CN1068417A - Grating moire signal microcomputer comprehensive compensation close classification and device - Google Patents
Grating moire signal microcomputer comprehensive compensation close classification and device Download PDFInfo
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- CN1068417A CN1068417A CN 91104628 CN91104628A CN1068417A CN 1068417 A CN1068417 A CN 1068417A CN 91104628 CN91104628 CN 91104628 CN 91104628 A CN91104628 A CN 91104628A CN 1068417 A CN1068417 A CN 1068417A
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Abstract
The present invention relates to a kind of grating moire signal microcomputer comprehensive compensation close classification of displacement measurement and grating displacement measuring device of according to said method being formed of being used for.Its principal feature is to segment by grating moire signal practical expression, can eliminate the influence of the constant amplitude of the DC level drift that characterizes the moire signal quality, amplitude fluctuation, two paths of signals and orthogonality error to subdivision accuracy, significantly improve subdivision accuracy and effective resolution, reduce requirement optical grating pair manufacturing and assembling adjustment precision.Be high precision of new generation, the realization of high-resolution grating displacement measuring system provides a new approach.
Description
The present invention relates to a kind of grating displacement measuring system and device thereof.More particularly, the grating displacement measuring device that the present invention relates to a kind of grating moire signal computer subdivision method and according to said method form.
Grating displacement measuring system is because of its precision height, stable performance, obtained in a large number, used widely in coordinate-measuring instrument (comprise single, double, three-dimensional) and numerical control device.In order to satisfy precision and the resolution more and more higher requirement of practical application to grating equipment, grating moire signal subdivide technology demonstrates its importance just day by day.Become the key of further raising optical grating measuring system precision and resolution.
Proposed a lot of grating moire signal divided methods at present both at home and abroad, as Mechanical Method, optical method, electronic method, microcomputer method etc., wherein the computer subdivision method is the most promising a kind of.Yet all computer subdivision methods of having delivered both at home and abroad all are the desirable expression formula (y by the grating moire signal at present
1=Asin θ
jy
2=Acos θ
jθ=2 π X/W) segments, as United States Patent (USP) 4225931 its fundamental drawback is to eliminate the influence of grating moire signal quality to subdivision accuracy, so segment number (resolution) in theory though can do very high, but improve subdivision accuracy is very difficult, and this has just limited the application of grating in high-precision displacement measurement system more.
Purpose of the present invention is exactly the deficiency that fundamentally overcomes existing computer subdivision method, proposes a kind of grating moire signal microcomputer comprehensive compensation close classification.The method is characterized in that: the practical expression by the grating moire signal is segmented, four major parameters of evaluation grating moire signal quality have been reacted in the practical expression, i.e. the constant amplitude sum of errors orthogonality error of the DC level drift of signal, amplitude fluctuation, two paths of signals.By real-time detection to actual grating moire signal and eigenwert thereof, the processing that compensation and segmentation combine together, eliminate of the influence of grating moire signal quality to subdivision accuracy, realization increases substantially the subdivision accuracy and the effective purpose of segmentation umber (resolution), for a new generation more the realization of high precision grating displacement measuring system a new approach is provided.
Purpose of the present invention can reach by following measure:
At first, according to the characteristics of grating moire signal, set up the practical expression of grating moire signal:
y
1＝A
O1（θ）+A
1（θ）sinP
1（θ） （1）
y
2＝A
O2（θ）+A
2（θ）cosP
2（θ） （2）
θ＝2πX/W （3）
The parameter that changes with displacement X in the formula (1) (2) (3) has three: A
O1(θ), A
O2(θ) DC component for changing; A
1(θ), A
2(θ) be the amplitude modulation(PAM) function; P
1(θ), P
2(θ) be phase modulation function, the W in the formula (3) is a grating pitch.The computing formula that can be solved the segmentation value by (1) (2) (3) formula is:
X
1= (W)/(2π) sin
-1(y
1-［A
1max(θ)+A
1mim(θ)］/2)/(A
1min(θ)) (4)
X
2= (W)/(2π) ｛cos
-1(y
2-［A
2max(θ)+A
2mim(θ)］/2)/(A
2min(θ)) -△P(θ)｝ (5)
△P（θ）＝P
1（θ）-P
2（θ） （6）
Secondly, adopt corresponding subdividing device (accompanying drawing 1) to signal y
1, y
2; Signal peak A
1max(θ), A
1mim(θ), A
2max(θ), A
2mim(θ); Two paths of signals orthogonality error △ P(θ) detects in good time.
At last, according in good time testing result, adopt the hardware and software way of combining to realize carrying out comprehensive timely compensation and the calculating of segmentation value by formula (4) (5) (6), try to achieve segmentation value X, again with pitch W of corresponding grating be the big numerical value of unit synthetic after, finally obtain the pattern displacement value.
Be elaborated as follows in conjunction with the accompanying drawings to apparatus of the present invention:
As shown in Figure 1, grating moire signal microcomputer comprehensive compensation subdividing device is mainly by signal clean circuit (1.); The drift-compensated meter of band DC level is number (corresponding grating pitch W) greatly; Circuit (2. 3. 4. 5.); The sub-circuit (6. 7. 8.) of drift of band DC level and amplitude fluctuation compensation; Grating moire signal and eigenwert testing circuit thereof (9. 10.) and single chip microcomputer (11) are formed.Grating moire signal y
1, y
2Through 1. purifying the back filtering interfering and signal noise being forced down a level that resolution allowed, with assurance subsequent conditioning circuit processing accuracy and reliability.9. and 10. be used for detecting in real time y
1, y
2Characteristic value, i.e. A
1max(θ), A
1mim(θ), A
2max(θ), A
2mim(θ) and P
1(θ), P
2(θ).And send single chip microcomputer (11), send A in real time by (11) after treatment
O1(θ)=(A
1max(θ)+A
1mim(θ))/2, A
O2(θ)=(A
2max(θ)+A
2mim(θ))/2 after 5., extremely 2. obtain reshaping signal, after 4. 5. handling, send (11) storage again through the drift-compensated grating More of DC level.A after handle (11)
O1(θ), A
O2(θ), A
1mim(θ), A
2mim(θ) must can send (11) sampled data from the A/D of motion tracking switching signal to DC level and amplitude as segmentation usefulness through 8. sending 7..Revise when the orthogonality error △ P(θ of two paths of signals) value of segmentation is calculated in (11).
V among Fig. 2
1, V
2Form the signal clean circuit by anti-interference filtration, amplification and low-pass filter respectively.Comparer T
1, T
2, digital to analog converter D/A1, D/A2, sensing circuit, up-down counter and latch impact damper and form the big number of meter circuit, sampling holder S/H1, S/H2, modulus converter A/D 1, A/D2, digital to analog converter D/A3, D/A4 forms the decimal sub-circuit.S/H in the single chip microcomputer 8098, A/D and decimal sub-circuit are 45 ° of phase shift shapings, and pulse generating circuit is formed y jointly under the cooperation of S/H command latch circuit in order
1, y
2Peak-to-peak value A
1max(θ), A
1mim(θ), A
2max(θ), A
2min(θ) with phasing degree P
1(θ), P
2(θ) testing circuit.The collection of all data, feedback compensation, the segmentation value is calculated, and various operations are controlled and are counted greatly and the synthetic of segmentation value finished by single-chip microcomputer 8098, send measurement result display unit to show then.
Only drawn among Fig. 3 electrical block diagram of one of them coordinate, circuit structure and Fig. 2 of other coordinates are in full accord.Fig. 3 and Fig. 2 difference are to have increased by two sampling holder S/H3 and S/H4, one " analog switch ", one " analog switch control switching circuit " and " the gauge head sampling pulse forms and latch cicuit " is specifically designed to the sampled signal of handling the three coordinate measuring machine three dimensional probe, 3-D probe.When the gauge head sampled signal arrived, S/H3, S/H4 latched y by " the gauge head sampling pulse forms and latch cicuit " control
1, y
2Instantaneous value, and blockade " latching impact damper ", send to 8098 from the HS1 mouth simultaneously and interrupt application, in interrupt service routine, read a big numerical value and a segmentation value, send internal memory after synthetic, same Fig. 2 of concrete disposal route of big number and segmentation value, Fig. 3 has the detection to displacement concurrently, and numeral shows and reads the dual-use function of this moment shift value constantly when " gauge head sampled signal " arrives.
The present invention compared with prior art has following advantage:
1. because computer subdivision method of the present invention is on the basis that is based upon grating moire signal practical expression, just segment by actual signal, therefore grating moire signal quality there is not strict demand, thereby reduced the requirement of grating being paid manufacturing and equipment adjustment precision, also reduced on the whole cost, strengthen the adaptability of system, widened range of application.
2. because the present invention can carry out in real time effectively compensation to four major parameters of the quality of evaluation grating moire signal, therefore in the relatively poor situation of signal quality, still can get To very high subdivision accuracy and effective resolution. 50 lines/mm grating is paid, when signal fluctuates 30% in the constant amplitude error of DC level drift, signal amplitude fluctuations, two paths of signals on the grating total length in A/D input full range, when the orthogonal error of two paths of signals is 5 °, when adopting 8 A/D converters, the segmentation number can accomplish 500, resolution ratio is 0.04 μ m, subdivision error ± 0.1 μ m.
3. owing to the real-time detection to signal is to adopt selectively to extract characteristic value (peak-to-peak value, therefore phase angle in the time of 45 °) way has improved the response speed of whole system, to 50 lines/mm grating, resolution ratio is 0.04 μ m, and velocity of displacement can reach 120mm/3.
4. method and apparatus provided by the present invention is equally applicable to the laser with same signal feature, inductosyn and magnetic grid displacement measurement system.
Description of drawings is as follows:
Fig. 1 embodies the device theory of constitution block diagram of grating moire signal microcomputer comprehensive compensation close classification.
Fig. 2 the present invention is used for the electrical schematic diagram that numeric display unit is measured in pattern displacement.
Fig. 3 the present invention is used for the electrical schematic diagram of three coordinate measuring machine raster coordinate measuring system.
Claims (2)
1, a kind of grating moire signal microcomputer comprehensive compensation divided method that is used for displacement measurement is according to the desirable expression formula y of grating moire signal
1=Asin (θ); y
2=Acos (θ); θ=2 π X/W segment, and the invention is characterized in according to the practical expression of grating moire signal the grating moire signal is segmented that its expression formula is:
y
1=A
o1(θ)+A
1(θ)sinP
1(θ) (1)
y
2=A
o2(θ)+A
2(θ)cosP
2(θ) (2)
θ=2πX/W (3)
X represents displacement in the expression formula, and W is a grating pitch, A
O1(θ), A
O2(θ) DC component for changing; A
1(θ), A
2(θ) be the amplitude modulation(PAM) function, P
2(θ), P
2(θ) be phase modulation function, expression formula obtains segmentation value computing formula and is thus:
X
1= (W)/(2π) sin
-1(y
1-［A
1max(θ)+A
1mim(θ)］/2)/(A1min(θ)) (4)
X
2= (W)/(2π) ｛cos
-1(y
2-［A
2max(θ)+A
2mim(θ)］/2)/(A
2min(θ)) -△P(θ)｝ (5)
ΔP(θ)=P
1(θ)-P
2(θ) (6)
In interval 0～π/4, pi/2～3 π/4, π～1 (π)/4,1 (π)/2～1
3 π 3(4) formula of use is calculated, at interval π/4～pi/2, and 3 π/4～π, 1 (π)/4～1 (π)/2,1 (π)/2～2 π uses (5) formula to calculate segmentation value X, again with pitch W of corresponding grating be the big numerical value of unit synthetic after, finally obtain the pattern displacement value, A in the formula
1max(θ), A
1Min (θ), A
2Max (θ), A
2Min (θ) is respectively A
1(θ), A
2Peak-to-peak value (θ), Δ P (θ) is y
1, y
2The orthogonality error of two paths of signals.
2, a kind of device that the grating moire signal is carried out the computer compensation segmentation comprises amplifier, trigger, and the A/D transducer, the sensing circuit, reversible counter, computing machine, parts such as display are wherein paid the signal y of output by grating
1, y
2After amplifying, amplifier is divided into two-way, one the tunnel becomes pulse signal through the trigger shaping, through sensing circuit and up-down counter input computing machine, another road is through A/D transducer input computing machine, computing machine is connected with display, apparatus of the present invention are characterised in that by following each several part to be formed, (1) signal clean circuit, (2) shaping circuit of band DC level compensation, (3) sensing and pulse shaping circuit, (4) up-down counter, (5) the DC level feedback signal forms circuit, (6) sampling holder, the A/D of (7) band DC level and amplitude compensation, (8) DC level and amplitude feedback signal form circuit, (9) sampling holder, (10) A/D transducer, (11) single-chip microcomputer, grating moire signal y
1, y
2Purify filtering interfering through (1) filtering, signal noise is forced down, improve signal to noise ratio (S/N ratio), be divided into three tunnel, one road warp (9) and (10) then, be used for detecting in real time y to single-chip microcomputer (11)
1, y
2Eigenwert be A
1max(θ), A
1min(θ), A
2max(θ), A
2min(θ) and P
1(θ), P
2(θ), above-mentioned eigenwert is sent into single-chip microcomputer (11) and is sent A in real time by (11) after treatment
O1(θ)=(A
1max(θ)+A
1min(θ))/2, A
O2(θ)=(A
2max(θ)+A
2min(θ))/2, obtain the reshaping signal through the drift-compensated grating More of DC level to (2) after (5), (3) again send (11) storage, the A after handle (11) after handle (4)
O1(θ), A
O2(θ), A
1min(θ), A
2min(θ) sending into (7) through (8) obtains sending (11) sampled data as segmentation usefulness, the orthogonality error △ P(θ of two paths of signals from the A/D of motion tracking switching signal to DC level and amplitude) revise when the value of segmentation is calculated in (11).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 91104628 CN1068417A (en) | 1991-07-09 | 1991-07-09 | Grating moire signal microcomputer comprehensive compensation close classification and device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 91104628 CN1068417A (en) | 1991-07-09 | 1991-07-09 | Grating moire signal microcomputer comprehensive compensation close classification and device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1068417A true CN1068417A (en) | 1993-01-27 |
Family
ID=4906723
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 91104628 Pending CN1068417A (en) | 1991-07-09 | 1991-07-09 | Grating moire signal microcomputer comprehensive compensation close classification and device |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102679888A (en) * | 2012-06-01 | 2012-09-19 | 沈阳工业大学 | Moire fringe high-power subdivision method based on less spatial points and equipment |
| CN103604373A (en) * | 2013-11-20 | 2014-02-26 | 沈阳工业大学 | Raster Moire striped wavelet fine dividing method and raster displacement measuring apparatus |
| CN107084662A (en) * | 2017-04-12 | 2017-08-22 | 合肥工业大学 | Orthogonal signalling real-time processing method based on FPGA |
| CN110500960A (en) * | 2019-07-02 | 2019-11-26 | 广东工业大学 | A kind of grating signal compensation method and compensation system |
| CN112556734A (en) * | 2020-11-30 | 2021-03-26 | 中国科学院长春光学精密机械与物理研究所 | Moire fringe subdivision method for photoelectric encoder |
-
1991
- 1991-07-09 CN CN 91104628 patent/CN1068417A/en active Pending
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102679888A (en) * | 2012-06-01 | 2012-09-19 | 沈阳工业大学 | Moire fringe high-power subdivision method based on less spatial points and equipment |
| CN102679888B (en) * | 2012-06-01 | 2016-02-17 | 沈阳工业大学 | Based on Moire fringe high power divided method and the equipment of a small amount of spatial point |
| CN103604373A (en) * | 2013-11-20 | 2014-02-26 | 沈阳工业大学 | Raster Moire striped wavelet fine dividing method and raster displacement measuring apparatus |
| CN103604373B (en) * | 2013-11-20 | 2016-04-20 | 沈阳工业大学 | Optical grating Moire fringe small echo divided method and grating displacement measuring device |
| CN107084662A (en) * | 2017-04-12 | 2017-08-22 | 合肥工业大学 | Orthogonal signalling real-time processing method based on FPGA |
| CN110500960A (en) * | 2019-07-02 | 2019-11-26 | 广东工业大学 | A kind of grating signal compensation method and compensation system |
| CN110500960B (en) * | 2019-07-02 | 2021-02-12 | 广东工业大学 | Grating signal compensation method and compensation system |
| CN112556734A (en) * | 2020-11-30 | 2021-03-26 | 中国科学院长春光学精密机械与物理研究所 | Moire fringe subdivision method for photoelectric encoder |
| CN112556734B (en) * | 2020-11-30 | 2021-09-28 | 中国科学院长春光学精密机械与物理研究所 | Moire fringe subdivision method for photoelectric encoder |
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