CN106872413B - Coaxial interference surface plasma microscopic method and system based on pupil modulation - Google Patents
Coaxial interference surface plasma microscopic method and system based on pupil modulation Download PDFInfo
- Publication number
- CN106872413B CN106872413B CN201710251257.8A CN201710251257A CN106872413B CN 106872413 B CN106872413 B CN 106872413B CN 201710251257 A CN201710251257 A CN 201710251257A CN 106872413 B CN106872413 B CN 106872413B
- Authority
- CN
- China
- Prior art keywords
- pupil
- surface plasma
- focal plane
- microcobjective
- function
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/55—Specular reflectivity
- G01N21/552—Attenuated total reflection
- G01N21/553—Attenuated total reflection and using surface plasmons
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/55—Specular reflectivity
- G01N21/552—Attenuated total reflection
- G01N21/553—Attenuated total reflection and using surface plasmons
- G01N21/554—Attenuated total reflection and using surface plasmons detecting the surface plasmon resonance of nanostructured metals, e.g. localised surface plasmon resonance
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Nanotechnology (AREA)
- Engineering & Computer Science (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
The invention discloses a kind of coaxial interference surface plasma microscopic methods and system based on pupil modulation, including what is be sequentially arranged along optical path: linear polarization illumination coherent source expands projection arrangement, spatial light modulator, sample clamping and micro-nano mobile platform, high-NA microcobjective, imaging lens group, the imaging optical path for being copolymerized burnt diaphragm and imaging sensor composition.During sample defocus, burnt interference signal i.e. V (z) curve is copolymerized with detecting on the imaging sensor of the focal plane conjugation of microcobjective.There is the period of V (z) curve and influence in marginal interference effect and background noise as caused by system clear aperature is limited, the present invention eliminates its influence by the way of modulating using back focal plane pupil function.This system has many advantages, such as simple system, at low cost, high s/n ratio and can be realized high-resolution imaging.
Description
Technical field
The present invention relates to nanocomposite optical detection field more particularly to a kind of coaxial interference tables based on the modulation of back focal plane pupil
Surface plasma microscopic method.
Background of invention
Surface plasma (Surface Plasmon Resonance, SPR) is a kind of along metal and dielectric surface biography
The electromagnetic wave broadcast, it is very sensitive to the refractive index of metal and electrolyte and the variation of thickness, can be to subcellular structure, Ya Na
The result that film, macromolecular structure, molecule and the interaction of molecule etc. of rice magnitude are detected, and detected, which has, to be protruded
Accuracy, stability and high duplication, be widely used in the fields such as chemistry, medical treatment, biology, semiconductor material, information.
The technology is disadvantageous in that its lateral resolution is limited by the spread length of SPR wave, usually in more than ten a microns, is much larger than
The diffraction limit of conventional optical system, that is, half-wavelength magnitude, typical system are lens type SPR microscopic systems.Microcobjective SPR
Incident light can strictly be focused on the focus of submicron-scale and excite SPR in the local scope of focus by detection system, real
The lateral resolution of existing submicron-scale.Microcobjective SPR detection system has interference formula and two kinds of non-interfering formula at present, wherein doing
Interferometric SPR microscopic system can detect the phase of spr signal with sample message, can effectively weaken conventional non-
The problem of lateral resolution and axial sensitivity of interference SPR microscopic system are runed counter to, realizes better lateral resolution and letter
It makes an uproar and compares, the invention belongs to interference SPR microscopic systems, and the excitation of SPR is realized using microcobjective.
It is compared to currently used both arms differential interferometry formula SPR microscopic system, the present invention still uses V (z) theory,
The difference is that present invention employs coaxial interference method, can be effectively reduced the influence of environmental noise, and system it is simple,
At low cost, easy industrial application.For in interference SPR microscopic system, since the limited bring of the numerical aperture of system is logical
Light aperture edge effect corresponding system noise on V (z) curve with it, the invention proposes one kind in microcobjective back focal plane
Or the system noise that the invalid background noise of incident light, edge effect are brought using pupil modulation function in its conjugate planes, with
And angular polarization incident light bring background noise is effectively filtered out.The present invention simple, high s/n ratio, high score with system
Resolution, it is at low cost the advantages that, can be realized lateral resolution and axial resolution respectively in the height of half-wavelength and sub-nanometer scale
Micro- resolution imaging.
Summary of the invention
(1) technical problems to be solved
Current interference SPR microscopic system complexity is high, signal-to-noise ratio is low, and brings since the numerical aperture of system is limited
Clear aperature edge effect and incident light in invalid background can generate a series of system interference so that system complex,
At high cost, harsh to environmental requirement and detection accuracy is lower.
(2) technical solution
In order to solve the above-mentioned technical problems, the present invention provides a kind of coaxial interference surface plasmons based on pupil modulation
Microscopic method and system are mainly formed by including lighting system, sample clamping with micro-nano mobile platform, imaging system three parts.
Wherein lighting system is for illuminating sample, including coherent illumination source, polarization modulating arrangement, expands dress
It sets, spatial light modulator, projection arrangement.The polarization state of lighting source can be adjusted in polarization regulating device, obtain polarization side
To the linearly polarized photon along specific direction, polarizing regulating device is usually to be made of the polarizer and half slide.Expand device by
Even number lens composition, can expand the radius of incident light, with the clear aperature full of system microcobjective and can meet surface
The requirement of the excitation angle of plasma.The back focal plane of spatial light modulator and microcobjective conjugation, for the wave to incident light
Before be modulated.Projection arrangement is made of even number lens, is conjugated for meeting spatial light modulator and microcobjective back focal plane.
Sample clamping and micro-nano mobile platform, including sample clamping device, print and micro-nano motion scan device.
Imaging system is used to acquire the signal near microcobjective focal plane, including microcobjective, imaging lens group, copolymerization coke
Diaphragm and imaging sensor.Imaging sensor photosurface, the focal plane of microcobjective and the burnt diaphragm of copolymerization are conjugated, in imaging optical path
Light beam is acquired through microcobjective, odd number imaging len and after being copolymerized burnt diaphragm by imaging sensor.
Reference arm and signal arm are located in the same beam optical path of imaging optical path, and wherein reference arm is located at the center of incident beam,
Signal arm is the surface plasma wave that incident light is generated in sample surfaces, and imaging sensor can be to sample to be tested near focal point
The interference signal of reference arm and signal arm is detected when mobile.During sample defocus, in the effect for being copolymerized burnt diaphragm
Under only the reference arm of system surface plasma wave corresponding with the sample sent out on the focal plane of microcobjective and its conjugate planes
Raw interference, imaging sensor record the interference effect i.e. V (z) curve in its conjugate planes.
Spatial light modulator is by adding pupil function on microcobjective back focal plane or its conjugate planes, to incident beam
Wavefront is modulated.Pupil function is blurred incident light edge, filters out the noise of edge effect generation.Further
, the pupil function can be taken as that the light of excitating surface plasma approximate angle and incident light center is only allowed to be used as ginseng
The light beam examined passes through, and filters out a large amount of background noise.Further, pupil function can be taken as the two-dimensional surface on back focal plane
Light intensity is most strong in polarization direction (i.e. radial direction of polarisation) in the corresponding two-dimentional annulus in plasma exciatiaon angle, vertical polarization side
Light intensity is most weak on (i.e. angular polarization direction), filter out in incident light can not excitating surface plasma phenomenon it is angular partially
Shake light bring background noise.
Above-mentioned technical proposal of the invention has the following advantages:
1. providing a kind of high-precision microscopic detection method, laterally and axially resolution ratio is respectively in sub-micron and sub-nanometer
Magnitude, and the two not mutual interference；
2. system structure is simple, used optical device is few, at low cost；
3. eliminating the frequency modulation(PFM) in the micro- method of both arms interference surface plasma；
4. the signal-to-noise ratio of system improves, the requirement to environment is reduced, solve must under harsh experiment condition ability
The problem of realization；
5. can targetedly be carried out to the edge effect under different numerical apertures effective by the way of pupil modulation
Filter out；
Suitable pupil modulation function is selected to be filtered 6. can according to need the noise type filtered out.
Detailed description of the invention
Fig. 1 is a kind of structural schematic diagram of coaxial interference surface plasma microscopic system based on pupil modulation；
Fig. 2 is the schematic diagram of coaxial interference surface plasma microscopic system；
Fig. 3 is the structural schematic diagram for being copolymerized burnt diaphragm；
Fig. 4 is two-dimensional surface plasma back focal plane light beam sectional drawing；
Fig. 5 is the pupil function one that use space optical modulator is added in microcobjective back focal plane；
Fig. 6 is the pupil function two that use space optical modulator is added in microcobjective back focal plane；
Fig. 7 is the pupil function three that use space optical modulator is added in microcobjective back focal plane；
Fig. 8 is V (z) curve graph scanned when pupil function is not added；
Fig. 9 is V (z) curve graph scanned when being modulated using pupil function one；
Figure 10 is V (z) curve graph scanned when being modulated using pupil function two.
Figure 11 is V (z) curve graph scanned when being modulated using pupil function three.
Figure 12 is coaxial interference surface plasma microscopic system scanning imagery schematic diagram.
Wherein in Fig. 1: 1 is laser emitter, and 2 be polarization modulating arrangement, and 3 be expand device, and 4 be spatial light modulator, 5
It is Amici prism for projecting lens, 6,7 be microcobjective, and 8 be surface plasma print to be measured, and 9 be imaging lens group, and 10 are
It is copolymerized burnt diaphragm, 11 be imaging sensor.
In Fig. 2: 9 be imaging lens group, and 10 is are copolymerized burnt diaphragm, and 11 be imaging sensor, and 12 be system noise, and 13 be letter
Number arm, 14 be reference arm, and 15 be background noise, and 701 be microcobjective, and 702 be microcobjective matching oil, and 801 be glass, 802
It is print to be detected for nano-Au films, 803.
In Fig. 3: 1001 be virtual aperture, and 1002 be focal boundary.
In Fig. 4: (a) direction is radial direction, and (b) direction is angular orientation.
Specific embodiment
With reference to the accompanying drawings and examples, specific embodiments of the present invention will be described in further detail.Following instance
For illustrating the present invention, but it is not intended to limit the scope of the invention.
Specific embodiment 1: a kind of coaxial interference surface plasma of back focal plane pupil modulation described in present embodiment
Body microscopic system, it includes: laser emitter (1), polarization modulating arrangement (2), expand device (3), spatial light modulator (4),
Projecting lens (5), Amici prism (6), microcobjective (7), surface plasma print (8) to be measured, imaging lens group (9), altogether
It focuses diaphragm (10), imaging sensor (11).
Laser emitter (1), polarization modulating arrangement (2), expand device (3), spatial light modulator (4), projecting lens
(5), the center of Amici prism (6) is located in same optical axis；Microcobjective (7), surface plasma print (8) to be measured, imaging
Lens group (9) is copolymerized burnt diaphragm (10), imaging sensor (11).In same optical axis.
Polarization modulating arrangement (2) is generally made of half slide and the polarizer, the photosurface of imaging sensor (11) with it is micro-
Object lens focal plane conjugation.The focal plane for being copolymerized burnt diaphragm (10) and microcobjective is conjugated.
System is illuminated using laser, and output light is linear polarization, and polarization modulating arrangement (2) can be to the polarization of output light
Direction is adjusted, and expand device (3) expands to be full of the numerical aperture of microcobjective laser.By spectroscopical anti-
After penetrating, the laser after expanding is focused on sample surfaces by microcobjective (7).
Spatial light modulator (4) is conjugated by the back focal plane of projecting lens (5) and microcobjective (7), in back focal plane
On the wavefront of incident light is modulated.
Imaging sensor (11) is located in the focal plane conjugate planes of microcobjective.The print of this system is fixed on micro-nano movement and sweeps
On imaging apparatus, gradually moved along microcobjective central axis from microcobjective focal plane side by control micro-nano motion scan device
Focal point is realized to the other side.Micro-nano motion scan device is aobvious from being gradually moved to close to microcobjective side in scanning process
Microcobjective is moved away from again on speck mirror focal plane.Imaging sensor (11) when during scanning close to microcobjective side
On collect minus half axis information of V (z) curvilinear coordinate axis, collect V (z) on microcobjective position of focal plane imaging sensor (11)
Information at curvilinear coordinate axis zero point collects on imaging sensor (11) when passing through focal plane and moving away from microcobjective side
V (z) curvilinear coordinate axis positive axis information.Microscopic system, which directly scans, obtains V (z) curve as shown in figure 8, wherein curve positive axis
V (z) curve fluctuation be as the limited numerical aperture of microcobjective and caused by edge effect, the present invention is in microcobjective
Adding in the conjugate planes of back focal plane influences brought by pupil function processing edge effect and background noise.To filter out edge effect
The noise and system noise of generation, pupil function chooses pupil function one, pupil function two and pupil function three in example.
The function of pupil function one radially may be expressed as:
In formula, r is that independent variable represents radius, is less than r1Or it is greater than r2Regional Representative's surface plasma excitation angle near
Light beam,Value be respectively gather [- n0,0]、[0,n0], respectively represent two and half Gaussian window letters of function two sides
Part is counted, wherein n0Value is positive integer, and physical meaning is excitation angle nearby light beam and incident light central light beam gaussian passband
Width, value is bigger, and the passband that represents is wider, otherwise narrower.The value of a represents edge sharpening degree, the smaller edge of a value
It is more sharp, on the contrary more mitigate, and value is neglected greatly depending on the effect of edge blurry.Pupil function one is taken in example as shown in figure 5,
V (z) curve obtained using this function as the pupil function on back focal plane is as shown in figure 9, by side after the modulation of pupil function one
Edge noise causes disturbance to disappear.
In order to further increase the signal-to-noise ratio of system, pupil function two can be used, as shown in fig. 6, in addition to filtering out edge
The noise that effect generates, has also filtered out the invalid background noise in incident light.The function of pupil function two radially may be expressed as:
In formula, r is that independent variable represents radius, and radius is less than r1Or it is greater than r2Regional Representative's surface plasma excite angle
Neighbouring light beam is greater than r3And it is greater than r4Region be incident light central part,Value be set [- n0,n0]、[-
n1,n1], respectively represent two Gauss functions of function two side areas and the Gauss function at center, n0、n1Value is positive
Integer, physical meaning are to excite the angle width of light beam and incident light central light beam gaussian passband nearby, and bigger represent of value is led to
Band is wider, otherwise narrower.The value of a represents edge sharpening degree, and the smaller edge of a value is more sharp, otherwise more mitigates, and takes
Value is neglected greatly depending on the effect of edge blurry.Pupil function two is taken in example as shown in fig. 6, on using this function as back focal plane
V (z) curve that pupil function obtains is as shown in Figure 10.
On the basis of the above, it makes an uproar to filter out background caused by the angular polarization component that can not excite spr signal in incident light
Sound designs pupil function three, it is characterized in that the component on incident light on angular polarization direction is filtered out, function is as shown in Figure 7.
Pupil function three is distributed identical, angle of incident light pupil in polarized component with pupil function two in incident light radial polarisation component
Function three only has one wave crest of central light beam.V (z) curve obtained using pupil function three as the pupil function on back focal plane is such as
Shown in Figure 11.Shown curve positive axis is smooth, and the influence of edge effect is eliminated, and signal-to-noise ratio is obviously improved.
The period of waves of V (z) curve and the optimal excitation angle θ of SPRspRelationship is as follows:
Wherein n is the refractive index of microcobjective, and λ is the wavelength of incident light in a vacuum.Optimal excitation angle θspIt uniquely determines
Sample is in the thickness of the point or the disturbance of refractive index.By being scanned to the difference on sample to be tested, its V is respectively obtained
(z) curve calculates separately the period of difference, and the Surface Microtexture of sample can be obtained.
Specific embodiment 2: the system of present embodiment is arranged as described in specific embodiment one, but this reality
The mode of applying provides the method that the Surface Microtexture of a kind of pair of sample quickly scans.
As shown in Figure 12, two V (z) curve difference maximum points are selected, control micro-nano motion scan device fixes it
At this moment defocus distance carries out two-dimensional scanning to sample to be tested, the Surface Microtexture of sample to be tested can be obtained.Present embodiment can
Can control the contrast of imaging by selecting different defocus distances.
Claims (7)
1. a kind of coaxial interference surface plasma microscopic method based on the modulation of back focal plane pupil, which is characterized in that including edge
What optical path was sequentially arranged:
Illumination path, for being illuminated to sample, including coherent illumination source, polarization modulating arrangement, expand device, spatial light
Modulator, projection arrangement, Amici prism；
Sample clamping and micro-nano mobile platform, including sample clamping device, surface plasma print and micro-nano motion scan dress
It sets；
Imaging optical path, for acquiring the signal near microcobjective focal plane, including microcobjective, imaging lens group, the burnt light of copolymerization
Door screen and imaging sensor；
Imaging sensor photosurface is copolymerized burnt diaphragm respectively with the focal plane of microcobjective conjugation, and imaging sensor can be to surface etc.
Gas ions print interference signal of reference arm and signal arm when near focal point is mobile is detected；
The coherent illumination source, polarization modulating arrangement, expand device, spatial light modulator, projection arrangement, in Amici prism
The heart is located in same optical axis；
The microcobjective, surface plasma print, imaging lens group are copolymerized burnt diaphragm, and imaging sensor is located at same light
On axis；
The coaxial interference surface plasma microscopic method based on pupil modulation, feature also also reside in, the spatial light
The back focal plane of modulator and microcobjective conjugation, for being modulated on back focal plane to the wavefront of incident light, in spatial light tune
Pupil function one, pupil function two and pupil function three are chosen on device processed carries out pupil modulation,
The function expression of pupil function one radially are as follows:
In formula, r is the radius that independent variable represents pupil, is less than r1Or it is greater than r2Regional Representative's pupil on light beam can excite table
The region of surface plasma,Value be respectively gather [- n0,0]、[0,n0], respectively represent two of function two sides
Half Gauss function part, wherein n0Value is positive integer, and physical meaning is that surface plasma excites light where Angle Position
The value of the width of beam and incident light central light beam gaussian passband, a determines edge sharpening degree；
The function expression of pupil function two radially are as follows:
In formula, r is the radius that independent variable represents pupil, and radius is less than r1Or it is greater than r2Regional Representative's pupil on light beam can swash
The sharp region of surface plasma is delivered, r is greater than3And it is greater than r4Region be incident light central part, Value be collection
Close [- n0,n0]、[-n1,n1], two Gauss functions of function two side areas and the Gauss function at center are respectively represented,
n0、n1Value is positive integer, and physical meaning is that light beam where surface plasma excites Angle Position and incident light central light beam are high
The value of the width of stone band, a determines edge sharpening degree；
Pupil function three is designed, pupil function three is distributed identical with pupil function two in incident light radial polarisation component, special
Sign is that the component in angle of incident light on polarization direction can be made to be filtered out.
2. a kind of coaxial interference surface plasma microscopic method based on the modulation of back focal plane pupil as described in claim 1,
It is characterized in that, the polarization state of lighting source can be adjusted in the polarization regulating device.
3. a kind of coaxial interference surface plasma microscopic method based on the modulation of back focal plane pupil as described in claim 1,
It is characterized in that, the expand device is made of even number lens, the radius of incident light can be expanded, to be full of the micro- object of system
The clear aperature of mirror and meet surface plasma excitation angle requirement.
4. a kind of coaxial interference surface plasma microscopic method based on the modulation of back focal plane pupil as described in claim 1,
It is characterized in that, the focal plane of imaging sensor photosurface, microcobjective and the burnt diaphragm of copolymerization are conjugated, light beam warp in imaging optical path
After microcobjective, odd number imaging len and the burnt diaphragm of copolymerization, acquired by imaging sensor.
5. a kind of coaxial interference surface plasma microscopic method based on the modulation of back focal plane pupil as described in claim 1,
It is characterized in that designed pupil function to meet the light beam met near surface plasma excitation angle in incident beam
And the light beam of incident light immediate vicinity passes through.
6. a kind of coaxial interference surface plasma microscopic method based on the modulation of back focal plane pupil as described in claim 1,
It is characterized in that, the reference arm and signal arm are located at same beam optical path, wherein reference arm is located at the center of incident beam, signal
Arm is the surface plasma wave that incident light is generated in the sample surface.
7. a kind of coaxial interference surface plasma microscopic method based on the modulation of back focal plane pupil as described in claim 1,
It is characterized in that, during the print defocus, the only reference arm of system and the sample under the action of being copolymerized burnt diaphragm
The corresponding surface plasma wave of piece interferes on the focal plane of microcobjective and its conjugate planes, and imaging sensor is in its conjugation
The interference effect i.e. V (z) curve is recorded on face.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710251257.8A CN106872413B (en) | 2017-04-18 | 2017-04-18 | Coaxial interference surface plasma microscopic method and system based on pupil modulation |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710251257.8A CN106872413B (en) | 2017-04-18 | 2017-04-18 | Coaxial interference surface plasma microscopic method and system based on pupil modulation |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106872413A CN106872413A (en) | 2017-06-20 |
| CN106872413B true CN106872413B (en) | 2019-09-17 |
Family
ID=59163068
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710251257.8A Expired - Fee Related CN106872413B (en) | 2017-04-18 | 2017-04-18 | Coaxial interference surface plasma microscopic method and system based on pupil modulation |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106872413B (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107643268A (en) * | 2017-09-15 | 2018-01-30 | 北京航空航天大学 | A kind of surface plasma nano sensing device excited using microcobjective |
| CN107703104A (en) * | 2017-09-30 | 2018-02-16 | 北京航空航天大学 | Wavelength modulation system surface plasma microscope equipment based on microcobjective |
| CN111257295A (en) * | 2019-11-14 | 2020-06-09 | 江苏省医疗器械检验所 | High-resolution differential confocal imaging system and imaging method based on radial polarized light |
| CN111257294A (en) * | 2019-11-14 | 2020-06-09 | 江苏省医疗器械检验所 | High-resolution differential confocal imaging system and imaging method based on tangential polarized light |
| CN111257293A (en) * | 2019-11-14 | 2020-06-09 | 江苏省医疗器械检验所 | Confocal imaging system and method based on radial polarized light |
| CN114659461B (en) * | 2020-12-23 | 2024-02-09 | 中国科学院微电子研究所 | Over-focus scanning optical microscopic imaging device and method based on pulse laser |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103718038A (en) * | 2011-05-29 | 2014-04-09 | 韩国化学研究院 | High-speed screening apparatus for a raman analysis-based high-speed multiple drug |
| CN103929151A (en) * | 2014-04-21 | 2014-07-16 | 北京航空航天大学 | Design method for self-adaptation optimal phase angle notch filter |
| EP2993460A1 (en) * | 2013-05-30 | 2016-03-09 | Osaka Prefecture University Public Corporation | Target-substance detection apparatus and method |
| CN105628655A (en) * | 2015-12-24 | 2016-06-01 | 温州生物材料与工程研究所 | Optical microscope based on surface plasma resonance |
-
2017
- 2017-04-18 CN CN201710251257.8A patent/CN106872413B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103718038A (en) * | 2011-05-29 | 2014-04-09 | 韩国化学研究院 | High-speed screening apparatus for a raman analysis-based high-speed multiple drug |
| EP2993460A1 (en) * | 2013-05-30 | 2016-03-09 | Osaka Prefecture University Public Corporation | Target-substance detection apparatus and method |
| CN103929151A (en) * | 2014-04-21 | 2014-07-16 | 北京航空航天大学 | Design method for self-adaptation optimal phase angle notch filter |
| CN105628655A (en) * | 2015-12-24 | 2016-06-01 | 温州生物材料与工程研究所 | Optical microscope based on surface plasma resonance |
Non-Patent Citations (1)
| Title |
|---|
| 《共轴共聚焦干涉式表面等离子体显微成像技术》;张蓓等;《北京航空航天大学学报》;20161205;第43卷(第7期);正文第1330-1333页 |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106872413A (en) | 2017-06-20 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN106872413B (en) | Coaxial interference surface plasma microscopic method and system based on pupil modulation | |
| CN109477955B (en) | Interference scattering microscope | |
| CN106290284B (en) | Two-photon fluorescence microscope system and method with structured light illumination | |
| CN109141224B (en) | Interference reflection type optical thin film microscopic measurement method based on structured light | |
| CN107490562B (en) | Ultra-high-speed three-dimensional refractive index image shooting and fluorescent structured light illuminating microscope system using wave surface shaper and using method thereof | |
| CN112229847A (en) | High-resolution automatic detection device and method for surface defects of optical element | |
| CN108801475A (en) | A kind of wavefront sensing methods based on spatial frequency domain reference | |
| EP3532822B1 (en) | Trans-illumination imaging with use of interference fringes to enhance contrast and find focus | |
| CN108956571B (en) | Calibration method and device based on error of included angle between ccd target surface and installation positioning surface of leakage radiation imaging | |
| CN208833665U (en) | A kind of CCD target surface calibrating apparatus for fixing based on compromising emanation imaging | |
| CN106841122B (en) | A kind of coaxial interference surface plasma microscopic method and system for exempting from pupil modulation | |
| CN113175894A (en) | Object surface three-dimensional shape white light interferometry device and method | |
| CN109238131A (en) | A kind of optical coherence tomography method and system of transverse direction super-resolution | |
| CN209264563U (en) | A kind of refractive index micrometering system | |
| WO2007121175A2 (en) | High-resolution optical imager | |
| US20230185067A1 (en) | Methods and apparatus for optimised interferometric scattering microscopy | |
| US8829415B2 (en) | Correlation confocal microscope | |
| CN109142273A (en) | A kind of refractive index micrometering system | |
| CN1310023C (en) | Three-differential focasing micro-three-dimensional super-resolution imaging method | |
| CN1261791C (en) | Shaping circular light three differential confocal microscope | |
| CN212229317U (en) | Non-mechanical scanning structured light microscopic three-dimensional imaging system | |
| CN111815544B (en) | Digital holographic spectrum center sub-pixel searching method | |
| CN110261320B (en) | Method and device for fluorescence staggered differential microscopic imaging | |
| CN107703104A (en) | Wavelength modulation system surface plasma microscope equipment based on microcobjective | |
| Kim et al. | Magnification-invariant surface profiling technique for structured illumination imaging and microscopy |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20190917 Termination date: 20200418 |