CN106931183A - Choke valve - Google Patents
Choke valve Download PDFInfo
- Publication number
- CN106931183A CN106931183A CN201511026521.5A CN201511026521A CN106931183A CN 106931183 A CN106931183 A CN 106931183A CN 201511026521 A CN201511026521 A CN 201511026521A CN 106931183 A CN106931183 A CN 106931183A
- Authority
- CN
- China
- Prior art keywords
- sealing gasket
- throttle body
- bushing
- valve rod
- valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K5/00—Plug valves; Taps or cocks comprising only cut-off apparatus having at least one of the sealing faces shaped as a more or less complete surface of a solid of revolution, the opening and closing movement being predominantly rotary
- F16K5/04—Plug valves; Taps or cocks comprising only cut-off apparatus having at least one of the sealing faces shaped as a more or less complete surface of a solid of revolution, the opening and closing movement being predominantly rotary with plugs having cylindrical surfaces; Packings therefor
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K5/00—Plug valves; Taps or cocks comprising only cut-off apparatus having at least one of the sealing faces shaped as a more or less complete surface of a solid of revolution, the opening and closing movement being predominantly rotary
- F16K5/08—Details
- F16K5/14—Special arrangements for separating the sealing faces or for pressing them together
- F16K5/18—Special arrangements for separating the sealing faces or for pressing them together for plugs with cylindrical surfaces
- F16K5/181—Special arrangements for separating the sealing faces or for pressing them together for plugs with cylindrical surfaces with the housing or parts of the housing mechanically pressing the seals against the plugs
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Lift Valve (AREA)
- Details Of Valves (AREA)
Abstract
A kind of choke valve, including a throttle body, a valve rod, a sealing gasket, a bottom, a spring and a bushing.One runner is formed among the throttle body.Valve rod is located among the throttle body, wherein, by rotating the valve rod, the aperture size of the runner is adjusted.Among the throttle body, the sealing gasket abuts the valve rod to sealing gasket.Bottom connects the throttle body, wherein, a gas outlet is formed on the bottom, and the bottom includes a bottom flange, and the bottom flange is around the gas outlet.The spring abuts the bottom flange and applies an elastic force to the sealing gasket, the sealing gasket is close to the valve rod.The spring housing on the bushing, first end ejection sealing gasket of the bushing.The gas outlet of choke valve of the invention will not be blocked because of particle deposition, can reduce the situation for adjusting throttle valve opening repeatedly, improve the life-span of choke valve.
Description
Technical field
The present invention is related to a kind of choke valve, in particular to a kind of choke valve for preventing particulate from polluting.
Background technology
In a vapor deposition process, sedimentary is deposited on semiconductor crystal wafer (or base material), generally includes to add
The hot base material, and by base material clamping, so that the base material is maintained at a distance of the source of supply in deposition gases (process gas)
One short distance, deposition gases (process gas) flow towards the base material.The deposition gases air-flow is produced and reacted, and in
A sedimentary is formed on the heated base material.
Some points on vacuum line between chamber and vavuum pump, vaccum stop valve or choke valve are normally provided,
When closed for process chamber provides limitation.Volatile contaminant in the reaction chamber at a high temperature of maintain steam state, can not
What is be expected to condenses on the vacuum line inwall of cooling, there are some distances and the reaction zone of reaction chamber between,
But still within the receiving limitation of the process chamber as defined in vacuum valve.Under a no gas flow condition, these pollutions
Thing can be returned among the conversion zone of chamber, and causes the pollution not being expected to.In order to attempt to avoid this problem, system
Inner surface in the receiving limit of journey chamber is periodically cleaned by etching modes such as (and/or plasma cleanings), is led to
A clean gas are crossed to remove the dielectric material deposited by deposition gases.
However, choke valve is limited to the design in its structure, pollutant can be deposited on the inner body of choke valve,
And influence the gas flow optimized effect of choke valve.Because choke valve is usually to be controlled with stepper motor, when pollutant is heavy
When product is on the inner body of choke valve, stepper motor can repeatedly adjust throttle valve opening, thus influence reative cell
Pressure, and reduce the life-span of choke valve.
The content of the invention
The present invention is a kind of choke valve provided to solve problem of the prior art, including a throttle body, one
Valve rod, a sealing gasket, a bottom, a spring and a bushing.One runner is formed among the throttle body.Valve
Bar is located among the throttle body, wherein, when the valve rod is rotated, the aperture size of the runner is adjusted.Sealing
Among the throttle body, the sealing gasket abuts the valve rod to pad.Bottom connects the throttle body, wherein, one
Gas outlet is formed on the bottom, and the bottom includes a bottom flange, and the bottom flange is around the gas outlet.The bullet
Spring abuts the bottom flange and applies an elastic force to the sealing gasket, the sealing gasket is close to the valve rod.The spring is arranged
On the bushing, first end ejection sealing gasket of the bushing.
In one embodiment, the bushing includes a flange of bush, and one end of the spring abuts the bottom flange, the spring
The other end abut the flange of bush.
In one embodiment, the flange of bush is formed at the first end.
In one embodiment, the bushing includes one second end, and second end extends through the gas outlet.
In one embodiment, the bushing has a bushing through hole, the aperture of the aperture less than the gas outlet of the bushing through hole.
In one embodiment, the material of the bushing is aluminium alloy.
In one embodiment, the throttle body includes an air inlet, and the air inlet is located at same straight line with the gas outlet
On.
The present invention be also related to a kind of choke valve, including a throttle body, a valve rod, a sealing gasket, a bottom with
And a spring.One runner is formed among the throttle body.Valve rod is located among the throttle body, wherein, when
When rotating the valve rod, the aperture size of the runner is adjusted.Sealing gasket is located among the throttle body, the sealing gasket
Abut the valve rod.Bottom connects the throttle body, wherein, a gas outlet is formed on the bottom, the bottom bag
A bottom flange is included, the bottom flange is around the gas outlet.The spring abuts the bottom flange and the sealing gasket is applied
One elastic force, makes the sealing gasket be close to the valve rod.
In one embodiment, a breach is formed with the valve rod, when the valve rod is rotated, the position of the breach is adjusted,
The aperture size of the runner is adjusted, and an abutting part is formed with the sealing gasket, and the abutting part is supported in the way of it can seal
Connect the valve rod.
Using the choke valve of the embodiment of the present invention, due to air-flow being isolated from spring and bottom flange using bushing, therefore,
Particulate will not be deposited on spring and bottom flange.Therefore the gas outlet of choke valve can not hinder because of particle deposition again
Plug, therefore the situation for adjusting throttle valve opening repeatedly can be reduced.Therefore the chamber pressure of stabilization can be provided, and improved
The life-span of choke valve.
Brief description of the drawings
The following drawings is only intended to, in schematic illustration and explanation is done to the present invention, not delimit the scope of the invention.Wherein,
Fig. 1 shows the choke valve of first embodiment of the invention.
Fig. 2 shows the bottom flange of first embodiment of the invention.
Fig. 3 shows the choke valve of second embodiment of the invention.
Fig. 4 shows the bushing of second embodiment of the invention.
Second end of the bushing of Fig. 5 display second embodiment of the invention.
Drawing reference numeral explanation：
1st, 2~choke valve；
10~the first coupling assemblies；
11~o-ring；
12~sealing gasket；
13~abutting part；
14~o-ring；
20~the second coupling assemblies；
21~o-ring；
22~sealing gasket；
23~abutting part；
24~o-ring；
30~throttle body；
31~air inlet；
40~valve stem unit；
41~valve rod；
42~breach；
50~bottom；
51~gas outlet；
52~bottom flange；
60~spring；
70~bushing；
71~first end；
72~the second ends；
73~flange of bush；
74~bushing through hole.
Specific embodiment
It is existing for the effect for making the technology contents for being used of the invention, purpose and its reach has more complete and clearly discloses
Control brief description of the drawings specific embodiment of the invention：
Reference picture 1, the choke valve 1 of its display first embodiment of the invention, including one first coupling assembly 10,1 the
Two coupling assemblies 20, a throttle body 30, a valve stem unit 40 and a bottom 50.First coupling assembly 10
Including an o-ring 11, a sealing gasket 12 and an o-ring 14.Second coupling assembly 20 includes an o-ring
21st, a sealing gasket 22 and an o-ring 24.Throttle body 30 includes an air inlet 31.The valve stem unit
40 include a valve rod 41, and a breach 42 is formed at the valve rod 41.A gas outlet 51, bottom are formed with bottom 50
50 connect the throttle body 30.
One runner is formed among the throttle body 30 (from the air inlet 31 to the gas outlet 51).Implement herein
In example, the runner is linear, and the air inlet 31 is located on same straight line with the gas outlet 51.Valve rod 41 sets
Among the throttle body 30, wherein, by rotating the valve rod 41, the position of breach 42 is adjusted, the stream
Therefore the aperture size in road is adjusted.O-ring 11 is between the exterior line (not shown) of sealing gasket 12 and.
O-ring 14 is located between the throttle body 30 and the exterior line (not shown).O-ring 21 is close located at this
Between packing 22 and the bottom 50, o-ring 24 is located between the throttle body 30 and the bottom 50.
Sealing gasket 12 has the abutting part 13 of concaveconvex shape, and abutting part 13 abuts the valve rod 41 in sealable mode.
Sealing gasket 22 has the abutting part 23 of concaveconvex shape, and abutting part 23 abuts the valve rod 41 in sealable mode.It is close
Packing 22 is among the throttle body 30.
Reference picture 1, Fig. 2, in the first embodiment, the bottom 50 includes a bottom flange 52, the bottom flange
52 around the gas outlet, thus can prevent particle deposition on the bottom flange 52.Therefore the gas outlet of choke valve
Will not block because of particle deposition, therefore the situation for adjusting throttle valve opening repeatedly can be reduced.Therefore stabilization can be provided
Chamber pressure, and improve the life-span of choke valve.
Reference picture 3, the choke valve 2 of its display second embodiment of the invention, including one first coupling assembly 10,1 the
Two coupling assemblies 20, a throttle body 30, a valve stem unit 40, a bottom 50, a spring 60 and a lining
Set 70.First coupling assembly 10 includes an o-ring 11, a sealing gasket 12 and an o-ring 14.Second connects
Connected components 20 include an o-ring 21, a sealing gasket 22 and an o-ring 24.Throttle body 30 includes
One air inlet 31.The valve stem unit 40 includes a valve rod 41, and a breach 42 is formed at the valve rod 41.Bottom 50
On be formed with a gas outlet 51, bottom 50 connects the throttle body 30.
One runner is formed among the throttle body 30 (from the air inlet 31 to the gas outlet 51).Implement herein
In example, the runner is linear, and the air inlet 31 is located on same straight line with the gas outlet 51.Valve rod 41 sets
Among the throttle body 30, wherein, by rotating the valve rod 41, the position of breach 42 is adjusted, the stream
Therefore the aperture size in road is adjusted.O-ring 11 is between the exterior line (not shown) of sealing gasket 12 and.
O-ring 14 is located between the throttle body 30 and the exterior line (not shown).O-ring 21 is close located at this
Between packing 22 and the bottom 50, o-ring 24 is located between the throttle body 30 and the bottom 50.
Sealing gasket 12 has the abutting part 13 of concaveconvex shape, and abutting part 13 abuts the valve rod 41 in sealable mode.
Sealing gasket 22 has the abutting part 23 of concaveconvex shape, and abutting part 23 abuts the valve rod 41 in sealable mode.
The spring 60 abuts the bottom flange 52 and applies an elastic force to the sealing gasket 22, makes the sealing gasket 22
It is close to the valve rod 41.The spring 60 is sheathed on the bushing 70, and the ejection of a first end 71 of the bushing 70 should
Sealing gasket 22.In this embodiment, first end 71 abuts o-ring 21.
Collocation reference picture 3, Fig. 4, in this embodiment, the bushing 70 includes a flange of bush 73, and the bushing is convex
Edge 73 is formed at the first end 71, and one end of the spring 60 abuts the bottom flange 52, the other end of the spring 60
Abut the flange of bush 73.The bushing further includes one second end 72.Collocation reference picture 5, in one embodiment, should
Second end 72 extends through the gas outlet 51.In one embodiment, the bushing 70 has a bushing through hole 74, should
Aperture of the aperture of bushing through hole 74 less than the gas outlet 51.
In one embodiment, the material of the bushing 70 is aluminium alloy, thus with to ozone resisting erosion.Above-mentioned exposure
The present invention is not limiting as, the bushing 70 can also be Teflon or other materials.
Same first embodiment, in this embodiment, by the width of the appropriately designed bottom flange 52, maximizing
The aperture of gas outlet 51, and still can be the support that the spring 60 provides abundance.
Using the choke valve of second embodiment of the invention, due to air-flow being isolated from spring and bottom flange using bushing,
Therefore, particulate will not be deposited on spring and bottom flange.Therefore the gas outlet of choke valve again can not be heavy because of particulate
Product obstruction, therefore the situation for adjusting throttle valve opening repeatedly can be reduced.Therefore the chamber pressure of stabilization can be provided, and
Improve the life-span of choke valve.
Although the present invention is disclosed above with specific preferred embodiment, so it is not limited to the present invention, any ripe
Skilled person is known, without departing from the spirit and scope of the present invention, can still make a little change and retouching, therefore this
The protection domain of invention ought be defined depending on right and is defined.
Claims (9)
1. a kind of choke valve, it is characterised in that the choke valve includes：
One throttle body, wherein, a runner is formed among the throttle body；
One valve rod, among the throttle body, wherein, when the valve rod is rotated, the aperture size quilt of the runner
Adjustment；
One sealing gasket, among the throttle body, the sealing gasket abuts the valve rod；
One bottom, connects the throttle body, wherein, a gas outlet is formed on the bottom, and the bottom includes one
Bottom flange, the bottom flange is around the gas outlet；
One spring, the spring abuts the bottom flange and applies an elastic force to the sealing gasket, the sealing gasket is close to this
Valve rod；And
One bushing, the spring housing on the bushing, first end ejection sealing gasket of the bushing.
2. choke valve as claimed in claim 1, it is characterised in that the bushing includes a flange of bush, the spring
One end abut the bottom flange, the other end of the spring abuts the flange of bush.
3. choke valve as claimed in claim 2, it is characterised in that the flange of bush is formed at the first end.
4. choke valve as claimed in claim 2, it is characterised in that the bushing includes one second end, second end
Extend through the gas outlet.
5. choke valve as claimed in claim 1, it is characterised in that the bushing has a bushing through hole, the bushing
Aperture of the aperture of through hole less than the gas outlet.
6. choke valve as claimed in claim 1, it is characterised in that the material of the bushing is aluminium alloy.
7. choke valve as claimed in claim 1, it is characterised in that the throttle body includes an air inlet, should
Air inlet is located on same straight line with the gas outlet.
8. a kind of choke valve, it is characterised in that the choke valve includes：
One throttle body, wherein, a runner is formed among the throttle body；
One valve rod, among the throttle body, wherein, when the valve rod is rotated, the aperture size quilt of the runner
Adjustment；
One sealing gasket, among the throttle body, the sealing gasket abuts the valve rod；
One bottom, connects the throttle body, wherein, a gas outlet is formed on the bottom, and the bottom includes one
Bottom flange, the bottom flange is around the gas outlet；And
One spring, the spring abuts the bottom flange and applies an elastic force to the sealing gasket, the sealing gasket is close to this
Valve rod.
9. choke valve as claimed in claim 8 a, it is characterised in that breach is formed with the valve rod, works as rotation
During the valve rod, the position of the breach is adjusted, and the aperture size of the runner is adjusted, and being formed with one on the sealing gasket supports
Socket part, the abutting part abuts the valve rod in the way of it can seal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201511026521.5A CN106931183B (en) | 2015-12-31 | 2015-12-31 | Throttle valve |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201511026521.5A CN106931183B (en) | 2015-12-31 | 2015-12-31 | Throttle valve |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106931183A true CN106931183A (en) | 2017-07-07 |
| CN106931183B CN106931183B (en) | 2019-02-01 |
Family
ID=59442685
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201511026521.5A Active CN106931183B (en) | 2015-12-31 | 2015-12-31 | Throttle valve |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106931183B (en) |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3382892A (en) * | 1965-03-08 | 1968-05-14 | Weatherhead Co | Quick-disconnect coupling |
| US6090206A (en) * | 1997-10-20 | 2000-07-18 | Applied Materials, Inc. | Throttle valve providing enhanced cleaning |
| CN2490375Y (en) * | 2001-07-30 | 2002-05-08 | 自贡市地佩尔阀门有限公司 | High-temp. fixed ball valve |
| CN2748721Y (en) * | 2004-11-16 | 2005-12-28 | 林泰顺 | Ball valve capable of automatically adjusting sealing |
| KR20070106312A (en) * | 2006-04-28 | 2007-11-01 | 주식회사서흥금속 | Ball valve of very low temperature |
| CN101421548A (en) * | 2006-04-13 | 2009-04-29 | Vir里齐奥工程师阀门工业股份公司 | Ball for valves and production method |
| US20130240772A1 (en) * | 2010-09-10 | 2013-09-19 | Xamol Limited | Valve assembly and components therefore |
| CN104662347A (en) * | 2012-08-06 | 2015-05-27 | 机械解析有限公司 | Valve with a load varying mechanism, and method of operating the same |
-
2015
- 2015-12-31 CN CN201511026521.5A patent/CN106931183B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3382892A (en) * | 1965-03-08 | 1968-05-14 | Weatherhead Co | Quick-disconnect coupling |
| US6090206A (en) * | 1997-10-20 | 2000-07-18 | Applied Materials, Inc. | Throttle valve providing enhanced cleaning |
| CN2490375Y (en) * | 2001-07-30 | 2002-05-08 | 自贡市地佩尔阀门有限公司 | High-temp. fixed ball valve |
| CN2748721Y (en) * | 2004-11-16 | 2005-12-28 | 林泰顺 | Ball valve capable of automatically adjusting sealing |
| CN101421548A (en) * | 2006-04-13 | 2009-04-29 | Vir里齐奥工程师阀门工业股份公司 | Ball for valves and production method |
| KR20070106312A (en) * | 2006-04-28 | 2007-11-01 | 주식회사서흥금속 | Ball valve of very low temperature |
| US20130240772A1 (en) * | 2010-09-10 | 2013-09-19 | Xamol Limited | Valve assembly and components therefore |
| CN104662347A (en) * | 2012-08-06 | 2015-05-27 | 机械解析有限公司 | Valve with a load varying mechanism, and method of operating the same |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106931183B (en) | 2019-02-01 |
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