CN106891244A - Rubbing head - Google Patents
Rubbing head Download PDFInfo
- Publication number
- CN106891244A CN106891244A CN201710117233.3A CN201710117233A CN106891244A CN 106891244 A CN106891244 A CN 106891244A CN 201710117233 A CN201710117233 A CN 201710117233A CN 106891244 A CN106891244 A CN 106891244A
- Authority
- CN
- China
- Prior art keywords
- rubbing head
- connection end
- floating
- lower floating
- floating part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/002—Grinding heads
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The present invention proposes a kind of rubbing head, and the rubbing head includes substrate, actuator, upper floating part, lower floating part, driving member, and adsorption piece, wherein, actuator includes：First connection end, and the first driving end；Upper floating part includes：Second connection end and upper floating end, the second connection end is concentric with the first connection end to be fixedly linked, and upper floating end is concave spherical surface or recessed circular conical surface；Lower floating part includes：Lower floating end and the 3rd connection end, lower floating end are convex spherical；The convex spherical of lower floating end is adapted with the concave spherical surface of upper floating end or recessed circular conical surface, and is detachably connected, and the center of rotation not higher than workpiece floated between upper floating part and lower floating part polished surface.Contact point deformation can be reduced by the present invention, the beat between workpiece and polishing disk is reduced, the parallelism error between rubbing head and polishing disk is made up, workpiece is fitted in polishing panel surface, and lifting polishing effect.
Description
Technical field
The present invention relates to a kind of rubbing head.
Background technology
In correlation technique, rubbing head is designed with floating structure, in the rubbing head of common chemical-mechanical polishing mathing, its floating
Polished surface of the center of rotation of structure higher than workpiece.
Under this mode, the frictional force between workpiece polished surface and polishing disk so that rubbing head is to polishing disk rotation side
To tilting, cause edge of work polishing speed fast, workpiece surface flatness is poor, and polishing effect is not good.
The content of the invention
It is contemplated that at least solving one of technical problem in correlation technique to a certain extent.
Therefore, it is an object of the invention to propose a kind of rubbing head, contact point deformation can be reduced, workpiece is reduced with polishing
Beat between disk, makes up the parallelism error between rubbing head and polishing disk, workpiece is fitted in polishing panel surface, and lifting
Polishing effect.
To reach above-mentioned purpose, the rubbing head that the embodiment of the present invention is proposed, including：Substrate, actuator, upper floating part, under
Floating part, driving member, and adsorption piece, wherein, the actuator includes：First connection end, and the first driving end；The floating
Moving part includes：Second connection end and upper floating end, second connection end is concentric with first connection end to be fixedly linked, institute
Floating end is stated for concave spherical surface or recessed circular conical surface；The lower floating part includes：Lower floating end and the 3rd connection end, it is described to float downward
Moved end is convex spherical；The convex spherical of the lower floating end is adapted with the concave spherical surface or recessed circular conical surface of the upper floating end, and
Be detachably connected, and the center of rotation not higher than workpiece floated between the upper floating part and the lower floating part throwing
Optical surface.
The rubbing head that the embodiment of the present invention is proposed, by the recessed ball of the convex spherical of the lower floating end of rubbing head and upper floating end
Face or recessed circular conical surface are adapted, and are detachably connected, and reduce contact point deformation, reduce inclined between workpiece and polishing disk
Pendulum, makes up the parallelism error between rubbing head and polishing disk, workpiece is fitted in polishing panel surface, and lifting polishing effect.
The additional aspect of the present invention and advantage will be set forth in part in the description, and will partly become from the following description
Obtain substantially, or recognized by practice of the invention.
Brief description of the drawings
The above-mentioned and/or additional aspect of the present invention and advantage will become from the following description of the accompanying drawings of embodiments
Substantially and be readily appreciated that, wherein：
Fig. 1 is the structural representation of rubbing head according to an embodiment of the invention；
Fig. 2 is the structural representation of actuator in the embodiment of the present invention；
Fig. 3 is the structural representation of upper floating part in the embodiment of the present invention；
Fig. 4 is the structural representation of lower floating part in the embodiment of the present invention；
Fig. 5 is the structural representation of substrate in the embodiment of the present invention；
Fig. 6 is the structural representation of driving member in the embodiment of the present invention.
Reference：
Rubbing head 100；
Substrate 101；Actuator 102；Upper floating part 103；Lower floating part 104；Driving member 105；Adsorption piece 106；
4th connection end 1011；Loading end 1012；Second driving end 1013；
First connection end 1021；First driving end 1022；Drive end 1023；
Second connection end 1031；Upper floating end 1032；First groove 1033；
Lower floating end 1041；3rd connection end 1042；Second groove 1043；
Transmission side A1051；Transmission side B1052.
Specific embodiment
Embodiments of the invention are described below in detail, the example of the embodiment is shown in the drawings, wherein from start to finish
Same or similar label represents same or similar element or the element with same or like function.Below with reference to attached
It is exemplary to scheme the embodiment of description, is only used for explaining the present invention, and is not considered as limiting the invention.Conversely, this
Inventive embodiment includes all changes fallen into the range of the spiritual and intension of attached claims, modification and is equal to
Thing.
Fig. 1 is the structural representation of rubbing head according to an embodiment of the invention.
Referring to Fig. 1, the rubbing head 100 includes：Substrate 101, actuator 102, upper floating part 103, lower floating part 104, biography
Moving part 105, and adsorption piece 106, specifically, actuator 102 includes：First connection end 1021, and the first driving end 1022；
Upper floating part 103 includes：Second connection end 1031 and upper floating end 1032, the second connection end 1031 are same with the first connection end 1021
Axle center is fixedly linked, and upper floating end 1032 is concave spherical surface or recessed circular conical surface；Lower floating part 104 includes：The lower He of floating end 1041
3rd connection end 1042, lower floating end 1041 is convex spherical；The convex spherical of lower floating end 1041 and the recessed ball of upper floating end 1032
Face or recessed circular conical surface are adapted, and are detachably connected.
In one embodiment of the invention, the rubbing head 100 includes：Substrate 101, actuator 102, upper floating part 103,
Lower floating part 104, driving member 105, and adsorption piece 106.
In one embodiment of the invention, referring to Fig. 2, Fig. 2 is the structural representation of actuator in the embodiment of the present invention,
Actuator 102 includes：First connection end 1021, and the first driving end 1022.
In one embodiment of the invention, referring to Fig. 2, actuator 102 also includes：The driving being connected with device drives axle
End 1023.
In one embodiment of the invention, referring to Fig. 3, Fig. 3 is the structural representation of upper floating part in the embodiment of the present invention
Figure, upper floating part 103 includes：Second connection end 1031 and upper floating end 1032, the second connection end 1031 and the first connection end
1021 it is concentric be fixedly linked, upper floating end 1032 be concave spherical surface or recessed circular conical surface.
It is fixedly linked by the way that the second connection end 1031 is concentric with the first connection end 1021, improves the rubbing head 100
Structural strength.
Wherein, upper floating end 1032 is the recessed circular conical surface of part concave spherical surface or part.
In one embodiment of the invention, referring to Fig. 3, the surface of upper floating end 1032 is provided with first groove 1033, the
One groove 1033 is used to store lubricating grease.
Rubbing head 100 in the embodiment of the present invention, by the recessed circle of the part concave spherical surface of upper floating end 1032 or part
The groove of annular is set on the conical surface, can be used for storing lubricating grease in the groove, reduce the abrasion of contact surface, improve floating
Flexibility.
In one embodiment of the invention, referring to Fig. 4, Fig. 4 is the structural representation of lower floating part in the embodiment of the present invention
Figure, lower floating part 104 includes：The connection end 1042 of lower floating end 1041 and the 3rd, lower floating end 1041 is convex spherical.
Wherein, lower floating end 1041 is part convex spherical.
In one embodiment of the invention, the convex spherical of lower floating end 1041 and the concave spherical surface of upper floating end 1032 or
Recessed circular conical surface is adapted, and is detachably connected, and in the rotation floated between upper floating part 103 and lower floating part 104
The heart is not higher than the polished surface of workpiece.
Rubbing head 100 in the embodiment of the present invention, the convex spherical by lower floating end 1041 is recessed with upper floating end 1032
Sphere or recessed circular conical surface are adapted, and are detachably connected, and can reduce contact point deformation, reduce between workpiece and polishing disk
Beat,.The polishing table of the center of rotation not higher than workpiece by being floated between upper floating part 103 and lower floating part 104
Face, i.e. the center of rotation floated or in workpiece polished surface, or less than workpiece polished surface, floating structure turns
Dynamic center is less than workpiece polished surface, and rubbing head 100 is tilted to the opposite direction of polishing disk rotation direction, entered beneficial to polishing fluid
Polished surface center, accelerates the clearance of workpiece centre, improves the flatness of polished surface.
In one embodiment of the invention, referring to Fig. 4, the surface of lower floating end 1041 of lower floating part 104 is provided with
Two grooves 1043, second groove 1043 is used to store lubricating grease.
Rubbing head 100 in the embodiment of the present invention, by being provided with the groove of annular, the ditch on the surface of lower floating end 1041
Can be used for storing lubricating grease in groove, reduce further the abrasion of contact surface, improve floating flexibility.
In one embodiment of the invention, referring to Fig. 5, Fig. 5 is the structural representation of substrate in the embodiment of the present invention, base
Plate 101 includes：4th connection end 1011, loading end 1012, and the second driving end 1013, wherein, the 4th connection end 1011 with
3rd connection end 1042 is fixedly linked, and the second driving end 1013 is connected by driving member 105 with the first driving end 1022.
In one embodiment of the invention, adsorption piece 106 is provided with loading end 1012, adsorption piece 106 is used to treat
Polishing workpiece is carried and loaded.
In one embodiment of the invention, referring to Fig. 6, Fig. 6 is the structural representation of driving member in the embodiment of the present invention,
Driving member 105 is diaphragm structure, and elastic deformation can occur.
Alternatively, diaphragm structure can include transmission side A1051 and transmission side B1052, and side is connected with actuator 102,
Opposite side is connected with substrate 101, and this is not restricted.
In the present embodiment, by the convex spherical of lower floating end and the concave spherical surface of upper floating end or the recessed circular conical surface of rubbing head
It is adapted, and is detachably connected, contact point deformation can be reduced, reduce the beat between workpiece and polishing disk, makes up polishing
Parallelism error between head and polishing disk, makes workpiece be fitted in polishing panel surface, and lifting polishing effect.
It should be noted that in the description of the invention, term " first ", " second " etc. are only used for describing purpose, without
It is understood that to indicate or implying relative importance.Additionally, in the description of the invention, unless otherwise indicated, the implication of " multiple "
It is two or more.
Any process described otherwise above or method description in flow chart or herein is construed as, and expression includes
It is one or more for realizing specific logical function or process the step of the module of code of executable instruction, fragment or portion
Point, and the scope of the preferred embodiment of the present invention includes other realization, wherein can not press shown or discussion suitable
Sequence, including function involved by basis by it is basic simultaneously in the way of or in the opposite order, carry out perform function, this should be of the invention
Embodiment person of ordinary skill in the field understood.
It should be appreciated that each several part of the invention can be realized with hardware, software, firmware or combinations thereof.Above-mentioned
In implementation method, the software that multiple steps or method can in memory and by suitable instruction execution system be performed with storage
Or firmware is realized.If for example, realized with hardware, and in another embodiment, can be with well known in the art
Any one of row technology or their combination are realized：With the logic gates for realizing logic function to data-signal
Discrete logic, the application specific integrated circuit with suitable combinational logic gate circuit, programmable gate array (PGA), scene
Programmable gate array (FPGA) etc..
Those skilled in the art are appreciated that to realize all or part of step that above-described embodiment method is carried
The rapid hardware that can be by program to instruct correlation is completed, and described program can be stored in a kind of computer-readable storage medium
In matter, the program upon execution, including one or a combination set of the step of embodiment of the method.
Additionally, during each functional unit in each embodiment of the invention can be integrated in a processing module, it is also possible to
It is that unit is individually physically present, it is also possible to which two or more units are integrated in a module.Above-mentioned integrated mould
Block can both be realized in the form of hardware, it would however also be possible to employ the form of software function module is realized.The integrated module is such as
Fruit is to realize in the form of software function module and as independent production marketing or when using, it is also possible to which storage is in a computer
In read/write memory medium.
Storage medium mentioned above can be read-only storage, disk or CD etc..
In the description of this specification, reference term " one embodiment ", " some embodiments ", " example ", " specifically show
The description of example " or " some examples " etc. means to combine specific features, structure, material or spy that the embodiment or example are described
Point is contained at least one embodiment of the invention or example.In this manual, to the schematic representation of above-mentioned term not
Necessarily refer to identical embodiment or example.And, the specific features of description, structure, material or feature can be any
One or more embodiments or example in combine in an appropriate manner.
Although embodiments of the invention have been shown and described above, it is to be understood that above-described embodiment is example
Property, it is impossible to limitation of the present invention is interpreted as, one of ordinary skill in the art within the scope of the invention can be to above-mentioned
Embodiment is changed, changes, replacing and modification.
Claims (7)
1. a kind of rubbing head, it is characterised in that including：Substrate, actuator, upper floating part, lower floating part, driving member, and inhale
Annex, wherein,
The actuator includes：First connection end, and the first driving end；
The upper floating part includes：Second connection end and upper floating end, second connection end are coaxial with first connection end
The heart is fixedly linked, and the upper floating end is concave spherical surface or recessed circular conical surface；
The lower floating part includes：Lower floating end and the 3rd connection end, the lower floating end are convex spherical；
The convex spherical of the lower floating end is adapted with the concave spherical surface or recessed circular conical surface of the upper floating end, and removably phase
Even, and the center of rotation not higher than workpiece floated between the upper floating part and the lower floating part polished surface.
2. rubbing head according to claim 1, it is characterised in that the floating end surfaces are provided with first groove, institute
First groove is stated for storing lubricating grease.
3. rubbing head according to claim 1, it is characterised in that the end surfaces of floating downward of the lower floating part are provided with
Two grooves, the second groove is used to store lubricating grease.
4. rubbing head according to claim 1, it is characterised in that the actuator also includes：It is connected with device drives axle
Drive end.
5. rubbing head according to claim 1, it is characterised in that the substrate includes：4th connection end, loading end, with
And second driving end, wherein, the 4th connection end is fixedly linked with the 3rd connection end, and second driving end passes through institute
Driving member is stated to be connected with first driving end.
6. rubbing head according to claim 5, it is characterised in that adsorption piece, the absorption are provided with the loading end
Part, is carried and is loaded for treating polishing workpiece.
7. rubbing head according to claim 5, it is characterised in that the driving member is diaphragm structure, and elastic shape can occur
Become.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710117233.3A CN106891244A (en) | 2017-03-01 | 2017-03-01 | Rubbing head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710117233.3A CN106891244A (en) | 2017-03-01 | 2017-03-01 | Rubbing head |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106891244A true CN106891244A (en) | 2017-06-27 |
Family
ID=59185349
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710117233.3A Pending CN106891244A (en) | 2017-03-01 | 2017-03-01 | Rubbing head |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106891244A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114871941A (en) * | 2022-04-25 | 2022-08-09 | 季华实验室 | Polishing head and polishing machine |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02232158A (en) * | 1989-03-02 | 1990-09-14 | Kyushu Electron Metal Co Ltd | Workpiece holding mechanism for surface polishing machine |
| US7137874B1 (en) * | 2000-11-21 | 2006-11-21 | Memc Electronic Materials, Spa | Semiconductor wafer, polishing apparatus and method |
| CN101342679A (en) * | 2008-08-19 | 2009-01-14 | 清华大学 | Polishing head for chemico-mechanical polishing |
| CN103192317A (en) * | 2013-04-02 | 2013-07-10 | 清华大学 | Polishing head |
| CN106272123A (en) * | 2016-10-20 | 2017-01-04 | 天津华海清科机电科技有限公司 | Rubbing head and there is its buffing machine |
| CN106334997A (en) * | 2016-10-20 | 2017-01-18 | 天津华海清科机电科技有限公司 | Polishing head and polisher with same |
-
2017
- 2017-03-01 CN CN201710117233.3A patent/CN106891244A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02232158A (en) * | 1989-03-02 | 1990-09-14 | Kyushu Electron Metal Co Ltd | Workpiece holding mechanism for surface polishing machine |
| US7137874B1 (en) * | 2000-11-21 | 2006-11-21 | Memc Electronic Materials, Spa | Semiconductor wafer, polishing apparatus and method |
| CN101342679A (en) * | 2008-08-19 | 2009-01-14 | 清华大学 | Polishing head for chemico-mechanical polishing |
| CN103192317A (en) * | 2013-04-02 | 2013-07-10 | 清华大学 | Polishing head |
| CN106272123A (en) * | 2016-10-20 | 2017-01-04 | 天津华海清科机电科技有限公司 | Rubbing head and there is its buffing machine |
| CN106334997A (en) * | 2016-10-20 | 2017-01-18 | 天津华海清科机电科技有限公司 | Polishing head and polisher with same |
Non-Patent Citations (1)
| Title |
|---|
| 戴智弘: ""低摆动瞬心式抛光头"", 《机械工程师》 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114871941A (en) * | 2022-04-25 | 2022-08-09 | 季华实验室 | Polishing head and polishing machine |
| CN114871941B (en) * | 2022-04-25 | 2024-04-05 | 季华实验室 | Polishing head and polishing machine |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR100818523B1 (en) | Polishing pad | |
| US5284538A (en) | Optical disc having signal recording layer on each side and method for producing same | |
| KR20110038422A (en) | Method and system for polishing glass | |
| CN104972388B (en) | Abrasive disk and grinder | |
| CN109551356B (en) | A kind of novel precise grinding and polishing device of sphere | |
| CN106891244A (en) | Rubbing head | |
| JP4521359B2 (en) | Polishing method and polishing apparatus | |
| JP6280355B2 (en) | Manufacturing method of magnetic disk substrate and carrier for polishing treatment | |
| CN206912860U (en) | Off-axis spherical polishing machine | |
| CN105856057B (en) | Link mechanism, substrate grinding device, rotation center localization method, maximum pressing load determination method and recording medium | |
| US5123218A (en) | Circumferential pattern finishing method | |
| CN103878676B (en) | A kind of cone spirality lapping device | |
| CN1294585C (en) | Equipment and method for dicision information record medium | |
| US9724800B2 (en) | Wafer polishing apparatus | |
| JP2002355742A (en) | Ball machining device and ball machining method | |
| KR102098993B1 (en) | Drum pad dressing apparatus for wafer edge polishing | |
| US5187901A (en) | Circumferential pattern finishing machine | |
| CN109590897A (en) | Grinding pad and grinding method | |
| JP6630231B2 (en) | Retainer ring, substrate holding device and substrate polishing device | |
| CN112139889B (en) | Non-magnetic grinding device and method for preventing bearing end face from warping | |
| CN106737130A (en) | Sapphire substrate lapping device | |
| CN215394297U (en) | Floating polishing device based on robot control | |
| CN207771615U (en) | A kind of upper polishing disk | |
| CN209408197U (en) | A kind of polishing mechanism connecing disk for valve | |
| JP2002307276A (en) | Polishing method and device for periphery of semiconductor wafer |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20170627 |
|
| RJ01 | Rejection of invention patent application after publication |