CN106881328A - Glass production line and glass making processes - Google Patents
Glass production line and glass making processes Download PDFInfo
- Publication number
- CN106881328A CN106881328A CN201710071651.3A CN201710071651A CN106881328A CN 106881328 A CN106881328 A CN 106881328A CN 201710071651 A CN201710071651 A CN 201710071651A CN 106881328 A CN106881328 A CN 106881328A
- Authority
- CN
- China
- Prior art keywords
- glass
- granularity
- production line
- exceeded
- unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011521 glass Substances 0.000 title claims abstract description 131
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 42
- 238000005816 glass manufacturing process Methods 0.000 title claims abstract description 8
- 238000004140 cleaning Methods 0.000 claims abstract description 66
- 239000002245 particle Substances 0.000 claims abstract description 33
- 238000007689 inspection Methods 0.000 claims abstract description 32
- 238000011144 upstream manufacturing Methods 0.000 claims description 10
- 238000007664 blowing Methods 0.000 claims description 5
- 239000005357 flat glass Substances 0.000 claims description 3
- 239000002699 waste material Substances 0.000 abstract description 10
- 230000002950 deficient Effects 0.000 abstract description 4
- 238000000034 method Methods 0.000 description 12
- 230000003749 cleanliness Effects 0.000 description 8
- 239000000758 substrate Substances 0.000 description 5
- 238000001514 detection method Methods 0.000 description 4
- 239000000428 dust Substances 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 239000012530 fluid Substances 0.000 description 1
- 238000012795 verification Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B11/00—Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto
- B08B11/04—Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto specially adapted for plate glass, e.g. prior to manufacture of windshields
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
- B07C—POSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
- B07C5/00—Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
- B07C5/34—Sorting according to other particular properties
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
- B07C—POSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
- B07C2501/00—Sorting according to a characteristic or feature of the articles or material to be sorted
- B07C2501/0072—Sorting of glass
Landscapes
- Cleaning In General (AREA)
- Surface Treatment Of Glass (AREA)
Abstract
The invention discloses a kind of glass production line, including being used to clean the cleaning unit (1) of the foreign matter of glass surface, with the particle inspection unit (2) of the granularity for being used to detect glass surface, particle inspection unit (2) is arranged on the downstream of cleaning unit (1)；Glass production line also includes loopback cell, and the exceeded glass of the granularity that the loopback cell detects particle inspection unit (2) is transmitted back to cleaning unit (1), implements to clean again with to the exceeded glass of granularity.The invention also discloses a kind of glass making processes.Cleaning unit is transmitted back to by by the exceeded glass of granularity, glass that can be exceeded to granularity is implemented to clean again.Thereby most can be judged to the product of waste product and become certified products because granularity is unqualified, so as to substantially reduce percent defective.
Description
Technical field
The present invention relates to glass manufacturing area, in particular it relates to a kind of glass production line and glass making processes.
Background technology
Flat panel display substrates glass is a kind of ultra-thin flat glass high to surface cleanliness requirement, for glass surface
The norm controlling of the foreign matter such as greasy dirt, watermark, dust have harsh requirement.Usually using cleaning in the manufacturing process of glass
Device is cleaned to the foreign matter of product surface.Cleaning device generally comprises the links such as shower water, hairbrush, cleaning fluid cleaning, can
Effectively remove the foreign matters such as greasy dirt, watermark, dust of glass surface.After the completion of cleaning, also glass can be detected by detection means
Whether the cleanliness factor on glass surface meets index request.The detection means can be by clean various different of the non-thoroughly cleaning of glass surface
Thing is detected and counted, and the quantity of foreign matter is characterized with granularity.Granularity is higher, shows that glass is got over unclean.Granularity
After more than a threshold value, glass product can be judged to waste product.Found in, the granularity of a part of glass product exceedes threshold value
Amplitude is simultaneously little.But waste product can be also judged to, this has resulted in waste.
The content of the invention
It is an object of the invention to provide a kind of apparatus and method, to rate of being reduced the number of rejects and seconds in glass manufacturing process.
To achieve these goals, one aspect of the present invention provides a kind of glass production line, including is used to clean glass surface
Foreign matter cleaning unit, and be used to detect the particle inspection unit of the granularity of glass surface, the particle inspection unit sets
Put in the downstream of the cleaning unit；The glass production line also includes loopback cell, and the loopback cell is by the particle inspection
The exceeded glass of granularity that unit is detected is transmitted back to the cleaning unit, implements again with to the exceeded glass of the granularity
Cleaning.
Preferably, the granularity is exceeded is more than first threshold and less than Second Threshold including granularity.
Preferably, the Second Threshold is 1.5 times to 2.5 times of the first threshold.
Preferably, the wash number again of the exceeded glass of the granularity is not more than 2 times.
Preferably, the loopback cell includes the sorting portion in the downstream for being arranged on the particle inspection unit, is used to institute
State the exceeded glass assorting of granularity out.
Preferably, the particle inspection unit and the sorting portion are arranged in toilet, and are set in the toilet
The useful dust-blowing device to prevent outdoor foreign matter from entering.
Preferably, the loopback cell also includes：Transport part, the input of the transport part is arranged under the sorting portion
Trip, output end is arranged on the upstream of the cleaning unit, is used to transmit the exceeded glass of the granularity；And feeding portion, should
Feeding portion the exceeded glass of the granularity of the output end of the transport part is sent into the cleaning unit.
Preferably, the glass production line also includes the grinding unit of the upstream for being arranged on the cleaning unit；Wherein, institute
Feeding portion is stated to surpass the granularity of the output end of the transport part in the beat space of the output glass of the grinding unit
Target glass sends into the cleaning unit.
Preferably, the glass production line is used to produce flat panel display substrates glass.
Another aspect of the present invention provides a kind of glass making processes, comprises the following steps：Glass is cleaned using cleaning unit
The foreign matter on surface；The granularity of glass surface is detected using particle inspection unit；Using loopback cell by the particle inspection list
The exceeded glass of granularity that unit detects is transmitted back to the cleaning unit, implements clear again with to the exceeded glass of the granularity
Wash.
Preferably, the granularity is exceeded is more than first threshold and less than Second Threshold including granularity.
Preferably, the Second Threshold is 1.5 times to 2.5 times of the first threshold.
Preferably, the wash number again of the exceeded glass of the granularity is not more than 2 times.
Preferably, the loopback cell includes the sorting portion in the downstream for being arranged on the particle inspection unit, is used to institute
State the exceeded glass assorting of granularity out.
Preferably, the particle inspection unit and the sorting portion are arranged in toilet, and are set in the toilet
The useful dust-blowing device to prevent outdoor foreign matter from entering.
Preferably, the loopback cell also includes：Transport part, the input of the transport part is arranged under the sorting portion
Trip, output end is arranged on the upstream of the cleaning unit, is used to transmit the exceeded glass of the granularity；And feeding portion, should
Feeding portion the exceeded glass of the granularity of the output end of the transport part is sent into the cleaning unit.
Preferably, the glass production line also includes the grinding unit of the upstream for being arranged on the cleaning unit；Wherein, institute
Feeding portion is stated to surpass the granularity of the output end of the transport part in the beat space of the output glass of the grinding unit
Target glass sends into the cleaning unit.
Preferably, the glass production line is used to produce flat panel display substrates glass.
By above-mentioned technical proposal, it is single that the exceeded glass of granularity is transmitted back to cleaning by the glass production line that the present invention is provided
Unit such that it is able to which the glass exceeded to granularity is implemented to clean again.So, the glass of this part loopback has just obtained cleaning again
Chance, granularity further reduces.Especially for those, granularity is little more than the amplitude of threshold value after first time cleans
Glass product for, after cleaning again as certified products possibility it is very big.Thereby can by most because
Granularity is unqualified and is judged to the product of waste product and becomes certified products, so as to substantially reduce percent defective, improves the non-defective unit of production line
Rate.
Other features and advantages of the present invention will be described in detail in subsequent specific embodiment part.
Brief description of the drawings
Accompanying drawing is, for providing a further understanding of the present invention, and to constitute the part of specification, with following tool
Body implementation method is used to explain the present invention together, but is not construed as limiting the invention.In the accompanying drawings：
Fig. 1 is the structural representation of glass production line of the invention.
Description of reference numerals
The particle inspection unit of 1 cleaning unit 2
The feeding portion of 31 sorting portion, 32 transport part 33
The subsequent cell of 4 grinding unit 5
Specific embodiment
Specific embodiment of the invention is described in detail below in conjunction with accompanying drawing.It should be appreciated that this place is retouched
The specific embodiment stated is merely to illustrate and explain the present invention, and is not intended to limit the invention.
With reference to Fig. 1, the present invention provides a kind of glass production line.Because flat panel display substrates glass is to surface cleanliness requirement
It is high, therefore the production line that the present invention is provided is particularly suited for production flat panel display substrates glass, but it is aobvious to be not limited to production flat board
Show base plate glass.
As shown in fig. 1, according to the embodiment of the present invention, the glass production line includes being sequentially arranged from upstream to downstream
Grinding unit 4, cleaning unit 1 and particle inspection unit 2.It is described herein to be sequentially arranged from upstream to downstream, it is intended merely to
Illustrate grinding unit 4, the setting on a production line of cleaning unit 1 and particle inspection unit 2 sequentially, not define on production line
All devices.That is, in certain embodiments, between grinding unit 4 and cleaning unit 1, cleaning unit 1 and particle inspection
Other equipment is also provided between verification certificate unit 2.
Embodiments in accordance with the present invention, the glass product of the output of grinding unit 4 is entered into and carried out in the cleaning unit 1 in downstream
Cleaning, to remove the foreign matter such as greasy dirt, watermark, dust on glass product surface.Downstream is entered into through the glass product of over cleaning
Particle inspection unit 2 carries out the detection of granularity, and whether finger has been reached with the cleanliness factor (granularity) for judging glass product surface
Mark required standard.When judging, the granularity that can be detected particle inspection unit 2 is compared with default threshold value.
Such as threshold value can be certified products patient granularity maximum, when the granularity for detecting exceed the maximum when,
Illustrate that the foreign matter on glass product surface is excessive, it can be determined that for granularity is exceeded；When the granularity for detecting is less than the maximum
When, the foreign matter for illustrating glass product surface can be tolerance, it can be determined that for granularity meets the requirements, and glass product is qualified
Product.
Follow-up flow can be carried out for the glass product that granularity reaches requirement into subsequent cell 5.For particle
The exceeded glass product of degree, according to the embodiment of the present invention, is passed through loopback cell and is transmitted back to cleaning unit 1, with to it
Implementation is cleaned again.So, the glass of this part loopback has just obtained the chance cleaned again, and granularity is further reduced.Especially
It is for those are in the little glass product of the amplitude that granularity after first time cleans exceedes threshold value, after cleaning again
Possibility as certified products is very big.Thereby can by most because granularity is unqualified be judged to waste product product become
Into certified products, so as to substantially reduce percent defective, the yields of production line is improve.
Embodiments in accordance with the present invention, default threshold value includes first threshold and Second Threshold.First, the present invention will detection
To granularity be compared with first threshold, when the granularity for detecting be less than first threshold when, illustrate glass product surface
Foreign matter can be tolerance, glass product is certified products.When the granularity for detecting is more than first threshold, illustrate that glass is produced
The foreign matter on product surface is excessive, it can be determined that for granularity is exceeded.Next, the granularity that preferably will also detect of the present invention with
Second Threshold is compared, and when the granularity for detecting is more than Second Threshold, illustrating the foreign matter of glass surface cannot lead to
The cleaning treatment of over cleaning unit 1 is clean, now can be as waste disposal.When the granularity for detecting is less than the second threshold
During value, illustrating the foreign matter of glass surface can be probably reduced to below first threshold by cleaning link again.
That is, when the granularity for detecting is more than first threshold and during less than Second Threshold, although glass surface
Foreign matter beyond the patient scope of certified products, but by implement clean again become certified products possibility it is very big.This
Segment glass is the optimal objective for implementation for being changed into certified products from waste product by cleaning again.In addition, right by clean implementation again
Quadrant is set to granularity less than Second Threshold, granularity can also be directly judged as into waste product more than the glass of Second Threshold, this
Sample directly can exclude the unnecessary glass for implementing to clean again, so as to save program, cost is cleaned in reduction again.
Embodiments in accordance with the present invention, 1.5 times to 2.5 times of first threshold are set to by Second Threshold.So, will be clear again
The practical range washed is locked on optimal objective for implementation, so as to ensure to clean again with efficiency higher.In addition, according to the present invention
Embodiment, the wash number again of the exceeded glass of granularity is not more than 2 times.It is qualified still to turn into after 2 times are cleaned again
The glass of product, then it is continued to implement to clean again that cost can be caused to waste；Also, can be by even across more frequently cleaning again
Granularity reduction, possible other indexs (such as finish index) also cannot again reach requirement.Therefore, the present invention is preferably cleaned again
Now it is not more than 2 times, is the preferably equalization point chosen between cleaning cost and cleaning efficiency.
With continued reference to Fig. 1, according to the embodiment of the present invention, loopback cell includes being arranged on the downstream of particle inspection unit
Sorting portion 31.The glass product detected by particle inspection unit 2 can be divided into that granularity reaches requirement and granularity is exceeded,
The glass product that granularity reaches requirement can enter subsequent cell 5 along production line main line.The exceeded glass product of granularity
Sorted out by sorting portion 31, to implement to clean again to it.
Embodiments in accordance with the present invention, loopback cell also includes transport part 32, is used to transmit the exceeded glass of granularity.Pass
The input in defeated portion 32 is arranged on the downstream in sorting portion 31, and output end is arranged on the upstream of cleaning unit 1.So, transport part 32
Input can directly receive the glass cleaned again the need for sorting portion 31 sorts out, and this segment glass is transported to clearly
The upstream of unit 1 is washed in case implementation is cleaned again.
Embodiments in accordance with the present invention, loopback cell also include feeding portion 33, be used to by the output end of transport part 32
The exceeded glass feeding cleaning unit 1 of granularity.As shown in fig. 1, feeding portion 33 be arranged on grinding unit 4 and cleaning unit 3 it
Between.In the beat space of the output glass of grinding unit 4, the exceeded glass of granularity is sent into cleaning unit 1 by feeding portion 33.This
Because, the normal flow that cleaning treatment is production line main line is carried out into cleaning unit 1 from the glass of the output of grinding unit 4,
Loopback cell should not be interfered with the normal flow.Therefore, feeding portion 33 should not be in the beat of the output glass of grinding unit 4
It is upper to implement feeding glass, and feeding glass should be implemented in the beat space of the output glass of grinding unit 4.
Embodiments in accordance with the present invention, particle inspection unit 2 and sorting portion 31 are arranged in toilet, to avoid sorting portion
31 take foreign matter in sort process on the glass through over cleaning.Also, dust-blowing device is provided with toilet, makes cleaning
Wind-force malleation is kept in room, to prevent sorting portion 31 when the exceeded glass of granularity is transported into transport part 32, transport part 32
Take foreign matter to toilet.Such as but not limited to, dust-blowing device can be air or blower fan.In other embodiment party of the invention
In formula, cleaning unit 1, grinding unit 4 and feeding portion 33 can also be also disposed in different toilets.In order to save into
, can be set to the cleanliness factor of the toilet residing for particle inspection unit 2 and sorting portion 31 better than residing for cleaning unit 1 by this
The cleanliness factor of toilet, the cleanliness factor of the toilet residing for cleaning unit 1 is set to better than grinding unit 4 and institute of feeding portion 33
The cleanliness factor of the toilet at place.Also, make to keep wind-force malleation in particle inspection unit 2 and the toilet residing for sorting portion 31,
So as to prevent foreign matter from entering into cleaniliness classs toilet high by transport part 32.
Another aspect of the present invention also provides a kind of glass making processes.The production method comprises the following steps：Using cleaning
Unit 1 cleans the foreign matter of glass surface；The granularity of glass surface is detected using particle inspection unit 2；Will using loopback cell
The exceeded glass of granularity that particle inspection unit 2 is detected is transmitted back to cleaning unit 1, implements with to the exceeded glass of granularity
Clean again.The feature of other features above-mentioned glass production line of correspondence of the method, the implementation method above-mentioned glass of correspondence of the method
The implementation method of production line.Here is omitted.The implementation method of the method and the implementation method of glass production line can be each other
Any combination, all within the scope of the present invention.
The preferred embodiment of the present invention is described in detail above in association with accompanying drawing, but, the present invention is not limited to above-mentioned reality
The detail in mode is applied, in range of the technology design of the invention, various letters can be carried out to technical scheme
Monotropic type, these simple variants belong to protection scope of the present invention.
It is further to note that each particular technique feature described in above-mentioned specific embodiment, in not lance
In the case of shield, can be combined by any suitable means.In order to avoid unnecessary repetition, the present invention to it is various can
The combination of energy is no longer separately illustrated.
Additionally, can also be combined between a variety of implementation methods of the invention, as long as it is without prejudice to originally
The thought of invention, it should equally be considered as content disclosed in this invention.
Claims (10)
1. a kind of glass production line, including it is used to clean the cleaning unit (1) of the foreign matter of glass surface, and be used to detect glass table
The particle inspection unit (2) of the granularity in face, the particle inspection unit (2) is arranged on the downstream of the cleaning unit (1)；Its
It is characterised by, the glass production line also includes loopback cell, the loopback cell detects the particle inspection unit (2)
The exceeded glass of granularity is transmitted back to the cleaning unit (1), implements to clean again with to the exceeded glass of the granularity.
2. glass production line according to claim 1, it is characterised in that the granularity it is exceeded including granularity more than the
One threshold value and less than Second Threshold.
3. glass production line according to claim 2, it is characterised in that the Second Threshold is the first threshold
1.5 times to 2.5 times.
4. the glass production line according to Claims 2 or 3, it is characterised in that the exceeded glass of the granularity it is clear again
Number of times is washed to be not more than 2 times.
5. the glass production line according to Claims 2 or 3, it is characterised in that the loopback cell includes being arranged on described
The sorting portion (31) in the downstream of particle inspection unit, is used to the exceeded glass assorting of the granularity out.
6. glass production line according to claim 5, it is characterised in that the particle inspection unit (2) and the sorting
Portion (31) is arranged in toilet, and the dust-blowing device for preventing outdoor foreign matter from entering is provided with the toilet.
7. glass production line according to claim 5, it is characterised in that the loopback cell also includes：Transport part (32),
The input of the transport part (32) is arranged on the downstream of the sorting portion (31), and output end is arranged on the cleaning unit (1)
Upstream, is used to transmit the exceeded glass of the granularity；And feeding portion (33), the feeding portion (33) is by the transport part (32)
The exceeded glass of the granularity of output end send into the cleaning unit (1).
8. glass production line according to claim 7, it is characterised in that the glass production line also includes being arranged on described
The grinding unit (4) of the upstream of cleaning unit (1)；
Wherein, the feeding portion (33) in the beat space of the output glass of the grinding unit (4) by the transport part (32)
The exceeded glass of the granularity of output end send into the cleaning unit (1).
9. glass production line according to claim 1, it is characterised in that the glass production line is used to produce FPD
Base plate glass.
10. a kind of glass making processes, it is characterised in that comprise the following steps：
The foreign matter of glass surface is cleaned using cleaning unit (1)；
The granularity of glass surface is detected using particle inspection unit (2)；
It is single that the exceeded glass of the granularity that the particle inspection unit (2) is detected using loopback cell is transmitted back to the cleaning
First (1), implements to clean again with to the exceeded glass of the granularity.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710071651.3A CN106881328B (en) | 2017-02-09 | 2017-02-09 | Glass production line and glass production method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710071651.3A CN106881328B (en) | 2017-02-09 | 2017-02-09 | Glass production line and glass production method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106881328A true CN106881328A (en) | 2017-06-23 |
| CN106881328B CN106881328B (en) | 2020-11-03 |
Family
ID=59179349
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710071651.3A Active CN106881328B (en) | 2017-02-09 | 2017-02-09 | Glass production line and glass production method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106881328B (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107812753A (en) * | 2017-11-15 | 2018-03-20 | 国网福建省电力有限公司 | A kind of method for cleaning breaker parts |
| CN109108032A (en) * | 2018-06-25 | 2019-01-01 | 上海华力微电子有限公司 | A kind of unproductive method for cleaning wafer |
| CN109335581A (en) * | 2018-09-10 | 2019-02-15 | 彩虹（合肥）液晶玻璃有限公司 | A kind of feed belt method for cleaning |
| CN106881328B (en) * | 2017-02-09 | 2020-11-03 | 东旭光电科技股份有限公司 | Glass production line and glass production method |
| CN116493295A (en) * | 2023-06-28 | 2023-07-28 | 中建材佳星玻璃(黑龙江)有限公司 | Glass production early warning method and system |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1294410A (en) * | 1999-10-26 | 2001-05-09 | 日本电气株式会社 | Semiconductor mfg. appts. |
| JP2001319857A (en) * | 2000-05-09 | 2001-11-16 | Tokyo Electron Ltd | Coating developing system |
| CN103223405A (en) * | 2012-01-30 | 2013-07-31 | 硅电子股份公司 | Ultrasonic cleaning method |
| CN103706523A (en) * | 2012-10-09 | 2014-04-09 | 东京毅力科创株式会社 | Processing liquid supply method, processing liquid supply apparatus and storage medium |
| CN104275640A (en) * | 2013-07-12 | 2015-01-14 | 株式会社荏原制作所 | Film-thickness measuring apparatus, film-thickness measuring method, and polishing apparatus having the film-thickness measuring apparatus |
| CN105481268A (en) * | 2015-12-10 | 2016-04-13 | 张进 | Optical glass cleaning and demisting method |
| CN105629530A (en) * | 2016-01-19 | 2016-06-01 | 京东方科技集团股份有限公司 | Cleaning device and use method thereof |
| CN205732017U (en) * | 2016-05-27 | 2016-11-30 | 合肥安晶龙电子股份有限公司 | Color selector clearing glass apparatus for ash |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106881328B (en) * | 2017-02-09 | 2020-11-03 | 东旭光电科技股份有限公司 | Glass production line and glass production method |
-
2017
- 2017-02-09 CN CN201710071651.3A patent/CN106881328B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1294410A (en) * | 1999-10-26 | 2001-05-09 | 日本电气株式会社 | Semiconductor mfg. appts. |
| JP2001319857A (en) * | 2000-05-09 | 2001-11-16 | Tokyo Electron Ltd | Coating developing system |
| CN103223405A (en) * | 2012-01-30 | 2013-07-31 | 硅电子股份公司 | Ultrasonic cleaning method |
| CN103706523A (en) * | 2012-10-09 | 2014-04-09 | 东京毅力科创株式会社 | Processing liquid supply method, processing liquid supply apparatus and storage medium |
| CN104275640A (en) * | 2013-07-12 | 2015-01-14 | 株式会社荏原制作所 | Film-thickness measuring apparatus, film-thickness measuring method, and polishing apparatus having the film-thickness measuring apparatus |
| CN105481268A (en) * | 2015-12-10 | 2016-04-13 | 张进 | Optical glass cleaning and demisting method |
| CN105629530A (en) * | 2016-01-19 | 2016-06-01 | 京东方科技集团股份有限公司 | Cleaning device and use method thereof |
| CN205732017U (en) * | 2016-05-27 | 2016-11-30 | 合肥安晶龙电子股份有限公司 | Color selector clearing glass apparatus for ash |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106881328B (en) * | 2017-02-09 | 2020-11-03 | 东旭光电科技股份有限公司 | Glass production line and glass production method |
| CN107812753A (en) * | 2017-11-15 | 2018-03-20 | 国网福建省电力有限公司 | A kind of method for cleaning breaker parts |
| CN109108032A (en) * | 2018-06-25 | 2019-01-01 | 上海华力微电子有限公司 | A kind of unproductive method for cleaning wafer |
| CN109335581A (en) * | 2018-09-10 | 2019-02-15 | 彩虹（合肥）液晶玻璃有限公司 | A kind of feed belt method for cleaning |
| CN116493295A (en) * | 2023-06-28 | 2023-07-28 | 中建材佳星玻璃(黑龙江)有限公司 | Glass production early warning method and system |
| CN116493295B (en) * | 2023-06-28 | 2023-09-08 | 中建材佳星玻璃(黑龙江)有限公司 | Glass production early warning method and system |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106881328B (en) | 2020-11-03 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN106881328A (en) | Glass production line and glass making processes | |
| TW360896B (en) | Method and apparatus for delivering ultra-low particle counts in semiconductor manufacturing | |
| CN109500663A (en) | A kind of polishing process reducing by 8 inches of silicon polished surface roughnesses | |
| DE102017200450A1 (en) | Wafer inspection apparatus, wafer inspection method, and semiconductor device manufacturing method | |
| CN103687265B (en) | Method and device for removing static electricity and dust on surface of substrate | |
| TW201518227A (en) | Glass substrate manufacturing management system and method of glass substrate manufacturing management | |
| CN107097148A (en) | A kind of sorting technique after sapphire substrate sheet section | |
| CN106984560A (en) | A kind of method for sorting based on solar silicon wafers open defect | |
| CN109860025B (en) | Cleaning method for ground silicon wafer | |
| CN101809616A (en) | Motionlessness deciding method and device for photograph object | |
| CN105606151A (en) | Car bearing ring intelligent comprehensive test system | |
| CN207927032U (en) | A kind of circuit board print system with automatic sorting function | |
| CN102759815A (en) | Manufacturing method and device of liquid crystal panel | |
| Shindo et al. | Excursion detection and source isolation in defect inspection and classification [VLSI manufacture] | |
| CN103794467A (en) | Recycle method for thin silicon wafers | |
| CN108818161B (en) | Silicon wafer reworking system and method | |
| JP2017189720A (en) | Foreign object removal device | |
| CN105996073B (en) | A kind of clamping structure for vegetable cleaning | |
| CN106363035A (en) | Cleaning apparatus of nylon-coated wire production line | |
| CN205447920U (en) | Controlling cabinet of water circulation hood | |
| CN205963981U (en) | Automatic dishes -washing system | |
| CN107895704A (en) | The defects of a kind of efficient, inspects method and system by random samples | |
| JP2021174912A (en) | Cleaning method for semiconductor wafer | |
| CN114589167B (en) | Cleaning device and control method thereof | |
| CN208891668U (en) | A kind of green soybean cleaning device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| TA01 | Transfer of patent application right |
Effective date of registration: 20200915 Address after: 050035 No. 9, the Yellow River Avenue, hi tech Zone, Hebei, Shijiazhuang Applicant after: DONGXU OPTOELECTRONIC TECHNOLOGY Co.,Ltd. Address before: The 100075 Beijing Seahawks Fengtai District Science City Road No. 9 Building No. 2 room 266 (Park) Applicant before: TUNGHSU TECHNOLOGY GROUP Co.,Ltd. Applicant before: TUNGHSU GROUP Co.,Ltd. |
|
| TA01 | Transfer of patent application right | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| EE01 | Entry into force of recordation of patent licensing contract | ||
| EE01 | Entry into force of recordation of patent licensing contract |
Application publication date: 20170623 Assignee: Zhuzhou Guoyang Photoelectric Technology Co.,Ltd. Assignor: DONGXU OPTOELECTRONIC TECHNOLOGY Co.,Ltd. Contract record no.: X2021110000027 Denomination of invention: Glass production line and glass production method Granted publication date: 20201103 License type: Common License Record date: 20210823 |
|
| EE01 | Entry into force of recordation of patent licensing contract |
Application publication date: 20170623 Assignee: Sichuan Jiangwei Technology Co.,Ltd. Assignor: DONGXU OPTOELECTRONIC TECHNOLOGY Co.,Ltd. Contract record no.: X2021110000049 Denomination of invention: Glass production line and glass production method Granted publication date: 20201103 License type: Common License Record date: 20211125 |
|
| EE01 | Entry into force of recordation of patent licensing contract | ||
| EE01 | Entry into force of recordation of patent licensing contract |
Application publication date: 20170623 Assignee: Sichuan Jiangtian Technology Co.,Ltd. Assignor: DONGXU OPTOELECTRONIC TECHNOLOGY Co.,Ltd. Contract record no.: X2022110000008 Denomination of invention: Glass production line and glass production method Granted publication date: 20201103 License type: Common License Record date: 20220318 |
|
| EE01 | Entry into force of recordation of patent licensing contract | ||
| EE01 | Entry into force of recordation of patent licensing contract |
Application publication date: 20170623 Assignee: Qingdao fusion Photoelectric Technology Co.,Ltd. Assignor: DONGXU OPTOELECTRONIC TECHNOLOGY Co.,Ltd. Contract record no.: X2022110000015 Denomination of invention: Glass production line and glass production method Granted publication date: 20201103 License type: Common License Record date: 20220812 |
|
| EE01 | Entry into force of recordation of patent licensing contract | ||
| EE01 | Entry into force of recordation of patent licensing contract |
Application publication date: 20170623 Assignee: Xinjiang Huiguang Photoelectric Technology Co.,Ltd. Assignor: DONGXU OPTOELECTRONIC TECHNOLOGY Co.,Ltd. Contract record no.: X2022990000483 Denomination of invention: Glass production line and glass production method Granted publication date: 20201103 License type: Common License Record date: 20220815 |
|
| EE01 | Entry into force of recordation of patent licensing contract |