CN106863136A - CCOS glossing full frequency band converged paths planing methods - Google Patents

Abstract

The invention belongs to optical processing technology field, specially a kind of CCOS glossings full frequency band converged paths planing method.The step of the method, is as follows：The face shape error for being obtained according to removal function and detection first calculates process velocity distribution matrix, the primary iteration path in routing algorithm is determined further according to VELOCITY DISTRIBUTION matrix, and then constantly initial path is expanded by routing algorithm, processing polished path is obtained by iterating, it is final to generate control program according to the polishing path for obtaining and residence time matrix, CCOS polishings are carried out to workpiece to be processed.The invention has the advantages that can make lathe that rate stabilization is farthest kept when being moved along polishing path, so that processing Low Medium Frequency is able to more preferably restrain, Path selection when processing every time in addition is differed, and this is conducive to face shape intermediate frequency to restrain, and the two comprehensively causes that crudy is improved.

Description

CCOS glossing full frequency band converged paths planing methods

Technical field

The invention belongs to CCOS optical polish processing technique fields, specially one kind can effectively improve full frequency band convergence efficiency Polishing path planing method.

Background technology

In contemporary optics processing, it will usually process various light using the method for computer controlled optical surfacing (CCOS) Learn element.The general principle of CCOS is that the bistrique that diameter of work is much smaller than to use according to face shape error data passes through computer control The residence time for making its each dwell point on workpiece realizes the quantitative removal of face shape each point material.For CCOS glossings Road Footpath planning is a highly important ring, and material removal amount can be regarded as residence time square on processing removal function and machining path The convolution of battle array, therefore the selection of machining path can directly affect the quality of quality of finish.Commonly used in existing CCOS glossings Polishing path mainly has two ways：One kind is the linear raster scanning paths of xy, and another kind is Archimedes spiral scanning road Footpath.But for these fixed routes solve residence time when easily occur speed mutation and influence machining accuracy, and use with Upper fixed route is easy to produce intermediate frequency distinct issues when processing, and this has resulted in the decline of crudy.To being at present Only still can simultaneously solve the problems, such as two above without suitable paths planning method, it is therefore desirable to design a kind of new path Planing method come reduce processing in speed mutation, while need increase path diversity with avoid fixed route produce Intermediate frequency error, this will have great impetus to CCOS polishing process.

The content of the invention

The technical problem to be solved in the present invention is to provide a kind of planing method of CCOS polishing paths, in processing CCOS The speed mutation of the motion of bistrique has randomness while reduction, so that full frequency band improves polishing precision.

In order to solve the above technical problems, the present invention proposes a kind of CCOS optical processing paths planing method, specifically include with Lower step：

(1) prepare before processing：Function test being removed using glossing process and extracting removal function (or directly use Known removal function), face shape error detection is carried out to workpiece furthermore with surface shape detection apparatus, obtain the face shape error of workpiece Distributed data, then calculated using existing deconvolution algorithm (such as ratio estimation algorithm, convolution iterative method etc.) based on face shape error data The residence time distribution of each point, sets processing sampling interval S in polishing, when residence time matrix T integrations are obtained processing resident Between matrix t and VELOCITY DISTRIBUTION matrix V (i, j), computing formula is：

(2) starting point (x of initial path is chosen in matrix V (i, j) respective coordinates point_start, y_start) and terminal point coordinate (x_end, y_end), the beginning and end of wherein initial path will not be in changing in iteration, general access speed matrix V (i, j) Middle maximum and minimum value respective coordinates as path beginning and end；

(3) initial path of selection algorithm iteration, adjacent sampled point all needs to ensure that distance is equal to S in path, general Initial path has many selections after beginning and end is fixed, as shown in Figure 1, for the sake of simplicity, choose in Fig. 1 path 1. or 2. as iteration initial path, initial path is represented by (i₁, j₁)→(i₂, j₂)→…→(i_n, j_n)→…→(i_N, j_N), its In, (i, j) is ranks number in VELOCITY DISTRIBUTION matrix, and the coordinate points number passed through in path is N；

(4) any two consecutive points (i in path is considered_n, j_n) and (i_n+1, j_n+1), its correspondence position coordinate away from There must be i from the relation between S, therefore two point coordinates that is fixed as_n=i_n+1Or j_n=j_n+1, define speed mutation matrixMatrix K represents the speed change summation after the extension of any two point, meter in path Calculation mode is：

Work as i_n=i_n+1

Work as j_n=j_n+1

(5) ranks number of least member in matrix K are found, that is, find the minimum Path extension selection of speed change, Corresponded in 2 points of insertion respective paths, specific algorithm is：

If minimum value is k_mn

Then new route is (i₁,j₁)→...→(i_n,j_n)→P_A→P_B→(i_n+1,j_n+1)→...→(i_N,j_N)

Wherein

Path length expands to N+2 from N simultaneously, and continues step (4) and be iterated extension；

(6) if without expansible path point in matrix K, terminating iteration, now path sequence is final processing road Footpath；

In glossing, numerical control code can be generated according to the machining path and each point residence time for finally obtaining, so that Control lathe carries out CCOS processing.

Easily cause the shortcoming of speed mutation for traditional grid shape path and spiral path, above-mentioned CCOS glossings are proposed New path planning scheme, compared with prior art, the advantage of the invention is that：The path of program generation can transport lathe Dynamic speed held stationary to greatest extent, so as to overcome in polishing because removal error caused by the mutation of lathe speed, has Precision is polished beneficial to improving.Differed additionally, due to the used residence time matrix of processing every time, therefore the processing for generating Path also changes therewith, improves machining path randomness so that workpiece intermediate frequency error is restrained.Due to the invention provides Grid shape path and the spiral path of traditional handicraft are different from a kind of optics CCOS polishings, this has weight to high accuracy CCOS polishings The application value wanted.

Brief description of the drawings

Fig. 1 is the schematic diagram to initial path selection in the present invention.

Fig. 2 is the removal function shape during glossing in embodiment.

Fig. 3 be embodiment in measure two pieces of face shape error distribution maps of workpiece to be processed.

The polishing path schematic diagram that Fig. 4 is respectively adopted for two pieces of workpieces to be processed in embodiment.

Fig. 5 is two pieces of test pieces processing shape error map below in embodiment.

Fig. 6 is the front and rear workpiece power spectral density plot figure of processing in embodiment.

Fig. 7 is two kinds of convergency factor situation maps of the front and rear power spectral density of path processing in embodiment.

Specific embodiment

Embodiment：

The CCOS glossings of the present embodiment are the technique ginseng in being carried out on the polissoir of ABB manipulators in a stylobate Number is set to：Small abrasive nose diameter 20mm, applies pressure 10N, revolution speed 120rpm, rotational velocity 200rpm, polishing fluid composition It is CeO₂, concentration is 10%w.t, and environment temperature is 23 DEG C, and polished test piece is two pieces of BK7 optics of 70mm × 70mm Glass.Experiment is processed with grid shape path and new path to two workpiece respectively, compares processing result.

Workpiece is polished by following methods：

1st, removal function is determined：Function experiment is removed using above-mentioned technical process, so as to obtain removal function, is removed Function is as shown in Fig. 2 a diameter of 30mm of the removal function；

2nd, detection face shape error distribution：The face shape error of polished workpiece, two pieces of workpiece faces are detected using laser interferometer Shape error distributed data is as shown in Figure 3；

3rd, residence time distribution is calculated：Face shape according to the removal function (such as Fig. 2) and polished test piece that obtain is missed Difference distributed data (such as Fig. 3), calculates two workpiece each point residence times and is distributed respectively using existing residence time computational methods Matrix；

The 4th, sampling interval is set for 2mm, correspondence residence time distribution matrix integration is obtained processing residence time matrix；

5th, the correspondence of workpiece 1 processing residence time matrix calculates machining path using new routing algorithm, and the correspondence of workpiece 2 adds Work residence time matrix is using classical grid shape path processing, and respective path is as shown in Figure 4；

6th, the residence time according to each point coordinates and the point on polishing path generates numerical control code using art methods Control lathe carries out small abrasive nose polishing；

7th, after actual polishing optical mirror plane face shape is as shown in figure 5, processing further to compare processing method in two As a result difference, is analyzed using the analysis method of power spectral density (PSD), selects laterally vertical in shape respectively below before processing Power spectral-density analysis are carried out to two straight lines, as shown in Figures 3 and 5, full frequency band convergence situation before and after analysis processing；

8th, power spectral density (PSD) analysis result is as shown in fig. 6, wherein thicker curve is processing above shape PSD curves, Thinner is processing shape PSD curves below, and its correspondence PSD convergency factors result as shown in fig. 7, it can be found that grid shape path due to Its inherent shortcoming, horizontal convergency factor is about 96%, and longitudinal convergency factor drops into 89%；And the inventive method proposition is new Path does not exist problems, and horizontal and vertical full frequency band convergency factor is respectively 96% and 98%, is superior to grid shape path, and this says The paths planning method that bright the inventive method is proposed has good actual effect.

Claims (2)

1. a kind of CCOS optical manufacturings paths planning method, it is characterised in that concretely comprise the following steps：

(1) prepare before processing：Function test is removed using glossing process extract removal function, or directly using known Removal function；Face shape error detection is carried out to workpiece furthermore with surface shape detection apparatus, the face shape error distribution of workpiece is obtained Data, then use existing deconvolution algorithm to calculate the residence time distribution of each point in polishing based on face shape error data, set and add Work sampling interval S, residence time matrix T integrations are obtained processing residence time matrix t and VELOCITY DISTRIBUTION matrix V (i, j), are calculated Formula is：

$V(i,j)=\frac{S}{{\∫}_{(j-1)\·S}^{j\·S}{\∫}_{(i-1)\·S}^{i\·S}T(I,J)dIdJ};$

(2) starting point (x of initial path is chosen in matrix V (i, j) respective coordinates point_start, y_start) and terminal point coordinate (x_end, y_end), i.e., in access speed matrix V (i, j) maximum and minimum value respective coordinates as path beginning and end；

(3) initial path of selection algorithm iteration, adjacent sampled point all needs to ensure that distance is equal to S, initial path table in path It is shown as (i₁, j₁)→(i₂, j₂)→…→(i_n, j_n)→…→(i_N, j_N), wherein, (i, j) is ranks number in VELOCITY DISTRIBUTION matrix, The coordinate points number passed through in path is N；

(4) any two consecutive points (i in path is considered_n, j_n) and (i_n+1, j_n+1), its correspondence position coordinate distance is consolidated Being set to relation between S, therefore two point coordinates has i_n=i_n+1Or j_n=j_n+1, define speed mutation matrixSpeed change summation in matrix K delegated path after the extension of any two point, meter Calculation mode is：

Work as i_n=i_n+1

Work as j_n=j_n+1

(5) ranks number of least member in matrix K are found, that is, finds the minimum Path extension selection of speed change, corresponded to In 2 points of insertion respective paths, specific algorithm is：

If minimum value is k_mn

Then new route is (i₁,j₁)→...→(i_n,j_n)→P_A→P_B→(i_n+1,j_n+1)→...→(i_N,j_N)

Wherein

Path length expands to N+2 from N simultaneously, and continues step (4) and be iterated extension；

(6) if without expansible path point in matrix K, terminating iteration, now path sequence is final machining path.

2. CCOS optical manufacturings paths planning method according to claim 1, it is characterised in that according to what is finally obtained Machining path and each point residence time generation numerical control code, control lathe carry out CCOS processing.