CN106865487A - Liquid injection type superslide surface and its laser accurate micro-processing method - Google Patents
Liquid injection type superslide surface and its laser accurate micro-processing method Download PDFInfo
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- CN106865487A CN106865487A CN201710017934.XA CN201710017934A CN106865487A CN 106865487 A CN106865487 A CN 106865487A CN 201710017934 A CN201710017934 A CN 201710017934A CN 106865487 A CN106865487 A CN 106865487A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C99/00—Subject matter not provided for in other groups of this subclass
- B81C99/0005—Apparatus specially adapted for the manufacture or treatment of microstructural devices or systems, or methods for manufacturing the same
- B81C99/0025—Apparatus specially adapted for the manufacture or treatment of microstructural devices or systems not provided for in B81C99/001 - B81C99/002
Abstract
The present invention relates to a kind of liquid injection type superslide surface and its laser accurate micro-processing method, belong to technical field of function materials.Liquid injection type superslide surface of the invention is using metal as substrate, first micro-nano compound structure is prepared by the way of laser ablation in metal surface, super hydrophobic surface is obtained by baking, then injection liquid is covered in super hydrophobic surface, obtain liquid injection type superslide surface.Test droplets include water droplet, acid solution, aqueous slkali, lake water, seawater, serum, glycerine and catsup, liquid injection type superslide surface of the invention has very little frictional resistance, and can be easy to be slid on surface, reduce the holdup times and probability of the test liquid on surface such as water droplet.Liquid injection type superslide surface laser super micro-processing method of the invention prepares micro-nano compound structure using laser precision machining technology in metal surface, technological process is simple to operation, without other chemical addition agents, have no toxic side effect and pollute, it is adaptable to mass produce on a large scale.
Description
Technical field
The present invention relates to technical field of function materials, and in particular to a kind of liquid injection type superslide surface and its laser accurate
Micro-processing method.
Background technology
2011, the Aizenberg seminars of Harvard University were subject to common nepenthes using the smooth limb edge predation of pitcher
The inspiration of insect, proposes the concept that easy synovia body injects porous surface, also referred to as superslide surface for the first time.It is loose by preparing
Porous substrate simultaneously irrigates lubricating oil, obtains the superslide surface of dynamic oil film covering.It is traditional due to being replaced with liquid-liquid interface
Solid-liquid interface, the drop that the roughness of contact surface is reduced in molecule rank, therefore superslide surface can be with the roll angle of very little
Roll.This is similar with the same super hydrophobic surface with low roll angle characteristic, but the defect of super hydrophobic surface is that surface can be compared with
Surface micro-nano structure can be immersed during the low liquid such as contact such as hexadecane, phenyl silicone oil super hydrophobic surface, and additional disadvantage is that
There is the possibility of destruction surface micro-nano structure when drop is with certain kinetic energy impact surface, be also easier to immerse the micro-nano knot on surface
Structure, so as to cause the failure of super-hydrophobic state.In addition easily degenerate or be stained with after low surface energy coat or chemical group long-term use
Dirt, such as can produce protein and other adsorb and cause on the surface low-surface-energy degeneration when bacterium contacts with surface,
So as to lose super lyophoby performance.
Superslide surface is substantially that the air in super lyophoby surface micro-nano structure is instead of with the oil filled in micro-nano structure,
Low-energy liquid also can with less angle in superslide surface scrolls without being immersed in substrate gap.Stick and oneself except low
Cleaning, after superslide surface damage can also selfreparing because the lubricating oil on superslide surface can flow under capillary action
To fill cut space.Because superslide surface has above many advantages, it is in liquid drop control, fluid transport, anti-freeze, antibacterial
Great advantage and application prospect are shown Deng field.
The content of the invention
It is an object of the invention to provide fast, the simple and convenient liquid injection type superslide surface of a kind of low cost, speed and its
Laser accurate micro-processing method.
To achieve these goals, technical scheme is specific as follows：
A kind of liquid injection type superslide surface, using metal as substrate, first in metal watch by the way of laser ablation
Face prepares micro-nano compound structure, and obtains super hydrophobic surface by baking, and injection liquid finally is covered in into super hydrophobic surface, enters
And obtain liquid injection type superslide surface.
In the above-mentioned technical solutions, the metal is stainless steel, aluminium alloy, brass or titanium alloy.
In the above-mentioned technical solutions, the injection liquid is silicone oil, rapeseed oil or olive oil.
In the above-mentioned technical solutions, the micro-nano compound structure is micron order mastoid process structure, and nanoscale fluff structures.
A kind of liquid injection type superslide surface laser super micro-processing method, comprises the following steps：
Step one：Metal sample surface is carried out into grinding process, is made its smooth and is removed oxide film dissolving；
Step 2：Metal sample after the grinding process that step one is obtained is cleaned in being placed on ultrasonic washing instrument, cleaning
After clean, the drying of metal sample cold wind or room temperature are dried naturally, obtain the metal sample of cleaning；
Step 3：Using laser processing technology, the clean metal sample for being obtained step 2 using short-pulse laser
Laser scanning treatment is carried out, micro-nano compound structure is prepared in metal surface；
Step 4：It is clear during the metal sample after Laser Processing is processed that step 3 is obtained is placed on into ultrasonic washing instrument
Wash, after cleaning up, be put into baking in constant temperature and humidity electrically heated drying cabinet, obtain super hydrophobic surface；
Step 5：Injection liquid is dropped on the super hydrophobic surface that step 4 is obtained, the final liquid note for obtaining stabilization
Enter type superslide surface.
In the above-mentioned technical solutions, step one is specially：Successively using 400 mesh, 1200 mesh and 2000 mesh sand paper to metal
Sample surfaces carry out grinding process, make its smooth and remove oxide film dissolving.
In the above-mentioned technical solutions, the metal sample after the grinding process for obtaining step one described in step 2 is placed on super
Cleaning is specially in sound wave cleaning device：First it is cleaned by ultrasonic with absolute ethyl alcohol, then is cleaned by ultrasonic with distilled water, is carried out respectively ultrasonic clear
10min is washed, its supersonic frequency is 20~40KHz, power bracket is 100~150W.
In the above-mentioned technical solutions, short-pulse laser wavelength described in step 3 is 570~1064nm, and mean power is small
In 300W, laser frequency is adjustable, and spacing is 10~100 μm.
In the above-mentioned technical solutions, the step 4 is specially：By step 3 obtain by Laser Processing treatment after
Metal sample is cleaned in being placed on ultrasonic washing instrument, first with washes of absolute alcohol, then is cleaned with distilled water, is cleaned respectively
10min, its supersonic frequency is 20~40KHz, and power bracket is 100~150W, and the metal sample is put into constant temperature and humidity electric heating
Baking in drying box, its drying temperature is 80 DEG C, and the time is 20min.
In the above-mentioned technical solutions, the step 5 is specially：It is super-hydrophobic by inject that liquid drops to that step 4 obtains
On surface, until super hydrophobic surface is all injected into liquid covering, and by the placement 2 hours of 20 ° of sample inclination, excess surface is removed
Injection liquid, the final liquid injection type superslide surface for obtaining stabilization.
The beneficial effects of the invention are as follows：
1) present invention provide liquid injection type superslide surface laser super micro-processing method, be by stainless steel, aluminium alloy,
The metal such as brass or titanium alloy prepares micro-nano compound structure, work using laser precision machining technology as substrate in metal surface
Skill flow is simple to operation, without other chemical addition agents, has no toxic side effect and pollutes, it is adaptable to mass produce on a large scale.
2) the liquid injection type superslide surface that the present invention is provided has excellent anti-sticking superslide characteristic, and test droplets include water
Drop, acid solution, aqueous slkali, lake water, seawater, serum, glycerine and catsup, it is easy to be slided on liquid injection type superslide surface
Fall, reduce holdup time and probability of the test liquid in liquid injection type superslide.
Brief description of the drawings
The present invention is described in further detail with reference to the accompanying drawings and detailed description.
The structural representation on the liquid injection type superslide surface that Fig. 1 is provided for the present invention；
Fig. 2 is the liquid injection type stainless steel superslide surface topography stereoscan photograph one of embodiment 1；
Fig. 3 is the liquid injection type stainless steel superslide surface topography stereoscan photograph two of embodiment 1.
Specific embodiment
The present invention is described in detail below in conjunction with the accompanying drawings.
The liquid injection type superslide surface laser super micro-processing method that the present invention is provided is comprised the following steps that：
Step one：Grinding process is carried out to metal sample surface using 400 mesh, 1200 mesh and 2000 mesh sand paper successively, is made
Its is smooth and removes oxide film dissolving；
Step 2：Metal sample after the grinding process that step one is obtained is cleaned in being placed on ultrasonic washing instrument, is first used
Washes of absolute alcohol, then cleaned with distilled water, cleaning 10min is carried out respectively, its supersonic frequency is 20~40KHz, power bracket
It is 100~150W, after cleaning up, the drying of sample cold wind or room temperature is dried naturally, obtains the metal sample of cleaning；
Step 3：Using laser processing technology, the clean metal sample for being obtained step 2 using short-pulse laser
Carry out laser scanning treatment；The sweep limits of laser, scanning track and process velocity are adjusted by computer program control and setting
Processing switch is clicked on after the good related technological parameter of section, starts processing, micro-nano compound structure is prepared in metal surface；The short arteries and veins
Laser wavelength is rushed for 570~1064nm, mean power is less than 300W, and laser frequency is adjustable, spacing is 10~100 μm；
Step 4：It is clear during the metal sample after Laser Processing is processed that step 3 is obtained is placed on into ultrasonic washing instrument
Wash, first with washes of absolute alcohol, then cleaned with distilled water, cleaning 10min is carried out respectively, its supersonic frequency is 20~40KHz, work(
Rate scope is 100~150W, after cleaning up, is put into baking in constant temperature and humidity electrically heated drying cabinet, and its drying temperature is 80 DEG C, when
Between be 20min, obtain super hydrophobic surface；
Step 5：The injection liquid such as silicone oil, rapeseed oil or olive oil is dropped on the super hydrophobic surface that step 4 is obtained,
Until super hydrophobic surface is all injected into liquid covering, and by 20 ° of sample inclination placement 2 hours, remove the injection of excess surface
Liquid, the final liquid injection type superslide surface for obtaining stabilization.
Experimental technique used in following embodiments is conventional method unless otherwise specified.
Material used, reagent etc. in following embodiments, unless otherwise specified, commercially obtain.
As shown in Figure 1, micro-nano compound structure is prepared in metal surface by the way of laser ablation first, is formed
Micro-nano compound structure is micron order mastoid process structure, and nanoscale fluff structures, and obtains super hydrophobic surface by baking, finally
Injection liquid is covered in super hydrophobic surface, and then obtains liquid injection type superslide surface.Liquid injection type superslide surface test
Liquid is water droplet, acid solution, aqueous slkali, lake water, seawater, serum, glycerine and catsup.Test result shows：Test liquid
It is easy to be slid on liquid injection type superslide surface, holdup time and probability of the test liquid on surface can be reduced.
Embodiment 1
The step of liquid injection type stainless steel superslide surface laser super micro-processing method, is as follows:
Step one：Stainless steel surfaces are polished using 400 mesh, 1200 mesh and 2000 mesh sand paper successively, makes its smooth
And remove oxide film dissolving；
Step 2：Stainless steel surfaces are successively placed in the ultrasonic washing instrument for filling absolute ethyl alcohol and deionized water clear
Wash, cleaning 10min is carried out respectively, supersonic frequency is 20~40KHz, and power bracket is 100~150W.After cleaning up, by institute
State the drying of stainless steel surfaces cold wind or room temperature is dried naturally, obtain the stainless steel surfaces of cleaning；
Step 3：Using laser processing technology, it is 570~1064nm laser beams to being obtained described in step one to use wavelength
Clean stainless steel sample carries out laser scanning manufacturing, and mean power is less than 300W；The sweep limits of laser, scanning track and add
Work speed clicks on processing switch by computer program control and setting after regulating the technological parameter of correlation, and laser frequency can
Adjust, spacing is respectively 10~100 μm, start processing.After process finishing, the stainless steel sample that taking-up is processed.In stainless steel watch
Uniform micron and nano composite structure (as shown in Figures 2 and 3) are formed on face；
Step 4：By described in step 3 by the stainless steel sample that obtains after Laser Processing treatment be successively placed on fill it is anhydrous
Cleaned in the ultrasonic washing instrument of ethanol and deionized water, cleaning 10min is carried out respectively, supersonic frequency is 20~40KHz, power
Scope is 100~150W, after cleaning up, is put into baking 20min in the constant temperature and humidity electrically heated drying cabinet that temperature is 80 DEG C；
Step 5：Silicone oil is dropped to the stainless steel sample coarse structure obtained after being processed through overbaking described in step 4,
Until surface is all injected into liquid covering, and by 20 ° of sample inclination placement 2 hours, the injection liquid of excess surface is removed, most
The liquid injection type stainless steel superslide surface of stabilization is obtained eventually.
Embodiment 2
The step of liquid injection type aluminium alloy superslide surface laser super micro-processing method, is as follows:
Step one：Aluminum alloy surface is polished using 400 mesh, 1200 mesh and 2000 mesh sand paper successively, makes its smooth
And remove oxide film dissolving；
Step 2：Aluminum alloy surface is successively placed in the ultrasonic washing instrument for filling absolute ethyl alcohol and deionized water clear
Wash, cleaning 10min is carried out respectively, supersonic frequency is 20~40KHz, and power bracket is 100~150W.After cleaning up, by institute
State the drying of aluminum alloy surface cold wind or room temperature is dried naturally, obtain the aluminum alloy surface of cleaning；
Step 3：Using laser processing technology, it is 570~1064nm laser beams to being obtained described in step one to use wavelength
Clean aluminium alloy sample carries out laser scanning manufacturing, and mean power is less than 300W；The sweep limits of laser, scanning track and processing
Speed clicks on processing switch by computer program control and setting after regulating the technological parameter of correlation, and laser frequency is adjustable,
Spacing is respectively 10~100 μm, starts processing.After process finishing, the aluminum alloy sample that taking-up is processed.In aluminum alloy surface
Form uniform micron and nano composite structure；
Step 4：By described in step 3 by the aluminum alloy sample that obtains after Laser Processing treatment be successively placed on fill it is anhydrous
Cleaned in the ultrasonic washing instrument of ethanol and deionized water, cleaning 10min is carried out respectively, supersonic frequency is 20~40KHz, power
Scope is 100~150W, after cleaning up, is put into baking 20min in the constant temperature and humidity electrically heated drying cabinet that temperature is 80 DEG C；
Step 5：Rapeseed oil is dropped to the coarse knot of aluminum alloy sample obtained after being processed through overbaking described in step 4
Structure, until surface is all injected into liquid covering, and by 20 ° of sample inclination placement 2 hours, removes the injection liquid of excess surface
Body, the final liquid injection type aluminium alloy superslide surface for obtaining stabilization.
Embodiment 3
The step of liquid injection type brass superslide surface laser super micro-processing method, is as follows:
Step one：Brass surfaces are polished using 400 mesh, 1200 mesh and 2000 mesh sand paper successively, makes its smooth simultaneously
Remove oxide film dissolving；
Step 2：Brass surfaces are successively placed on cleaning in the ultrasonic washing instrument for filling absolute ethyl alcohol and deionized water,
Cleaning 10min is carried out respectively, and supersonic frequency is 20~40KHz, and power bracket is 100~150W.After cleaning up, by the Huang
The cold wind drying of copper surface or room temperature are dried naturally, obtain the brass surfaces of cleaning；
Step 3：Using laser processing technology, it is 570~1064nm laser beams to being obtained described in step one to use wavelength
Clean Brass sample carries out laser scanning manufacturing, and mean power is less than 300W；The sweep limits of laser, scanning track and processing speed
Degree clicks on processing switch by computer program control and setting after regulating the technological parameter of correlation, and laser frequency is adjustable,
Away from respectively 10~100 μm, start processing.After process finishing, the Brass sample that taking-up is processed.Formed in brass surfaces equal
Even micron and nano composite structure；
Step 4：Anhydrous second is filled by being successively placed on by the Brass sample obtained after Laser Processing treatment described in step 3
Cleaned in the ultrasonic washing instrument of alcohol and deionized water, cleaning 10min is carried out respectively, supersonic frequency is 20~40KHz, power model
It is 100~150W to enclose, and after cleaning up, is put into baking 20min in the constant temperature and humidity electrically heated drying cabinet that temperature is 80 DEG C；
Step 5：Olive oil is dropped to the Brass sample coarse structure obtained after being processed through overbaking described in step 4,
Until surface is all injected into liquid covering, and by 20 ° of sample inclination placement 2 hours, the injection liquid of excess surface is removed, most
The liquid injection type brass superslide surface of stabilization is obtained eventually.
Embodiment 4
The step of liquid injection Type Titanium Alloy superslide surface laser super micro-processing method, is as follows:
Step one：Titanium alloy surface is polished using 400 mesh, 1200 mesh and 2000 mesh sand paper successively, makes its smooth
And remove oxide film dissolving；
Step 2：Titanium alloy surface is successively placed in the ultrasonic washing instrument for filling absolute ethyl alcohol and deionized water clear
Wash, cleaning 10min is carried out respectively, supersonic frequency is 20~40KHz, and power bracket is 100~150W.After cleaning up, by institute
State the drying of titanium alloy surface cold wind or room temperature is dried naturally, obtain the titanium alloy surface of cleaning；
Step 3：Using laser processing technology, it is 570~1064nm laser beams to being obtained described in step one to use wavelength
Clean titanium alloy sample carries out laser scanning manufacturing, and mean power is less than 300W；The sweep limits of laser, scanning track and processing
Speed clicks on processing switch by computer program control and setting after regulating the technological parameter of correlation, and laser frequency is adjustable,
Spacing is respectively 10~100 μm, starts processing.After process finishing, the titanium alloy sample that taking-up is processed.On titanium alloy surface
Form uniform micron and nano composite structure；
Step 4：By described in step 3 by the titanium alloy sample that obtains after Laser Processing treatment be successively placed on fill it is anhydrous
Cleaned in the ultrasonic washing instrument of ethanol and deionized water, cleaning 10min is carried out respectively, supersonic frequency is 20~40KHz, power
Scope is 100~150W, after cleaning up, is put into baking 20min in the constant temperature and humidity electrically heated drying cabinet that temperature is 80 DEG C；
Step 5：Silicone oil is dropped to the titanium alloy sample coarse structure obtained after being processed through overbaking described in step 4,
Until surface is all injected into liquid covering, and by 20 ° of sample inclination placement 2 hours, the injection liquid of excess surface is removed, most
The liquid injection Type Titanium Alloy superslide surface of stabilization is obtained eventually.
Obviously, above-described embodiment is only intended to clearly illustrate example, and not to the restriction of implementation method.It is right
For those of ordinary skill in the art, can also make on the basis of the above description other multi-forms change or
Change.There is no need and unable to be exhaustive to all of implementation method.And the obvious change thus extended out or
Among changing still in the protection domain of the invention.
Claims (10)
1. a kind of liquid injection type superslide surface, it is characterised in that it is using metal as substrate, first using laser ablation
Mode prepares micro-nano compound structure in metal surface, and obtains super hydrophobic surface by baking, is finally covered in injection liquid
Super hydrophobic surface, and then obtain liquid injection type superslide surface.
2. liquid injection type superslide surface according to claim 1, it is characterised in that the metal is that stainless steel, aluminium are closed
Gold, brass or titanium alloy.
3. liquid injection type superslide surface according to claim 1, it is characterised in that the injection liquid is silicone oil, dish
Seed oil or olive oil.
4. liquid injection type superslide surface according to claim 1, it is characterised in that the micro-nano compound structure is micron
Level mastoid process structure, and nanoscale fluff structures.
5. a kind of liquid injection type superslide surface laser super micro-processing method described in claim 1-4 any one, it is special
Levy and be, comprise the following steps：
Step one：Metal sample surface is carried out into grinding process, is made its smooth and is removed oxide film dissolving；
Step 2：Metal sample after the grinding process that step one is obtained is cleaned in being placed on ultrasonic washing instrument, is cleaned up
Afterwards, the drying of metal sample cold wind or room temperature are dried naturally, obtains the metal sample of cleaning；
Step 3：Using laser processing technology, the clean metal sample that step 2 is obtained is carried out using short-pulse laser
Laser scanning is processed, and micro-nano compound structure is prepared in metal surface；
Step 4：Cleaned what step 3 was obtained in the metal sample after Laser Processing treatment is placed on ultrasonic washing instrument,
After cleaning up, baking in constant temperature and humidity electrically heated drying cabinet is put into, obtains super hydrophobic surface；
Step 5：Injection liquid is dropped on the super hydrophobic surface that step 4 is obtained, the final liquid injection type for obtaining stabilization
Superslide surface.
6. liquid injection type superslide surface laser super micro-processing method according to claim 5, it is characterised in that step
One is specially：Grinding process is carried out to metal sample surface using 400 mesh, 1200 mesh and 2000 mesh sand paper successively, makes its smooth
And remove oxide film dissolving.
7. liquid injection type superslide surface laser super micro-processing method according to claim 5, it is characterised in that step
Metal sample after the grinding process for obtaining step one described in two is placed in ultrasonic washing instrument to clean and is specially：First use nothing
Water-ethanol be cleaned by ultrasonic, then with distilled water be cleaned by ultrasonic, ultrasonic cleaning 10min is carried out respectively, its supersonic frequency be 20~
40KHz, power bracket is 100~150W.
8. liquid injection type superslide surface laser super micro-processing method according to claim 5, it is characterised in that step
Short-pulse laser wavelength described in three is 570~1064nm, and mean power is less than 300W, and laser frequency is adjustable, and spacing is 10
~100 μm.
9. liquid injection type superslide surface laser super micro-processing method according to claim 5, it is characterised in that described
Step 4 is specially：It is clear during the metal sample after Laser Processing is processed that step 3 is obtained is placed on into ultrasonic washing instrument
Wash, first with washes of absolute alcohol, then cleaned with distilled water, cleaning 10min is carried out respectively, its supersonic frequency is 20~40KHz, work(
Rate scope is 100~150W, and the metal sample is put into baking in constant temperature and humidity electrically heated drying cabinet, and its drying temperature is 80 DEG C,
Time is 20min.
10. liquid injection type superslide surface laser super micro-processing method according to claim 5, it is characterised in that institute
Step 5 is stated to be specially：Injection liquid is dropped on the super hydrophobic surface that step 4 is obtained, until super hydrophobic surface whole quilt
Injection liquid covering, and by the placement 2 hours of 20 ° of sample inclination, remove the injection liquid of excess surface, the final liquid for obtaining stabilization
Body injection type superslide surface.
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