position sensor. However, even if the valve body in the fully closed state is moved in the valve opening direction, the fluid cannot flow immediately. As shown in fig. 6, this is because the fluid control valve has a position where the fluid starts to flow (position where it starts to open) and a region (insensitive zone) before this position. In addition, the initial open position and insensitive area of each fluid control valve are different. The output of the position sensor is not zero at the position of the valve body in the fully closed state or the position at which the valve body starts to open.
Therefore, if the user confirms the position of the valve body only by the output of the position sensor, it is impossible to determine whether or not the valve body actually has passed the position at which the opening is started, and as a result, it is erroneously interpreted that the fluid control valve is clogged, a failure has occurred, or the like.
Disclosure of Invention
Therefore, the present invention has been made to solve the above-mentioned problems, and a main object of the present invention is to eliminate misunderstandings of users and improve convenience of use.
That is, the present invention provides a fluid control valve including: a valve seat; a valve body disposed so as to be able to approach or separate from the valve seat; an actuator having an operating body that is brought into contact with the valve body and moves the valve body in a direction of approaching or separating from the valve body; a position information detecting unit provided to the operating body and detecting a value corresponding to a relative position of the valve body with respect to the valve seat; a position output unit that sets the opening start position as a zero position regardless of the position information obtained by the position information detection unit at the opening start position of the valve body; and a display unit that displays the position of the valve body at which the valve body starts to open, the position being output from the position output unit, as a zero position of the valve body.
According to this fluid control valve, the position output unit sets the opening start position as the zero position regardless of the position information obtained by the position information detection unit at the opening start position of the valve body, so that the user can recognize the opening start position of the valve body as the zero position without being confused by the output of the position sensor. Therefore, misunderstanding by the user can be eliminated, and convenience in use can be improved.
Further, by using the position at which the valve body starts to open as the zero position, the fluid control can be performed without being affected by individual differences of the fluid control valve. It is possible to eliminate an error in the accuracy of fluid control due to individual differences of the fluid control valves.
Preferably, the position output unit sets the position of the valve body to a zero position when the position information obtained by the position information detection unit indicates a position closer to the valve seat than the opening start position. When the valve body is positioned closer to the valve seat than the position at which the valve body starts to open, the flow rate is in a zero state, and the state is set to the zero position, so that the user can directly recognize the state.
With the change over time of the position at which the valve body starts to open, the zero position to be displayed also needs to be changed. Therefore, it is preferable that the position output unit corrects the zero position by using a deviation amount between the position information obtained by the position information detection unit in a state where the full close signal is output to the driver and an initial value of the position information obtained by the position information detection unit in the same state. In this way, it is possible to eliminate misunderstanding of the user due to a change with time of the position at which opening is started and a change of the zero position accompanying the change. In the case of correcting the zero position, the full close signal may be output to the driver and the output signal of the position sensor may be compared. That is, since it is not necessary to determine the zero position again, the correction becomes easy.
Further, the present invention provides a control method of controlling a fluid control valve including: a valve seat; a valve body disposed so as to be able to approach or separate from the valve seat; an actuator having an operating body that is brought into contact with the valve body and moves the valve body in a direction of approaching or separating from the valve body; and a position information detecting unit provided to the operating body and detecting a value corresponding to a relative position of the valve body with respect to the valve seat, wherein the control method causes a computer to function as a position output unit that sets the opening start position as a zero position regardless of position information obtained by the position information detecting unit at the opening start position of the valve body, and a display unit that displays the opening start position output from the position output unit as the zero position of the valve body.
According to the present invention, since the position at which the valve body starts to open is set to the zero position of the valve body regardless of the position information obtained by the position information measuring unit at the position at which the valve body starts to open, it is possible to eliminate misunderstanding by a user and improve usability.
Drawings
Fig. 1 is a schematic diagram showing the structure of a mass flow controller according to the present embodiment.
Fig. 2 is a diagram showing a configuration of a fluid control valve according to the same embodiment.
Fig. 3 is a diagram showing three states of the position of starting opening of the valve body member of the same embodiment.
Fig. 4 is a diagram showing a display state of the position output unit according to the same embodiment.
Fig. 5 is a diagram showing a method of correcting the opening start position (zero position) in the same embodiment.
FIG. 6 is a graph showing a position of a fluid control valve to begin opening and a deadband.
Description of the reference numerals
100 fluid control valve
31. valve seat
31 a. seat surface
32. valve body
32 a. faces contacting the valve seat
33. driver
41. valve opening degree control part
42. position output part
43. display part
7. position sensor
Detailed Description
Hereinafter, an embodiment of a mass flow controller incorporating a fluid control valve according to the present invention will be described with reference to the drawings.
The mass flow controller 100 of the present embodiment is used in, for example, a semiconductor manufacturing process.
Specifically, as shown in fig. 1, the mass flow controller 100 includes: a main body 5 having a flow passage 51 formed therein, the flow passage 51 being configured to allow a fluid such as a gas for semiconductor processing to flow therethrough; a flow rate measurement means 2 for measuring a flow rate of the fluid flowing through the flow passage 51; a fluid control valve 3 that controls the flow rate of the fluid flowing through the flow passage 51; and a control device 4 that controls a valve opening degree of the fluid control valve 3 so that the measured flow rate output by the flow rate measurement mechanism 2 approaches a predetermined set flow rate. Hereinafter, each portion will be described in detail.
The body 5 is formed in a block shape, and the flow path 51 penetrates the block. An upstream end of the flow passage 51 is connected to an external inflow pipe (not shown). The downstream end of the flow passage 51 is connected to an external outflow pipe.
The flow rate measurement mechanism 2 is a thermal type flow rate measurement mechanism. Specifically, the flow rate measurement mechanism 2 includes: a sensor flow path pipe 21 branched from the flow path 51 to branch the fluid; and a pair of heating resistors 22 and 23 provided on the sensor flow channel tube 21. The pair of heating resistors 22 and 23 generate a temperature difference according to the mass flow rate of the fluid flowing through the sensor flow path tube 21. The flow rate measuring means 2 detects a temperature difference between the pair of heating resistors 22 and 23 by the flow calculating unit 24, and measures the mass flow rate of the sensor flow path pipe 21. The flow rate calculation unit 24 calculates the mass flow rate in the flow channel 51 based on the flow dividing ratio between the flow channel 51 and the sensor flow channel tube 21. Further, a laminar flow member 10 is provided between the branch point and the junction point of the sensor flow channel tube 21 of the flow channel 51.
The fluid control valve 3 is, for example, a normally closed flow control valve provided in the flow passage 51.
Specifically, as shown in fig. 2, the fluid control valve 3 includes: a valve seat member 31 and a valve body member 32 which are a pair of valve members housed in the main body 5; and an actuator 33 for driving the valve member 32 to set a valve opening degree, i.e., a separation distance between the valve seat member 31 and the valve member 32.
The valve seat member 31 serves as a valve seat, and its lower surface has a valve seat surface 31a as shown in fig. 2. An internal flow passage 31b is formed in the valve seat member 31, and one end of the internal flow passage 31b opens to the valve seat surface 31a and the other end opens to the side peripheral surface. The other end of the internal flow path 31b may be open on the upper surface of the valve seat member 31. In addition, the number of the internal flow passages 31b may be plural.
The valve seat member 31 is accommodated in a cylindrical recess 52 provided in the body 5. The recess 52 is disposed so as to cut off the flow path 51 of the body 5. Of the flow paths 51 cut by the recessed portion 52, an upstream flow path (hereinafter also referred to as an upstream flow path) 51(a) opens, for example, at the bottom surface of the recessed portion 52, and a downstream flow path (hereinafter also referred to as a downstream flow path) 52(B) opens, for example, at the side surface of the recessed portion 52. The recess 52 forms a valve chamber in which the valve seat member 31 and the valve body member 32 are arranged.
In addition, in a state where the valve seat member 31 is accommodated in the recess 52, the upstream flow passage 51(a) and the downstream flow passage 51(B) are communicated with each other through the internal flow passage 31B of the valve seat member 31.
The valve member 32 is a valve body, is disposed in the recess 52 of the main body 5 so as to face the valve seat member 31, and has a surface 32a on the upper surface thereof contacting the valve seat. The valve-seating-contact surface 32a contacts the seating surface 31a, and closes the internal flow path 31b that opens at the seating surface 31 a.
Further, in the recess 52 of the main body 5, the valve body member 32 is supported so as to be able to approach or separate from the valve seat member 31 by the valve body return spring 6. The valve body return spring 6 is a member that applies a biasing force to the valve body member 32 toward the valve seat member 31. That is, the valve body member 32 is urged in a direction from the open state toward the closed state (valve closing direction) by the valve body return spring 6. The valve body return spring 6 of the present embodiment is a plate spring and is fixed to the support member 9 provided in the recess 52. Further, the valve body return spring 6 may be fixed to the inner surface of the recess 52. The valve element return spring 6 may be any member that applies a biasing force to the valve element 32, and may be an elastic body other than a leaf spring. The elastomer may apply a force directly or indirectly to the valve body member 32.
The valve body member 32 is urged by the actuator 33 in response to the driving force, and moves from a closed state in which the valve body member contacts the valve seat member 31 and blocks the upstream flow path 51(a) and the downstream flow path 51(B) to an open state in which the valve body member is separated from the valve seat member 31 and the upstream flow path 51(a) and the downstream flow path 51(B) communicate with each other.
The actuator 33 includes, for example, a piezoelectric stack 331 formed by stacking a plurality of piezoelectric elements, and an actuator 332 that is displaced by the extension of the piezoelectric stack 331.
The front end of the piezoelectric stack 331 is connected to the moving body 332 via an intermediate connecting member 334.
The actuator 332 includes a diaphragm member 332a and a connecting rod 332b, and the connecting rod 332b is provided at the center of the diaphragm member 332a and abuts against the valve body member 32. The connecting rod 332b penetrates the center of the valve seat member 31 (the internal flow path 31b in the present embodiment) and abuts against the valve body member 32.
Further, if a voltage is applied to the piezoelectric stack 331, the piezoelectric stack 331 expands, and the actuator 332 applies a biasing force in the valve opening direction to the valve member 32 to move the valve member 32. Thus, the seat surface 31a and the surface 32a contacting the seat are separated by only a distance corresponding to the applied voltage. The upstream flow path 51(a) and the downstream flow path (B) communicate with each other through the gap. In a normal state where no voltage is applied to the actuator 33, the valve element 32 is in a closed state.
The fluid control valve 3 of the present embodiment includes a position information detecting unit 7, and the position information detecting unit 7 detects a value corresponding to the relative position of the valve seat contacting surface 32a with respect to the valve seat surface 31 a. Further, the values corresponding to the relative positions include: a relative distance or a value related to the relative distance of the valve seat surface 31a (valve seat member 31) and the surface 32a (valve body member 32) that contacts the valve seat; a valve opening or a value related to the valve opening; either the drive voltage of the driver 33 or a value related to the drive voltage; and so on.
The position information detecting unit 7 of the present embodiment is a position sensor that measures the displacement of the surface 32a that contacts the valve seat relative to the valve seat surface 31 a. The position sensor 7 is provided on the valve body member 32 or a member that moves together with the valve body member 32. Further, the position sensor 7 measures a relative distance from the valve seat member 31 or other stationary square member. The position sensor 7 of the present embodiment is an eddy current sensor. The eddy current sensor 7 is provided on the connecting rod 332b of the moving body 332. Further, the target 8 having conductivity is provided on the stationary member so as to oppose the approaching or separating direction of the valve body member 32 (the moving direction of the connecting rod 332 b). The eddy current sensor 7 measures the distance to the target 8.
The control device 4 has a valve opening control portion 41, and the valve opening control portion 41 obtains the flow rate measurement signal from the flow rate measurement mechanism 2 and the position information (position measurement signal) from the position sensor 7, and controls the valve opening of the fluid control valve 3. The valve opening control unit 41 controls the valve opening by controlling the position of the valve member 32 based on the position information (position measurement signal counts) from the position sensor 7.
In addition, the control device 4 has a position output portion 42, and the position output portion 42 outputs position information obtained by the position sensor 7 at the position where the valve body member 32 starts to open, to the display portion 43 as information that the position of the valve body member 32 is the zero position. Further, the control device 4 has at least the function of the position output unit 42 by installing a control program to the control device 4 having a CPU, a memory, an input/output interface, and the like.
The position output unit 42 determines the position at which opening is started, based on the flow rate measurement signal from the flow rate measurement means 2 and the position measurement signal from the position sensor 7. The determined opening start position is set to the zero position of the valve body member 32 regardless of the position measurement signal of the opening start position. Further, even in the position of the valve body member 32 in the fully closed state or the position at which opening is started, the position measurement signal from the position sensor 7 is not necessarily zero.
Here, the setting to the zero position means: the position where the opening is started is set to a numerical value of zero (numeral 0), and also includes a numerical value where the position can be recognized as zero, for example, a predetermined value where zero is continuous from one digit to a predetermined digit and is well divided.
Here, as shown in fig. 3, the positions at which the valve body member 32 starts to open are: (1) a position of the valve body member 32 (specifically, the surface 32a contacting the valve seat) at a point when the flow rate measurement value [ sccm ] indicated by the flow rate measurement signal exceeds zero and the fluid starts to flow ((1) of fig. 3); (2) the position of the valve element 32 at the time when the flow rate measurement value becomes a predetermined value larger than zero ((2) of fig. 3); or (3) a position shifted by a predetermined amount toward the valve seat member 31 side from the position of the valve body member 32 at the time when the flow rate measurement value exceeds zero and the fluid starts to flow ((3) of fig. 3). The position of (3) is a position between the position of the valve body member 32 in the fully closed state and the position of (1).
The position at which the opening is started is determined, for example, by gradually displacing the valve body member 32 from the fully closed state in which the fully closed signal is output to the driver 33, and obtaining the flow rate measurement signal from the flow rate measurement mechanism 2 at that time. The position at which opening is started may be a relative distance [ μm ] indicated by the position measurement signal, or may be a position measurement signal of the position sensor 7 (e.g., a signal value [ count ] before distance conversion). In addition, when the position to start opening is determined based on the drive voltage of the driver 33, the position to start opening may be indicated by the drive voltage.
Further, when the position measurement signal of the position sensor 7 indicates a position closer to the valve seat member 31 (specifically, the valve seat surface 31a) than the opening start position, the position output portion 42 sets the position of the valve body member 32 to a zero position, not a negative value. The zero position in this case is the same as the value (zero or a predetermined value) of the position set to start opening.
According to the above configuration, the position output unit 42 replaces the real-time position measurement signal at the position where the opening is started with zero (0). Further, when the valve seat is located at a position closer to the opening side (the side opposite to the valve seat surface 31a) than the position at which the valve seat is opened, the position output unit 42 outputs a value obtained by subtracting the real-time position measurement signal at the position at which the valve seat is opened from the real-time position measurement signal at the position, that is, the position output unit 42 outputs a value from zero. Further, when the position is located closer to the closing side (the valve seat surface 31a side) than the position at which the opening is started, the position output portion 42 outputs zero.
As shown in fig. 4, the display unit 43 displays a graph showing the relationship between the measured flow rate value [ sccm ] indicated by the flow rate measurement signal and the relative distance [ μm ] indicated by the position measurement signal on the display. Further, the position measurement signal (signal value [ count ] before distance conversion) of the position sensor 7 may be used as the relative distance [ μm ] set as the abscissa. The unit of the horizontal axis indicating the position of the valve member 32 may be [ m ] in addition to [ μm ], and the ratio [% ] of the position of the valve member 32 to a predetermined valve opening degree may be used in various other units. The unit on the vertical axis representing the measured flow rate value may be [ sccm ] or a ratio to a predetermined flow rate, and various other units may be used.
The display unit 43 may display, for example, a graph showing a relationship between the applied voltage [ V ] applied to the actuator 33 and the relative distance [ μm ] and a graph showing a relationship between the ratio [% ] of the output signal to the maximum flow rate of the position sensor 7 or the output signal at a predetermined flow rate and the relative distance [ μm ] in addition to the graph showing the relationship between the flow rate measurement value and the relative distance.
In the figure, the display unit 43 displays the position at which the opening start set by the position output unit 42 is the zero position of the valve body member 32 so that the user can visually recognize that the position at which the opening start is set by the position output unit 42 is the zero position of the valve body member 32, regardless of the position information of the valve body member 32 at the position at which the opening start is set. In the present embodiment, as shown in fig. 4, the display unit 43 displays the position where the opening is started is zero and the position is an intersection of the horizontal axis and the vertical axis. The display unit 43 may display a mark such as an indication line or an arrow indicating a position where opening is started as a zero position.
When the position measurement signal of the position sensor 7 indicates a position closer to the valve seat member 31 (specifically, the valve seat surface 31a) than the position at which the opening is started, the display unit 43 displays the position of the valve body member 32 (the surface 32a that contacts the valve seat) as a zero position. In the graph showing the relationship between the ratio [% ] of the position measurement signal to the position measurement signal at the time of the maximum flow rate of the position sensor 7 or at the time of the predetermined flow rate and the relative distance [ μm ], the display unit 43 sets the position measurement signal of the position sensor 7 at the position at which opening is started to zero, and sets the state where the position measurement signal is equal to or less than the position measurement signal of the position sensor 7 at the position at which opening is started to zero.
The position output unit 42 of the present embodiment includes a correction unit (correction function) that corrects the zero position.
The correction unit 421 of the position output unit 42 performs correction by shifting the already set zero position by the amount of deviation using the amount of deviation between the position measurement signal of the position sensor 7 in the fully-closed signal state and the initial value of the position measurement signal of the position sensor 7 in the same state, which is output to the driver 33. Further, the initial value is a position measurement signal of the position sensor 7 in the fully closed state obtained when the position at which the opening is started is most recently measured.
Specifically, as shown in fig. 5, the correction unit 421 calculates the position measurement signal of the corrected opening start position by subtracting (compensating) the deviation amount from the position measurement signal of the opening start position before correction.
The position correction by the correction unit 421 may be automatically performed at predetermined intervals or each time a predetermined event occurs. Further, the operation may be performed when an input signal is received by a user.
The display unit 43 displays the corrected opening start position on the display as a zero position.
According to the mass flow controller 100 configured as described above, the position output portion 42 sets the opening start position as the zero position of the valve body member 32 regardless of the position information (position measurement signal) of the valve body member 32 at the opening start position, and the display portion 43 displays the opening start position as the zero position. Thus, the user can recognize the position at which the valve member 32 starts to open as the zero position without being confused by the output of the position sensor 7. Therefore, misunderstanding by the user can be eliminated, and convenience in use can be improved.
Further, by using the position at which the valve body member 32 starts to open as the zero position, the fluid control can be performed without being affected by individual differences of the fluid control valve 3. It is possible to eliminate an error in the accuracy of fluid control due to individual differences of the fluid control valves 3.
The present invention is not limited to the above embodiments.
For example, the position information detecting unit 7 is not limited to the eddy current sensor of the above embodiment, and may be an optical sensor such as a capacitance sensor or an optical interference sensor, a sensor that detects a drive voltage of an actuator and obtains position information, or the like.
The fluid control valve of the above embodiment is of a normally closed type, but may be of a normally open type, and similar effects can be achieved.
Further, as in the above-described embodiment, in the case of a fluid control apparatus (mass flow controller) to which a fluid control valve has been attached, by sharing a control section (CPU) of the fluid control valve and a control section (CPU) of the fluid control apparatus, the shared CPU can be made to have a function as the position output section.
In the above embodiment, the description has been given of the mass flow controller to which the fluid control valve is attached, but it is needless to say that the fluid control valve may be configured as a single body. As the fluid control valve, in addition to the flow rate control valve as described in the above embodiment, a pressure control valve for controlling the pressure of the fluid may be used.
The configuration of the fluid control valve is not limited to the above embodiment, and the following embodiment may be used: the shutoff/communication of the flow passage is switched by providing a valve seat in the flow passage and providing a valve body so as to be able to approach or separate from the valve seat. In addition, the fluid control valve may be a normally open type.
In the above embodiment, the position at which opening is started is corrected based on the amount of deviation of the output signal of the position sensor from the initial value in the fully closed state, but the position at which opening is started may be updated and the position information of the updated position at which opening is started may be displayed as the zero position by the same method as in the above embodiment. That is, the following manner may also be adopted: the valve body member 32 is gradually displaced from the fully closed state in which the fully closed signal is output to the actuator 33, and the flow rate measurement signal from the flow rate measurement means 2 at that time is obtained, thereby determining the position at which the opening is started after the change with time.
In the above embodiment, as a configuration for correcting the stored opening start position, the following configuration may be adopted: the position at which the opening is started is determined based on the flow rate measurement signal from the flow rate measurement means 2 and the position measurement signal from the position sensor 7 every time the valve body member in the fully closed state is opened or every predetermined number of times the valve body member in the fully closed state is opened.
As the flow rate measurement means of the above embodiment, various flow rate measurement systems such as a pressure type flow rate measurement system, a coriolis type flow rate measurement system, and an ultrasonic type flow rate measurement system may be used in addition to the thermal type flow rate measurement means.
The valve opening degree control unit 41 of the above embodiment may control the valve opening degree using the position information (position measurement signal [ count ]) from the position sensor 7, and may control the valve opening degree with reference to the zero position set by the position output unit 42.
The fluid control valve and the mass flow controller according to the above embodiments may be used in a place other than the semiconductor manufacturing process.
The present invention is not limited to the above embodiment, and various modifications may be made without departing from the scope of the present invention.
The technical features described in the embodiments (examples) of the present invention may be combined with each other to form a new technical solution.
Claims (4)
1. A fluid control valve, characterized in that,
the fluid control valve includes:
a valve seat;
a valve body disposed so as to be able to approach or separate from the valve seat;
an actuator having an operating body that is brought into contact with the valve body and moves the valve body in a direction of approaching or separating from the valve body;
a position information detecting unit provided to the operating body and detecting a value corresponding to a relative position of the valve body with respect to the valve seat;
a position output unit that sets the opening start position as a zero position regardless of the position information obtained by the position information detection unit at the opening start position of the valve body; and
and a display unit that displays the position of the valve body at which the valve body starts to open, the position being output from the position output unit, as a zero position of the valve body.
2. The fluid control valve of claim 1,
the position output unit sets the position of the valve body to a zero position when the position information obtained by the position information detection unit indicates a position closer to the valve seat than the opening start position.
3. The fluid control valve of claim 1,
the position output unit corrects the zero position using a deviation amount between the position information obtained by the position information detection unit in a state where the full close signal is output to the driver and an initial value of the position information obtained by the position information detection unit in the same state.
4. A control method of controlling a fluid control valve, the fluid control valve comprising: a valve seat; a valve body disposed so as to be able to approach or separate from the valve seat; an actuator having an operating body that is brought into contact with the valve body and moves the valve body in a direction of approaching or separating from the valve body; and a position information detecting unit provided to the operating body and detecting a value corresponding to a relative position of the valve body with respect to the valve seat,
the control method causes a computer to function as a position output unit that sets a position at which opening of the valve body is started as a zero position regardless of position information obtained by the position information detection unit at the position at which opening of the valve body is started, and a display unit that displays the position at which opening is started, which is output from the position output unit, as the zero position of the valve body.
Applications Claiming Priority (2)
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| JP2015-200289 | 2015-10-08 | ||
| JP2015200289A JP6775288B2 (en) | 2015-10-08 | 2015-10-08 | Fluid control valve and its control program |
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| CN106931221A CN106931221A (en) | 2017-07-07 |
| CN106931221B true CN106931221B (en) | 2020-05-26 |
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| CN201610874019.8A Active CN106931221B (en) | 2015-10-08 | 2016-09-30 | Fluid control valve and control method thereof |
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| US (1) | US10323771B2 (en) |
| JP (1) | JP6775288B2 (en) |
| KR (1) | KR102525494B1 (en) |
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Families Citing this family (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6777659B2 (en) * | 2015-06-25 | 2020-10-28 | イリノイ トゥール ワークス インコーポレイティド | Piezo actuator type valve |
| JP6844874B2 (en) * | 2017-03-30 | 2021-03-17 | 株式会社フジキン | A mass flow sensor, a mass flow meter including the mass flow sensor, and a mass flow controller including the mass flow sensor. |
| JP7427357B2 (en) * | 2017-06-07 | 2024-02-05 | 株式会社堀場エステック | Fluid control device, control program, and control method |
| JP7008499B2 (en) | 2017-12-27 | 2022-01-25 | 株式会社堀場エステック | Calibration data creation device, calibration data creation method, and flow control device |
| CN112189171A (en) * | 2018-08-10 | 2021-01-05 | 株式会社富士金 | Fluid control device, fluid control apparatus, and operation analysis system |
| JP2020089037A (en) * | 2018-11-22 | 2020-06-04 | 株式会社堀場エステック | Piezo actuator, fluid control valve and fluid control apparatus |
| US11702331B2 (en) * | 2019-05-03 | 2023-07-18 | Marmon Foodservice Technologies, Inc. | Beverage dispensing machines with dispensing valves |
| AU2020283140B2 (en) | 2019-05-31 | 2022-04-14 | Perceptive Sensor Technologies Llc | Non-linear ultrasound method and apparatus for quantitative detection of materials (liquids, gas, plasma) |
| US11231311B2 (en) | 2019-05-31 | 2022-01-25 | Perceptive Sensor Technologies Llc | Non-linear ultrasound method and apparatus for quantitative detection of materials |
| WO2022120074A1 (en) | 2020-12-02 | 2022-06-09 | Perceptive Sensor Technologies Llc | Variable angle transducer interface block |
| EP4256282A1 (en) | 2020-12-04 | 2023-10-11 | Perceptive Sensor Technologies, Inc. | Multi-bounce acoustic signal material detection |
| US11788904B2 (en) | 2020-12-04 | 2023-10-17 | Perceptive Sensor Technologies, Inc. | Acoustic temperature measurement in layered environments |
| US11549839B2 (en) | 2020-12-04 | 2023-01-10 | Perceptive Sensor Technologies, Inc. | Systems and methods for determining floating roof level tilt and characterizing runoff |
| US11536696B2 (en) | 2020-12-04 | 2022-12-27 | Perceptive Sensor Technologies, Inc. | In-wall multi-bounce material property detection and acoustic signal amplification |
| US11604294B2 (en) | 2020-12-04 | 2023-03-14 | Perceptive Sensor Technologies, Inc. | Determining layer characteristics in multi-layered environments |
| CA3201085A1 (en) | 2020-12-04 | 2022-06-09 | Lazar Bivolarsky | Acoustic temperature measurement in layered environments |
| US11585690B2 (en) | 2020-12-04 | 2023-02-21 | Perceptive Sensor Technologies, Inc. | Multi-path acoustic signal improvement for material detection |
| WO2022120259A1 (en) | 2020-12-04 | 2022-06-09 | Perceptive Sensor Technologies, Inc. | Apparatus, system, and method for the detection of objects and activity within a container |
| US11946905B2 (en) | 2020-12-30 | 2024-04-02 | Perceptive Sensor Technologies, Inc. | Evaluation of fluid quality with signals |
| KR102359130B1 (en) * | 2021-05-04 | 2022-02-08 | 주식회사 삼양발브종합메이커 | Valve apparatus available flow control and the control system using the apparatus |
| EP4370816A1 (en) | 2021-07-16 | 2024-05-22 | Engineered Controls International, LLC | Actuating assembly for an internal valve |
| TWI788037B (en) * | 2021-10-01 | 2022-12-21 | 中國鋼鐵股份有限公司 | Control valve analysis system |
| WO2023154514A1 (en) | 2022-02-11 | 2023-08-17 | Perceptive Sensor Technologies, Inc. | Acoustic signal detection of material composition in static and dynamic conditions |
| WO2024091308A1 (en) | 2022-07-19 | 2024-05-02 | Perceptive Sensor Technologies, Inc. | Acoustic signal material identification with nanotube couplant |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4132272A (en) * | 1977-06-30 | 1979-01-02 | International Harvester Company | Tractor hitch position control system |
| US5197508A (en) * | 1991-02-21 | 1993-03-30 | Mannesmann Aktiengesellschaft | Valve apparatus and method for controlling fluid flow |
| CN103671939A (en) * | 2012-09-07 | 2014-03-26 | 株式会社堀场Stec | Valve element and fluid control valve |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5527548A (en) * | 1978-08-16 | 1980-02-27 | Fuji Kinzoku Kosaku Kk | Indicator of opening degree of valve |
| JPS59168319A (en) * | 1983-03-15 | 1984-09-22 | Mitsubishi Electric Corp | Display device |
| JPH053932Y2 (en) * | 1985-06-06 | 1993-01-29 | ||
| EP0471884B1 (en) * | 1990-08-24 | 1996-02-21 | MOOG GmbH | Electrohydraulic servovalve |
| JPH05141572A (en) * | 1991-11-20 | 1993-06-08 | Kayaba Ind Co Ltd | Fluid valve control device |
| JPH07180701A (en) * | 1993-12-24 | 1995-07-18 | Yamatake Honeywell Co Ltd | Electropneumatic positioner |
| JP3222061B2 (en) * | 1996-05-27 | 2001-10-22 | 株式会社巴技術研究所 | Drive device for center type butterfly valve |
| JPH10103562A (en) * | 1996-09-24 | 1998-04-21 | Hitachi Plant Eng & Constr Co Ltd | Valve opening/closing degree display device and valve opening/closing degree resetting method |
| US6155283A (en) * | 1999-09-10 | 2000-12-05 | The Foxboro Company | Intelligent valve positioner tuning |
| JP4856905B2 (en) * | 2005-06-27 | 2012-01-18 | 国立大学法人東北大学 | Flow rate variable type flow control device |
| JP5141572B2 (en) | 2009-01-22 | 2013-02-13 | ソニー株式会社 | Non-aqueous electrolyte secondary battery |
| US8640676B2 (en) * | 2010-03-11 | 2014-02-04 | Honda Motor Co., Ltd. | Evaporated fuel treatment apparatus |
| JP5947505B2 (en) | 2011-08-30 | 2016-07-06 | 株式会社堀場エステック | Fluid control valve |
| WO2013115298A1 (en) * | 2012-02-03 | 2013-08-08 | 日立金属株式会社 | Device and program for flow rate control |
| US20140021384A1 (en) * | 2012-07-20 | 2014-01-23 | Gm Global Technology Operations Llc. | Electronically controlled valve assembly |
| CN202859864U (en) * | 2012-10-08 | 2013-04-10 | 上海力申科学仪器有限公司 | Electronic control flow regulating valve |
| JP6147182B2 (en) | 2013-12-20 | 2017-06-14 | 株式会社堀場エステック | Fluid control valve |
-
2015
- 2015-10-08 JP JP2015200289A patent/JP6775288B2/en active Active
-
2016
- 2016-09-27 KR KR1020160124060A patent/KR102525494B1/en active IP Right Grant
- 2016-09-30 CN CN201610874019.8A patent/CN106931221B/en active Active
- 2016-10-03 US US15/283,757 patent/US10323771B2/en active Active
- 2016-10-07 TW TW105132618A patent/TWI697638B/en active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4132272A (en) * | 1977-06-30 | 1979-01-02 | International Harvester Company | Tractor hitch position control system |
| US5197508A (en) * | 1991-02-21 | 1993-03-30 | Mannesmann Aktiengesellschaft | Valve apparatus and method for controlling fluid flow |
| CN103671939A (en) * | 2012-09-07 | 2014-03-26 | 株式会社堀场Stec | Valve element and fluid control valve |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI697638B (en) | 2020-07-01 |
| US10323771B2 (en) | 2019-06-18 |
| US20170102095A1 (en) | 2017-04-13 |
| KR102525494B1 (en) | 2023-04-25 |
| JP2017072216A (en) | 2017-04-13 |
| KR20170042227A (en) | 2017-04-18 |
| JP6775288B2 (en) | 2020-10-28 |
| CN106931221A (en) | 2017-07-07 |
| TW201713889A (en) | 2017-04-16 |
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