CN106892401A - A kind of sandwich construction nano generator and preparation method thereof - Google Patents
A kind of sandwich construction nano generator and preparation method thereof Download PDFInfo
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- CN106892401A CN106892401A CN201710034329.3A CN201710034329A CN106892401A CN 106892401 A CN106892401 A CN 106892401A CN 201710034329 A CN201710034329 A CN 201710034329A CN 106892401 A CN106892401 A CN 106892401A
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/853—Ceramic compositions
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/05—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
Abstract
The present invention provides a kind of sandwich construction nano generator and preparation method thereof.The nano generator is made up of five parts, respectively：Metallic bottom electrode layer, zinc oxide film, Nano graphite lamella, gold grain layer and electrode of metal layer.Using titanium, copper, aluminium foil or piece as metallic bottom electrode layer.One layer of (002) oriented zinc oxide polycrystalline film is deposited on substrate and, as piezoelectric layer, is prepared into zinc oxide film.Shitosan is dissolved in acetum, as-reduced powdered graphite is added, into thick, the sticky silk-screen printing ink of silk-screen printing, is made Nano graphite lamella on zinc-oxide film.One layer of gold nano grain, i.e. gold grain layer are modified on graphite nano plate.Layer of metal is covered again on the graphite nano plate of gold nano particle modification as electrode of metal layer.Nano generator preparation process is simple of the invention, low production cost, electric charge yield is big.
Description
Technical field
The present invention relates to the nano generator in a kind of new energy devices field, in particular for a kind of to power and photaesthesia
Sandwich construction nano generator and preparation method thereof.
Background technology
The present invention is the nano generator of rule-based zinc oxide nanocrystalline, is by mechanical energy or luminous energy in nanometer range
Electric energy is changed into, is generator minimum in the world.Zinc-oxide film has larger photoelectric coupling coefficient, relatively low temperature system
Number and smaller dielectric constant, the zinc oxide of (002) orientation have stronger piezoelectricity and piezooptical effect, can serve as piezoelectricity, press polish
Device；Graphite has excellent electric conductivity, and graphite is plated in zinc-oxide film surface in the form of nanometer sheet, increases contact surface
Product, while again being attached on graphite nano plate with the gold nano grain for relatively grabbing electronic capability, such zinc-oxide film is produced
Raw electronics maximizing is flowed by graphite linings to electrode, the electric energy required for producing us, and then realize passive power supply.
There is stronger piezoelectricity and piezooptical effect for the zinc oxide of (002) orientation, the present invention have devised a kind of new
Nano generator, stronger electricity can be produced to piezoelectricity and press polish.The difference of hearth electrode can produce different purposes, non-soft
Property substrate generator can be applied to industrial generation, the quantity of electric charge is big, can meet industrial portion requirements；The generating of flexible substrates
Machine can voluntarily recover deformation, and fusion zinc oxide can be dressed, by the machine of human motion to the sensitivity characteristic of piezoelectricity on body
Tool can be ingenious to be converted into electric energy by pressure, similarly, it is also possible to test heartbeat, is applied to the multiple electricity consumption neck such as medicine equipment
Domain, meets the electrical energy demands of different aspect.On the other hand, zinc oxide can be equally produced because of the illumination to photaesthesia, different frequency
Required electric energy.In general, the field that can produce light and power is extensive, decides the application dynamics of the nano generator
It is unrivaled, the nano generator preparation process is simple in addition, low production cost, electric charge yield is big, compared to other
Nano generator has obvious advantage.
The content of the invention
It is an object of the invention to provide a kind of sandwich construction nano generator, what the sandwich construction nano generator was constituted
Five parts are followed successively by from top to bottom：Metallic bottom electrode layer, zinc oxide film, Nano graphite lamella, gold grain layer and electrode of metal
Layer,
(1) using the paper tinsel or piece of titanium, copper or aluminium as metallic bottom electrode layer；
(2) one layer of (002) oriented zinc oxide polycrystalline film is deposited on substrate as piezoelectric layer, i.e. zinc oxide film；
(3) shitosan is dissolved in acetum, as-reduced powdered graphite is added, into thick graphite liquid, in oxygen
Change the sticky silk-screen printing ink of silk-screen printing on zinc film, stand, drying, the Nano graphite lamella being made；
(4) one layer of gold nano grain, i.e. gold grain layer are modified on graphite nano plate；
(5) layer of metal is covered again on the graphite nano plate of gold nano particle modification as electrode of metal layer.
Another object of the present invention is to provide a kind of preparation method of sandwich construction nano generator, five parts of composition
It is followed successively by from top to bottom：Metallic bottom electrode layer, zinc oxide film, Nano graphite lamella, gold grain layer and electrode of metal layer, by with
Lower step composition：
(1) using the paper tinsel or piece of titanium, copper or aluminium as metallic bottom electrode layer；
(2) one layer of (002) oriented zinc oxide polycrystalline film is deposited on substrate and, as piezoelectric layer, is prepared into zinc oxide film；
(3) shitosan is dissolved in acetum, as-reduced powdered graphite is added, into thick graphite liquid, in oxygen
Change the sticky silk-screen printing ink of silk-screen printing on zinc film, stand, drying is obtained Nano graphite lamella；
(4) one layer of gold nano grain, i.e. gold grain layer are modified on graphite nano plate；
(5) layer of metal is covered again on the graphite nano plate of gold nano particle modification as electrode of metal layer.
The thickness of described zinc oxide polycrystalline film is 200nm-1 μm, (002) orientation, and grain size is 25nm-300nm.
The mass ratio of the incorporation of described shitosan Yu powdered graphite is 2：1-2：2, according to the body of the acetum for adding
Product is added.
The mass fraction of the described acetum for preparing Nano graphite layer is 1%-10%.
It is more than the described mesh of silk-screen printing mesh number 50.
The described method for preparing gold grain can using many potential step methods of electrochemistry, cyclic voltammetry, potentiostatic method,
The laboratory facilities such as ultraviolet catalytic reducing process.
The described tetra chlorauric acid solution concentration used gold nano grain for preparing is 0.1g/L-0.01g/L more.
The particle diameter of the described gold grain modified in graphite linings is 20nm-800nm.
The layer of metal for covering on the gold particle can be the metals such as copper, titanium, aluminium.
Connecting wire is distinguished on upper lower metal layer, its generated energy is tested.
Beneficial effects of the present invention：
(1) preparation process is simple, it is easy to be molded, the ingenious combination of the characteristic according to different material, realizes power generation performance.
(2) generated energy is big, only the sample of 2cm × 2cm, and generally generated energy can reach the electricity of 500PC, maximum
Up to 700PC.
(3) material used by Nano graphite lamella is prepared for shitosan, its good biocompatibility is harmless, promote
Cohesion.
(4) extensively, for piezoelectricity and the sensitiveness of press polish characteristic, practicality is stronger for application field, can be answered in multiple fields
With simultaneously if conditions permit, piezoelectricity and press polish are used, and electricity can realize superposition.
(5) generator amounts to the composition that is of five storeys, and each layer of system of selection has multiple, when multiple selection method random groups
Close, although the nano generator of generation belongs to sandwich construction nano generator field, but due to preparation technology, working condition etc.
Influence, different methods can produce new experiment effect.
Brief description of the drawings
It is presented below sandwich construction nano generator is described further referring to the drawings, wherein：
Fig. 1 is that the sandwich construction nano generator that embodiment 1 is formed cuts open object plane layer.
Fig. 2 is the SEM image of the sandwich construction nano generator of embodiment 1.
Fig. 3 is the sandwich construction nano generator of embodiment 1 respectively under the conditions of the irradiation of 254nm, 302nm, 365nm light source
Electricity output figure.
Fig. 4 is electricity output figure of the sandwich construction nano generator of embodiment 2 in the case of the piezoelectricity of different power.
Specific embodiment
Embodiment 1
The present invention is elaborated below, embodiment is carried out on the premise of inventive technique scheme, of the invention
Protection domain is not limited to the example.
(1) selection high-purity thickness be 890 μm of titaniums as substrate, be placed in beaker, be put into supersonic cleaning machine, anhydrous second
Alcohol is washed 15 minutes, then, is continued to clean 15 minutes with ultra-pure water.
(2) it is the inner chamber polishing of ultra-high vacuum multifunctional sputtering equipment is clean, then by sputtering target material zinc oxide and sputtering
Substrate titanium sheet is positioned in chamber, and sputtering condition is：1) temperature：It is optimal with 300 DEG C of positions in the range of 150 DEG C -300 DEG C；2) pressure：
It is optimal with 1Pa in the range of 0.5Pa-1.5Pa；3) power：In the range of 90W-150W, by taking 120W as an example；4) gas intake：
The ratio that is passed through of argon gas and oxygen is maintained at 10:5, it is normal range (NR) to fluctuate between 1.5-2.5.5) sputtering time：2h-
6h, wherein by taking 3h as an example.
(3) nanocrystalline ZnO layer can be seen in the secure execution mode (sem, illustrates that Zinc oxide film is successfully sputtered in titanium sheet, this
When can carry out next step ground experimental implementation.
(4) by 100mg molecular weight for the shitosan of (203.19) n is dissolved in 1% acetum of 5ml, add
The as-reduced powdered graphites of 50mg, ultrasound makes it be uniformly dispersed in 20 minutes in being put into ultrasonic vessel, obtains sticky graphite flake and hangs
Supernatant liquid.Zinc oxide/Ti electrode is fixed on screen process press, being placed under 100 mesh silk screens carries out silk-screen printing, then to toasting
Under lamp, drying.
(5) in the secure execution mode (sem it can be seen that there is lamellar graphite piece in zinc oxide surface, show that the graphite linings scrubbing brush that succeeded exists
Zinc oxide surface, graphite linings/zinc oxide/Ti electrode is successfully prepared, and can carry out next step ground experimental implementation.
(6) quartz container is placed in ultrasonic cleaning machine and is cleaned up, sample is put into quartz container, prepared a certain amount of
0.03g/L tetra chlorauric acid solution, pour into quartz container untill not having sample.Then it is placed on sewage disposal
It is that 365nm ultraviolet mercury lamps irradiate 3h with wavelength in device, gold ion is reduced, prepares gold grain layer.
(7) clearly gold grain can be observed in the secure execution mode (sem to be attached to above, gold/graphite flake/zinc oxide/titanium multilayer is obtained
Electrode.
(8) it is last, one layer of copper is being covered as Top electrode on gold grain surface, show that the nano generator is successfully prepared.
Embodiment 2
(1) selection high-purity thickness be 200 μm of Copper Foils as substrate, and be cut into 4cm × 4cm specification sizes, be positioned over burning
In cup, in supersonic cleaning machine, then absolute ethanol washing 15 minutes, is continued to clean 15 minutes with ultra-pure water.
(2) it is the inner chamber polishing of ultra-high vacuum multifunctional sputtering equipment is clean, then by sputtering target material zinc oxide and sputtering
Substrate Copper Foil is positioned in chamber, and sputtering alternative condition is：1) temperature：300℃；2) pressure：1Pa；3) power：150W；4) gas
Intake：Argon gas intake is 10sccm, and the intake of oxygen is 10sccm；5) sputtering time：6h.
(3) nanocrystalline ZnO layer can be seen in the secure execution mode (sem, illustrates that Zinc oxide film is successfully sputtered on Copper Foil, this
When can continue executing with next step ground experimental implementation.
(4) zinc oxide/copper electrode is put into Muffle furnace, temperature control is 450 DEG C, is annealed 1 hour.Treat that sample is cooled down
After take out, by 100mg molecular weight for the shitosan of (203.19) n is dissolved in 1% acetum of 5ml, added 50mg
The powdered graphite of reduction, ultrasound makes it be uniformly dispersed in 20 minutes in being put into ultrasonic vessel, obtains sticky graphite flake suspension.Will
Titanium sheet is fixed on screen process press, and being placed under 100 mesh silk screens carries out silk-screen printing, then under drying lamp, drying.
(5) in the secure execution mode (sem it can be seen that there is lamellar graphite piece in zinc oxide surface, graphite linings/zinc oxide/copper flexible electrode is just
It is successfully prepared, next step ground experimental implementation can be carried out.
(6) configuration concentration is 0.01mol/L chlorauric acid solutions, then contains graphite linings/zinc oxide/copper flexible electrode immersion
In having a quartz container of chlorauric acid solution, and wavelength is placed it under 365nm ultraviolet mercury lamps, to irradiate 6 hours, gold ion is entered
Row reduction.Sample is put into Muffle furnace again, temperature control is 450 DEG C, is heated 1 hour, thus successfully in graphite surface
Grown gold grain.
(7) clearly gold grain can be observed in the secure execution mode (sem to be attached to above, shows to obtain gold/graphite flake/zinc oxide/copper
Multilayer film is successfully prepared successfully.
(8) it is last, one layer of copper is being covered as Top electrode on gold grain surface, show that the nano generator is successfully prepared.
Claims (10)
1. a kind of sandwich construction nano generator, it is characterised in that five parts that the sandwich construction nano generator is constituted are under
To being above followed successively by：Metallic bottom electrode layer, zinc oxide film, Nano graphite lamella, gold grain layer and electrode of metal layer,
(1) using the paper tinsel or piece of titanium, copper or aluminium as metallic bottom electrode layer；
(2) one layer of (002) oriented zinc oxide polycrystalline film is deposited on substrate as piezoelectric layer, i.e. zinc oxide film；
(3) shitosan is dissolved in acetum, as-reduced powdered graphite is added, into thick graphite liquid, in zinc oxide
The sticky silk-screen printing ink of silk-screen printing on film, stands, drying, the Nano graphite lamella being made；
(4) one layer of gold nano grain, i.e. gold grain layer are modified on graphite nano plate；
(5) layer of metal is covered again on the graphite nano plate of gold nano particle modification as electrode of metal layer.
2. a kind of preparation method of sandwich construction nano generator, it is characterised in that five parts of composition are followed successively by from top to bottom：
Metallic bottom electrode layer, zinc oxide film, Nano graphite lamella, gold grain layer and electrode of metal layer, comprise the steps of：
(1) using the paper tinsel or piece of titanium, copper or aluminium as metallic bottom electrode layer；
(2) one layer of (002) oriented zinc oxide polycrystalline film is deposited on substrate and, as piezoelectric layer, is prepared into zinc oxide film；
(3) shitosan is dissolved in acetum, as-reduced powdered graphite is added, into thick graphite liquid, in zinc oxide
The sticky silk-screen printing ink of silk-screen printing on film, stands, and drying is obtained Nano graphite lamella；
(4) one layer of gold nano grain, i.e. gold grain layer are modified on graphite nano plate；
(5) layer of metal is covered again on the graphite nano plate of gold nano particle modification as electrode of metal layer.
3. the preparation method of the sandwich construction nano generator according to claims 2, it is characterised in that described oxidation
The thickness of zinc polycrystalline film is 200nm-1 μm, (002) orientation, and grain size is 25nm-300nm.
4. the preparation method of the sandwich construction nano generator according to claims 2, it is characterised in that described shell gathers
Sugar is 2 with the mass ratio that powdered graphite is mixed：1-2：2, the volume quantitative according to required acetum is added.
5. the preparation method of the sandwich construction nano generator according to claims 2, it is characterised in that described preparation
The mass fraction of the acetum of Nano graphite layer is 1%-10%.
6. the preparation method of the sandwich construction nano generator according to claims 2, it is characterised in that described silk screen
It is more than the printing mesh of mesh number 50.
7. the preparation method of the sandwich construction nano generator according to claims 2, it is characterised in that described preparation
The method of gold grain can use many potential step methods of electrochemistry, cyclic voltammetry, potentiostatic method, ultraviolet catalytic reducing process etc.
Laboratory facilities.
8. the preparation method of the sandwich construction nano generator according to claims 2, it is characterised in that described preparation
The tetra chlorauric acid solution concentration used gold nano grain is 0.1g/L-0.01g/L more.
9. the preparation method of the sandwich construction nano generator according to claims 2, it is characterised in that described in stone
The particle diameter of the gold grain modified in layer of ink is 20nm-800nm.
10. the preparation method of the sandwich construction nano generator according to claims 2, it is characterised in that in gold grain
The layer of metal of upper covering can be copper, titanium or aluminium.
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