CN106873712A - A kind of radio-frequency signal generator controls circuit and radio-frequency signal generator - Google Patents
A kind of radio-frequency signal generator controls circuit and radio-frequency signal generator Download PDFInfo
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- CN106873712A CN106873712A CN201710078057.7A CN201710078057A CN106873712A CN 106873712 A CN106873712 A CN 106873712A CN 201710078057 A CN201710078057 A CN 201710078057A CN 106873712 A CN106873712 A CN 106873712A
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- 230000008878 coupling Effects 0.000 claims description 7
- 238000010168 coupling process Methods 0.000 claims description 7
- 238000005859 coupling reaction Methods 0.000 claims description 7
- 230000005611 electricity Effects 0.000 claims description 7
- 238000005259 measurement Methods 0.000 claims description 7
- 238000012544 monitoring process Methods 0.000 claims description 7
- 230000003993 interaction Effects 0.000 claims description 5
- 238000004891 communication Methods 0.000 claims description 3
- 238000001514 detection method Methods 0.000 claims description 3
- 238000005070 sampling Methods 0.000 claims 1
- 230000008859 change Effects 0.000 description 11
- 238000010586 diagram Methods 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000010363 phase shift Effects 0.000 description 3
- 238000003786 synthesis reaction Methods 0.000 description 3
- 230000003321 amplification Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 210000001367 artery Anatomy 0.000 description 1
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- 238000006243 chemical reaction Methods 0.000 description 1
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- 238000011161 development Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 210000003462 vein Anatomy 0.000 description 1
Classifications
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F1/00—Details not covered by groups G06F3/00 - G06F13/00 and G06F21/00
- G06F1/02—Digital function generators
- G06F1/022—Waveform generators, i.e. devices for generating periodical functions of time, e.g. direct digital synthesizers
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Abstract
A kind of radio-frequency signal generator controls circuit, including control module, converter module and power amplifier module, the control module is provided with DDS circuit and comparator, and DDS circuit produces radiofrequency sinusoidal signal, radiofrequency sinusoidal signal to be converted to square-wave signal by comparator and be transported to power amplifier module；Control module connects converter module, and control module control converter module produces two-way unipolarity waveform, and converter module after two-way unipolarity addition of waveforms, treatment to forming DC voltage；The DC voltage is powered for power amplifier module, and power amplifier module is the adjustable radio-frequency current of power output.
Description
Technical field
The invention belongs to electronic technology field, more particularly to a kind of radio-frequency signal generator control circuit and radio-frequency signal generator.
Background technology
Radio-frequency signal generator is the supporting power supply of plasma, and it is by signal generator, impedance matching box and impedance power
The composition such as meter, radio-frequency signal generator technical field is 80 year latter stage in the emerging high-tech area of China.Radio-frequency signal generator should
It is with extensive, main specific field：Semiconductor production field, plasma etching, vacuum coating, PECVD, plasma cleaning,
Physical vapor deposition（PVD）, chemical meteorology deposition（CVD）, radio-frequency sputtering etc..
Modern radio-frequency signal generator has tremendous development, by electron tube power supply the developing into now step by step of the eighties
Transistor radio-frequency signal generator, power by watt, hectowatt, kilowatt, to megawatt, frequency has 2Mhz/13.56Mhz/27.12Mhz/
40.68Mhz etc., and apply and also expanded to other field, semiconductor, beauty etc. from former Vacuum Field.
Signal in radio-frequency signal generator is produced and control circuit is the core circuit of radio-frequency signal generator.In radio-frequency signal generator
Signal is produced and control circuit influences very big to the technical indicator of radio-frequency signal generator.
The content of the invention
The signal that this patent is given in a kind of radio-frequency signal generator is produced and control circuit, and the circuit passes through direct digital synthesizers
（Direct Digital Synthesis）DDS changes working frequency, realizes that power amplifier is powered electricity using phase shift addition of waveforms method
The change of pressure, so as to change the power output of radio-frequency signal generator.Realize the functions such as the setting to radio-frequency signal generator, control, monitoring.
The present invention is achieved through the following technical solutions：
A kind of radio-frequency signal generator controls circuit, including control module, converter module and power amplifier module, and the control module is provided with
DDS circuit and comparator, DDS circuit produce radiofrequency sinusoidal signal, radiofrequency sinusoidal signal to be converted to square-wave signal by comparator
It is transported to power amplifier module；
Control module connects converter module, and converter module includes V/F waveform generation modules, high power MOSFET pipes, coupling
Close transformer and rectifier bridge
V/F waveform generation modules in control module control converter module produce two-way unipolarity waveform, two-way unipolarity ripple
Shape after high power MOSFET pipes, coupling transformer and rectifier bridge by forming DC voltage；The DC voltage is power amplifier module
Power supply, power amplifier module is the adjustable radio-frequency current of power output.
Further to improve, the control module includes ARM chips and fpga chip, and ARM chips are used to control DDS electricity
Road, fpga chip is used to send waveform signal to converter module.
Further to improve, the fpga chip is connected with detection circuit, and power amplifier module is by detecting circuit to FPGA cores
Piece feedback power signal, forms closed-loop control.
It is further to improve, display button interface, parameter setting interface, monitoring variable AD are connected with the ARM chips and are adopted
Sample interface and communication interface.
A kind of radio-frequency signal generator, including control module, converter module and power amplifier module, the equipment generator include electricity
Source module, the three-phase electricity of electric power source pair of module input is processed and is other module for power supply；
The control module is provided with DDS circuit and comparator, and DDS circuit produces radiofrequency sinusoidal signal, radiofrequency sinusoidal signal to pass through
Comparator is converted to square-wave signal and is transported to power amplifier module；
Control module connects converter module, and control module control converter module produces two-way unipolarity waveform, converter mould
Block after two-way unipolarity addition of waveforms, treatment to forming DC voltage；The DC voltage is powered for power amplifier module, power amplifier module
That is the adjustable radio-frequency current of power output；
Power amplifier module is connected with measurement module, and measurement module measures the power output of power amplifier module, and feeds back to control module；
Control module is also associated with display device and human-computer interaction device.
Compared with prior art, the present invention has advantages below：
This patent can be applied to various radio-frequency signal generator, and the signal that this patent is given is produced and control circuit, using Direct Digital
Synthesis（Direct Digital Synthesis）DDS changes working frequency, realizes that power amplifier is supplied using phase shift addition of waveforms method
The change of piezoelectric voltage, so as to change the power output of radio-frequency signal generator.Realize the setting to radio-frequency signal generator, control, monitoring etc.
Function.
Brief description of the drawings
Fig. 1 radio-frequency signal generator theory diagrams;
Fig. 2 signals are produced and control circuit theory diagrams;
Fig. 3 unipolarity V/F signal waveforms;
Fig. 4 drive signal waveforms;
Fig. 5 high power MOSFET signal output waveforms;
Fig. 6 two-way MOSFET signals differ 180 ° through transformer coupled output;
Fig. 7 two-way MOSFET signals differ by more than 180 ° through transformer coupled output;
After Fig. 8 rectifier bridge rectifications, output cathode impulse waveform;
D. c. voltage signal is exported after Fig. 9 filter circuits;
Figure 10 power outputs automated closed-loop is controlled.
Specific embodiment
Embodiment 1
Fig. 1 is the theory diagram of radio-frequency signal generator, and the radio-frequency signal generator in the present invention includes：
Power module：Power module three-phase electric rectification is produced into other modules required for power supply.
Converter module：Converter module power module rectification after ± 150V dc sources be transformed into RF power amplification need
The supply voltage wanted.Converter module includes：V/F waveform generation modules, for producing two-way unipolarity waveform；High power
MOSFET is managed, the voltage for amplifying two-way unipolarity waveform；Coupling transformer, for two-way unipolarity waveform to be coupled into arteries and veins
Rush ripple；Rectifier bridge, for the impulse wave after the coupling after coupling to be converted into d. c. voltage signal.
Power amplifier module：The signal that power amplifier module sends control module carries out power amplification.
Control module：The configuration of chip in control module to DDS is set, and generation needs the sine wave of frequency and amplitude to believe
Number source, realizes the control to converter drive signal phase.And to the monitoring of the whole machine each several part of radio-frequency signal generator, realize monitoring variable
Circle collection monitoring, the setting of running parameter, man-machine interaction etc..
Measurement module：Measurement module provides forward power and reflection power monitor analogue quantity.
Interaction, display module：Interaction, display module control front panel keyboard and LCD screen by serial ports and control board communications
Display.
Fig. 2 is control module schematic diagram, and the configuration to DDS is mainly realized in wherein ARM chips part, produces the radio frequency for needing
Sinusoidal signal, square-wave signal is exported through comparator.Fpga chip major function is to use phase shift addition of waveforms method, by conversion
Device module realizes the change of power amplifier supply voltage, so as to change the power output of radio-frequency signal generator.
Fig. 3-Fig. 9 is converter module output voltage schematic diagram：
Converter V/F waveform generation modules can differ the two of 180 ° according to the signal output of fpga chip phase as shown in Figure 3
Road unipolarity waveform.Fig. 4 is monopolar drive signals waveform.
Drive signal promotes high power MOSFET pipes, produces bipolarity high-voltage signal waveform as shown in Figure 5.Two-way Gao Gong
Rate MOSFET output signals are exported after transformer coupled, transformer coupled to be output as when two paths of signals phase differs 180 °
0V, as shown in Figure 6.
When two paths of signals phase differs by more than 180 °, transformer coupled output double polarity pulse signal, pulse signal is wide
Degree increases with the increase of phase difference.As shown in Figure 7.
After the transformer coupled output rectified bridge rectification of double polarity pulse signal, output cathode impulse waveform, such as Fig. 8 institutes
Show.Output cathode impulse waveform exports d. c. voltage signal after filtered circuit again, as shown in Figure 9.The DC voltage
Powered to power amplifier module.
Therefore fpga chip is by changing the phase difference between two-way unipolarity waveform, you can control converter module is final
The DC voltage of output.The DC voltage can influence the power of power amplifier module final output, realize the adjustable of power.
Detection module can realize the closed-loop control of equipment, and its principle is as shown in Figure 10：Power amplifier output signal is through measurement electricity
Feedback power signal detects circuit to PWM behind road.The circuit produces change width according to the size variation of feedback power signal
Change the phase of converter V/F output waveforms in pulse signal, FPGA according to the change width of the pulse signal, so as to change work(
The DC voltage of discharge source, plays a part of to change power output.So far, a closed-loop control of power adjustment is formed.
Claims (5)
1. a kind of radio-frequency signal generator controls circuit, including control module, converter module and power amplifier module, it is characterised in that institute
State control module and be provided with DDS circuit and comparator, DDS circuit produces radiofrequency sinusoidal signal, radiofrequency sinusoidal signal to pass through comparator
Be converted to square-wave signal and be transported to power amplifier module；
Control module connects converter module, and converter module includes V/F waveform generation modules, high power MOSFET pipes, coupling
Close transformer and rectifier bridge;
V/F waveform generation modules in control module control converter module produce two-way unipolarity waveform, two-way unipolarity ripple
Shape after high power MOSFET pipes, coupling transformer and rectifier bridge by forming DC voltage；The DC voltage is power amplifier module
Power supply, power amplifier module is the adjustable radio-frequency current of power output.
2. a kind of radio-frequency signal generator as claimed in claim 1 controls circuit, it is characterised in that the control module includes ARM chips
And fpga chip, for controlling DDS circuit, fpga chip to converter module for sending waveform signal for ARM chips.
3. a kind of radio-frequency signal generator as claimed in claim 2 controls circuit, it is characterised in that the fpga chip is connected with detection electricity
Road, power amplifier module forms closed-loop control by detecting circuit to fpga chip feedback power signal.
4. a kind of radio-frequency signal generator as claimed in claim 2 controls circuit, it is characterised in that be connected with display on the ARM chips
Keystroke interface, parameter setting interface, monitoring variable AD Sampling Interfaces and communication interface.
5. a kind of radio-frequency signal generator, including control module, converter module and power amplifier module, it is characterised in that the equipment hair
Raw device includes power module, and the three-phase electricity of electric power source pair of module input is processed and is other module for power supply；
The control module is provided with DDS circuit and comparator, and DDS circuit produces radiofrequency sinusoidal signal, radiofrequency sinusoidal signal to pass through
Comparator is converted to square-wave signal and is transported to power amplifier module；
Control module connects converter module, and control module control converter module produces two-way unipolarity waveform, converter mould
Block after two-way unipolarity addition of waveforms, treatment to forming DC voltage；The DC voltage is powered for power amplifier module, power amplifier module
That is the adjustable radio-frequency current of power output；
Power amplifier module is connected with measurement module, and measurement module measures the power output of power amplifier module, and feeds back to control module；
Control module is also associated with display device and human-computer interaction device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710078057.7A CN106873712B (en) | 2017-02-14 | 2017-02-14 | Radio frequency generator control circuit and radio frequency generator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710078057.7A CN106873712B (en) | 2017-02-14 | 2017-02-14 | Radio frequency generator control circuit and radio frequency generator |
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| Publication Number | Publication Date |
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| CN106873712A true CN106873712A (en) | 2017-06-20 |
| CN106873712B CN106873712B (en) | 2021-03-02 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201710078057.7A Active CN106873712B (en) | 2017-02-14 | 2017-02-14 | Radio frequency generator control circuit and radio frequency generator |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116170932A (en) * | 2023-02-17 | 2023-05-26 | 上海励兆科技有限公司 | Radio frequency plasma source supporting pulse monitoring function |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102055438A (en) * | 2010-11-16 | 2011-05-11 | 北京航天测控技术开发公司 | High-speed square wave generating device and method |
| CN104767374A (en) * | 2015-03-30 | 2015-07-08 | 中国石油天然气集团公司 | High-power signal emission control method based on DDS |
| CN104917390A (en) * | 2015-05-16 | 2015-09-16 | 常德立欣电子科技股份有限公司 | Special switching transformer for computer |
-
2017
- 2017-02-14 CN CN201710078057.7A patent/CN106873712B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102055438A (en) * | 2010-11-16 | 2011-05-11 | 北京航天测控技术开发公司 | High-speed square wave generating device and method |
| CN104767374A (en) * | 2015-03-30 | 2015-07-08 | 中国石油天然气集团公司 | High-power signal emission control method based on DDS |
| CN104917390A (en) * | 2015-05-16 | 2015-09-16 | 常德立欣电子科技股份有限公司 | Special switching transformer for computer |
Non-Patent Citations (1)
| Title |
|---|
| 严博文: "电外科射频能量发生器控制系统的研制", 《中国优秀硕士学位论文全文数据库》 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116170932A (en) * | 2023-02-17 | 2023-05-26 | 上海励兆科技有限公司 | Radio frequency plasma source supporting pulse monitoring function |
| CN116170932B (en) * | 2023-02-17 | 2024-02-13 | 上海励兆科技有限公司 | Radio frequency plasma source supporting pulse monitoring function |
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| CN106873712B (en) | 2021-03-02 |
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Effective date of registration: 20200421 Address after: 100176 No. 8 Wenchang Avenue, Beijing economic and Technological Development Zone, Beijing, Daxing District Applicant after: BEIJING NAURA MICROELECTRONICS EQUIPMENT Co.,Ltd. Address before: 100000 No. 26, Tianzhu Road, A District, Tianzhu Airport Industrial Zone, Beijing, Shunyi District Applicant before: Beijing BBEF Science & Technology Co.,Ltd. |
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Effective date of registration: 20240719 Address after: 100176 4s01, 4th floor, building 1, No.8 courtyard, Wenchang Avenue, Beijing Economic and Technological Development Zone, Daxing District, Beijing Patentee after: Beijing Huacheng Electronics Co.,Ltd. Country or region after: China Address before: 100176 Beijing Daxing District Beijing economic and Technological Development Zone Wenchang Road 8 Patentee before: BEIJING NAURA MICROELECTRONICS EQUIPMENT Co.,Ltd. Country or region before: China |
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