CN106929911B - It is a kind of to wash crystal structure for sapphire crystal growth - Google Patents

It is a kind of to wash crystal structure for sapphire crystal growth Download PDF

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Publication number
CN106929911B
CN106929911B CN201710201134.3A CN201710201134A CN106929911B CN 106929911 B CN106929911 B CN 106929911B CN 201710201134 A CN201710201134 A CN 201710201134A CN 106929911 B CN106929911 B CN 106929911B
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Prior art keywords
positioning disk
fixed plate
hole
side fixed
rotating disc
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CN106929911A (en
Inventor
曹建伟
张俊
欧阳鹏根
沈兴潮
宋建军
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Inner Mongolia Jinghuan Electronic Materials Co Ltd
Zhejiang Jingsheng Mechanical and Electrical Co Ltd
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Inner Mongolia Jinghuan Electronic Materials Co Ltd
Zhejiang Jingsheng Mechanical and Electrical Co Ltd
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    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B17/00Single-crystal growth onto a seed which remains in the melt during growth, e.g. Nacken-Kyropoulos method
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10Inorganic compounds or compositions
    • C30B29/16Oxides
    • C30B29/20Aluminium oxides

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

The present invention relates to sapphire crystal growing furnace ancillary equipments, it is desirable to provide a kind of to wash crystal structure for sapphire crystal growth.Wash crystal structure of this kind for sapphire crystal growth includes mounting rack, clamping set, positioning disk, rotating disc, bellows, can be cleaned to seed rod.The present invention can real-time control wash brilliant amplitude and frequency, it is good to wash brilliant effect;The drive of the automatic equipments such as motor can be used in operation handle of the invention, realizes and washes crystalline substance automatically, reduces manual operation, reduces human error and causes the risks such as seed crystal fracture;The configuration of the present invention is simple, it is at low cost, it is easily installed, it is easy to operate.

Description

It is a kind of to wash crystal structure for sapphire crystal growth
Technical field
The present invention relates to sapphire crystal growing furnace ancillary equipment fields, in particular to a kind of raw for sapphire crystal Long washes crystal structure.
Background technique
The sapphire crystal growth technique of mainstream in the world is kyropoulos, czochralski method, EFG technique and heat-exchanging method at present, And the sapphire crystal of kyropoulos technique growth accounts for about the 70% of existing market.Low cost, in high quality growing large-size are blue precious Stone crystal has become the urgent task currently faced.Kyropoulos are the seed crystal and melt contacts that one is cooled, if interface Temperature is lower than freezing point, then seed crystal starts to grow.In order to make crystal constantly grow up, it is necessary to gradually decrease the temperature of melt, together When decentralization and rotating crystal to improve the Temperature Distribution of melt, can also slowly or upper body crystal stage by stage, to expand Big radiating surface.
During sapphire crystal growth, when due to material, it may appear that a large amount of oxide, the oxide are condensing in Seed crystal face will have a direct impact on the growth arrangement of crystal, to directly influence the quality of entire crystal if do not removed. So generally requiring technical staff during seeding and seed crystal being inserted into solution, and rapidly stir back and forth, wash Remove to condense in the oxide of seed crystal face.
There are two ways to washing crystalline substance of sapphire seed crystal at present, one is seed crystal rotation is driven by rotation seed rod, separately One is by catching the welding bellows on the outside of seed rod, the seed rod of the inside is thumped by the deformation of bellows.But Seed rod is rotated often because not fast and seed crystal and solution enough the friction of the speed of rotation is not big enough, is not properly cleaned clean table The oxide in face;By the bang of bellows, often because can not master the dynamics completely, so that bang dynamics is excessive, lead Seed crystal fracture is caused, while also having directly influenced the service life of welding bellows.
Summary of the invention
It is a primary object of the present invention to overcome deficiency in the prior art, it is simple, at low cost to provide a kind of structure design Honest and clean, can be used to remove seed crystal face oxide before automatic seeding washes crystal structure.In order to solve the above technical problems, solution of the invention Certainly scheme is:
There is provided it is a kind of wash crystal structure for sapphire crystal growth, seed rod can be cleaned, it is described for blue precious The crystal structure of washing of stone crystal growth includes mounting rack, clamping set, positioning disk, rotating disc, bellows;
The mounting rack is the straight tetragonous rod structure that bottom surface is square, and is provided with through-hole in the middle part of the bottom surface of mounting rack, is blocked It is fixed to be threaded through in the through-hole of mounting rack;The clamping set is the clamping set of cylinder structure, and the middle part of clamping set is provided with circular Interstitial hole, opposite in interstitial hole to open there are two notch, seed rod is passed through from the interstitial hole that clamping cover, and when clamping set rotation, Seed rod can be stuck in two notches and realize clamping;The side of mounting rack has two mounting holes being connected to through-hole, It is installed with observation glass on one mounting hole, for observing the state of clamping set by observation glass, another mounting hole is used In the axis for penetrating rotating disc;
The positioning disk is the positioning disk of circular ring structure, and rotating disc is mounted on positioning disk, and rotating disc can be in positioning disk On make rotating motion;The axis of rotating disc sequentially passes through the interior circular hole of positioning disk, a mounting hole of mounting rack and clamping set and connects, It can realize that clamping set carries out clamping or disengagement to seed rod by driving clamping set rotation;And in the axis and guiding of rotating disc Sealing ring is installed between the interior circular hole of disk, for realizing the sealed connection of rotating disc and positioning disk;
The bellows is mounted between positioning disk and mounting rack, and the axis of the rotating disc is installed in bellows;And The junction of bellows and positioning disk junction, bellows and mounting rack, is respectively arranged with sealing ring, for guaranteeing at seed rod In the environment of sealing vacuum;
Ear structure there are two setting on the excircle of positioning disk, the center of each ear structure is provided with (a diameter For 12mm's) through-hole, and the through hole center point of two ear structures and the outer circle center of positioning disk are in same horizontal line On;Ear device is connect using the through-hole at ear structure center with positioning disk;
The ear device includes linear bearing, guide rod, left side fixed plate, right side fixed plate, adjusts screw, handle; The guide rod is equipped with two, and two guide rods are separately fixed between left side fixed plate, right side fixed plate, the linear axis It holds there are two setting, is separately mounted on corresponding guide rod, linear bearing can move in a straight line on the guide bar;Two linear axis It holds in the correspondence through-hole for being separately mounted to positioning disk ear structure, linear bearing is enable to move together with positioning disk;The hand One end of handle passes through right side fixed plate and is connected on positioning disk, and handle capable of being pushes positioning disk to move in a straight line along guide rod;Institute State and adjust there are four screws, be separately mounted to left side fixed plate, in the fixed plate of right side, i.e., left side fixed plate, in the fixed plate of right side Each installation adjusts screw by (spanner) and is screwed into spiral shell in left side fixed plate, right side fixed plate there are two screw is adjusted Follow closely length, and guarantee in same fixed plate two adjusting screws to be screwed into screw length consistent, when control positioning disk is along guiding When bar moves along a straight line, encounters the adjusting screw being mounted in left side fixed plate or right side fixed plate and stop, and then realization pair The control of seed rod amplitude of fluctuation when washing crystalline substance.
As a further improvement, described when rotating 30 ° of disc spins, clamping set being capable of and then rotation and by seed rod Step up.
As a further improvement, the other end of the handle, which can be used to be manually operated, washes crystalline substance, or by handle The other end installs automatic equipment (motor etc.), and realization, which is automatically brought into operation, washes crystalline substance.
The working principle of the invention: rotating disc is connected to clamping set, and the rotation covered by clamping is realized to intermediate seed rod Clamping and loosen;And rotating disc is mounted on positioning disk, can be moved in a straight line together along guide rod with positioning disk.When When gripping orientation, seed rod can be moved back and forth with positioning disk along guide rod together as clamping covers, and back and forth Amplitude can be controlled by adjusting screw, realize stirring action when it washes crystalline substance;When relaxation state, seed rod is kept certainly By suspension status, weighing sensor only distinguishes the weight change of crystal.
Compared with prior art, the beneficial effects of the present invention are:
1, the present invention can real-time control wash brilliant amplitude and frequency, it is good to wash brilliant effect.
2, the drive of the automatic equipments such as motor can be used in operation handle of the invention, realizes and washes crystalline substance automatically, reduces manual operation, It reduces human error and causes the risks such as seed crystal fracture.
3, the configuration of the present invention is simple, it is at low cost, it is easily installed, it is easy to operate.
Detailed description of the invention
Fig. 1 is right side structural representation of the invention.
Fig. 2 is overlooking structure diagram of the invention.
Fig. 3 is left view structural representation of the invention.
Fig. 4 is that clamping when seed rod is clamped state covers state diagram.
Appended drawing reference in figure are as follows: 1 rotating disc;2 positioning disks;3 bellowss;4 mounting racks;5 seed rods;6 sealing rings;7 is left Side fixed plate;8 guide rods;9 right side fixed plates;10 handles;11 adjust screw;12 linear bearings;13 clamping sets;14 observation glass Glass.
Specific embodiment
Present invention is further described in detail with specific embodiment with reference to the accompanying drawing:
A kind of crystal structure of washing for sapphire crystal growth as shown in Figure 1, Figure 2, Figure 3 shows includes mounting rack 4, clamping set 13, positioning disk 2, rotating disc 1, bellows 3 can carry out seed rod 5 to wash brilliant operation.
The mounting rack 4 is the straight tetragonous rod structure that bottom surface is square, and the bottom surface middle part of mounting rack 4 is provided with through-hole, Clamping set 13 is threaded through in the through-hole of mounting rack 4.Clamping set 13 of the clamping set 13 for cylinder structure, the middle part of clamping set 13 It is provided with circular interstitial hole, opposite in interstitial hole to open that there are two notches, seed rod 5 is passed through from the interstitial hole of clamping set 13, and is worked as When clamping 13 rotation of set, seed rod 5 can be stuck in two notches and realize clamping.The side of mounting rack 4 have two with The mounting hole of through-hole connection is installed with observation glass 14 on one mounting hole, for observing clamping set 13 by observation glass 14 State, another mounting hole is used to penetrate the axis of rotating disc 1.
The positioning disk 2 is the positioning disk 2 of circular ring structure, and rotating disc 1 is mounted on positioning disk 2, and rotating disc 1 can led It makes rotating motion on disk 2.The axis of rotating disc 1 sequentially passes through a mounting hole and card for the interior circular hole of positioning disk 2, mounting rack 4 Fixed 13 connection can realize that clamping covers 13 pairs of seed rods 5 and carries out clamping or disengagement by driving 13 rotation of clamping set;Such as When rotating disc 1 rotates 30 °, clamping set 13 being capable of and then rotation and by 5 clamping of seed rod.In the axis and guiding of rotating disc 1 Sealing ring 6 is installed between the interior circular hole of disk 2, for realizing the sealed connection of rotating disc 1 and positioning disk 2.
The bellows 3 is mounted between positioning disk 2 and mounting rack 4, and the axis of the rotating disc 1 is installed in bellows 3; And in the junction of bellows 3 and 2 junction of positioning disk, bellows 3 and mounting rack 4, it is respectively arranged with sealing ring 6, for protecting Demonstrate,prove the sealing vacuum environment requirement that seed rod 5 is grown.
For dress there are two ear structure, it is 12mm that each ear structure center, which is provided with diameter, on the excircle of positioning disk 2 Through-hole, the outer circle center of the central point of hole of two ear structures and positioning disk 2 is in horizontal consistent.
Ear device includes linear bearing 12, guide rod 8, left side fixed plate 7, right side fixed plate 9, adjusts screw 11, hand Handle 10.The guide rod 8 is equipped with two, and upper and lower two guide rods 8 are separately fixed at left side fixed plate 7, right side fixed plate 9 Between, the linear bearing 12 is mounted on two guide rods 8, and can freely be moved in a straight line on guide rod 8.The guiding Disk 2 installs linear bearing 12 by the through-hole of ear structure on excircle, and linear bearing 12 can move together with positioning disk 2. One end of the handle 10 passes through right side fixed plate 9 and is connected on positioning disk 2, and handle 10 can push positioning disk 2 along guide rod 8 It moves in a straight line;The other end of handle 10, which can be used to be manually operated, washes crystalline substance, or installs motor by the other end in handle 10 Equal automatic equipments, realization, which is automatically brought into operation, washes crystalline substance.The adjusting screw 11 is separately positioned on left side fixed plate 7, right side fixed plate 9 On, the amplitude that can be moved along a straight line by adjusting the length for adjusting screw 11, control positioning disk 2, and then control seed rod 5 when washing crystalline substance The amplitude of swing.
When specific operation, by rotary motion disk 1, clamping set 13 is driven, so that the seed crystal of the 13 main centre of card of clamping set Bar 5, can refer to shown in Fig. 4;Brilliant completion, counter-rotating rotating disc 1 are washed, so that clamping set 13 and seed rod 5 disengage.It adjusts The length of screw 11 determines the linear distance of its movement, by the promotion back and forth of handle 10, to drive entire 2 edge of positioning disk Guide rod 8 move back and forth, realize the stirring action of seed rod 5.
Finally it should be noted that the above enumerated are only specific embodiments of the present invention.It is clear that the invention is not restricted to Above embodiments can also have many variations.Those skilled in the art can directly lead from present disclosure Out or all deformations for associating, it is considered as protection scope of the present invention.

Claims (2)

1. a kind of wash crystal structure for sapphire crystal growth, seed rod can be cleaned, which is characterized in that described to be used for The crystal structure of washing of sapphire crystal growth includes mounting rack, clamping set, positioning disk, rotating disc, bellows;
The mounting rack is the straight tetragonous rod structure that bottom surface is square, and is provided with through-hole, clamping set in the middle part of the bottom surface of mounting rack It is threaded through in the through-hole of mounting rack;The clamping set is the clamping set of cylinder structure, and the middle part of clamping set is provided with circular centre Hole, opposite in interstitial hole to open there are two notch, seed rod is passed through from the interstitial hole that clamping cover, and when clamping set rotation, seed crystal Bar can be stuck in two notches and realize clamping;The side of mounting rack has two mounting holes being connected to through-hole, and one Observation glass is installed on mounting hole, for observing the state of clamping set by observation glass, another mounting hole is for wearing Enter the axis of rotating disc;
The positioning disk is the positioning disk of circular ring structure, and rotating disc is mounted on positioning disk, and rotating disc can be done on positioning disk Rotary motion;The axis of rotating disc sequentially passes through the interior circular hole of positioning disk, a mounting hole of mounting rack and clamping set and connects, and can lead to Drive clamping set rotation is crossed, realizes that clamping set carries out clamping or disengagement to seed rod;And in the axis of rotating disc and positioning disk Sealing ring is installed between interior circular hole, for realizing the sealed connection of rotating disc and positioning disk;
The bellows is mounted between positioning disk and mounting rack, and the axis of the rotating disc is installed in bellows;And in ripple The junction of pipe and positioning disk junction, bellows and mounting rack, is respectively arranged with sealing ring, for guaranteeing that it is close that seed rod is in Seal the environment of vacuum;
Ear structure there are two setting on the excircle of positioning disk, the center of each ear structure is provided with a through-hole, and two The through hole center point of a ear structure and the outer circle center of positioning disk are on same horizontal line;Ear device utilizes ear The through-hole of structure centre is connect with positioning disk;
The ear device includes linear bearing, guide rod, left side fixed plate, right side fixed plate, adjusts screw, handle;It is described Guide rod is equipped with two, and two guide rods are separately fixed between left side fixed plate, right side fixed plate, and the linear bearing is set There are two, it is separately mounted on corresponding guide rod, linear bearing can move in a straight line on the guide bar;Two linear bearings point It is not mounted in the correspondence through-hole of positioning disk ear structure, linear bearing is enable to move together with positioning disk;The handle One end passes through right side fixed plate and is connected on positioning disk, and handle capable of being pushes positioning disk to move in a straight line along guide rod;The tune Save there are four screws, be separately mounted to left side fixed plate, in the fixed plate of right side, i.e., left side fixed plate, respectively pacify in the fixed plate of right side Dress is screwed into screw length in left side fixed plate, right side fixed plate there are two screw is adjusted, by adjusting screw, and protects In card same fixed plate two adjusting screws to be screwed into screw length consistent, when control positioning disk moves along a straight line along guide rod When, encounter the adjusting screw being mounted in left side fixed plate or right side fixed plate and stop, and then realizes to seed crystal when washing crystalline substance The control of bar amplitude of fluctuation.
2. a kind of crystal structure is washed for sapphire crystal growth according to claim 1, which is characterized in that the handle The other end can be used to be manually operated and wash crystalline substance, or automatic equipment is installed by the other end in handle, realization, which is automatically brought into operation, washes It is brilliant.
CN201710201134.3A 2017-03-30 2017-03-30 It is a kind of to wash crystal structure for sapphire crystal growth Active CN106929911B (en)

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Citations (8)

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CN201778147U (en) * 2010-08-11 2011-03-30 上海昀丰光电技术有限公司 Sapphire growth device and quick seed-crystal replacement device thereof
CN202576644U (en) * 2012-04-13 2012-12-05 西安蓝晶机械科技有限公司 Sapphire crystal growth pulling device by utilizing Kyropoulos method
CN102953121A (en) * 2012-11-14 2013-03-06 吴江亿泰真空设备科技有限公司 Novel seed crystal chamber of sapphire crystal growth furnace
CN102978692A (en) * 2012-12-11 2013-03-20 哈尔滨奥瑞德光电技术股份有限公司 Rotating and pulling structure for large-size sapphire single crystal growth furnace
CN203096230U (en) * 2013-01-11 2013-07-31 焦作市光源晶电科技有限公司 Shake preventing device for seed crystal rod of sapphire crystal furnace
CN204417637U (en) * 2015-01-19 2015-06-24 杭州晶一智能科技有限公司 A kind of electronic self unloader of kyropoulos sapphire crystallization equipment weighing system
CN205711032U (en) * 2016-04-19 2016-11-23 黄山市东晶光电科技有限公司 A kind of kyropoulos sapphire crystal growing furnace that can change seed crystal online
CN205774930U (en) * 2016-05-24 2016-12-07 上海申骅机电设备制造有限公司 A kind of sapphire crystal growth pulling apparatus

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN202989343U (en) * 2012-10-31 2013-06-12 浙江露笑光电有限公司 Sapphire single crystal pulling device
KR101496249B1 (en) * 2013-07-05 2015-02-26 디케이아즈텍 주식회사 Method for auto seeding of sapphire ingot growth furnace
KR101626425B1 (en) * 2013-12-31 2016-06-01 (주) 다애테크 Seed shaking apparatus for of sapphire single crystal growing equipment
CN105671630B (en) * 2015-12-17 2018-02-02 南京晶升能源设备有限公司 Kyropoulos growing sapphire crystal grows ending method and growing method

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN201778147U (en) * 2010-08-11 2011-03-30 上海昀丰光电技术有限公司 Sapphire growth device and quick seed-crystal replacement device thereof
CN202576644U (en) * 2012-04-13 2012-12-05 西安蓝晶机械科技有限公司 Sapphire crystal growth pulling device by utilizing Kyropoulos method
CN102953121A (en) * 2012-11-14 2013-03-06 吴江亿泰真空设备科技有限公司 Novel seed crystal chamber of sapphire crystal growth furnace
CN102978692A (en) * 2012-12-11 2013-03-20 哈尔滨奥瑞德光电技术股份有限公司 Rotating and pulling structure for large-size sapphire single crystal growth furnace
CN203096230U (en) * 2013-01-11 2013-07-31 焦作市光源晶电科技有限公司 Shake preventing device for seed crystal rod of sapphire crystal furnace
CN204417637U (en) * 2015-01-19 2015-06-24 杭州晶一智能科技有限公司 A kind of electronic self unloader of kyropoulos sapphire crystallization equipment weighing system
CN205711032U (en) * 2016-04-19 2016-11-23 黄山市东晶光电科技有限公司 A kind of kyropoulos sapphire crystal growing furnace that can change seed crystal online
CN205774930U (en) * 2016-05-24 2016-12-07 上海申骅机电设备制造有限公司 A kind of sapphire crystal growth pulling apparatus

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