CN106840287B - Flow sensor, flowmeter and flow detection method - Google Patents
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- CN106840287B CN106840287B CN201710004707.3A CN201710004707A CN106840287B CN 106840287 B CN106840287 B CN 106840287B CN 201710004707 A CN201710004707 A CN 201710004707A CN 106840287 B CN106840287 B CN 106840287B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/56—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using electric or magnetic effects
- G01F1/64—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using electric or magnetic effects by measuring electrical currents passing through the fluid flow; measuring electrical potential generated by the fluid flow, e.g. by electrochemical, contact or friction effects
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Abstract
The invention discloses a flow sensor, a flowmeter and a flow detection method, wherein the flow sensor comprises: a heating element and one or more detection units; wherein, the detecting element includes: the detection circuit comprises an upstream detection resistor, a downstream detection resistor, a first constant current source connected with the upstream detection resistor in series, and a second constant current source connected with the downstream detection resistor in series; the upstream detection resistor and the downstream detection resistor are respectively arranged on the upstream side and the downstream side of the circulation path of the medium to be detected, and the heating element is arranged between the upstream detection resistor and the downstream detection resistor. The constant current source provides constant current for the detection resistor, so that the influence of the temperature of the detected medium on the flow detection result can be avoided, and the flow metering precision is ensured.
Description
Technical Field
The invention relates to the technical field of sensors, in particular to a flow sensor, a flowmeter and a flow detection method for detecting the flow of a detected medium.
Background
In the flow metering process, a commonly used flow detection method is generally a detection method based on a temperature difference. The working principle of the temperature difference detection method is that a heating element is arranged in the middle of a flow sensor, and the heating element is controlled by a temperature control circuit to keep the temperature difference with a measured medium constant. A pair of symmetrical sensing resistors are also provided upstream and downstream of the heating element. When the measured medium (for example, gas) passes through the heating element in a laminar flow state, the temperature of the upstream detection resistor is reduced and the temperature of the downstream detection resistor is increased due to the influence of the flow direction of the measured medium, namely: the temperature field will migrate resulting in a temperature difference deltat between the two sensing resistors. The temperature difference Δ T formed between the detection resistors is different corresponding to different kinds and different flow rates of the measured media. By utilizing the characteristic that the resistance values corresponding to the detection resistors at different temperatures are different, the temperature difference delta T between the detection resistors can be reflected by the difference value change of the resistance values of the two detection resistors, and the difference value change of the resistance values of the two detection resistors can be converted into differential voltage to be output, so that the temperature difference generated by the two detection resistors caused by the flow of the detected medium is converted into differential voltage to be output, the differential voltage and the flow of the detected medium are in one-to-one correspondence, as shown in fig. 1, and the mass flow of the corresponding detected medium can be obtained through the differential voltage.
In practical applications, as shown in fig. 2, the above-mentioned differential voltage Δ U of the sensor is usually measured by a wheatstone bridge circuit to represent the temperature difference Δ T between the two sensing resistors R1 and R2. However, there is a problem in that the wheatstone bridge is used in that, in addition to the difference in temperature between the two detection resistors R1 and R2 caused by the flow direction of the measured medium, the resistance values of the two detection resistors R1 and R2 are changed due to the difference in temperature of the measured medium itself. Since the fixed voltage U0 in the wheatstone bridge is not changed, the change in the resistance values of the two sensing resistors R1 and R2 causes the current flowing through the sensing resistors R1 and R2 to change, and further causes the change in the differential voltage Δ U, that is, when the temperatures of the detected media are different, the output differential voltage Δ U also includes the change caused by the temperature of the detected media, so that the differential voltage Δ U cannot truly represent the flow rate of the detected media.
Generally, a temperature compensation coefficient method can be adopted to eliminate the influence of the temperature of a measured medium on flow detection, but the temperature compensation coefficient method is complex and cannot meet the requirement on the measurement precision in the flow measurement process.
Aiming at the problem that the temperature of a measured medium influences a flow detection result and further influences the metering precision in the related technology, an effective solution is not provided at present.
Disclosure of Invention
Aiming at the problem that the temperature of a measured medium influences a flow detection result and further influences metering precision in the related technology, the invention provides a flow sensor, a flow meter and a flow detection method for detecting the flow of the measured medium, which can avoid the problem that the temperature of the measured medium influences the flow detection result, thereby ensuring the flow metering precision.
The technical scheme of the invention is realized as follows:
according to an aspect of the present invention, there is provided a flow sensor comprising: a heating element and one or more detection units; wherein, the detecting element includes: the detection circuit comprises an upstream detection resistor, a downstream detection resistor, a first constant current source connected with the upstream detection resistor in series, and a second constant current source connected with the downstream detection resistor in series; the upstream detection resistor and the downstream detection resistor are respectively arranged on the upstream side and the downstream side of the circulation path of the medium to be detected, and the heating element is arranged between the upstream detection resistor and the downstream detection resistor.
According to an embodiment of the invention, the detection unit further comprises: a differential voltage output port for outputting a differential voltage; the first output node of the differential voltage output port is connected to the first end of the upstream detection resistor Ru, the second output node of the differential voltage output port is connected to the first end of the downstream detection resistor Rd, and the second end of the upstream detection resistor Ru and the second end of the downstream detection resistor Rd are connected to the ground terminal.
According to an embodiment of the invention, the detection unit further comprises: and the pull-up resistor is a low-temperature drift resistor, and the upstream detection resistor and the downstream detection resistor are both connected to the ground terminal through the pull-up resistor.
According to an embodiment of the present invention, the first constant current source outputs a first constant current having a current value equal to that of the second constant current output by the second constant current source.
According to one embodiment of the invention, the flow sensor is a MEMS sensor.
According to one embodiment of the present invention, the first constant current outputted from the first constant current source and the second constant current outputted from the second constant current source each have a current value within a range of 100 μ A-300 μ A.
According to one embodiment of the invention, the pull-up resistor has a resistance value within a range of 500 Ω -2000 Ω.
According to another aspect of the present invention, there is provided a flow meter comprising: the above flow sensor; and the processing module is connected with the flow sensor and used for obtaining the flow of the measured medium according to the differential voltage.
According to still another aspect of the present invention, there is provided a traffic detection method including: providing constant current for the upstream detection resistor and the downstream detection resistor; generating a differential voltage related to the flow of the measured medium by using the constant current; and obtaining the flow of the measured medium according to the differential voltage.
According to one embodiment of the invention, obtaining the measured medium flow according to the differential voltage comprises: acquiring the corresponding relation between the differential voltage and the flow of the measured medium; and obtaining the flow of the measured medium according to the corresponding relation and the differential voltage.
According to an embodiment of the present invention, obtaining the corresponding relationship between the differential voltage and the measured medium flow includes: obtaining a plurality of corresponding calibrated differential voltages under the flow of a plurality of determined media to be measured; and obtaining a corresponding relation according to the flow of the measured medium and the calibrated differential voltage, wherein the corresponding relation is a linear relation.
The constant current source is arranged to provide constant current for the detection resistor, so that the influence of the temperature of the detected medium on the flow detection result can be avoided, and the accuracy of flow measurement is ensured.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without creative efforts.
FIG. 1 is a diagram illustrating a relationship between a differential voltage between detection resistors and a mass flow rate of a detected medium in the prior art;
FIG. 2 is a schematic diagram of a prior art Wheatstone bridge circuit for measuring differential voltage;
FIG. 3 is a schematic diagram of a flow sensor according to an embodiment of the invention;
FIG. 4 is a schematic circuit diagram of a sensing unit of a flow sensor according to one embodiment of the present invention;
FIG. 5 is a schematic electrical circuit diagram of a sensing unit of a flow sensor according to another embodiment of the present invention;
fig. 6 is a flow chart of a traffic detection method according to an embodiment of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments that can be derived by one of ordinary skill in the art from the embodiments given herein are intended to be within the scope of the present invention.
According to an embodiment of the present invention, a flow sensor is provided.
Referring to fig. 3, 4 and 5 together, a flow sensor according to an embodiment of the present invention includes: a heating element Rh and one or more detection cells 100; wherein, the detecting unit 100 includes: the detection device comprises an upstream detection resistor Ru, a downstream detection resistor Rd, a first constant current source Is1 connected in series with the upstream detection resistor Ru, and a second constant current source Is2 connected in series with the downstream detection resistor Rd; the upstream detection resistor Ru and the downstream detection resistor Rd are respectively arranged on the upstream side and the downstream side of the circulation path of the detected medium, and the heating element is arranged between the upstream detection resistor Ru and the downstream detection resistor Rd.
The first constant current source Is1 and the second constant current source Is2 are used for providing constant currents for the upstream detection resistor Ru and the downstream detection resistor Rd respectively so as to obtain a differential voltage which Is generated by the upstream detection resistor Ru and the downstream detection resistor Rd by using the constant currents and Is related to the medium flow to be detected. The constant current source is a circuit capable of providing constant current, and is characterized in that the constant current source does not change due to the change of environmental temperature and can ensure the stability of output current. Therefore, the differential voltage does not include the change caused by the temperature of the measured medium, namely, the temperature of the measured medium does not influence the flow rate detection result, and the accuracy of flow rate measurement is ensured.
Specifically, as shown in fig. 3, when the medium to be measured flows in the pipe 200 in the direction indicated by the arrow in the figure, the heat generated by the heating element Rh is taken away by the medium to be measured flowing through the heating element RhAnd transmitted to the downstream detection resistor Rd, so that the resistance value of the upstream detection resistor Ru of the heating element Rh can be reduced, and the resistance value of the downstream detection resistor Rd can be increased; and the first constant current source Is1 and the second constant current source Is2 which are applied to the first constant current I on the upstream detection resistor Ru and the downstream detection resistor Rd respectively due to high-precision low-temperature drift
uAnd a second constant current I
dObtaining the corresponding voltage value u according to ohm's law without changing
uAnd u
dFurther, the differential voltage Δ u between the upstream detection resistor Ru and the downstream detection resistor Rd can be obtained.
According to an embodiment of the present invention, referring to fig. 4 and 5 together, the detection unit 100 further includes a differential voltage output port for outputting a differential voltage; the first output node of the differential voltage output port is connected to the first end of the upstream detection resistor Ru, the second output node of the differential voltage output port is connected to the first end of the downstream detection resistor Rd, and the second end of the upstream detection resistor Ru and the second end of the downstream detection resistor Rd are connected to the ground terminal.
According to one embodiment of the present invention, the first constant current source Is1 outputs the first constant current I
uAnd a second constant current I output by a second constant current source Is2
dAre equal.
According to one embodiment of the present invention, the first constant current source Is1 outputs the first constant current I
uAnd a second constant current I output by a second constant current source Is2
dThe current values of (A) are all within a range of 100 muA-300 muA.
Preferably, the first constant current I
uAnd a second constant current I
dThe current values of (2) were all 200. mu.A.
The first constant current source Is1 and the second constant current source Is2 which are high in accuracy and low in temperature drift respectively provide constant currents for the upstream detection resistor Ru and the downstream detection resistor Rd, so that in order to avoid that the upstream detection resistor Ru and the downstream detection resistor Rd generate heat due to overlarge currents and the temperature transmitted by a flowing measured medium cannot be reflected really, the currents with small current values need to be applied to the upstream detection resistor Ru and the downstream detection resistor Rd. According to the difference between the upstream detection resistor Ru and the downstream detection resistor RdThe applied current will also vary. Specifically, when the resistance values of the upstream detection resistor Ru and the downstream detection resistor Rd are large, a current having a relatively small current value can be applied; when the resistance values of the upstream detection resistor Ru and the downstream detection resistor Rd are small, a current having a relatively large current value can be applied. Otherwise, the current is too large, which may cause the upstream sensing resistor Ru and the downstream sensing resistor Rd to generate heat; if the current is too small, the differential voltage Δ u output by the detection unit 100 may be too small, which may affect the measurement accuracy. Therefore, the first constant current I with the current value within 100 muA-300 muA can be applied to the upstream detection resistor Ru and the downstream detection resistor Rd
uAnd a second constant current I
d. Preferably, the first constant current I
uAnd a second constant current I
dThe current values of (2) were all 200. mu.A.
According to one embodiment of the present invention, the flow sensor is a MEMS (micro electro mechanical systems) sensor.
According to an embodiment of the present invention, further comprising: and the analog-to-digital conversion module is connected to the one or more detection units 100 and is used for converting the differential voltage from an analog quantity to a digital quantity. Optionally, the analog-to-digital conversion module is a 24-bit AD sampling module. The high-precision 24-bit AD sampling module is used for carrying out analog-to-digital conversion, and then the corresponding relation between the output differential voltage delta u and the flow of the measured medium can be obtained.
According to an embodiment of the present invention, as shown in fig. 5, the detection unit 100 further includes: and the pull-up resistor Rs is a low-temperature drift resistor, and the upstream detection resistor Ru and the downstream detection resistor Rd are both connected to the ground terminal through the pull-up resistor Rs. The low-temperature drift resistor refers to a resistor with small temperature variation of resistance value. The main purpose of pull-up resistor Rs is to raise the output differential voltage au in order to meet the minimum sampled input voltage requirements of some 24-bit AD sampling modules. If the AD sampling module used does not have the requirement of minimum sampled input voltage, then no pull-up resistor Rs needs to be provided.
According to one embodiment of the present invention, the pull-up resistor Rs has a resistance value within a range of 500 Ω -2000 Ω.
Preferably, the pull-up resistor Rs has a resistance value of 1000 Ω. Specifically, the resistance value of the pull-up resistor Rs may be set according to the requirement that the differential voltage Δ u needs to be too high. For example, when the pull-up resistor Rs is 1000 Ω, the first constant current I
uAnd a second constant current I
dWhen the current values of (1) are all 200 μ A, the voltage to ground of the differential voltage Δ u can be raised by about 400 mV.
There is also provided, in accordance with an embodiment of the present invention, a flow meter, including: the flow sensor and the processing module; the processing module is connected with the flow sensor and can be used for obtaining the flow of the measured medium according to the differential voltage. The flow meter can directly output the flow of the measured medium through the processing module.
Optionally, the processing module may include an obtaining module, configured to obtain a corresponding relationship between the differential voltage and the measured medium flow; and the generating and outputting module is used for obtaining and outputting the flow of the measured medium according to the corresponding relation and the differential voltage.
Further, the obtaining module may include: the first submodule is used for acquiring a plurality of corresponding calibrated differential voltages under the condition of determining the flow of the measured medium; and the second submodule is used for obtaining a corresponding relation according to the measured medium flow and the calibrated differential voltage, wherein the corresponding relation is a linear relation.
As shown in fig. 6, according to an embodiment of the present invention, there is provided a traffic detection method, including the following steps:
step S110, providing constant current for the upstream detection resistor and the downstream detection resistor;
step S120, generating differential voltage related to the flow of the medium to be measured by using the constant current;
and step S130, obtaining the flow rate of the medium to be measured according to the differential voltage.
In step S110, constant currents may be supplied to the upstream detection resistor and the downstream detection resistor by the first constant current source and the second constant current source, respectively; in step S120, the upstream sensing resistor and the downstream sensing resistor generate a differential voltage related to the flow rate of the measured medium by using the constant current, so that the differential voltage does not include a change caused by the temperature of the measured medium, i.e., the temperature of the measured medium does not affect the flow rate sensing result, thereby ensuring the accuracy of flow rate measurement.
According to an embodiment of the present invention, the step S130 may include the steps of:
step S131, acquiring the corresponding relation between the differential voltage and the flow of the measured medium;
and S132, obtaining the flow of the medium to be measured according to the corresponding relation and the differential voltage.
Further, step S131 may include the steps of:
obtaining a plurality of corresponding calibrated differential voltages under the flow of a plurality of determined media to be measured;
and obtaining a corresponding relation according to the flow of the measured medium and the calibrated differential voltage, wherein the corresponding relation is a linear relation.
Step S130 will be specifically described below. Can pass q under different gas mass flow rates
mThe corresponding relationship of delta u completes calibration, and the constant current source, the differential voltage signal delta u and the measured medium flow q can be found to be utilized
mAnd has a linear relationship.
From ohm's law, the differential voltage Δ u can be derived as:
Δu＝u
d－u
u＝(I
dR
d－I
uR
u)
preferably, setting I
u＝I
dI, R
d－R
uThen, there are:
Δu＝u
d－u
u＝I(R
d－I
u)＝IΔR，
therefore, there are:
ΔR＝Δu/I
further, the resistance value R of the upstream detection resistor
uAnd the temperature T of the upstream sense resistor
uRelationship (D), resistance value R of downstream detection resistor
dAnd the temperature T of the downstream sense resistor
dThe relationships of (a) can be expressed as:
R
u＝R
u0(1+a
uT
u)；R
d＝R
d0(1+a
dT
d)
wherein R is
u0And R
d0The resistance values of the upstream detection resistor and the downstream detection resistor at zero degrees centigrade, a
uAnd a
dThe temperature coefficients of the upstream detection resistor and the downstream detection resistor are respectively; the above expression can be derived again as:
Δu＝I(R
d0+R
d0a
dT
d－R
u0－R
u0a
uT
u)
and because of R
u＝R
d＝R
0、a
d＝a
uA, so:
R
u＝R
u0(1+aT
u)，R
d＝R
d0(1+aT
d)；
temperature difference T between upstream detection resistor and downstream detection resistor of heating element
d－T
uΔ T, then:
Δu＝IR
0a(T
d－T
u)＝IR
0aΔT；(1)
wherein, I, R
0A is a fixed constant, k is IR
0a, changing Δ T to Δ u/IR
0a is substituted into the relation (1) to obtain the mass flow q
mComprises the following steps:
it can be seen from this that theoretical derivation proves that the differential voltage Δ u obtained by the method using the constant current source circuit is only correspondingly related to the mass flow qm of the measured medium, and is not related to the temperature change of the measured medium.
Further, the correctness of the invention is also confirmed by the experimental verification carried out on the MEMS household table of G4 type. As shown in table 1, test data of a G4 type MEMS household meter using a wheatstone bridge circuit in the related art is shown, and table 2 shows test data of a G4 type MEMS household meter using a flow sensor of the present invention.
As can be seen from the data in tables 1 and 2, when the ambient temperature is 20 ℃, the error of the detection results obtained by using the prior art and the flow sensor of the present invention is small, but when the ambient temperature is low (e.g., 0 ℃) or high (e.g., 40 ℃), the error of the detection results obtained by using the flow sensor of the present invention is significantly lower than that obtained by using the prior art. Further, the invention can avoid the influence of the temperature of the measured medium on the flow detection result in the prior art, and improve the metering precision.
TABLE 1
TABLE 2
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents, improvements and the like that fall within the spirit and principle of the present invention are intended to be included therein.
Claims (10)
1. A flow sensor, comprising: a heating element and one or more detection units;
wherein the detection unit includes: an upstream detection resistor, a downstream detection resistor, a first constant current source connected in series with the upstream detection resistor, and a second constant current source connected in series with the downstream detection resistor;
the upstream detection resistor and the downstream detection resistor are respectively arranged on the upstream side and the downstream side of a circulation path of a detected medium, and the heating element is arranged between the upstream detection resistor and the downstream detection resistor;
the detection unit further comprises a differential voltage output port, and the differential voltage output port is used for outputting the differential voltage;
the first output node of the differential voltage output port is connected to the first end of the upstream detection resistor Ru, the second output node of the differential voltage output port is connected to the first end of the downstream detection resistor Rd, and the second end of the upstream detection resistor Ru and the second end of the downstream detection resistor Rd are connected to the ground terminal.
2. The flow sensor according to claim 1, wherein the detection unit further comprises:
the pull-up resistor is a low-temperature drift resistor, and the upstream detection resistor and the downstream detection resistor are both connected to the ground terminal through the pull-up resistor.
3. The flow sensor of claim 1,
the first constant current outputted by the first constant current source and the second constant current outputted by the second constant current source have the same current value.
4. The flow sensor of claim 1, wherein the flow sensor is a MEMS sensor.
5. The flow sensor of claim 1,
the current values of the first constant current output by the first constant current source and the second constant current output by the second constant current source are both within 100-300 muA.
6. The flow sensor of claim 2,
the pull-up resistor has a resistance value within 500-2000 omega.
7. A flow meter, comprising:
a flow sensor according to any one of the preceding claims 1 to 6; and
and the processing module is connected with the flow sensor and used for obtaining the flow of the measured medium according to the differential voltage.
8. A method for detecting traffic, comprising:
disposing a heating element between the upstream sensing resistor and the downstream sensing resistor;
providing constant currents for an upstream detection resistor and a downstream detection resistor, wherein a first constant current provided for the upstream detection resistor is equal to a second constant current provided for the downstream detection resistor in current value;
generating a differential voltage related to the flow of the measured medium by using the constant current;
and obtaining the flow of the measured medium according to the differential voltage.
9. The flow rate detection method according to claim 8, wherein obtaining the measured medium flow rate from the differential voltage comprises:
acquiring the corresponding relation between the differential voltage and the flow of the measured medium;
and obtaining the flow of the measured medium according to the corresponding relation and the differential voltage.
10. The flow rate detection method according to claim 9, wherein obtaining the correspondence between the differential voltage and the flow rate of the medium to be detected comprises:
obtaining a plurality of corresponding calibrated differential voltages under the flow of a plurality of determined media to be measured;
and obtaining the corresponding relation according to the measured medium flow and the calibrated differential voltage, wherein the corresponding relation is a linear relation.
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| CA1255923A (en) * | 1985-12-23 | 1989-06-20 | Dimitri Petrov | Non-obstructive thermodynamic flow meter |
| JP3753057B2 (en) * | 2001-12-04 | 2006-03-08 | 株式会社日立製作所 | Gas flow measuring device |
| US6883370B2 (en) * | 2002-06-28 | 2005-04-26 | Heetronix | Mass flow meter with chip-type sensors |
| CN105222843A (en) * | 2015-09-21 | 2016-01-06 | 天津大学 | A kind of thermal type gas quality flow meter based on tabilized current power supply |
| CN106020311A (en) * | 2016-07-16 | 2016-10-12 | 江南大学 | 80mA high-precision constant current source circuit |
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| US5685194A (en) * | 1995-07-27 | 1997-11-11 | Delta M Corporation | Differential twin sensor system |
| US5809827A (en) * | 1995-09-25 | 1998-09-22 | Smc Kabushiki Kaisha | Flow rate detector |
| CN101897588A (en) * | 2009-05-27 | 2010-12-01 | 霍尼韦尔国际公司 | Multi-dynamic-range sensor |
| CN103080703A (en) * | 2010-09-08 | 2013-05-01 | 日立汽车系统株式会社 | Gas flow rate measurement device |
| CN204064363U (en) * | 2014-06-27 | 2014-12-31 | 天津大学 | A kind of sensor circuit for thermal type gas quality flow meter |
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