CN106907999A - A kind of grating sensor displacement measurement system based on phase-modulation - Google Patents
A kind of grating sensor displacement measurement system based on phase-modulation Download PDFInfo
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- CN106907999A CN106907999A CN201710306458.3A CN201710306458A CN106907999A CN 106907999 A CN106907999 A CN 106907999A CN 201710306458 A CN201710306458 A CN 201710306458A CN 106907999 A CN106907999 A CN 106907999A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
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Abstract
The invention discloses a kind of grating sensor displacement measurement system based on phase-modulation, including grating sensing optical path unit, signal processing unit.Grating sensing optical path unit includes collimated light source, MEMS scanning mirrors, key light grid and indication grating, and signal processing unit includes opto-electronic conversion, phaselocked loop phase.The present invention carries out phase-modulation to indication grating using MEMS mirror structures with respect to the relative displacement signal of key light grid, is the accurate measurement for being capable of achieving displacement using single detector.Treatment is demodulated to signal at particular harmonic frequency spectrum by phaselocked loop, measurement signal is migrated out low-frequency band, overcome the influence of the low frequency variations such as dc shift, also can effectively reduce the influence of high band noise in the signal processing simultaneously, avoid the quadrature error that traditional raster sensor two-way or four road signals bring, the influence of dc shift and amplitude fluctuations to measurement result is reduced, certainty of measurement of the measuring system in low speed and high-speed displacement measuring is improve.
Description
Technical field
The present invention relates to accurate displacement measuring system field, specifically a kind of grating sensor displacement based on phase-modulation
Measuring system.
Background technology
Pattern displacement measurement sensor realizes displacement measurement according to Moire fringe principle, in measurement range, certainty of measurement, sound
Answering the aspects such as speed has notable technical advantage, extensively should in fields such as machining tool, measuring instrument, semiconductor processing equipments
With.Grating sensor carries out displacement measurement by basic measurement unit of screen periods, with the progress of photoetching technique, the week of grating
Phase is more and more small, so as to realize that higher precision measurement provides more accurate scale.With the increase of grating ruling density, light
The reading of gate signal such as is more vulnerable to be aligned, vibrates at the interference of factor, so as to produce measurement to miss in grating electro-optically reads signal
Difference.The main error factor of the measurement orthogonal signalling that grating reads is including dc shift, amplitude fluctuations, phase difference etc..Phase is missed
Difference is typically systematic error caused by key light grid and reading head alignment, can be processed by first signal and be detected and compensated.Light
It is all the factor for causing dc shift that source power exports unstable, photodetector and drive circuit drift, in actually reading
Although can be influenceed using differential amplifying technique reduction dc shift, the factor such as difference of photodetector can not effectively go
Except DC component.The influence factor of amplitude fluctuations has：Measuring speed in the uneven and practical application of grating face optical characteristics
Change.When measurement signal reads, due to LPF noise reduction and the inherent characteristic of electrooptical device, when measuring speed is larger
When measurement signal amplitude decline, in application process, although good fixed ampllitude can be realized using Digital Signal Processing means,
But these methods are all the signal amplitude correction values for removing to predict future time point from the Changing Pattern of amplitude, real-time is poor,
So as to limit measuring speed in practical application.
In high precision measurement demand occasion, the grating sensing method of Moire fringe orthogonal signalling detection is difficult to removal direct current drift
The interference with amplitude fluctuations is moved, the further raising of grating measuring sensor accuracy is hindered.Subject matter has two aspects：
Moment before and after measurement starts and measurement stops, when velocity of displacement is close to zero, measurement signal frequency and low-frequency interference signal frequency
It is close, the separation of measurement signal and interference signal is difficult in grating signal process circuit, so as to bring larger to measurement
Error；When measuring speed is larger, Photoelectric Detection obtains quadrature measuring signal amplitude and is decreased obviously, so as in the subdivision to signal
In can produce and larger error or even cannot segment.
The content of the invention
The object of the invention is directed to the defect of the grating measuring principle in field of high-precision measurement of Moire fringe, proposes a kind of
Grating sensor displacement measurement system based on phase-modulation.
In order to achieve the above object, the technical solution adopted in the present invention is：
A kind of grating sensor displacement measurement system based on phase-modulation, it is characterised in that：Including grating sensing light path
Unit, signal processing unit, wherein：
Grating sensing optical path unit includes collimated light source, MEMS galvanometers, the key light grid and indication grating of relative movement, collimation
The collimated light beam of light source outgoing is incident to MEMS galvanometers, and the MEMS galvanometers are rotated with fixed angles velocity scanning, are rotated in scanning
During collimated light beam is reflexed into key light grid, collimated light beam is formed More's bar by the key light grid and indication grating that relatively move
Line optical signal, the Moire fringe optical signal includes MEMS vibration mirror scanning rotation informations simultaneously, and key light grid and indication grating
Relative displacement information；
Signal processing unit includes photoelectric conversion unit, phaselocked loop, and the photoelectric conversion unit reception Moire fringe simultaneously will
Moire fringe optical signal is converted to electric signal, and the electric signal is phase modulated signal, i.e. indication grating and key light grid relative displacement
The modulation of the cycle amplitude signal that the phase signal of generation correspondence displacement is produced through MEMS vibration mirror scannings, the phaselocked loop receives phase
Position modulated signal, can obtain displacement and survey in the resonant scan frequencies of MEMS galvanometers by phaselocked loop to phase modulated signal demodulation
Amount signal.
A kind of described grating sensor displacement measurement system based on phase-modulation, it is characterised in that：Indication grating and
During key light grid geo-stationary, collimated light beam is incident to MEMS galvanometers, and MEMS galvanometers are rotated with fixed angles velocity scanning, by collimated light
Beam reflexes to key light grid, and the Moire fringe optical signal that key light grid are formed when being relatively moved with indication grating is by identical with MEMS galvanometers
Angular speed oscillation, the Moire fringe optical signal through photoelectric conversion unit change after obtain electric signal, the electric signal is and MEMS
The periodic signal of galvanometer same scan frequency, photoelectric conversion unit receives the width of the position different electrical signals of Moire fringe optical signal
Value is different.
A kind of described grating sensor displacement measurement system based on phase-modulation, it is characterised in that：The photoelectricity turns
Changing unit includes photoelectric switching circuit and pre-amplification circuit, and photoelectric switching circuit realizes photosignal by a photodetector
Detection, Moire fringe optical signal is converted into electric signal by photoelectric switching circuit, and export after being amplified by pre-amplification circuit.
A kind of described grating sensor displacement measurement system based on phase-modulation, it is characterised in that：At the signal
Reason unit is the subdivision and sensing for being capable of achieving relative displacement of the indication grating with respect to key light grid, signal transacting list using one-channel signal
Unit carries out the demodulation of displacement signal using phaselocked loop to one-channel signal, based on phaselocked loop, signal is entered at particular harmonic frequency spectrum
Measurement signal, is migrated out low-frequency band by row demodulation, overcomes the influence of the low-frequency disturbances such as dc shift, it is to avoid traditional raster biography
The quadrature error that sensor two-way or four road signals bring, reduces the influence of dc shift and amplitude fluctuations to measurement result, carries
Certainty of measurement of the height measuring system in low speed and high-speed displacement measuring.
The present invention is based on traditional raster sensing arrangement, in the optical path using MEMS mirror structures to the relative key light of indication grating
The relative displacement signal of grid carries out phase-modulation, is to be capable of achieving displacement using the photoelectric conversion unit comprising single photodetector
Accurate measurement.The present invention had both remained traditional raster sensor indication grating and key light grid produce the structure of Moire fringe, drew
Entering MEMS galvanometers carries out phase-modulation to measurement signal, and the phaselocked loop of use is demodulated to phase, single channel modulated signal
High power subdivision and sensing are realized, the number of photoelectric detector is simplified, it is to avoid traditional raster sensor two-way or four roads letter
Number quadrature error brought, reduces the influence of dc shift and amplitude fluctuations to measurement result, improves measuring system in low speed
Certainty of measurement during with high-speed displacement measuring.
Brief description of the drawings
Fig. 1 is the grating sensor displacement measurement system block diagram based on phase-modulation.
Fig. 2 is phaselocked loop schematic diagram.
Specific embodiment
The invention provides a kind of grating sensor displacement measurement system based on phase-modulation, be as shown in Figure 1 based on
The grating sensor displacement measurement system block diagram of phase-modulation, including grating sensing optical path unit, signal processing unit.Grating is passed
Sense optical path unit includes the collimated light source, MEMS galvanometers 3, key light grid 4 and the indication grating 5 that are made up of LED light source 1 and collimating mirror 2,
Signal processing unit includes photoelectric conversion unit 6, phaselocked loop 7.
In grating sensing optical path unit, the collimated mirror 2 of the light beam of LED light source 1 incides MEMS galvanometers to the present invention after collimating
3, MEMS galvanometers 3 are rotated with fixed angles velocity scanning, and collimated light beam is reflexed on key light grid 4, indication grating 5 and key light grid 4
During relative displacement, the Moire fringe that key light grid 4 are formed with indication grating 5 is rotated and relative position comprising the scanning of MEMS galvanometers 3 simultaneously
The information of shifting, the signal is phase modulated signal, i.e. indication grating 5 and key light grid 4 by the electric signal formed after opto-electronic conversion
Relative displacement produces the phase signal of correspondence displacement through the modulation of the cycle amplitude signal of the scanning generation of MEMS galvanometers 3, the phase
Modulated signal can obtain displacement measurement signal by phase-locked link demodulation.Phase-modulation is phase displacement measurement sinusoidal signal modulation
Position signal, treatment is demodulated by phaselocked loop at particular harmonic frequency spectrum to signal, and measurement signal is migrated out low-frequency band, gram
The influence of the low frequency variations such as dc shift has been taken, while the influence of high band noise also can be effectively reduced in the signal processing, it is real
The displacement measurement signal demodulation of existing degree of precision.
LED light source 1 sends light beam by being incident to key light grid 4 after MEMS galvanometers 3 reflect after collimating mirror 2 is collimated, main
Grating 4 forms Moire fringe with the relative movement of indication grating 5.The scanning vibration equation of MEMS galvanometers is：I=msinwt.
The light intensity signal detected at photodetector is phase modulation-type cosine signal, signal such as formula (1)：
I (t)=A+Bcos (kx+kmsinwt) (1)
Wherein, A represents the DC component of signal, and B represents the amplitude of signal communication component.Represent by key light grid with
The moire frange signal phase place change cycle that indication grating relative displacement is produced, d represents grating constant, and msinwt represents that MEMS shakes
The cyclic effects that the vibration of mirror changes to signal phase, wherein m represent the amplitude of galvanometer vibration phase influence, and w shakes for MEMS
The scanning vibration angular frequency of mirror.The process of signal transacting is the process of the demodulation phase kx from signal shown in formula (1).
What the present invention was used is that PHASE-LOCKED LOOP PLL TECHNIQUE carries out phase demodulating, is illustrated in figure 2 phaselocked loop schematic diagram, and phaselocked loop is
A feedback control system being made up of phase discriminator, three loop components of loop filter and voltage controlled oscillator.In phase-locked loop
In, the effect of phase discriminator be comparator input signal I (t) cos0.5wt with the output signal sin (2.5wt+ θ) of voltage controlled oscillator it
Between phase, by this phase difference be converted into voltage signal output；The effect of low pass filter is to filter the high frequency in voltage signal
The control voltage of voltage controlled oscillator is converted into after composition and noise, is then added on voltage controlled oscillator, make voltage controlled oscillator
Frequency it is close to the frequency of input signal I (t) cos0.5wt, until last frequency is equal and Phase synchronization realizes locking output
Voltage signal, the effect of voltage controlled oscillator is to produce frequency of oscillation, and this frequency of oscillation receives voltage controlled oscillator output voltage letter
Number control produce frequency shift (FS), it is achieved thereby that the tracking to frequency input signal.With PHASE-LOCKED LOOP PLL TECHNIQUE demodulation phase phase
For determining to realize that phase subdivision is more accurate by amplitude in conventional method, while the response time is also more quick.
From the foregoing, the light intensity signal detected at photodetector is phase modulation-type cosine signal such as formula：
I (t)=A+Bcos (kx+kmsinwt) (1)
(1) formula is launched, is obtained：
In formula (2), Jn(km) it is first kind Bessel function.Phase modulated from formula (2), displacement information is adjusted
Make in the amplitude of modulating frequency each harmonic, so as to useful signal frequency band is removed into low frequency range, overcome the influence of low-frequency excitation.
Gained moire frange signal is multiplied with 0.5 frequency multiplication reference signal of modulating frequency in actual treatment, is obtained：
In formula (3)：
Wherein：P (i)=[0,2,2,4,4,6,6 ...], what q (i)=[1,1,3,3,5,5,7 ...] was corresponding to i has ordinal number
Row, by selecting suitable modulated amplitude m, meet：
J2(km)=J3(km) (4)
Then formula (3) is represented by：
By formula (5) as can be seen that displacement information kx is transformed into the multiplied frequency harmonic component BJ of modulating frequency 2.52(km)cos
In the phase of (2.5wt+kx).By shown in formula (5) signal feeding phaselocked loop in, using phaselocked loop to BJ2(km)cos(2.5wt
+ kx) phase be tracked, you can try to achieve change in displacement.The measurement signal processing method changes the subdivision of conventional orthogonal signal
Method, the subdivision and sensing of signal can be carried out using signal all the way, eliminate orthogonal sensing error with signal difference of not going the same way
The error of introducing, by phaselocked loop high frequency phase modulation real-time tracking and then obtains shift value, overcomes dc shift in low frequency
Etc. the influence of factor.Phase measurement is more accurate compared to the method for amplitude measurement so that the system can reach essence very high
Degree and resolution ratio.
Invention described above implementation method, is not intended to limit the scope of the present invention..It is any in the present invention
Spirit and principle within modification, equivalent and the improvement made etc., should be included in claim protection model of the invention
Within enclosing.
Claims (4)
1. a kind of grating sensor displacement measurement system based on phase-modulation, it is characterised in that：Including grating sensing light path list
Unit, signal processing unit, wherein：
Grating sensing optical path unit includes collimated light source, MEMS galvanometers, the key light grid and indication grating of relative movement, collimated light source
The collimated light beam of outgoing is incident to MEMS galvanometers, and the MEMS galvanometers are rotated with fixed angles velocity scanning, in scanning rotation process
It is middle that collimated light beam is reflexed into key light grid, collimated light beam is formed Moire fringe light by the key light grid and indication grating that relatively move
Signal, the Moire fringe optical signal includes MEMS vibration mirror scanning rotation informations simultaneously, and key light grid and indication grating is relative
Displacement information；
Signal processing unit includes photoelectric conversion unit, phaselocked loop, and the photoelectric conversion unit receives Moire fringe and by More
Striped optical signal is converted to electric signal, and the electric signal is that phase modulated signal, i.e. indication grating and the relative displacement of key light grid are produced
The phase signal of correspondence displacement, the modulation of the cycle amplitude signal produced through MEMS vibration mirror scannings, the phaselocked loop receiving phase
Modulated signal, displacement measurement can be obtained by phaselocked loop in the resonant scan frequencies of MEMS galvanometers to phase modulated signal demodulation
Signal.
2. a kind of grating sensor displacement measurement system based on phase-modulation according to claim 1, it is characterised in that：
When indication grating and key light grid geo-stationary, collimated light beam is incident to MEMS galvanometers, and MEMS galvanometers are turned with fixed angles velocity scanning
It is dynamic, collimated light beam is reflexed into key light grid, the Moire fringe optical signal that key light grid are formed when being relatively moved with indication grating by with
MEMS galvanometer identical angular speed oscillations, the Moire fringe optical signal obtains electric signal after being changed through photoelectric conversion unit, the electricity
Signal is the periodic signal with MEMS galvanometer same scan frequencies, and photoelectric conversion unit receives the position of Moire fringe optical signal not
Amplitude with electric signal is different.
3. a kind of grating sensor displacement measurement system based on phase-modulation according to claim 1, it is characterised in that：
The photoelectric conversion unit includes photoelectric switching circuit and pre-amplification circuit, and photoelectric switching circuit is by a photodetector reality
The detection of existing photosignal, electric signal is converted to by photoelectric switching circuit by Moire fringe optical signal, and by pre-amplification circuit
Exported after amplification.
4. a kind of grating sensor displacement measurement system based on phase-modulation according to claim 1, it is characterised in that：
The signal processing unit is the subdivision and sensing for being capable of achieving relative displacement of the indication grating with respect to key light grid using one-channel signal,
Signal processing unit carries out the demodulation of displacement signal using phaselocked loop to one-channel signal, based on phaselocked loop, in particular harmonic frequency spectrum
Place is demodulated to signal, and measurement signal is migrated out low-frequency band, overcomes the influence of the low-frequency disturbances such as dc shift, it is to avoid
The quadrature error that traditional raster sensor two-way or four road signals bring, reduces dc shift and amplitude fluctuations to measurement result
Influence, improve certainty of measurement of the measuring system in low speed and high-speed displacement measuring.
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| CN109916314A (en) * | 2019-04-29 | 2019-06-21 | 西安交通大学 | A kind of time-space domain modulated grating displacement sensing method and measuring system |
| CN111238377A (en) * | 2020-03-13 | 2020-06-05 | 北方民族大学 | Novel grating sensor and use method thereof |
| CN114754680A (en) * | 2022-06-14 | 2022-07-15 | 探维科技(北京)有限公司 | Grating scale and method, device, medium and equipment for improving measurement precision of grating scale |
| CN115854884A (en) * | 2022-11-10 | 2023-03-28 | 郑州轻工业大学 | Nanometer displacement sensor dynamically modulated by twin structure light field and measuring method thereof |
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| CN108008660A (en) * | 2017-08-02 | 2018-05-08 | 合肥工业大学 | Orthogonal signalling high-speed, high precision processing method based on DSP and FPGA |
| CN107808399A (en) * | 2017-09-19 | 2018-03-16 | 深圳大学 | A kind of measuring method and system of the camera angle change based on Moire fringe |
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| CN109916314B (en) * | 2019-04-29 | 2020-03-31 | 西安交通大学 | Time-space domain modulation grating displacement sensing method and measuring system |
| CN111238377A (en) * | 2020-03-13 | 2020-06-05 | 北方民族大学 | Novel grating sensor and use method thereof |
| CN111238377B (en) * | 2020-03-13 | 2021-11-05 | 北方民族大学 | Grating sensor and using method thereof |
| CN114754680A (en) * | 2022-06-14 | 2022-07-15 | 探维科技(北京)有限公司 | Grating scale and method, device, medium and equipment for improving measurement precision of grating scale |
| CN115854884A (en) * | 2022-11-10 | 2023-03-28 | 郑州轻工业大学 | Nanometer displacement sensor dynamically modulated by twin structure light field and measuring method thereof |
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